WO1997034171A2 - Microlens scanner for microlithography and wide-field confocal microscopy - Google Patents
Microlens scanner for microlithography and wide-field confocal microscopy Download PDFInfo
- Publication number
- WO1997034171A2 WO1997034171A2 PCT/US1997/002949 US9702949W WO9734171A2 WO 1997034171 A2 WO1997034171 A2 WO 1997034171A2 US 9702949 W US9702949 W US 9702949W WO 9734171 A2 WO9734171 A2 WO 9734171A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microlens
- aperture
- array
- image
- projection
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0036—Scanning details, e.g. scanning stages
- G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP09532621A JP2001500628A (en) | 1996-02-28 | 1997-02-20 | Microlens scanner for microlithography and wide field confocal microscope |
AU19751/97A AU1975197A (en) | 1996-02-28 | 1997-02-20 | Microlens scanner for microlithography and wide-field confocal microscopy |
EP97907857A EP0991959B1 (en) | 1996-02-28 | 1997-02-20 | Microlens scanner for microlithography and wide-field confocal microscopy |
DE69729659T DE69729659T2 (en) | 1996-02-28 | 1997-02-20 | MIKROLINSEN RASTER DEVICE FOR MICROLITHOGRAPHY AND FOR CONFOCUS MICROSCOPY WITH LARGE RECORDING FIELD |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1243496P | 1996-02-28 | 1996-02-28 | |
US60/012,434 | 1996-02-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1997034171A2 true WO1997034171A2 (en) | 1997-09-18 |
WO1997034171A3 WO1997034171A3 (en) | 1998-02-26 |
Family
ID=21754960
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1997/002949 WO1997034171A2 (en) | 1996-02-28 | 1997-02-20 | Microlens scanner for microlithography and wide-field confocal microscopy |
Country Status (6)
Country | Link |
---|---|
US (1) | US6133986A (en) |
EP (1) | EP0991959B1 (en) |
JP (1) | JP2001500628A (en) |
AU (1) | AU1975197A (en) |
DE (1) | DE69729659T2 (en) |
WO (1) | WO1997034171A2 (en) |
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Also Published As
Publication number | Publication date |
---|---|
DE69729659D1 (en) | 2004-07-29 |
WO1997034171A3 (en) | 1998-02-26 |
DE69729659T2 (en) | 2005-06-23 |
US6133986A (en) | 2000-10-17 |
EP0991959A4 (en) | 2000-04-12 |
AU1975197A (en) | 1997-10-01 |
EP0991959B1 (en) | 2004-06-23 |
EP0991959A2 (en) | 2000-04-12 |
JP2001500628A (en) | 2001-01-16 |
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