WO1997006927A1 - Method of texturing a substrate using an abrasive article having multiple grit particles - Google Patents

Method of texturing a substrate using an abrasive article having multiple grit particles Download PDF

Info

Publication number
WO1997006927A1
WO1997006927A1 PCT/US1996/011267 US9611267W WO9706927A1 WO 1997006927 A1 WO1997006927 A1 WO 1997006927A1 US 9611267 W US9611267 W US 9611267W WO 9706927 A1 WO9706927 A1 WO 9706927A1
Authority
WO
WIPO (PCT)
Prior art keywords
abrasive
ofthe
coating
disk
texturing
Prior art date
Application number
PCT/US1996/011267
Other languages
French (fr)
Inventor
Darlene N. Strecker
Original Assignee
Minnesota Mining And Manufacturing Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining And Manufacturing Company filed Critical Minnesota Mining And Manufacturing Company
Priority to JP9509266A priority Critical patent/JPH11510743A/en
Priority to EP96924346A priority patent/EP0843612A1/en
Publication of WO1997006927A1 publication Critical patent/WO1997006927A1/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/16Machines or devices using grinding or polishing belts; Accessories therefor for grinding other surfaces of particular shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/04Zonally-graded surfaces
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers

Definitions

  • the present invention relates to a method of texturing a substrate, particularly a rigid disk, using a coated abrasive article comprising a backing having at least two regions of abrasive coating bonded to one side ofthe backing.
  • the at least two regions of abrasive coating have different abrasive natures.
  • a conventional method of producing such a final surface is to abrade the entire workpiece surface with a coarse abrasive, leaving a rough finish, after which a fine abrasive is used only on the part ofthe workpiece requiring the finer finish.
  • An alternate method is to abrade the entire workpiece with a fine abrasive thus imparting a fine finish, and then roughening part ofthe surface with a coarse abrasive to provide the desired rougher section.
  • the thin film rigid disks are manufactured by electroless nickel plating a thin-film of nickel or nickel alloy onto an aluminum base, such as nickel/phosphorus (Ni-P), which is then polished to a very fine, mirror-like finish. After polishing, the Ni-P coating is textured, followed by the application of a magnetic coating(s) thereon to form the magnetic medium.
  • Ni-P nickel/phosphorus
  • Nonmetal substrates such as glass or ceramic substrates
  • Nonmetallic substrates there is no metal or metal alloy coating applied onto the metal base before subsequent polishing, texturing, and magnetic coating application. Rather, the surface ofthe glass or ceramic rigid disk itself is polished, textured, and thereafter the magnetic coating is directly applied thereon without interposing any metal or metal alloy coating layer.
  • Rigid disks require a fairly consistent surface texture in order for the disk to perform properly.
  • the texture provided on the surface of a thin film rigid disk is a compromise ofthe surface finish (Ra) necessary for the memory area versus the surface finish necessary for the head landing zone.
  • the landing zone typically a 1/8 inch to 3/8 inch (0.32 to 0.95 cm) wide inner annular portion ofthe disk, requires a relatively rough finish to minimize the stiction and friction between the disk and the read/write head on startup and shutdown ofthe drive.
  • the texturing also eases the separation between the computer head and the rigid disk when the computer is first turned on. If the disk is smooth and untextured, it is difficult for the disk to start spinning because of too much head/disk contact.
  • the surface roughness ofthe landing zone preferably has an Ra of about 40 to 60 Angstroms.
  • the memory retention area ofthe disk typically the outer annular surface portion ofthe disk, does not need to be as rough, but is preferred to have an Ra of about 20 Angstroms. A lower Ra minimizes asperities on the disk surface and enables lower flying heights ofthe read/write head which results in higher recording densities.
  • Texturing typically produces, on the annular surface ofthe disk which will bear the magnetic medium coating, a random pattern of uniform scratches with sharply defined edges in a substantially circumferential direction relative to the center ofthe rigid disk.
  • Disk texturing accomplishes a number of purposes, including improving the aerodynamics between the computer head (which reads and writes data on the disk) and the surface of the magnetic coating on the disk.
  • the scratches formed during texturing make it easier for the head to distinguish bytes of information between tracks on the disk. If the scratches are too deep, however, this may cause a loss of data on the rigid disk.
  • Disk surface texturing has traditionally been accomplished by using a loose abrasive slurry.
  • Loose abrasive slurries provide the requisite substantially circumferential scratches that have sharply defined edges with the appropriate depth.
  • the use of loose abrasive slurries is, however, accompanied by a number of disadvantages. For instance, the loose abrasive slurries create a large amount of debris and waste. As a result, the thin film rigid disks must be thoroughly cleaned to remove any residual surface residue from the abrasive slurry.
  • the loose abrasive slurry also results in a relatively high amount of wear on the equipment used for texturing.
  • coated abrasive lapping films have been used to texture the thin film rigid disks.
  • a lapping film typically comprises a polymeric film backing having an abrasive layer consisting of very fine abrasive particles dispersed in a binder.
  • the abrasive layer is typically coated on the polymeric film to form a thin layer which has a surface profile which is essentially flat other than the partial protrusions of some ofthe abrasive particles.
  • the lapping film abrades a portion ofthe substrate surface to impart the texture therein.
  • the porous nonwoven substrate provides advantages such as the ability to collect and entrap swarf and debris during the abrasion.
  • USSN 08/301,254 filed 6 September 1994 and assigned to the assignee ofthe present invention, discloses combining the texturing characteristics of a loose abrasive slurry and a fixed abrasive tape by providing a water soluble abrasive coating on a nonwoven material.
  • U.S. Patent No. 875,936 (Landis) teaches an abrading material comprising a backing coated with relatively wide and narrow parallel abrasive coatings with adjacent strips each containing a different grade of two different abrasive grades and regions between the strips being devoid of any abrasive coating.
  • JP 4-141377 published 14 May 1992 teaches a roll of abrasive tape for flexible magnetic disks and magnetic tapes, where the abrasive grain size gradually increases from the free end ofthe tape to the center ofthe roll.
  • the pressure of being wound counteracts the larger abrasive grain size and thus, when utilized, the abrasive tape has a uniform abrasiveness throughout the length ofthe tape as it is unwound from the roll.
  • JP 4-210383 published 31 July 1992 teaches a roll of coated abrasive tape for the polishing of magnetic recording medium, where the hardness of the binder is varied along the length ofthe tape from the free end to the center ofthe roll.
  • the pressure of being wound counteracts the binder hardness variance and thus, when utilized, the abrasive tape has a uniform abrasiveness throughout the length ofthe tape as it is unwound from the roll.
  • U.S. Patent No. 5, 166,006 (Lal et al.) teaches texturing thin film disks by use of a chemical etchant process.
  • the present invention relates to a method of texturing substrates, particularly rigid disks for use as magnetic media.
  • the present invention relates to a method of texturing a surface of a rigid disk to simultaneously impart a first area on said surface having a first surface finish and a second area on said surface having a second surface finish, said method comprising the steps of:
  • a coated abrasive article comprising a first region having a first abrasive nature and a second region having a second abrasive nature, both regions bonded to a backing, said first abrasive nature being different than said second abrasive nature; and (b) moving at least one of said coated abrasive article or said rigid disk with respect to each other under conditions to impart said first and second surface finishes.
  • the abrasive nature ofthe coating can be altered by using different size abrasive particles, different types of abrasive particles, adding fillers or additives to affect erodability, different binders, different coating patterns, different size or shape of abrasive composites, or varying the density of abrasive composites.
  • the abrasive nature can also be altered by changing the ratio of materials in the abrasive coating, e.g., the binder to abrasive grain ratio, or by the processing conditions, e.g., different coating methods, or different degree of cure.
  • abrasive coating having no abrasive particles or grit therein, that when fully cured, nonetheless functions as a polishing article depending on the hardness ofthe workpiece and the abrasiveness ofthe cured binder relative thereto.
  • abrasive nature means or refers to the ability of the abrasive coating to impart a surface finish (e.g., textured or smooth) to a surface of a workpiece.
  • the surface of a workpiece can be altered by the abrasive article in many ways, such as removal of material, reduction or increase ofthe surface roughness, or imparting a pattern in the topography ofthe workpiece surface.
  • “different abrasive nature” means that the surface of a workpiece has one area having an Ra at least 10%, preferably at least about 20% greater than the Ra of a second area.
  • Ra of a surface is defined as the measurement ofthe arithmetic average ofthe scratch depth. It is the arithmetic average of five individual roughness depths, where an individual roughness depth is the vertical distance between the highest point and a center, or mean, line.
  • FIG. 1 is a plan view of one abrasive article useful in an embodiment ofthe present invention.
  • FIG. 2 is a plan view of a thin film rigid disk.
  • FIG. 3 is a cross section area of a thin film rigid disk.
  • FIG. 4 is a schematic perspective view ofthe articles which are deployed with respect to one another for practicing a method ofthe present invention.
  • FIG. 5 is a schematic perspective view of other articles alternatively deployed with respect to one another for practicing a method ofthe present invention. Detailed Description of the Invention
  • the process of texturing a substrate, in particular a magnetic medium coated rigid disk includes providing a substrate, usually a rigid disk substrate, generally having a thickness between 0.75 to 1.25 millimeter.
  • the rigid disk substrate may be metallic or nonmetallic.
  • the metal rigid disks preferably have a base of aluminum alloy coated with a thin metal or metal alloy coating.
  • the nonmetallic disk substrates are preferably glass or ceramic.
  • the phrase "rigid substrate” as used herein means a thin member comprising a structure composed of a single distinct layer or plurality of integral layers having a surface on which is adherently applied a magnetic layer.
  • FIG. 2 shows a rigid disk 20 having a surface which includes three areas: a smooth-surfaced memory area 22, a textured surface landing zone 24, and an optionally textured center 26.
  • Disk 20 is the type commonly used in computer hard drives. While the computer is turned off, the read/write head (not shown) ofthe computer is stationed in landing zone 24. As the computer is powered up and disk 20 begins to spin, the head, while in contact with landing zone 24 slides over landing zone 24, until disk 20 has reached full speed, after which the head moves to memory area 22.
  • rigid disk 20 comprises metal base 35 with at least metal coating 31 having textured metal surfaces 30 and 32. Scratches on surfaces 30 and 32 are circumferentially deployed about the center of disk 20, irregular in nature and comprise high regions 34 and low regions 36. The texturing process results in an increase in the exposed surface area ofthe metal coating(s) 31.
  • the rougher surface reduces stiction/friction with a computer head and the substantially circumferential direction ofthe scratches enables better differentiation between data tracks.
