WO1997034447A1 - Organic electroluminescent element and organic electroluminescent display - Google Patents

Abstract

An organic electroluminescent element having a support substrate (1) on which a lower electrode (2), an organic layer (3) and an opposed electrode (4) are laid layer upon layer in this order. The lower electrode has a resistivity of 0.5 x 10-4 Φ.cm or greater. A wiring layer line (5) is connected to the lower electrode (2) and embedded in a flattened layer (6) between the support substrate (1) and the lower electrode (2) or in the support substrate (1). The organic electroluminescent element and an organic EL display are provided that can reduce the resistance value of the lower electrode and prevent not only the disconnection of the opposed electrode by eliminating a difference in level due to the wiring layer line but also a crosstalk.

Description

 Akira Itoda Organic Electroluminescence Element and Organic Electroluminescence Display

 The present invention relates to an organic electroluminescence element (hereinafter, may be abbreviated as an organic EL element) and an organic EL display device. More specifically, organic EL devices and organic EL devices that are preferably used for various displays for information industry equipment and do not cause a voltage drop due to wiring or a delay in driving response due to electrode resistance are mainly used. Related to EL display device. Background art

 An organic EL device basically includes a lower electrode, an organic light emitting layer, and a counter electrode. When the lower electrode and the counter electrode are formed into a matrix, pixels are formed at the intersections, and a display can be formed by arranging a plurality of pixels.

By the way, in recent years, display devices (displays) using organic EL elements tend to have higher definition and larger size. In order to achieve higher definition, it is desired to reduce the number of pixels to several hundreds of square meters or less. In this case, the scanning electrode lines and signal electrode lines constituting the display become finer, and accordingly, the resistance becomes high, and in some cases, it becomes several kΩ or more. Also, in a high-definition display, the number of scanning electrode lines and the number of signal electrode lines each exceed 100, but in this case, the duty must be driven by the pulse of the reciprocal of the number of scanning electrode lines. Then, a high current pulse flows on the scanning electrode wire. At this time, if the scanning electrode lines and signal electrode lines have high resistance, voltage drop due to wiring and electrode resistance There is a problem that a response delay at the time of driving is caused. That is, the voltage drop causes brightness unevenness in the display, and the response delay during driving makes it difficult to display a fast-moving screen when producing a high-definition display. Therefore, there was a problem that the display was restricted.

 To address such problems, for example, the following organic EL devices have been proposed.

 Japanese Patent Application Laid-Open No. 418197/1991 discloses an organic EL device in which a metal wire is connected to a transparent electrode to reduce the resistance of the transparent electrode.

 Also, Japanese Patent Application Laid-Open No. 5-307977 discloses an organic EL device in which a metal having a small work function is similarly disposed on a transparent electrode to reduce the resistance of the transparent electrode. I have.

 Further, Japanese Patent Publication No. 5-76155 discloses an example in which an auxiliary metal film is used in an EL element. A special insulating film is placed on the auxiliary metal film to prevent dielectric breakdown.

 However, in the organic EL devices disclosed in JP-A-4-82197 and JP-A-5-309797, a step formed by a metal wire used as an auxiliary is not sufficient. As a result, there was a problem that the counter electrode was disconnected and display defects were generated. In addition, since minute charges are injected from the metal wiring to the organic layer of the organic EL element, for example, the hole injection layer, there is a problem that so-called crosstalk is easily caused.

 Also, in the inorganic EL device disclosed in Japanese Patent Publication No. 5-76155, there is also a problem that a step is generated due to the thickness of the auxiliary metal film and the insulating film, and that the counter electrode is disconnected and cut off. Was.

The present invention has been made in view of the above problems, and has been made to reduce a resistance value of a transparent electrode (lower electrode) and to prevent disconnection of a counter electrode by eliminating a step due to a wiring layer, Another object of the present invention is to provide an organic EL device capable of preventing crosstalk. The present invention also provides a display device which uses an organic EL element having the above-mentioned characteristics and has a high definition, a large size, and a uniform emission by extremely reducing the resistance value of a scanning electrode line. It is an object of the present invention to provide an organic EL display device.

 The present inventors have conducted intensive studies to solve the above-mentioned problems, and as a result, have found that the above-mentioned problems can be solved by introducing a specific configuration to the organic EL device. The present invention has been completed based on such findings.

 That is, the gist of the present invention is as follows.