  • the disks shown in FIGs. 2 and 3 are comprised of a metal base coated with a thin metal or metal alloy film, it is to be understood that the present invention also contemplates applying the texturing to other substrates, for example, those made of glass or ceramic material, which may have a metal or metal alloy thin film coating formed on a surface thereof. If the original surface(s) ofthe substrate is glass or ceramic without a metal coating, the glass or ceramic is directly subjected to the texturing method of the present invention.
  • a glass substrate material can be made of a hard amorphous glass material such as a fused mixture ofthe silicates ofthe alkali and alkaline-earth or heavy metals.
  • a ceramic substrate material can comprise various hard materials made by shaping and then firing at a high temperature a nonmetallic mineral such as clay. These ceramic materials include ceramic alloys, such as silicon nitride, silicon carbide, zirconia, alumina, and the like. Carbon and titanium also are known as substrates which can be textured by the method ofthe present invention.
  • FIG. 4 depicts a simplified schematic depiction ofthe deployed articles 40 ofthe present invention, including a substrate such as rigid disk 42 and abrasive article 44 for use with the method ofthe present invention.
  • a substrate such as rigid disk 42
  • abrasive article 44 for use with the method ofthe present invention.
  • the texturing of only one side ofthe substrate (in FIG. 4, a rigid disk) 42 is depicted, it is understood that both sides ofthe rigid disk 42 may be textured simultaneously by separate abrasive articles as depicted in FIG. 5 or sequentially or even simultaneously by the same abrasive article.
  • Rigid disk 42 generally has a diameter between 30 to 200 millimeters, typically between 40 to 150 mm, and more typically between 48 and 130 mm.
  • Rigid disk 42 is installed on a machine (not shown) for texturing rigid disks, for example, that available under the trade designation "HDF" from the Exclusive Design Company (San Mateo, CA) .
  • the machine spins rigid disk 42 between about 50 to 700 rpm, resulting in a direction of travel with a surface speed on disk 42 of between about 7.5 to about 440 meters/minute, measured at the outer edge ofthe disk.
  • the abrasive article 44 of the invention is preferably in the form of an elongate ribbon or tape of coated abrasive having areas of different abrasive natures, as described above, provided in a roll form having a width between 20 to 60 millimeters, preferably between 25 to 50 mm.
  • the continuous strip ofthe abrasive article 44 is unwound from the roll at a first station 46 and is rewound once used at a second station 48.
  • An unwound portion ofthe coated abrasive strip between station 46 and station 48 is caused to contact the surface of metal coating on disk 42 while being engaged against the surface being finished by roller 50 as disk 42 rotates.
  • Roller 50 has a preferred diameter of about 50 mm and is preferably constructed of an elastomeric material having a Shore A durometer of about 50.
  • the force between the abrasive article 44 and the metal coating on disk 42 is between 0.1 to 4 kg, preferably between 0.5 and 3 kg, for a contact length of 3.1 mm using a rubber roll having a diameter of 50 mm and a Shore A hardness value of 50. If the pressure is too high, the resulting surface finish, Ra, will be undesirably high, i.e., greater than about 7 nanometers (0.0070 micrometers). If the pressure is too low, then the scratch height will be undesirably low and the surface finish will be undesirably low, i.e., less than about 2 nanometers (0.0020 micrometers).
  • the pressure needed to provide the desired scratch height is dependent on, for example, the speed ofthe abrasive article, disk speed, disk material, and rubber roll hardness.
  • the preferred method of texturing includes oscillating roller 50 in a radial direction relative to the rotation (or travel direction) of disk 42 during the texturing process.
  • the radial oscillation ensures that the scratches formed by the abrasive article 44 are not concentric on the substrate 42, but are, instead, substantially circumferential with random crossings.
  • the abrasive strip 44 is also indexed at a controlled rate between stations 46 and 48 to periodically provide fresh abrasive.
  • the indexing speed ofthe abrasive article 44 is between 50 to 400 mm/minute, preferably between 150 to 250 mm min.
  • the combination ofthe indexing the strip of abrasive article 44 and the oscillating roller 50 provides the random, substantially circumferentially spaced scratches desired.
  • the finished surface of rigid disk 42 is typically cleaned after texturing to remove any debris or swarf. After cleaning, any conventional magnetic coating can be applied over the scratches.
  • a typical magnetic media coating such as chrome, is applied over the textured metal, e.g., nickel/phosphorus, or nonmetallic coating.
  • An additional coating of a magnetic material can be applied over the chrome coating, for example, a CoXZ alloy, where Co is cobalt, X can be platinum or tantalum, and Z can be chrome or nickel.
  • a carbon coating can be applied over the magnetic coating. This coating technique is within the knowledge of one skilled in the rigid magnetic disk manufacturing field.
  • FIG. 5 is another simplified schematic representation ofthe method ofthe present invention.
  • Abrasive articles 55 are used to texture the surfaces of rigid disk 58.
  • Abrasive articles 55 each have regions 56 which have a less abrasive nature than regions 57.
  • Abrasive articles 55 are incrementally indexed in the direction denoted by the arrows to provide fresh abrasive to the surface ofthe rigid disk being textured.
  • the abrasive article used in the method ofthe present invention comprises an abrasive coating having at least two regions, the two regions having different abrasive natures.
  • the abrasive nature ofthe coating can be altered by using different sizes and/or different types of abrasive particles, different binders, adding fillers or additives to affect erodability or cut rate, varying the ratio of binder to fillers and/or abrasive particles, or overall lack of abrasive coating.
  • abrasive particles as used herein, means abrasive grains, abrasive agglomerates, and abrasive composites. When agglomerates and/or composites are used, the density may be varied to alter the abrasive nature.
  • a binder bonds abrasive particles to a backing.
  • a typical method for making a coated abrasive article is to provide a backing, apply a resinous organic make coat on the backing, apply abrasive particles by a known technique (e.g., electrostatic, magnetic, or drop coating) onto and into the make coat, at least partially cure the make coat, apply a resinous size coat over the abrasive particles, cure, and optionally apply a resinous supersize coat over the size coat.
  • the curing can be done by exposing the abrasive article to an energy source such as thermal or radiation energy.
  • the backing may be treated prior to application ofthe make coat with a backing treatment, such as a primer, presize, backsize, and/or saturant.
  • a backing treatment such as a primer, presize, backsize, and/or saturant.
  • the backing treatment can be applied by any conventional technique such as dip coating or roll coating, and is at least partially cured or dried before the next coat is applied. Preferably, the treatment is fully cured. After the last coat is applied and at least partially cured, if necessary, the remaining partially cured coats are fully cured.
  • the make coat precursor is applied over the backing and any optional presize by any conventional technique such as spray coating, roll coating, die coating, powder coating, hot melt coating or knife coating. Abrasive particles are projected into the make coat precursor, typically by an electrostatic coating process, after which the make coat precursor is partially cured.
  • a size coat precursor is then applied over the abrasive particles and make coat by any conventional technique and at least partially cured.
  • a supersize coat precursor can be applied over the size coat.
  • the coated abrasive is subsequently further cured, humidified, or flexed, if so desired.
  • FIG. 1 shows abrasive article 10 having backing 1 1 on which is abrasive coating 12.
  • Abrasive coating 12 comprises two regions, region one 13 and region two 14, each ofwhich comprise a binder (not depicted) and a plurality of abrasive particles.
  • Region one 13 comprises first abrasive particles 15 and region two 14 comprises second abrasive particles 16.
  • First abrasive particles 15 have an average particle size discernibly greater than the average particle size of second abrasive particles 16.
  • the abrasive nature ofthe coating differs by the average particle size ofthe abrasive particles.
  • the average particle size ofthe abrasive particles of one coating region differ by at least about 10%, preferably by at least about 25%, and more preferably by at least about 50% from the average particle size ofthe abrasive particle ofthe second coating region.
  • at least two regions each having a different abrasive nature are provided in the abrasive article by side-by-side contiguous abrasive coating regions. It is preferred that the regions have boundaries that directly adjoin one another, so that there is no area therebetween that is devoid of abrasive coating, although a minimal gap may be tolerated.
  • An acceptable gap is typically less than 1 millimeter, preferably less than 0.5 mm, and more preferably less than about 0.1 mm in width. It is preferred that the gap between the at least two regions be minimal because the surface finish ofthe substrate textured by that gap may be unpredictable.
  • the coating regions can either be applied sequentially or simultaneously, but it should be done in such a way as to minimize overlap of adjacent abrasive areas. It is possible to have some intermixing at a common boundary between adjacent regions, but this is usually not preferred because the surface finish produced by that area may be unpredictable. It is also possible to have more than two, such as three or four, different abrasive areas side by side, each with different abrasive nature regions, depending on the intended use ofthe abrasive article.
  • the arrangement ofthe regions can be in any particular order (i.e., increasing or decreasing in abrasive nature), depending on the surface finish desired on the substrate.
  • the abrasive nature ofthe regions should be discernibly different, to the extent that the desired surface finish is produced by each region.
  • the phrase "discernibly different", as used herein, means that the abrasive nature from one region provides a surface finish on the textured substrate which is statistically different than the surface finish provided by the other region.
  • the surface finish (e.g., Ra) of a textured rigid disk can be measured, for example, with an interferometer, such as available from WYKO Corp., Arlington, AZ, using a 40X objective.
  • the abrasive nature of the coating can be altered depending on the requirements ofthe disk to be textured, for example, by using different sizes and/or different types of abrasive particles, adding fillers or additives to affect erodability or cut rate, selecting binder systems, or having a lack of abrasive coating.
  • one region can comprise aluminum oxide abrasive particles having an average particle size of 3 micrometers
  • a second region can comprise silicon carbide abrasive particles having an average particle size of 2 micrometers.
  • one region can have a binder to mineral ratio of 1 to 1
  • a second region can have a binder to mineral ratio of 1 to 4.
  • steps can be taken during the converting process to alter the abrasive nature, steps such as calendering, flexing, or humidifying. It is not necessary that the two regions be formed in situ, but can be laminated together at a later time or coated sequentially.
  • Another method of producing a coated abrasive known as a slurry coated abrasive, is to provide a slurry of binder precursor and abrasive particles on a backing.
  • the abrasive particles, and any fillers (including additives, dyes, surfactants, etc.) and possible solvents are mixed into a binder precursor to form a homogenous slurry.
  • Slurries can be coated on a backing by a variety of methods, including gravure roll coating, curtain coating, die coating, and knife coating.