[1] An organic electroluminescent device having a lower electrode, an organic layer including an organic light-emitting layer, and a counter electrode laminated in this order on a support substrate, wherein the lower electrode has a size of 0.5 × 1 0 - are those having ⁴ Q * cm or more resistivity, the lower electrode of the brackets are connected wiring layer because it reduces the resistance value, further the wiring layer, the supporting substrate and the lower electrode An organic electroluminescent element characterized by being buried in a flattening layer provided therebetween or in a support substrate.

[2] The wiring layer is characterized by being embedded in a flattening layer provided between the support substrate and the lower electrode or in the support substrate and covered by the lower electrode. The organic electroluminescence element according to the above [1].

[3] An organic electroluminescence device having a lower electrode, an organic layer including an organic light emitting layer, and a counter electrode laminated in this order on a support substrate, wherein the lower electrode is 0.5 X 10-4 It has a resistivity of Q * cm or more. Is connected because of the wiring layer, further ⁴ gamma individual wiring layer, and wherein the Nalco covered by planarized interlayer insulating film is provided between the including organic layers The organic light-emitting layer Organic electroluminescent element.

[4] The organic electroluminescence device according to any one of [1] to [3], wherein the lower electrode is a transparent electrode.

[5] The above-mentioned [1] to [1], wherein the planarizing layer or the interlayer insulating film is an oxide film formed by oxidizing a surface of a metal film forming a wiring layer.

 The organic electroluminescence device according to any one of [3].

[6] The organic electroluminescent device according to [3], wherein the cross-sectional shape of the interlayer insulating film is trapezoidal (tapered).

[7] The organic electroluminescent device according to any one of [1] to [3], wherein the lower electrode and the counter electrode are formed by forming an XY matrix. Sensing element.

[8] The organic electroluminescent device according to any one of [1] to [3], wherein the resistance of the electrode line reduced in resistance by the wiring layer is 5 kΩ or less. Sensing element.

[9] The organic element according to [7], wherein the XY matrix formed by the lower electrode and the counter electrode is a double, triple, or quadruple matrix. Lonore luminescence element.

[10] In an organic electroluminescence element in which a lower electrode, an organic layer including an organic light emitting layer, and a counter electrode are laminated in this order on a supporting substrate, a wiring layer is connected to the lower electrode. , Width of wiring layer (short side Is about 20 to 150% of the width (length of the short side) of the lower electrode, and the wiring layer is embedded in the planarization layer provided between the support substrate and the lower electrode. An organic EL luminescence element characterized by this.

[11] The organic EL device according to [10], wherein the lower electrode and the counter electrode form an XY matrix.

[12] The organic electroluminescence device according to [10] or [11], wherein the resistance value of the wiring layer per unit length (1 cm) is smaller than 100 ohms.

[13] A plurality of scanning electrode lines and a plurality of signal electrode lines intersect, an emission pixel is provided in the intersection area, and an organic electroluminescence device in which the emission pixels are arranged in a plurality. In the display device, the light-emitting pixel is an organic electroluminescent element in which a lower electrode, an organic layer including an organic light-emitting layer, and a counter electrode are stacked in this order on a supporting substrate, and a scanning electrode line is formed of a lower electrode. The wiring layer is buried in a planarization layer provided between the support substrate and the lower electrode, and the signal electrode line includes a counter electrode. An organic electroluminescence display device characterized by the following.

[14] The organic electroluminescent device according to the above [13], wherein the width (short side length) of the wiring layer is 20 to 150% of the width (short side length) of the lower electrode. Sense display.

[15] The organic electroluminescence according to [13] or [14], wherein the resistance value of the wiring layer per unit length (1 cm) is smaller than 100 ohms. Display device. [16] In an organic electroluminescent device in which a lower electrode ⁶ , an organic layer including an organic light emitting layer, and a counter electrode are laminated in this order on a supporting substrate, a wiring layer is formed below the lower electrode. And the layer formed by the side layer covering the side surface of the wiring layer and the wiring layer has a trapezoidal (tapered) cross section, and the wiring layer is isolated from the organic layer by the lower electrode and the side layer. An organic electroluminescent element characterized in that:

[17] The organic electroluminescent device according to [16], wherein the lower electrode and the counter electrode form an XY matrix.

 [18] The above-mentioned [16] or [16], wherein the side layer is selected from the same material as the lower electrode layer, an insulating material, or a material in which the amount of charge injected into the organic layer is 1/50 or less of that of the lower electrode. [17] The organic electroluminescent element according to [17].

[19] A plurality of scanning electrode lines and a plurality of signal electrode lines intersect, an emission pixel is provided in the intersection area, and an organic electroluminescence light emitting device in which a plurality of the emission pixels are arranged. In the above, the luminescent pixel is an organic electroluminescent element in which a lower electrode, an organic layer including an organic luminescent layer, and a counter electrode are laminated in this order on a supporting substrate, and the scanning electrode line is a lower electrode and the lower electrode. It consists of a wiring layer connected to the lower part. The layer formed from the side layer covering the side surface of the wiring layer and the wiring layer has a trapezoidal (taper) cross section, and the wiring layer is formed of the lower electrode and the wiring layer. An organic electroluminescence display device, wherein the signal electrode line includes a counter electrode, which is separated from the organic layer by a side layer that covers the side surface.

[20] The side layer is made of the same material, insulating material, or organic as the lower electrode layer [19] The organic electroluminescence display device according to the above [19], wherein the amount of charge injected into the layer is 1 Z50 or less as compared with the lower electrode. As described above, according to the present invention, it is possible to reduce the resistance of the lower electrode, to prevent disconnection of the counter electrode, and to prevent so-called crosstalk. An element can be provided.

 Further, according to the present invention, it is possible to provide an organic EL display device capable of uniform light emission by extremely reducing the resistance value of a scanning electrode line in a display device having a high definition, a large size, and a large size. . BRIEF DESCRIPTION OF THE FIGURES

 FIG. 1 is a schematic cross-sectional view schematically showing one embodiment of the organic electroluminescence element of the first invention.

 FIG. 2 is a schematic cross-sectional view schematically showing another embodiment of the organic electroluminescent element of the first invention.

 FIG. 3 is a schematic sectional view schematically showing an example of a method for forming a wiring layer and a flattening layer in the first invention.

 FIG. 4 is a schematic cross-sectional view schematically showing one example of a method for forming a wiring layer and a flattening layer in the first invention.

 FIG. 5 is a schematic cross-sectional view schematically showing one example of a method for forming a wiring layer and a flattening layer in the first invention.

 FIG. 6 is a schematic cross-sectional view schematically showing one example of a method for forming a wiring layer and a flattening layer in the first invention.

 FIG. 7 is a schematic cross-sectional view schematically showing one example of a method for forming a wiring layer and a flattening layer in the first invention.

FIG. 8 is a schematic cross-sectional view schematically showing one embodiment of the organic electroluminescence element of the second invention. FIG. 9 is a schematic sectional view schematically showing the taper angle of the insulating film in the second invention.

 FIG. 10 is a schematic cross-sectional view schematically showing one example of a method for forming a wiring layer and an interlayer insulating film in the second invention.

 FIG. 11 is a schematic cross-sectional view schematically showing one example of a method for forming a wiring layer and an interlayer insulating film in the second invention.

 FIG. 12 is a schematic cross-sectional view schematically showing one example of a method for forming a wiring layer and an interlayer insulating film in the second invention.

 FIG. 13 is a schematic cross-sectional view schematically showing one example of a pattern of a wiring layer and a lower electrode in the present invention.

 FIG. 14 is a schematic cross-sectional view schematically showing one example of a pattern of a wiring layer and a lower electrode in the present invention.

 FIG. 15 is a schematic cross-sectional view schematically showing one example of a pattern of a wiring layer and a lower electrode in the present invention.

 FIG. 16 is a schematic sectional view schematically showing one embodiment of the organic electroluminescence element of the third invention.

 FIG. 17 is a schematic cross-sectional view schematically showing another embodiment of the organic electroluminescent device of the third invention.

 FIG. 18 is a schematic cross-sectional view schematically showing another embodiment of the organic electroluminescence element of the third invention.

 FIG. 19 is a schematic cross-sectional view schematically showing another embodiment of the organic electroluminescence element of the third invention.

 FIG. 20 is a schematic sectional view schematically showing another embodiment of the organic electroluminescent device of the third invention.

 FIG. 21 is a schematic cross-sectional view schematically showing one example of a method for forming a lower electrode, a wiring layer, and a planarization layer in the third invention.