  • a preferred method of producing a slurry coated abrasive article ofthe present invention is to knife coat the individual slurries simultaneously, such as taught by Stubbs et al. in USSN 08/514,417 filed 1 1 August 1995.
  • the preferred methods to change the abrasive nature of a slurry coated abrasive include altering the abrasive particle shape or size or type, the amount of solvents or fillers in the slurry or the binder precursor, or calendering one portion ofthe abrasive article.
  • a coated abrasive useful in the method ofthe present invention is a structured abrasive, as taught by U.S. Patent Nos. 5,152,917 and 5,304,223 (Pieper et al.) and U.S. Patent No. 5,435,816 (Spurgeon et al.) filed 30 December 1993.
  • the abrasive coating is in the form of a plurality of abrasive composites comprising abrasive particles and a binder bonded to a backing. It is generally preferred that each abrasive composite has a precise shape associated with it. The precise shape is determined by distinct and discernible boundaries.
  • the composites are usually formed by filling cavities in a tool with an abrasive slurry comprising abrasive particles and binder precursor, and then curing the binder precursor while in the tool, such that the cured composite has the inverse shape ofthe cavity.
  • the abrasive nature ofthe abrasive article can be varied by altering the topography (i.e., height, dimension, shape) ofthe composites, or by the abrasive particles within the composites. Additional details on structured abrasive articles with multiple abrasive natures can be found in USSN 08/514,417 (Stubbs et al.) filed 1 1 August 1995.
  • the abrasive article ofthe method ofthe present invention is generally in the form of a tape having a width of between about 2.5 cm (1 inch) to about 25 cm (10 inches) and an extended length, usually at least about 25 cm (10 inches), generally at least about 100 cm (39 inches), and typically about 180 meters (600 feet).
  • the exact width and length will depend on the substrate textured and the requirements of any machine being used for the texturing process.
  • the abrasive article could be in the form of a sheet, disc, or endless belt, depending again on the substrate and on any machine being used.
  • the abrasive particles used in the method ofthe present invention typically have an average particle size ranging from about 0.01 to 30 micrometers, usually between about 0.05 to 10 micrometers, and preferably between 0.1 to 5 micrometers, particularly 1, 2, and 3 micrometer average particle size. It is preferred that the abrasive particles have a Mohs' hardness of at least about 8, more preferably above 9.
  • abrasive particles include fused aluminum oxide (which includes brown aluminum oxide, heat treated aluminum oxide, and white aluminum oxide), ceramic aluminum oxide, silicon carbide including green silicon carbide, chromia, alumina zirconia, diamond, iron oxide, titanium diboride, boron carbide, ceria, cubic boron nitride, boron carbide, garnet, and combinations thereof.
  • Aluminum oxide is the preferred material for metal coated substrates, whereas diamond is preferred for glass or ceramic substrates.
  • the abrasive particle can be irregular or precisely shaped.
  • Shaped abrasive particles include for example, thin bodies having geometrical faces of triangles, squares, or the like, three-dimensional shapes such as pyramids, truncated pyramids, prisms, and filamentary or rod shapes. Examples of shaped abrasive particles are taught in U.S. Patent Nos. 5,090,968 (Pellow); 5,201,916 (Berg et al.); and 5,304,331 (Leonard et al.), and co-pending USSN 08/085,638 (Holmes et al.) filed 30 June 1993.
  • abrasive particles encompasses single abrasive particles and abrasive agglomerates. Abrasive agglomerates are further described in U.S. Patent Nos. 4,311,489 (Kressner); 4,652,275 (Bloecher et al.); and 4,799,939 (Bloecher et al.).
  • the abrasive particles can have a surface coating which may increase adhesion to the binder, alter the abrading characteristics ofthe abrasive particle and the like.
  • surface coatings include coupling agents, halide salts, metal oxides including silica, refractory metal nitrides, refractory metal carbides and the like.
  • Binders for use in the present invention can be any binder conventionally known for abrasive articles.
  • the binders can be thermosetting or thermoplastic. They can be thermal or radiation curable.
  • Preferred binders includes phenolic resin, epoxies, polyesters, polyurethanes, and urea-formaldehyde resins.
  • the same binder can be used for the at least two abrasive regions, or the binder may differ, and thus provide a different abrasive nature.
  • the ratio of binder to abrasive particles is usually between about 5: 1 to 1 : 10, more typically 2: 1 to 1 :5, although higher and lower ratios are also usable. Altering the binder to abrasive particles ratio changes the abrasive nature ofthe abrasive coating. Fillers
  • Fillers when added to an abrasive coating, are known to affect the abrading characteristics of the coating.
  • Examples of fillers known particularly for the effect on erodability include, but are not limited to, alumina bubbles, polymer spheres, clay bubbles, gypsum, coral, coquina, and oolite.
  • useful fillers for this invention include: metal carbonates (such as calcium carbonate (chalk, calcite, marl, travertine, marble, and limestone), calcium magnesium carbonate, sodium carbonate, magnesium carbonate), silica (such as quartz, glass beads, glass bubbles, and glass fibers), silicates (such as talc, clays (montmorillonite), feldspar, mica, calcium silicate, calcium metasilicate, sodium aluminosilicate, and sodium silicate), metal sulfates (such as calcium sulfate, barium sulfate, sodium sulfate, aluminum sodium sulfate, and aluminum sulfate), gypsum, vermiculite, wood flour, aluminum trihydrate, carbon black, metal oxides (such as calcium oxide (lime), aluminum oxide, and titanium dioxide), and metal sulfites (such as calcium sulfite). Fillers also include antistatic agents such as carbon black, graphite, vanadium oxide, and humectant
  • filler also encompasses materials that are known in the abrasive industry as grinding aids.
  • a grinding aid is defined as particulate material that the addition of which has a significant effect on the chemical and physical processes of abrading which results in improved performance.
  • chemical groups of grinding aids include waxes, organic halide compounds, halide salts and metals and their alloys.
  • the organic halide compounds will typically break down during abrading and release a halogen acid or a gaseous halide compound.
  • examples of such materials include chlorinated waxes like tetrachloronaphthalene, pentachloronaphthalene; and polyvinyl chloride.
  • halide salts include sodium chloride, potassium cryolite, sodium cryolite, ammonium cryolite, potassium tetrafluoroborate, sodium tetrafluoroborate, silicon fluorides, potassium chloride, magnesium chloride.
  • metals include, tin, lead, bismuth, cobalt, antimony, cadmium, iron, and titanium.
  • Other miscellaneous grinding aids include sulfur, organic sulfur compounds, graphite, and metallic sulfides.
  • the coating may further include additives such as dyes, pigments, lubricants, plasticizers, coupling agents, surfactants, wetting agents, antistatic agents, and the like.
  • Typical abrasive backings include polymeric film
  • Primed polymeric film and nonwoven materials are preferred backings.
  • SCA2 silane coupling agent gamma-glycidoxypropyl trimethoxysilane, commercially available from Union Carbide under the trade designation "A- 187";
  • PR3 polyester resin commercially available from Shell Chemical Co. under the trade designation "3300"; SDS sodium diamylsulfosuccinate, commercially available from
  • a model 800C HDF Disk Burnisher manufactured by Exclusive Design Co , San Mateo, CA
  • the thin film disk substrate was a nickel/phosphorus (NiP) plated aluminum disk (95 mm diameter) rotated at 200 rpm
  • the abrasive article ofthe present invention was cut into the width as described for each Example, having an extended length
  • Rolls ofthe abrasive strip were installed on a tape cassette that had a supply reel with the unused abrasive article and a take-up reel with the used abrasive article
  • Two sets of abrasive tape cassettes were tested One cassette was used to texture the top surface ofthe rigid disk, and the other cassette was used to texture the bottom surface of the rigid disk
  • the feed rate ofthe abrasive tape was 30 5 cm/min
  • an aqueous coolant mist was dripped onto a cleaning fabric which was applied to the surface ofthe rigid disk to transfer the aqueous coolant to the surface ofthe disk
  • the force between the roller and abrasive to the disk was about 8.8 kg.
  • the endpoint ofthe test was 20 seconds.
  • the surface ofthe textured rigid disk was then measured using a WYKO interferometer using a 40X objective to determine the surface properties, Ra, of each sample.
  • Comparative Example A was a conventional 2 micrometer aluminum oxide lapping film on 51 micrometer thick polyester terephthalate backing, commercially available from 3M Company, St. Paul, MN, under the trade designation "TR3 IMPERIAL Lapping Film".
  • Example 1 a commercially available 2 micrometer aluminum oxide abrasive ("2 ⁇ 28 IQ W/D Production Polishing Paper” from 3M) was slit to 0.635 cm width and laminated to a 25 micrometer thick polyester teraphthalate film directly along side a 3.49 cm wide strip of commercially available 1 micrometer aluminum oxide abrasive (" 1 ⁇ 281 Q W/D Production Polishing Paper” from 3M).
  • Example 2 For Example 2, a 0.635 cm wide strip of commercially available 2 micrometer aluminum oxide abrasive ("2 ⁇ 281 Q W/D Production Polishing Paper" from 3M) was laminated to a 5 cm wide strip of 178 micrometer thick nonwoven backing (commercially available from Hollingsworth & Vose). Thus, 4.365 cm ofthe width of the strip had no abrasive coating thereon.
  • Example 3 For Example 3, a 3.49 cm wide strip ofthe material of Comparative Example A was used. A portion of this strip, 2.86 cm, was calendered in order that 2.86 cm of this had a less aggressive nature than the remaining 0.63 cm wide uncalendered portion.
  • Table 1 below reports the Ra of Examples 1 through 3 compared to Comparative Example A when tested according to the Texturing Procedure. For all Examples, the more aggressive portion ofthe Example was placed at the inner diameter of the disk to be textured. Surface roughness was checked at 9 millimeters (landing zone) and 15 millimeters (memory area) from the inner lip of the textured disk, and is reported in Angstroms.
  • Examples 4 through 6 were produced according to the Procedure for Making a Lapping Abrasive Article.
  • Abrasive slurry A had a WAO average abrasive particle size of 3 micrometers
  • abrasive slurry B had a WAO average abrasive particle size of 2 micrometers.
  • the abrasive slurries A and B were coated side by side to provide abrasive regions A and B on three different backing to provide Examples 4, 5, and 6 by the following method.
  • the abrasive slurries were coated onto the backing with a knife coater having a 51 micrometer gap between the knife and the backing.
  • a dividing dam having two compartments was placed behind (upweb) from and in contact with the knife, and the abrasive slurries were poured into the compartments ofthe dam.
  • the abrasive slurries were physically separated by the dam until they came into contact with the knife.
  • the backing was pulled in the machine direction and the abrasive slurries passed under the knife and abrasive precursor coatings were formed.
  • abrasive precursor coatings were then cured in a conventional oven at 121 °C (250°F) for 5 minutes followed by 16 hours at 49°C ( 120°F) to fo ⁇ n abrasive coatings.
  • the width of abrasive region A was 0.635 cm (0.25 inch) and the width of abrasive region B was 2.84 cm ( 1.12 inch).
  • Example 4 was coated on a 51 micrometer thick polyester backing;
  • Example 5 was coated on a 120 micrometer thick paper backing;
  • Example 6 was coated on a 178 micrometer thick nonwoven backing (commercially available from Hollingsworth & Vose).
  • Tables 1 and 2 above show the surface texture of a thin film disk after a single texturing step using a single abrasive article. Until the abrasive article of this invention, at least two separate abrasive articles were needed to provide the difference in Ra from the landing zone area ofthe disk to the memory area.