 FIG. 22 is a schematic cross-sectional view schematically showing one example of a method for forming a lower electrode, a wiring layer, and a planarization layer in the third invention.

FIG. 23 shows the lower electrode, the wiring layer, and the planarization layer in the third invention. FIG. 4 is a schematic cross-sectional view schematically showing one example of a method for forming a semiconductor device.

 FIG. 24 is a schematic cross-sectional view schematically showing one example of a method for forming a lower electrode, a wiring layer, and a planarization layer in the third invention.

 FIG. 25 is a schematic cross-sectional view schematically showing an embodiment of the organic electroluminescent device of the fifth invention.

 FIG. 26 is a schematic cross-sectional view schematically showing one example of a method for forming a lower electrode, a wiring layer, and a side layer according to the fifth invention.

 FIG. 27 is a schematic cross-sectional view schematically showing one example of a method for forming a lower electrode, a wiring layer, and a side layer according to the fifth invention.

 FIG. 28 is a schematic cross-sectional view schematically showing one example of a method for forming a lower electrode, a wiring layer, and a side layer according to the fifth invention.

 FIG. 29 is a schematic cross-sectional view schematically showing one example of a method for forming a lower electrode, a wiring layer, and a side layer according to the fifth invention. BEST MODE FOR CARRYING OUT THE INVENTION

 Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings. The present invention is roughly classified into first to sixth inventions based on the embodiments.

 I. First Invention

 1. Basic form (Organic EL device with flattening layer: Part 1)

 In the first invention, as shown in FIG. 1 or 2, a transparent electrode (lower electrode) 2, an organic layer including an organic light emitting layer (hereinafter, may be abbreviated as an organic layer) 3, And an opposing electrode 4 laminated in this order, wherein the lower electrode 2 has a resistivity of 0.5 X 10-^ Ωcm or more. A wiring layer 5 for reducing the resistance value of the lower electrode 2 is buried in the flattening layer 6 provided between the support substrate 1 and the lower electrode 2 or in the support substrate 1.

Therefore, since the wiring layer 5 does not protrude above the lower electrode 2, there is no step due to the wiring layer 5, and the disconnection of the opposite electric wire 4 is effectively prevented. The wiring layer 5 is electrically connected to the lower electrode 2. In the present invention, since the lower electrode 2 is provided on the wiring layer 5 so as to cover it, Leakage current does not occur due to intrusion of charges from 5 into the organic layer 3, and crosstalk can be effectively prevented.

 As another embodiment of the first invention, for example, the one shown in FIG. 2 can be mentioned.

 In this embodiment, as shown in FIG. 2, the wiring layer 5 is covered with a flattening film 6, and the electrical connection between the wiring layer 5 and the lower electrode 2 is formed by a contact formed on the flattening film 6. It is going through the hall 7. Also in this embodiment, the wiring layer 5 does not protrude above the lower electrode 2, so that disconnection and cross-talk of the counter electrode 4 can be effectively prevented.

2. Components

Hereinafter, the first invention, _c (1) specifically described in the al for each component thereof the lower electrode

 In the present invention, the lower electrode is electrically connected to the wiring layer. Since a highly conductive material is used for the wiring layer, it is not essential to use a highly conductive material for the lower electrode layer.

The lower electrode layer may be an anode or a cathode. In the case of the anode, a conductive material such as a metal having a high work function (work function of 4.5 eV or more) excellent in hole injection property can be used. In addition, since the resistivity does not matter for the anode, a semiconductor can be used. Specifically, for example, metals such as gold (Au), nickel (Ni), palladium (Pd), and platinum (Pt), In—Zn—0, Zn0: A1 ( A mixture of ZnO with A1 added), In—Zn—0, SnO2: conductive oxides such as Sb (a mixture of Sb with SnO2), α— Gay, Polysilicon, α-Gay Carbide, α-Carbon Semiconductors can be suitably used. Further, all conjugated polymers that are organic semiconductors can also be used. As such a polymer, specifically, polyaniline, polyarylenevinylene, polychenylenevinylene, polyacetylene, polyvirol, or the like can be preferably used. .

 On the other hand, in the case of the cathode, the low work function (work function

(3.9 eV or less) conductive materials such as metals and alloys can be used. In addition, since the resistivity does not matter for the cathode, a semiconductor can also be used. Alloys include those containing a small amount of alkaline earth metals, alkali metals or rare earth metals, for example, A 1 —L i, A 1 -M g, A 1 -Ba, A 1 -C a, A 1 -S c, A l —Y b and the like can be suitably used. Furthermore, an ultrathin (about 20 nm or less) alkaline earth metal oxide such as BaO, SrO, or Mg0 can also be used as the cathode. The L a B ₆ and T i N a metal boride any low work function, a nitride metal may and Mochiiruko. Rare earth silicides with a low work function can also be used.

 In the present invention, since the lower electrode layer may have a high sheet resistance, the film thickness can be reduced. In this case, it is preferable that the thickness be 200 nm or less, particularly 2 to 100 nm. In this case, if the film thickness is in the range of 2 to 10 nm, a continuous layer may not be formed. However, as shown in FIG. 16, when the lower electrode layer and the wiring layer are in close contact, there is no problem in the operation of the element. On the other hand, when the film thickness is larger than 200 n, the organic layer and the counter electrode may be disconnected at the step portion of the lower electrode layer.

In the present invention, the lower electrode can be formed by a known method. For example, a lower electrode is formed by forming a film by a sputtering method and then patterning by a photolithographic method. (2) Wiring layer

 In the present invention, the wiring layer has a function as an auxiliary wire for reducing the resistance value of the lower electrode. For this reason, it is necessary to have a low resistance value and to be electrically connected to the lower electrode. Here, “electrically” means that when a power supply is connected to the wiring layer and the counter electrode, the wiring layer and the lower electrode are connected so that a voltage is applied to the organic EL element. Therefore, the current supplied to the organic EL element flows through the wiring layer, and a wiring layer having a low resistance is preferable. By providing such a wiring layer, the resistance value of the lower electrode layer can be extremely reduced.

 The wiring layer used in the present invention is not particularly limited as long as it has a low resistance value. For example, the resistance of an electrode line (for example, a signal electrode line) whose resistance is reduced by this wiring layer is reduced. Metal wires with a value of 5 kΩ or less are preferred. If it exceeds 5 kQ, the light emission luminance unevenness of the pixel may occur. When displaying a television image, it is more preferable to set the value to 1 kΩ or less.

 When the length of the signal electrode wire is about 100 cm, the unit length (length per 1 cm) is preferably 100 Ω or less.

The resistivity of the wiring layer is preferably 5 × 10 −5 Ω · cm or less. Beyond ^{5 X 1 0- 5 Ω · cm} , the effect of reducing the resistance by the this providing a wiring layer can not be expected.

Metals used for such wiring layers include, for example, tungsten (W), aluminum (A1), copper (Cu), silver (Ag), molybdenum (Mo), Tantalum (T a), gold (A u), chromium (C r), titan (T i), neodymium (N d), and alloys thereof. Specific examples of these alloys include Mo-W, Ta-I "W, Ta-Mo, Al-Ta, Al-Ti, Al-Nd, A1-Z can be mentioned alloy r or the like. further, a compound of metal and gay _{element, T i S i 2, Z} r S i '2, H f S i 2, VS i≥, N b S i 2, Ύ a S \ 2 , C r S i 2, WS i 2, C o S i 2, N i S i 2, P t S i, arbitrarily favored, such as P d ₂ S i. Further, a configuration in which these metals and silicon compounds are stacked may be employed.

 Table 1 shows the resistivity of metals preferably used for the wiring layer used in the present invention.

Metal resistivity

 (μΩ • cm

A 1 3

 C r 2 5

 T a 1 8 0

 T a: M o 40

 T i 8 4

 M o: W 1 5

 M o 5 3

 A 1: T i 10 to 30

 A 1: T a 10 to 30

 A 1: N d 6 to 14

The wiring layer is preferably formed in a state of a metal film, as described later, from the viewpoint of simplicity of production. In this case, the metal film may be more preferably a multilayer film of two or more types in order to enhance the stability of the film. This multilayer film can be formed using the above metals or alloys thereof. For example, for three layers, Ta layer, Cu layer and Ta layer, and for Ta layer, A 1 layer and Ta layer, and for two layers, A 1 layer and Ta Layer, a Cr layer and an Au layer, and an A1 layer and an Mo layer. Here, the stability of the film means that the low resistivity and the edge are maintained. It is a property that is not easily corroded by the liquid used for the treatment during the etching ₍ for example, Cu or Ag alone has low resistivity but easily corrodes, but at least one of the upper and lower parts By laminating a film of a metal having excellent corrosion resistance, for example, Ta, Cr, Mo, etc., the stability of the film can be enhanced.