Abstract

The present invention relates to a method of texturing a rigid disk for magnetic media applications, using a coated abrasive article comprising a backing having at least two regions of abrasive coating bonded to one side of the backing. The at least two regions of abrasive coating have different abrasive natures.

Description

METHOD OF TEXTURING A SUBSTRATE USING AN ABRASIVE ARTICLE HAVING MULTIPLE GRIT PARTICLES.
METHOD OF TEXTURING A SUBSTRATE USING AN ABRASIVE ARTICLE HAVING MULTIPLE ABRASIVE NATURES
Field of the Invention
The present invention relates to a method of texturing a substrate, particularly a rigid disk, using a coated abrasive article comprising a backing having at least two regions of abrasive coating bonded to one side ofthe backing. The at least two regions of abrasive coating have different abrasive natures.
Background of the Invention In many abrading or polishing operations, a finer finish is desired on one part of a workpiece than on another part. A conventional method of producing such a final surface is to abrade the entire workpiece surface with a coarse abrasive, leaving a rough finish, after which a fine abrasive is used only on the part ofthe workpiece requiring the finer finish. An alternate method is to abrade the entire workpiece with a fine abrasive thus imparting a fine finish, and then roughening part ofthe surface with a coarse abrasive to provide the desired rougher section.
Personal computers, which have become common in the current times, frequently contain a rigid memory disk or hard drive, which involves a rigid thin film metal or nonmetal disk as the substrate for the magnetic medium coating. The annular surface ofthe thin film disk, which will be coated with magnetic media, requires a coarser finish on the inner portion of the annular surface and a finer finish on the outer portion ofthe annular surface. In one conventional arrangement, the thin film rigid disks are manufactured by electroless nickel plating a thin-film of nickel or nickel alloy onto an aluminum base, such as nickel/phosphorus (Ni-P), which is then polished to a very fine, mirror-like finish. After polishing, the Ni-P coating is textured, followed by the application of a magnetic coating(s) thereon to form the magnetic medium. Nonmetal substrates, such as glass or ceramic substrates, also are used in the rigid memory disk industry in place ofthe metal substrates. For these nonmetallic substrates, there is no metal or metal alloy coating applied onto the metal base before subsequent polishing, texturing, and magnetic coating application. Rather, the surface ofthe glass or ceramic rigid disk itself is polished, textured, and thereafter the magnetic coating is directly applied thereon without interposing any metal or metal alloy coating layer. Rigid disks require a fairly consistent surface texture in order for the disk to perform properly. The texture provided on the surface of a thin film rigid disk is a compromise ofthe surface finish (Ra) necessary for the memory area versus the surface finish necessary for the head landing zone. The landing zone, typically a 1/8 inch to 3/8 inch (0.32 to 0.95 cm) wide inner annular portion ofthe disk, requires a relatively rough finish to minimize the stiction and friction between the disk and the read/write head on startup and shutdown ofthe drive. The texturing also eases the separation between the computer head and the rigid disk when the computer is first turned on. If the disk is smooth and untextured, it is difficult for the disk to start spinning because of too much head/disk contact. The surface roughness ofthe landing zone preferably has an Ra of about 40 to 60 Angstroms. In contrast, the memory retention area ofthe disk, typically the outer annular surface portion ofthe disk, does not need to be as rough, but is preferred to have an Ra of about 20 Angstroms. A lower Ra minimizes asperities on the disk surface and enables lower flying heights ofthe read/write head which results in higher recording densities.
The texturing process is critical to the performance of rigid disks. Texturing typically produces, on the annular surface ofthe disk which will bear the magnetic medium coating, a random pattern of uniform scratches with sharply defined edges in a substantially circumferential direction relative to the center ofthe rigid disk. Disk texturing accomplishes a number of purposes, including improving the aerodynamics between the computer head (which reads and writes data on the disk) and the surface of the magnetic coating on the disk. The scratches formed during texturing make it easier for the head to distinguish bytes of information between tracks on the disk. If the scratches are too deep, however, this may cause a loss of data on the rigid disk.
Disk surface texturing has traditionally been accomplished by using a loose abrasive slurry. Loose abrasive slurries provide the requisite substantially circumferential scratches that have sharply defined edges with the appropriate depth. The use of loose abrasive slurries is, however, accompanied by a number of disadvantages. For instance, the loose abrasive slurries create a large amount of debris and waste. As a result, the thin film rigid disks must be thoroughly cleaned to remove any residual surface residue from the abrasive slurry. The loose abrasive slurry also results in a relatively high amount of wear on the equipment used for texturing.
To overcome the above noted disadvantages associated with loose abrasive slurries, coated abrasive lapping films have been used to texture the thin film rigid disks. Such a lapping film typically comprises a polymeric film backing having an abrasive layer consisting of very fine abrasive particles dispersed in a binder. The abrasive layer is typically coated on the polymeric film to form a thin layer which has a surface profile which is essentially flat other than the partial protrusions of some ofthe abrasive particles. During use, the lapping film abrades a portion ofthe substrate surface to impart the texture therein. Recently the use of porous nonwoven cloths coated on a surface with an abrasive slurry has been advanced as an alternate to lapping film to uniformly texture thin film metal or metal alloy coated rigid disks before application ofthe magnetic coatings in a clean process that generates high quality scratches and avoids reweld, i.e., the reattachment of abraded metal particles on the surface being textured. For example, U.S. Patent No. 5,307,593 (Lucker et al.) discloses a nonwoven substrate having an abrasive coating thereon that is used for texturing magnetic media substrates having a thin-film metal or metal alloy coating. The porous nonwoven substrate provides advantages such as the ability to collect and entrap swarf and debris during the abrasion. USSN 08/301,254 (Wedell et al.) filed 6 September 1994 and assigned to the assignee ofthe present invention, discloses combining the texturing characteristics of a loose abrasive slurry and a fixed abrasive tape by providing a water soluble abrasive coating on a nonwoven material.
Each of these methods, loose abrasive slurries, film backed lapping films, and nonwoven backed lapping products, requires, at a minimum, a second texturing step in order to produce the difference in surface texture needed on the disk between the memory area and the landing zone.
U.S. Patent No. 875,936 (Landis) teaches an abrading material comprising a backing coated with relatively wide and narrow parallel abrasive coatings with adjacent strips each containing a different grade of two different abrasive grades and regions between the strips being devoid of any abrasive coating.
JP 4-141377 published 14 May 1992 teaches a roll of abrasive tape for flexible magnetic disks and magnetic tapes, where the abrasive grain size gradually increases from the free end ofthe tape to the center ofthe roll. The pressure of being wound counteracts the larger abrasive grain size and thus, when utilized, the abrasive tape has a uniform abrasiveness throughout the length ofthe tape as it is unwound from the roll.
JP 4-210383 published 31 July 1992 teaches a roll of coated abrasive tape for the polishing of magnetic recording medium, where the hardness of the binder is varied along the length ofthe tape from the free end to the center ofthe roll. The pressure of being wound counteracts the binder hardness variance and thus, when utilized, the abrasive tape has a uniform abrasiveness throughout the length ofthe tape as it is unwound from the roll. U.S. Patent No. 5, 166,006 (Lal et al.) teaches texturing thin film disks by use of a chemical etchant process. U.S. Patent No. 5, 167,096 (Eltoukhy et al.) describes a disk-like abrasive pad having a backing comprising regions of different compressibilities which produce a deeper-groove texture opposite a less compressible part ofthe backing at the inner diameter of a disk. USSN 08/398, 198 (Ohishi) filed 2 March 1995 and assigned to the assignee ofthe current invention, teaches a method of texturing thin film rigid disks using an abrasive article comprising abrasive composites.
USSN 08/514,417 (Stubbs et al.) filed 11 August 1995 and assigned to the assignee ofthe current invention, teaches a method of making abrasive articles having at least two regions of abrasive coating abutting, wherein the regions having different abrasive natures, and method of making same.
Summary of the Invention The present invention relates to a method of texturing substrates, particularly rigid disks for use as magnetic media. In particular, the present invention relates to a method of texturing a surface of a rigid disk to simultaneously impart a first area on said surface having a first surface finish and a second area on said surface having a second surface finish, said method comprising the steps of:
(a) contacting said surface with a coated abrasive article comprising a first region having a first abrasive nature and a second region having a second abrasive nature, both regions bonded to a backing, said first abrasive nature being different than said second abrasive nature; and (b) moving at least one of said coated abrasive article or said rigid disk with respect to each other under conditions to impart said first and second surface finishes.
The abrasive nature ofthe coating can be altered by using different size abrasive particles, different types of abrasive particles, adding fillers or additives to affect erodability, different binders, different coating patterns, different size or shape of abrasive composites, or varying the density of abrasive composites. The abrasive nature can also be altered by changing the ratio of materials in the abrasive coating, e.g., the binder to abrasive grain ratio, or by the processing conditions, e.g., different coating methods, or different degree of cure. It is also possible in certain applications to create an abrasive coating having no abrasive particles or grit therein, that when fully cured, nonetheless functions as a polishing article depending on the hardness ofthe workpiece and the abrasiveness ofthe cured binder relative thereto.
The phrase "abrasive nature" as used herein means or refers to the ability of the abrasive coating to impart a surface finish (e.g., textured or smooth) to a surface of a workpiece. The surface of a workpiece can be altered by the abrasive article in many ways, such as removal of material, reduction or increase ofthe surface roughness, or imparting a pattern in the topography ofthe workpiece surface. As used herein, "different abrasive nature" means that the surface of a workpiece has one area having an Ra at least 10%, preferably at least about 20% greater than the Ra of a second area. "Ra" of a surface is defined as the measurement ofthe arithmetic average ofthe scratch depth. It is the arithmetic average of five individual roughness depths, where an individual roughness depth is the vertical distance between the highest point and a center, or mean, line.
Brief Description of Drawings
FIG. 1 is a plan view of one abrasive article useful in an embodiment ofthe present invention.
FIG. 2 is a plan view of a thin film rigid disk. FIG. 3 is a cross section area of a thin film rigid disk. FIG. 4 is a schematic perspective view ofthe articles which are deployed with respect to one another for practicing a method ofthe present invention.
FIG. 5 is a schematic perspective view of other articles alternatively deployed with respect to one another for practicing a method ofthe present invention. Detailed Description of the Invention
The process of texturing a substrate, in particular a magnetic medium coated rigid disk includes providing a substrate, usually a rigid disk substrate, generally having a thickness between 0.75 to 1.25 millimeter. The rigid disk substrate may be metallic or nonmetallic. The metal rigid disks preferably have a base of aluminum alloy coated with a thin metal or metal alloy coating. The nonmetallic disk substrates are preferably glass or ceramic. The phrase "rigid substrate" as used herein means a thin member comprising a structure composed of a single distinct layer or plurality of integral layers having a surface on which is adherently applied a magnetic layer.
Texturing of Rigid Disks
The general method of texturing thin film rigid disks is well known in the art. Examples include those methods disclosed in U.S. Patent No. 5,307,593 (Lucker et al.) and USSN 08/398,198 (Ohishi) filed 2 March 1995, assigned to the assignee ofthe present invention.
The drawings are provided to facilitate the understanding ofthe invention. FIG. 2 shows a rigid disk 20 having a surface which includes three areas: a smooth-surfaced memory area 22, a textured surface landing zone 24, and an optionally textured center 26. Disk 20 is the type commonly used in computer hard drives. While the computer is turned off, the read/write head (not shown) ofthe computer is stationed in landing zone 24. As the computer is powered up and disk 20 begins to spin, the head, while in contact with landing zone 24 slides over landing zone 24, until disk 20 has reached full speed, after which the head moves to memory area 22.
It is preferred that landing zone 24 have a rough surface, on the order of 40 to 60 Angstroms Ra (0.004 to 0.006 micrometers), and that memory area 22 have a surface roughness of about 20 Angstroms Ra (0.002 micrometers). The width and height ofthe scratches do not have to be uniform, although the scratches should not be excessively wide or deep. Referring now to the partial cross-sectional view of FIG. 3, rigid disk 20 comprises metal base 35 with at least metal coating 31 having textured metal surfaces 30 and 32. Scratches on surfaces 30 and 32 are circumferentially deployed about the center of disk 20, irregular in nature and comprise high regions 34 and low regions 36. The texturing process results in an increase in the exposed surface area ofthe metal coating(s) 31. The rougher surface reduces stiction/friction with a computer head and the substantially circumferential direction ofthe scratches enables better differentiation between data tracks.
Although the disks shown in FIGs. 2 and 3 are comprised of a metal base coated with a thin metal or metal alloy film, it is to be understood that the present invention also contemplates applying the texturing to other substrates, for example, those made of glass or ceramic material, which may have a metal or metal alloy thin film coating formed on a surface thereof. If the original surface(s) ofthe substrate is glass or ceramic without a metal coating, the glass or ceramic is directly subjected to the texturing method of the present invention. A glass substrate material can be made of a hard amorphous glass material such as a fused mixture ofthe silicates ofthe alkali and alkaline-earth or heavy metals. A ceramic substrate material can comprise various hard materials made by shaping and then firing at a high temperature a nonmetallic mineral such as clay. These ceramic materials include ceramic alloys, such as silicon nitride, silicon carbide, zirconia, alumina, and the like. Carbon and titanium also are known as substrates which can be textured by the method ofthe present invention.
FIG. 4 depicts a simplified schematic depiction ofthe deployed articles 40 ofthe present invention, including a substrate such as rigid disk 42 and abrasive article 44 for use with the method ofthe present invention. Although the texturing of only one side ofthe substrate (in FIG. 4, a rigid disk) 42 is depicted, it is understood that both sides ofthe rigid disk 42 may be textured simultaneously by separate abrasive articles as depicted in FIG. 5 or sequentially or even simultaneously by the same abrasive article. Rigid disk 42 generally has a diameter between 30 to 200 millimeters, typically between 40 to 150 mm, and more typically between 48 and 130 mm. Rigid disk 42 is installed on a machine (not shown) for texturing rigid disks, for example, that available under the trade designation "HDF" from the Exclusive Design Company (San Mateo, CA) . The machine spins rigid disk 42 between about 50 to 700 rpm, resulting in a direction of travel with a surface speed on disk 42 of between about 7.5 to about 440 meters/minute, measured at the outer edge ofthe disk. The abrasive article 44 of the invention is preferably in the form of an elongate ribbon or tape of coated abrasive having areas of different abrasive natures, as described above, provided in a roll form having a width between 20 to 60 millimeters, preferably between 25 to 50 mm. The continuous strip ofthe abrasive article 44 is unwound from the roll at a first station 46 and is rewound once used at a second station 48. An unwound portion ofthe coated abrasive strip between station 46 and station 48 is caused to contact the surface of metal coating on disk 42 while being engaged against the surface being finished by roller 50 as disk 42 rotates. Roller 50 has a preferred diameter of about 50 mm and is preferably constructed of an elastomeric material having a Shore A durometer of about 50. The force between the abrasive article 44 and the metal coating on disk 42 is between 0.1 to 4 kg, preferably between 0.5 and 3 kg, for a contact length of 3.1 mm using a rubber roll having a diameter of 50 mm and a Shore A hardness value of 50. If the pressure is too high, the resulting surface finish, Ra, will be undesirably high, i.e., greater than about 7 nanometers (0.0070 micrometers). If the pressure is too low, then the scratch height will be undesirably low and the surface finish will be undesirably low, i.e., less than about 2 nanometers (0.0020 micrometers). The pressure needed to provide the desired scratch height is dependent on, for example, the speed ofthe abrasive article, disk speed, disk material, and rubber roll hardness. The preferred method of texturing includes oscillating roller 50 in a radial direction relative to the rotation (or travel direction) of disk 42 during the texturing process. The radial oscillation ensures that the scratches formed by the abrasive article 44 are not concentric on the substrate 42, but are, instead, substantially circumferential with random crossings. During texturing, the abrasive strip 44 is also indexed at a controlled rate between stations 46 and 48 to periodically provide fresh abrasive. The indexing speed ofthe abrasive article 44 is between 50 to 400 mm/minute, preferably between 150 to 250 mm min. The combination ofthe indexing the strip of abrasive article 44 and the oscillating roller 50 provides the random, substantially circumferentially spaced scratches desired.
The finished surface of rigid disk 42 is typically cleaned after texturing to remove any debris or swarf. After cleaning, any conventional magnetic coating can be applied over the scratches. A typical magnetic media coating, such as chrome, is applied over the textured metal, e.g., nickel/phosphorus, or nonmetallic coating. An additional coating of a magnetic material can be applied over the chrome coating, for example, a CoXZ alloy, where Co is cobalt, X can be platinum or tantalum, and Z can be chrome or nickel. Finally a carbon coating can be applied over the magnetic coating. This coating technique is within the knowledge of one skilled in the rigid magnetic disk manufacturing field.
FIG. 5 is another simplified schematic representation ofthe method ofthe present invention. Abrasive articles 55 are used to texture the surfaces of rigid disk 58. Abrasive articles 55 each have regions 56 which have a less abrasive nature than regions 57. Abrasive articles 55 are incrementally indexed in the direction denoted by the arrows to provide fresh abrasive to the surface ofthe rigid disk being textured.
The abrasive article used in the method ofthe present invention comprises an abrasive coating having at least two regions, the two regions having different abrasive natures. The abrasive nature ofthe coating can be altered by using different sizes and/or different types of abrasive particles, different binders, adding fillers or additives to affect erodability or cut rate, varying the ratio of binder to fillers and/or abrasive particles, or overall lack of abrasive coating. The phrase "abrasive particles", as used herein, means abrasive grains, abrasive agglomerates, and abrasive composites. When agglomerates and/or composites are used, the density may be varied to alter the abrasive nature.
Abrasive Articles
In a coated abrasive article, a binder bonds abrasive particles to a backing. A typical method for making a coated abrasive article is to provide a backing, apply a resinous organic make coat on the backing, apply abrasive particles by a known technique (e.g., electrostatic, magnetic, or drop coating) onto and into the make coat, at least partially cure the make coat, apply a resinous size coat over the abrasive particles, cure, and optionally apply a resinous supersize coat over the size coat. The curing can be done by exposing the abrasive article to an energy source such as thermal or radiation energy. The details of this typical and exemplary process are well known in the art. It has been found that before applying any additional coating, it is preferred that any resinous layers already existing on the article be sufficiently cured in order to maintain the article's integrity during the application of an additional coating layer.
The backing may be treated prior to application ofthe make coat with a backing treatment, such as a primer, presize, backsize, and/or saturant. The backing treatment can be applied by any conventional technique such as dip coating or roll coating, and is at least partially cured or dried before the next coat is applied. Preferably, the treatment is fully cured. After the last coat is applied and at least partially cured, if necessary, the remaining partially cured coats are fully cured. After any backing treatment is applied, the make coat precursor is applied over the backing and any optional presize by any conventional technique such as spray coating, roll coating, die coating, powder coating, hot melt coating or knife coating. Abrasive particles are projected into the make coat precursor, typically by an electrostatic coating process, after which the make coat precursor is partially cured. A size coat precursor is then applied over the abrasive particles and make coat by any conventional technique and at least partially cured. A supersize coat precursor can be applied over the size coat. Finally, the coated abrasive is subsequently further cured, humidified, or flexed, if so desired.
FIG. 1 shows abrasive article 10 having backing 1 1 on which is abrasive coating 12. Abrasive coating 12 comprises two regions, region one 13 and region two 14, each ofwhich comprise a binder (not depicted) and a plurality of abrasive particles. Region one 13 comprises first abrasive particles 15 and region two 14 comprises second abrasive particles 16. First abrasive particles 15 have an average particle size discernibly greater than the average particle size of second abrasive particles 16. In this example, the abrasive nature ofthe coating differs by the average particle size ofthe abrasive particles. In this example, the average particle size ofthe abrasive particles of one coating region differ by at least about 10%, preferably by at least about 25%, and more preferably by at least about 50% from the average particle size ofthe abrasive particle ofthe second coating region. In order to produce the abrasive article for the practice ofthe method ofthe present invention, at least two regions each having a different abrasive nature are provided in the abrasive article by side-by-side contiguous abrasive coating regions. It is preferred that the regions have boundaries that directly adjoin one another, so that there is no area therebetween that is devoid of abrasive coating, although a minimal gap may be tolerated. An acceptable gap is typically less than 1 millimeter, preferably less than 0.5 mm, and more preferably less than about 0.1 mm in width. It is preferred that the gap between the at least two regions be minimal because the surface finish ofthe substrate textured by that gap may be unpredictable. The coating regions can either be applied sequentially or simultaneously, but it should be done in such a way as to minimize overlap of adjacent abrasive areas. It is possible to have some intermixing at a common boundary between adjacent regions, but this is usually not preferred because the surface finish produced by that area may be unpredictable. It is also possible to have more than two, such as three or four, different abrasive areas side by side, each with different abrasive nature regions, depending on the intended use ofthe abrasive article. For three or more different regions, the arrangement ofthe regions can be in any particular order (i.e., increasing or decreasing in abrasive nature), depending on the surface finish desired on the substrate. The abrasive nature ofthe regions should be discernibly different, to the extent that the desired surface finish is produced by each region. The phrase "discernibly different", as used herein, means that the abrasive nature from one region provides a surface finish on the textured substrate which is statistically different than the surface finish provided by the other region. The surface finish (e.g., Ra) of a textured rigid disk can be measured, for example, with an interferometer, such as available from WYKO Corp., Tucson, AZ, using a 40X objective.
The abrasive nature of the coating can be altered depending on the requirements ofthe disk to be textured, for example, by using different sizes and/or different types of abrasive particles, adding fillers or additives to affect erodability or cut rate, selecting binder systems, or having a lack of abrasive coating. For example, one region can comprise aluminum oxide abrasive particles having an average particle size of 3 micrometers, and a second region can comprise silicon carbide abrasive particles having an average particle size of 2 micrometers. In an alternate embodiment, one region can have a binder to mineral ratio of 1 to 1, and a second region can have a binder to mineral ratio of 1 to 4.
In addition, steps can be taken during the converting process to alter the abrasive nature, steps such as calendering, flexing, or humidifying. It is not necessary that the two regions be formed in situ, but can be laminated together at a later time or coated sequentially. Another method of producing a coated abrasive, known as a slurry coated abrasive, is to provide a slurry of binder precursor and abrasive particles on a backing. The abrasive particles, and any fillers (including additives, dyes, surfactants, etc.) and possible solvents are mixed into a binder precursor to form a homogenous slurry. Slurries can be coated on a backing by a variety of methods, including gravure roll coating, curtain coating, die coating, and knife coating. A preferred method of producing a slurry coated abrasive article ofthe present invention is to knife coat the individual slurries simultaneously, such as taught by Stubbs et al. in USSN 08/514,417 filed 1 1 August 1995. The preferred methods to change the abrasive nature of a slurry coated abrasive include altering the abrasive particle shape or size or type, the amount of solvents or fillers in the slurry or the binder precursor, or calendering one portion ofthe abrasive article. Further, another coated abrasive useful in the method ofthe present invention is a structured abrasive, as taught by U.S. Patent Nos. 5,152,917 and 5,304,223 (Pieper et al.) and U.S. Patent No. 5,435,816 (Spurgeon et al.) filed 30 December 1993. In a structured abrasive article, the abrasive coating is in the form of a plurality of abrasive composites comprising abrasive particles and a binder bonded to a backing. It is generally preferred that each abrasive composite has a precise shape associated with it. The precise shape is determined by distinct and discernible boundaries. These boundaries form the outline or contour ofthe precise shape, and to some degree separate one abrasive composite from another. The composites are usually formed by filling cavities in a tool with an abrasive slurry comprising abrasive particles and binder precursor, and then curing the binder precursor while in the tool, such that the cured composite has the inverse shape ofthe cavity. For the abrasive article for use with the present method, the abrasive nature ofthe abrasive article can be varied by altering the topography (i.e., height, dimension, shape) ofthe composites, or by the abrasive particles within the composites. Additional details on structured abrasive articles with multiple abrasive natures can be found in USSN 08/514,417 (Stubbs et al.) filed 1 1 August 1995.