 Although the thickness of such a metal film is not particularly limited, it is preferably from 100 nm to several 10 m, and particularly preferably 2 O Onn! ~ 5 um. l If it is less than OO nm, the resistance value becomes large and it is not preferable as a wiring layer, and if it exceeds several 10; tm, it becomes difficult to planarize, and the performance of the organic layer formed on the top May decrease. The width (length of the short side) of the metal film is not particularly limited, but is preferably 2 m to 100 m, and more preferably 50 111 to 300; / 111. If it is less than 2 / ^ m, the resistance of the wiring layer will increase, and if it exceeds 100m, light extraction may be hindered.

(3) Flattening layer

 The flattening layer is a layer made of an insulating material provided to alleviate the projections of the pattern stripes of the wiring layer. The preferred flatness is less than 0.2 m. Further, the surface roughness is preferably set to 10 nm or less in order to suppress the occurrence of a light emission defect. Here, the above-mentioned flatness is the amount of unevenness of the wiring layer pattern stripe, and can be measured by a stylus, a film thickness meter, a scanning atomic force microscope, or the like. On the other hand, the surface roughness is a surface roughness of the flattening layer itself, and is a mean square value of surface irregularities that can be measured at a square of 500 to 1 mm square.

The material of the planarizing layer used in the present invention is not particularly limited as long as it has an insulating property, but a material having a withstand voltage of 2 MV / cm or more is preferable. In addition, it can withstand the temperature during film formation of the lower electrode. Those having thermal properties are preferred. Examples include transparent polymers, oxides, and glass. When burying the wiring layer or performing contact hole processing for electrical connection between the wiring layer and the lower electrode, fine processing such as formation of openings is required. It is preferably a material that can be made.

Specifically, the transparent polymer includes polyimide, fluorinated polyimide, fluororesin, polyacrylate, polyquinoline, poloxadiazole, and cyclic structure. Polyolefins, polyarylates, polycarbonates, polysulfones, ladder type polysiloxanes, etc., having the following are preferred examples. Further, as the _{oxide, S i 0 2, A 1} 2 O s, T a 2 0 3, S is Ν 4, fluoridation S i O 2, M g O , Υ b 0 3 , etc. the etching It can be mentioned as a preferred example of a material that can be processed. Among the above materials, polyimide, polyacrylate, glass, and the like, which have photosensitivity and can be etched without using a photo resist, are more preferable. No.

 The thickness of this layer is not particularly limited as long as the wiring layer can be buried, but is preferably, for example, thicker than the thickness of the wiring layer and equal to or less than 10 zm.

(4) Other components

 The organic EL device of the present invention includes, as constituent elements, an organic layer including an organic light emitting layer, a counter electrode, and a support substrate, in addition to the lower electrode, the wiring layer, and the planarizing layer.

In the organic EL device of the present invention, the organic layer interposed between the lower electrode and the counter electrode includes at least an organic light emitting layer. The organic layer may be a layer composed of only the organic light emitting layer, or may have a multilayer structure in which a hole transport layer and the like are laminated together with the organic light emitting layer. There is no particular limitation on the type of light emitting material used for the organic light emitting layer. Any known organic EL element can be used. For example, as an organic light emitting layer material, oxine metal complexes, stilbene-based dyes, polyolefin divinylene derivatives, and the like can be cited as materials that provide high-level organic EL devices.

 The counter electrode is an electrode that forms a pair with the lower electrode, and has a charge opposite to that of the lower electrode. Then, the charge (hole or electron) injected from the lower electrode side and the charge (electron or hole) injected from the counter electrode side collide with each other in the organic light emitting layer to emit light. The generated light is extracted from the lower electrode side and the Z or counter electrode side. In the present invention, when the width of the wiring layer is 100 to 150%, the light emission is extracted from the counter electrode side. In this case, it is necessary to adopt a counter electrode having a light transmittance of 30% or more at the emission wavelength. As such a material, a commonly used organic electroluminescent element of this kind can be used as it is. For example, a transparent conductive oxide film, an ultrathin film of a metal or alloy having a thickness of 20 nm or less, a laminated film of a transparent conductive oxide film and the ultrathin film, and the like can be given.