The abrasive article ofthe method ofthe present invention is generally in the form of a tape having a width of between about 2.5 cm (1 inch) to about 25 cm (10 inches) and an extended length, usually at least about 25 cm (10 inches), generally at least about 100 cm (39 inches), and typically about 180 meters (600 feet). The exact width and length will depend on the substrate textured and the requirements of any machine being used for the texturing process. In addition, the abrasive article could be in the form of a sheet, disc, or endless belt, depending again on the substrate and on any machine being used.
Abrasive Particles
The abrasive particles used in the method ofthe present invention typically have an average particle size ranging from about 0.01 to 30 micrometers, usually between about 0.05 to 10 micrometers, and preferably between 0.1 to 5 micrometers, particularly 1, 2, and 3 micrometer average particle size. It is preferred that the abrasive particles have a Mohs' hardness of at least about 8, more preferably above 9. Examples of abrasive particles include fused aluminum oxide (which includes brown aluminum oxide, heat treated aluminum oxide, and white aluminum oxide), ceramic aluminum oxide, silicon carbide including green silicon carbide, chromia, alumina zirconia, diamond, iron oxide, titanium diboride, boron carbide, ceria, cubic boron nitride, boron carbide, garnet, and combinations thereof. Aluminum oxide is the preferred material for metal coated substrates, whereas diamond is preferred for glass or ceramic substrates.
The abrasive particle can be irregular or precisely shaped. Shaped abrasive particles, include for example, thin bodies having geometrical faces of triangles, squares, or the like, three-dimensional shapes such as pyramids, truncated pyramids, prisms, and filamentary or rod shapes. Examples of shaped abrasive particles are taught in U.S. Patent Nos. 5,090,968 (Pellow); 5,201,916 (Berg et al.); and 5,304,331 (Leonard et al.), and co-pending USSN 08/085,638 (Holmes et al.) filed 30 June 1993.
It is within the scope ofthe invention to have one region ofthe abrasive coating having one abrasive particle type, such as fused aluminum oxide, and another region having a different abrasive particle, such as agglomerates or ceramic aluminum oxide. As stated above, the term "abrasive particles" encompasses single abrasive particles and abrasive agglomerates. Abrasive agglomerates are further described in U.S. Patent Nos. 4,311,489 (Kressner); 4,652,275 (Bloecher et al.); and 4,799,939 (Bloecher et al.).
The abrasive particles can have a surface coating which may increase adhesion to the binder, alter the abrading characteristics ofthe abrasive particle and the like. Examples of surface coatings include coupling agents, halide salts, metal oxides including silica, refractory metal nitrides, refractory metal carbides and the like.
Binders
Binders for use in the present invention can be any binder conventionally known for abrasive articles. The binders can be thermosetting or thermoplastic. They can be thermal or radiation curable. Preferred binders includes phenolic resin, epoxies, polyesters, polyurethanes, and urea-formaldehyde resins. The same binder can be used for the at least two abrasive regions, or the binder may differ, and thus provide a different abrasive nature. Typically, the ratio of binder to abrasive particles is usually between about 5: 1 to 1 : 10, more typically 2: 1 to 1 :5, although higher and lower ratios are also usable. Altering the binder to abrasive particles ratio changes the abrasive nature ofthe abrasive coating. Fillers
Fillers, when added to an abrasive coating, are known to affect the abrading characteristics of the coating. Examples of fillers known particularly for the effect on erodability include, but are not limited to, alumina bubbles, polymer spheres, clay bubbles, gypsum, coral, coquina, and oolite. Other examples of useful fillers for this invention include: metal carbonates (such as calcium carbonate (chalk, calcite, marl, travertine, marble, and limestone), calcium magnesium carbonate, sodium carbonate, magnesium carbonate), silica (such as quartz, glass beads, glass bubbles, and glass fibers), silicates (such as talc, clays (montmorillonite), feldspar, mica, calcium silicate, calcium metasilicate, sodium aluminosilicate, and sodium silicate), metal sulfates (such as calcium sulfate, barium sulfate, sodium sulfate, aluminum sodium sulfate, and aluminum sulfate), gypsum, vermiculite, wood flour, aluminum trihydrate, carbon black, metal oxides (such as calcium oxide (lime), aluminum oxide, and titanium dioxide), and metal sulfites (such as calcium sulfite). Fillers also include antistatic agents such as carbon black, graphite, vanadium oxide, and humectants.
The term "filler" also encompasses materials that are known in the abrasive industry as grinding aids. A grinding aid is defined as particulate material that the addition of which has a significant effect on the chemical and physical processes of abrading which results in improved performance. Examples of chemical groups of grinding aids include waxes, organic halide compounds, halide salts and metals and their alloys. The organic halide compounds will typically break down during abrading and release a halogen acid or a gaseous halide compound. Examples of such materials include chlorinated waxes like tetrachloronaphthalene, pentachloronaphthalene; and polyvinyl chloride. Examples of halide salts include sodium chloride, potassium cryolite, sodium cryolite, ammonium cryolite, potassium tetrafluoroborate, sodium tetrafluoroborate, silicon fluorides, potassium chloride, magnesium chloride. Examples of metals include, tin, lead, bismuth, cobalt, antimony, cadmium, iron, and titanium. Other miscellaneous grinding aids include sulfur, organic sulfur compounds, graphite, and metallic sulfides.
The coating may further include additives such as dyes, pigments, lubricants, plasticizers, coupling agents, surfactants, wetting agents, antistatic agents, and the like.
Backing
Examples of typical abrasive backings include polymeric film
(including primed polymeric film), cloth (including greige cloth), paper, vulcanized fiber, thermoplastics, nonwovens, metal (including metal substrates, metal foils, and the like), and treated versions thereof, and combinations thereof. Primed polymeric film and nonwoven materials are preferred backings.
Objects and advantages of this invention are further illustrated by the following examples, but the particular materials and amounts thereof recited in these examples, as well as other conditions and details, should not be construed to unduly limit this invention.
Examples The following non-limiting examples will further illustrate the invention. All parts and percentages are by weight unless otherwise indicated. The following abbreviations are used throughout:
SCA2 silane coupling agent, gamma-glycidoxypropyl trimethoxysilane, commercially available from Union Carbide under the trade designation "A- 187";
WAO white aluminum oxide;
MEK methyl ethyl ketone;
TOL toluene;
PR3 polyester resin, commercially available from Shell Chemical Co. under the trade designation "3300"; SDS sodium diamylsulfosuccinate, commercially available from
American Cyanamid under the trade designation " Aerosol
AY 100", POL polyol, commercially available from Monsanto under the trade designation "RJ 100",
TDI polyisocyanurate of toluene diisocyanate commercially available from Miles under the trade designation "Desmodur
IL", CAT dibutyl tin dialaurate commercially available from Cardinal Chemical Co under the trade designation "D-22"
Texturing Procedure
For the Texturing Procedure, a model 800C HDF Disk Burnisher, manufactured by Exclusive Design Co , San Mateo, CA, was used The thin film disk substrate was a nickel/phosphorus (NiP) plated aluminum disk (95 mm diameter) rotated at 200 rpm The abrasive article ofthe present invention was cut into the width as described for each Example, having an extended length Rolls ofthe abrasive strip were installed on a tape cassette that had a supply reel with the unused abrasive article and a take-up reel with the used abrasive article Two sets of abrasive tape cassettes were tested One cassette was used to texture the top surface ofthe rigid disk, and the other cassette was used to texture the bottom surface of the rigid disk The feed rate ofthe abrasive tape was 30 5 cm/min During the texturing process an aqueous coolant mist was dripped onto a cleaning fabric which was applied to the surface ofthe rigid disk to transfer the aqueous coolant to the surface ofthe disk The aqueous coolant consisted of a 5% by weight solution of RECOOL 85, commercially available from Mangill Chemical Co Two cleaning tape cassettes (Type TJ Cleaning Tape, manufacture by Thomas E West Co ) were also used in this test One cassette was used to clean the top surface ofthe rigid disk, and the other was used to clean the bottom surface ofthe rigid disk At the surfaces of the rigid disk, the abrasive tapes and cleaning tapes were passed over a Shore A 50 durometer elastomer roller having a diameter of 50 mm which was not oscillated. The force between the roller and abrasive to the disk was about 8.8 kg. The endpoint ofthe test was 20 seconds. The surface ofthe textured rigid disk was then measured using a WYKO interferometer using a 40X objective to determine the surface properties, Ra, of each sample.
Comparative Example A was a conventional 2 micrometer aluminum oxide lapping film on 51 micrometer thick polyester terephthalate backing, commercially available from 3M Company, St. Paul, MN, under the trade designation "TR3 IMPERIAL Lapping Film".
For Example 1 , a commercially available 2 micrometer aluminum oxide abrasive ("2μ 28 IQ W/D Production Polishing Paper" from 3M) was slit to 0.635 cm width and laminated to a 25 micrometer thick polyester teraphthalate film directly along side a 3.49 cm wide strip of commercially available 1 micrometer aluminum oxide abrasive (" 1 μ 281 Q W/D Production Polishing Paper" from 3M).
For Example 2, a 0.635 cm wide strip of commercially available 2 micrometer aluminum oxide abrasive ("2μι 281 Q W/D Production Polishing Paper" from 3M) was laminated to a 5 cm wide strip of 178 micrometer thick nonwoven backing (commercially available from Hollingsworth & Vose). Thus, 4.365 cm ofthe width of the strip had no abrasive coating thereon.
For Example 3, a 3.49 cm wide strip ofthe material of Comparative Example A was used. A portion of this strip, 2.86 cm, was calendered in order that 2.86 cm of this had a less aggressive nature than the remaining 0.63 cm wide uncalendered portion.
Table 1 below reports the Ra of Examples 1 through 3 compared to Comparative Example A when tested according to the Texturing Procedure. For all Examples, the more aggressive portion ofthe Example was placed at the inner diameter of the disk to be textured. Surface roughness was checked at 9 millimeters (landing zone) and 15 millimeters (memory area) from the inner lip of the textured disk, and is reported in Angstroms.
Table 1
Example Landing Memory Zone Ra Zone Ra
Comparative A 32.8 31.8
1 29.6 27.3
2 32.0 19.7
3 32.6 29.0
Examples 4 through 6 were produced according to the Procedure for Making a Lapping Abrasive Article. Two abrasive slurries, A (for the landing zone) and B (for the memory zone), were mixed by the following procedure. 120.7 parts 50/50 MEK/TOL; 47.5 parts PR3; 5.2 parts SCA2; 1.6 parts SDS; and 200.0 parts WAO were combined in an alumina ball mill (with glass milling media) and milled for 16 hours. To this was added 46.9 parts MEK/TOL; 1 17.6 parts PR3; 1 1.6 parts POL; 22.9 parts TDI; and 0.69 part CAT. Abrasive slurry A had a WAO average abrasive particle size of 3 micrometers, and abrasive slurry B had a WAO average abrasive particle size of 2 micrometers. The abrasive slurries A and B were coated side by side to provide abrasive regions A and B on three different backing to provide Examples 4, 5, and 6 by the following method.
The abrasive slurries were coated onto the backing with a knife coater having a 51 micrometer gap between the knife and the backing. A dividing dam having two compartments was placed behind (upweb) from and in contact with the knife, and the abrasive slurries were poured into the compartments ofthe dam. The abrasive slurries were physically separated by the dam until they came into contact with the knife. The backing was pulled in the machine direction and the abrasive slurries passed under the knife and abrasive precursor coatings were formed. The abrasive precursor coatings, were then cured in a conventional oven at 121 °C (250°F) for 5 minutes followed by 16 hours at 49°C ( 120°F) to foπn abrasive coatings. The width of abrasive region A was 0.635 cm (0.25 inch) and the width of abrasive region B was 2.84 cm ( 1.12 inch).
Example 4 was coated on a 51 micrometer thick polyester backing; Example 5 was coated on a 120 micrometer thick paper backing; Example 6 was coated on a 178 micrometer thick nonwoven backing (commercially available from Hollingsworth & Vose).
Examples 4 through 6 were tested on rigid disks according to the Texturing Procedure and the results are shown in Table 2. AH Ra results are listed in Angstroms.
Table 2
Example Landing Memory Zone Zone Ra Ra
4 30.7 20.8
5 24.1 19.6
6 39.6 32.3
Tables 1 and 2 above show the surface texture of a thin film disk after a single texturing step using a single abrasive article. Until the abrasive article of this invention, at least two separate abrasive articles were needed to provide the difference in Ra from the landing zone area ofthe disk to the memory area. Various modifications and alterations of this invention will become apparent to those skilled in the art without departing from the scope and spirit of this invention, and it should be understood that this invention is not to be unduly limited to the illustrative embodiments set forth herein.

Claims

What is Claimed is:
1. A method of texturing a surface of a rigid disk to simultaneously impart a first area on said surface having a first surface finish and a second area on said surface having a second surface finish, said method comprising the steps of:
(a) contacting said surface with a coated abrasive article comprising a first region having a first abrasive nature and a second region having a second abrasive nature, both regions bonded to a backing, said first abrasive nature being different than said second abrasive nature; and
(b) moving at least one of said coated abrasive article or said rigid disk with respect to each other under conditions to impart said first and second surface finishes.
2. A method according to claim 1, wherein said rigid disk is a metal coated rigid disk, a glass rigid disk, or ceramic rigid disk.
3. A method according to claim 1, wherein said first region has an average abrasive particle size at least 10% larger than said second region.
4. A method according to claim 4, wherein said first region has an average abrasive particle size at least 25% larger than said second region.
5. A method according to claim 1, wherein said coated abrasive article is a tape having an extended length and said first region and said second region are parallel along said length.
6. A method according to claim 1, wherein said moving comprises spinning said rigid disk to provide a direction of travel while said coated abrasive article is perpendicular to said direction of travel.
7. A method according to claim 9, wherein said moving further comprises oscillating said coated abrasive article perpendicular to said direction of travel.
8. A method according to claim 9, wherein said contacting imparts circumferential scratches in said surface.
9. A method according to claim 1 1, wherein said circumferential scratches have an Ra between about 20 and 60 Angstroms.
10. The rigid disk made according to the method of claim 1.
PCT/US1996/011267 1995-08-11 1996-07-03 Method of texturing a substrate using an abrasive article having multiple grit particles WO1997006927A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9509266A JPH11510743A (en) 1995-08-11 1996-07-03 Method of texturing a support using a polishing tool containing a plurality of grit particles
EP96924346A EP0843612A1 (en) 1995-08-11 1996-07-03 Method of texturing a substrate using an abrasive article having multiple grit particles

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/514,491 US5645471A (en) 1995-08-11 1995-08-11 Method of texturing a substrate using an abrasive article having multiple abrasive natures
US08/514,491 1995-08-11

Publications (1)

Publication Number Publication Date
WO1997006927A1 true WO1997006927A1 (en) 1997-02-27

Family

ID=24047398

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1996/011267 WO1997006927A1 (en) 1995-08-11 1996-07-03 Method of texturing a substrate using an abrasive article having multiple grit particles

Country Status (6)

Country Link
US (1) US5645471A (en)
EP (1) EP0843612A1 (en)
JP (1) JPH11510743A (en)
KR (1) KR19990036285A (en)
CN (1) CN1192713A (en)
WO (1) WO1997006927A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016193534A1 (en) * 2015-06-05 2016-12-08 Kwh Mirka Ltd An abrasive product and a method for manufacturing such

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5791969A (en) * 1994-11-01 1998-08-11 Lund; Douglas E. System and method of automatically polishing semiconductor wafers
US5798164A (en) * 1995-06-23 1998-08-25 Stormedia, Inc. Zone textured magnetic recording media
US6062958A (en) * 1997-04-04 2000-05-16 Micron Technology, Inc. Variable abrasive polishing pad for mechanical and chemical-mechanical planarization
US5902172A (en) * 1997-08-22 1999-05-11 Showa Aluminum Corporation Method of polishing memory disk substrate
US6081411A (en) * 1998-06-29 2000-06-27 International Business Machines Corporation Thin film disk media using optimum surface orientation to written data tracks
US6193588B1 (en) 1998-09-02 2001-02-27 Micron Technology, Inc. Method and apparatus for planarizing and cleaning microelectronic substrates
US6176763B1 (en) 1999-02-04 2001-01-23 Micron Technology, Inc. Method and apparatus for uniformly planarizing a microelectronic substrate
US6491570B1 (en) * 1999-02-25 2002-12-10 Applied Materials, Inc. Polishing media stabilizer
KR20060101791A (en) * 1999-04-23 2006-09-26 쓰리엠 이노베이티브 프로퍼티즈 캄파니 Method for grinding glass
JP3097913B1 (en) * 1999-07-01 2000-10-10 日本ミクロコーティング株式会社 Mirror finish method for glass substrate
US6629875B2 (en) * 2000-01-28 2003-10-07 Accretech Usa, Inc. Machine for grinding-polishing of a water edge
US6290572B1 (en) 2000-03-23 2001-09-18 Micron Technology, Inc. Devices and methods for in-situ control of mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies
JP2001341058A (en) * 2000-03-29 2001-12-11 Nihon Micro Coating Co Ltd Method of machining surface of glass substrate for magnetic disk and abrasive grain suspension for machining
US6612901B1 (en) 2000-06-07 2003-09-02 Micron Technology, Inc. Apparatus for in-situ optical endpointing of web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies
US6428386B1 (en) 2000-06-16 2002-08-06 Micron Technology, Inc. Planarizing pads, planarizing machines, and methods for mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies
US6520833B1 (en) * 2000-06-30 2003-02-18 Lam Research Corporation Oscillating fixed abrasive CMP system and methods for implementing the same
US6561884B1 (en) 2000-08-29 2003-05-13 Applied Materials, Inc. Web lift system for chemical mechanical planarization
US6447369B1 (en) 2000-08-30 2002-09-10 Micron Technology, Inc. Planarizing machines and alignment systems for mechanical and/or chemical-mechanical planarization of microelectronic substrates
US6609947B1 (en) 2000-08-30 2003-08-26 Micron Technology, Inc. Planarizing machines and control systems for mechanical and/or chemical-mechanical planarization of micro electronic substrates
US6800020B1 (en) * 2000-10-02 2004-10-05 Lam Research Corporation Web-style pad conditioning system and methods for implementing the same
US6482072B1 (en) 2000-10-26 2002-11-19 Applied Materials, Inc. Method and apparatus for providing and controlling delivery of a web of polishing material
US6592439B1 (en) 2000-11-10 2003-07-15 Applied Materials, Inc. Platen for retaining polishing material
US6503131B1 (en) 2001-08-16 2003-01-07 Applied Materials, Inc. Integrated platen assembly for a chemical mechanical planarization system
US6866566B2 (en) * 2001-08-24 2005-03-15 Micron Technology, Inc. Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces
US6616516B1 (en) * 2001-12-13 2003-09-09 Lam Research Corporation Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates
JP2003212603A (en) * 2002-01-18 2003-07-30 Nippon Sheet Glass Co Ltd Method for manufacturing glass substrate for information recording medium
US7070703B2 (en) * 2002-05-23 2006-07-04 Hitachi Global Storage Technologies Netherlands B.V. Process for producing glass disk substrates for magnetically recordable data storage disks
US7341502B2 (en) 2002-07-18 2008-03-11 Micron Technology, Inc. Methods and systems for planarizing workpieces, e.g., microelectronic workpieces
CN100500379C (en) * 2002-12-26 2009-06-17 Hoya株式会社 Glass substrate for information recording media and its fabricating method
JP2004265461A (en) * 2003-01-31 2004-09-24 Nippon Sheet Glass Co Ltd Glass substrate for information recording medium and its manufacturing method
US7086927B2 (en) 2004-03-09 2006-08-08 Micron Technology, Inc. Methods and systems for planarizing workpieces, e.g., microelectronic workpieces
US20050241239A1 (en) * 2004-04-30 2005-11-03 Chien-Min Sung Abrasive composite tools having compositional gradients and associated methods
US20070095367A1 (en) * 2005-10-28 2007-05-03 Yaxin Wang Apparatus and method for atomic layer cleaning and polishing
US8083820B2 (en) * 2006-12-22 2011-12-27 3M Innovative Properties Company Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same
US8157914B1 (en) 2007-02-07 2012-04-17 Chien-Min Sung Substrate surface modifications for compositional gradation of crystalline materials and associated products
US7799600B2 (en) * 2007-05-31 2010-09-21 Chien-Min Sung Doped diamond LED devices and associated methods
US7758403B2 (en) * 2007-11-16 2010-07-20 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for lapping workpieces with soluble abrasives
MY150551A (en) * 2008-07-03 2014-01-30 3M Innovative Properties Co Fixed abrasive particles and articles made therefrom
EP2327088B1 (en) 2008-08-28 2019-01-09 3M Innovative Properties Company Structured abrasive article, method of making the same, and use in wafer planarization
CN102458770A (en) * 2009-04-17 2012-05-16 3M创新有限公司 Metal particle transfer article, metal modified substrate, and method of making and using the same
US9011211B2 (en) * 2010-03-29 2015-04-21 Christian T. Zyniecki Sandpaper and method of use thereof
JP5793014B2 (en) * 2011-07-21 2015-10-14 株式会社不二製作所 Side polishing method for hard brittle material substrate
US8727832B2 (en) * 2011-09-27 2014-05-20 HGST Netherlands B.V. System, method and apparatus for enhanced cleaning and polishing of magnetic recording disk
CN104369120B (en) * 2014-09-15 2016-11-09 西安德谦新材料科技发展有限公司 A kind of diamond implanted based on grinding unit or CBN grinding tool preparation method
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US9776361B2 (en) * 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
WO2016060712A1 (en) 2014-10-17 2016-04-21 Applied Materials, Inc. Cmp pad construction with composite material properties using additive manufacturing processes
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
CN108290267B (en) 2015-10-30 2021-04-20 应用材料公司 Apparatus and method for forming polishing article having desired zeta potential
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
US11040430B2 (en) * 2016-02-29 2021-06-22 Charles Neff Texture pattern for abrasive tool
JP7118065B2 (en) * 2017-02-24 2022-08-15 カリフォルニア インスティチュート オブ テクノロジー Ooid-containing microabrasive composition
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (en) 2017-08-07 2019-02-14 Applied Materials, Inc. Abrasive delivery polishing pads and manufacturing methods thereof
US10835920B2 (en) * 2018-08-03 2020-11-17 Indian Institute Of Technology Ropar Technology and process for coating a substrate with swarf particles
KR20210042171A (en) 2018-09-04 2021-04-16 어플라이드 머티어리얼스, 인코포레이티드 Formulations for advanced polishing pads
US11813712B2 (en) 2019-12-20 2023-11-14 Applied Materials, Inc. Polishing pads having selectively arranged porosity
US11806829B2 (en) 2020-06-19 2023-11-07 Applied Materials, Inc. Advanced polishing pads and related polishing pad manufacturing methods
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH377218A (en) * 1962-04-29 1964-04-30 Willy Burkhard Et Robert Degou Method of finishing the surface of timepieces
US4565034A (en) * 1984-01-03 1986-01-21 Disco Abrasive Systems, Ltd. Grinding and/or cutting endless belt
US4762534A (en) * 1985-11-27 1988-08-09 Hitachi, Ltd. Method of producing magnetic disk
DE4200350A1 (en) * 1991-01-09 1992-07-16 Fuji Photo Film Co Ltd Abrasive coated belts - comprise flexible substrate and abrasive agent layer contg. three types of abrasive grains of specified sizes and hardnesses
FR2699417A1 (en) * 1992-12-17 1994-06-24 Skid Sa Endless belt with different abrasives to sand ski

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US449930A (en) * 1891-04-07 dubey
US875936A (en) * 1907-07-30 1908-01-07 Ezra F Landis Abrading material.
US4347689A (en) * 1980-10-20 1982-09-07 Verbatim Corporation Method for burnishing
CA1266568A (en) * 1984-05-09 1990-03-13 Minnesota Mining And Manufacturing Company Coated abrasive product incorporating selective mineral substitution
CA1266569A (en) * 1984-05-09 1990-03-13 Minnesota Mining And Manufacturing Company Coated abrasive product incorporating selective mineral substitution
US4644703A (en) * 1986-03-13 1987-02-24 Norton Company Plural layered coated abrasive
US4930266A (en) * 1988-02-26 1990-06-05 Minnesota Mining And Manufacturing Company Abrasive sheeting having individually positioned abrasive granules
US4951423A (en) * 1988-09-09 1990-08-28 Cynthia L. B. Johnson Two sided abrasive disc with intermediate member
US5167096A (en) * 1990-02-26 1992-12-01 Hmt Technology Corporation Method for texturing a magnetic disc substrate
JPH04141377A (en) * 1990-10-03 1992-05-14 Tokin Corp Surface polishing tape and manufacture thereof
JPH04210383A (en) * 1990-12-13 1992-07-31 Tokin Corp Surface polishing tape for magnetic recording medium and manufacture thereof
US5166006A (en) * 1991-06-03 1992-11-24 Hmt Technology Corporation Textured thin-film substrate and method
US5437754A (en) * 1992-01-13 1995-08-01 Minnesota Mining And Manufacturing Company Abrasive article having precise lateral spacing between abrasive composite members
US5307593A (en) * 1992-08-31 1994-05-03 Minnesota Mining And Manufacturing Company Method of texturing rigid memory disks using an abrasive article
JPH06155271A (en) * 1992-11-16 1994-06-03 Fuji Photo Film Co Ltd Burnishing of magnetic disc and device therefor
JPH06278037A (en) * 1993-03-31 1994-10-04 Tokyo Jiki Insatsu Kk Abrasive film used for texturing magnetic disk

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH377218A (en) * 1962-04-29 1964-04-30 Willy Burkhard Et Robert Degou Method of finishing the surface of timepieces
US4565034A (en) * 1984-01-03 1986-01-21 Disco Abrasive Systems, Ltd. Grinding and/or cutting endless belt
US4762534A (en) * 1985-11-27 1988-08-09 Hitachi, Ltd. Method of producing magnetic disk
DE4200350A1 (en) * 1991-01-09 1992-07-16 Fuji Photo Film Co Ltd Abrasive coated belts - comprise flexible substrate and abrasive agent layer contg. three types of abrasive grains of specified sizes and hardnesses
FR2699417A1 (en) * 1992-12-17 1994-06-24 Skid Sa Endless belt with different abrasives to sand ski

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016193534A1 (en) * 2015-06-05 2016-12-08 Kwh Mirka Ltd An abrasive product and a method for manufacturing such
CN107690373A (en) * 2015-06-05 2018-02-13 Kwh米尔卡有限公司 Abrasive product and its manufacture method
RU2717763C2 (en) * 2015-06-05 2020-03-25 Квх Мирка Лтд Abrasive product and method for production thereof
US10981260B2 (en) 2015-06-05 2021-04-20 Kwh Mirka Ltd Abrasive product and a method for manufacturing such

Also Published As

Publication number Publication date
JPH11510743A (en) 1999-09-21
EP0843612A1 (en) 1998-05-27
KR19990036285A (en) 1999-05-25
US5645471A (en) 1997-07-08
CN1192713A (en) 1998-09-09

Similar Documents

Publication Publication Date Title
US5645471A (en) Method of texturing a substrate using an abrasive article having multiple abrasive natures
EP0812456B1 (en) Method of texturing a substrate using a structured abrasive article
EP0846041B1 (en) Method of making a coated abrasive article having multiple abrasive natures
US6080215A (en) Abrasive article and method of making such article
US5307593A (en) Method of texturing rigid memory disks using an abrasive article
WO1997006926A9 (en) Method of making a coated abrasive article having multiple abrasive natures
AU684776B2 (en) Method of providing a smooth surface on a substrate
CN106457526B (en) Abrasive material having multiple abrasive elements of different sets and tool for making same
US6217413B1 (en) Coated abrasive article, method for preparing the same, and method of using a coated abrasive article to abrade a hard workpiece
US6475253B2 (en) Abrasive article and method of making
MXPA97002267A (en) Abrasive article coated, method for preparing it and method for using an abrasive article coated to submit abrasion a working piece d
EP1038637A2 (en) Abrasive article and method of making
US5586926A (en) Method for texturing a metallic thin film
KR101287501B1 (en) Abrasive product and method for the production thereof
US5695386A (en) Cleaning method using abrasive tape
US9403258B2 (en) Method for forming an abrasive lapping plate
JPH06278042A (en) Abrasive material
JPH06190736A (en) Texturing film for magnetic disk and method for it
JPH0957633A (en) Polishing tape
JPH07328932A (en) Abrasive tape and manufacture thereof

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 96196176.7

Country of ref document: CN

AK Designated states

Kind code of ref document: A1

Designated state(s): CN JP KR SG

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
ENP Entry into the national phase

Ref document number: 1997 509266

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 1996924346

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 1019980700953

Country of ref document: KR

WWP Wipo information: published in national office

Ref document number: 1996924346

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 1019980700953

Country of ref document: KR

WWR Wipo information: refused in national office

Ref document number: 1996924346

Country of ref document: EP

WWW Wipo information: withdrawn in national office

Ref document number: 1996924346

Country of ref document: EP

WWW Wipo information: withdrawn in national office

Ref document number: 1019980700953

Country of ref document: KR