 As the support substrate, a substrate commonly used in this type of organic electroluminescent element can be used as it is, as long as it has excellent mechanical strength and low moisture and oxygen permeability. Specifically, for example, glass and ceramics can be cited.

3. Method of forming wiring layer and flattening layer

 The method for forming the wiring layer and the flattening layer is not particularly limited. For example, the following method can be mentioned as a preferred example.

 (1) Anodizing method

In this method, a metal film is formed on a supporting substrate with a material constituting a wiring layer. As shown in FIG. 3 (a), a film is formed on the supporting substrate 1 by a known film forming method such as evaporation, sputtering, CVD or the like until the film thickness becomes a predetermined wiring layer. The film 8 is formed. Next, as shown in FIG. 3 (b), a photo resist is applied on the metal film 8 and exposed, and then the photo resist 9 is positioned at a position of a pattern for forming a wiring layer. To do.

 Next, as shown in FIG. 3C, the metal film 8 in the opening where the photo resist 9 is not located is completely oxidized by anodic oxidation. The oxidized metal film 8 becomes the flattening layer 6.

 Finally, as shown in FIG. 3 (d), the wiring layer 5 embedded in the planarization layer 6 can be formed by separating the photo resist 9.

 Note that this method cannot be used unless a material such as A 1, Cr, Ta or the like is capable of anodic oxidation.

(2) Lift-off method

 In this method, a flattening layer is formed on a supporting substrate, and then a metal film is formed. When a transparent polymer is used as the flattening layer, examples of the film forming method include spin coating, coating, and dip coating. When an oxide, glass, or the like is used, examples of the film forming method include methods such as vapor deposition, sputtering, CVD, and anodic oxidation.

 As shown in FIG. 4A, first, a planarization layer 6 is formed on a support substrate 1.

 Next, as shown in FIG. 4 (b), after applying a photo resist on the planarizing layer 6, it is exposed to light, and the photo resist is applied to a pattern where no wiring layer is formed. Position 9

 Next, as shown in FIG. 4C, the planarizing layer 6 is etched and removed using the photo resist 9 as a mask.

 Next, as shown in FIG. 4D, a metal film 8 is formed.

Further, as shown in FIG. 4 (e), by separating the photo resist 9 together with the metal film 8 thereon, the wiring buried in the planarization layer 6 is removed. Layer 5 can be formed.

 If the required film thickness of the wiring layer 5 is as thick as several to several 10 m, the plating method, sputtering, and CVD require a long time to form the film, and thus the plating method may be used.

 For example, as shown in FIG. 5 (a), a thin metal film 8 is formed on the supporting substrate 1 by using the lift-off method, and then, as shown in FIG. 5 (b), Then, a plating film 10 is formed by an electroless or electrolytic plating method, and by increasing the thickness, the wiring layer 5 composed of the plating film 10 and the metal film 8 can be formed.

(3) Polymer flattening method

 In this method, a contact hole is provided by covering a wiring layer pattern with a flattening layer.

 As shown in FIG. 6A, a wiring layer pattern 5 is formed on the supporting substrate 1 by using a photo-etching or a lift-off method.

 Next, as shown in FIG. 6B, a flattening layer 6 is formed so as to cover the wiring layer pattern 5. As a forming method, spin coating, coating, vapor deposition, CVD, sputtering, or the like can be used.

 If the polymer used here has photosensitivity, the contact hole can be opened at the same time.

 Next, as shown in FIG. 6 (c), a contact hole 7 is provided in the flattening layer 6 by etching using a photo resist. The contact hole 7 is preferably formed in a tapered shape extending upward in order to prevent disconnection of the layer provided thereabove. By connecting the lower electrode to the auxiliary electrode 5 via the contact hole 7, the organic electroluminescence element shown in FIG. 2 can be manufactured.

The flattening layer 6 may have some undulations as shown in FIG. However, it is necessary that the upper organic layer for the EL element and the counter electrode layer do not break due to the undulation. (4) Substrate embedding method

 In this method, a part of the supporting substrate is used as a planarization layer.

 As shown in FIG. 7A, a pattern of a photo resist 9 having an opening at a position where a wiring layer is provided on the supporting substrate 1 is formed.

 Next, as shown in FIG. 7B, a portion of the support substrate 1 which is not covered with the photo resist 9 is etched.

 Next, as shown in FIG. 7C, a metal film 8 is formed over the entire area including the etched portion.

 Finally, the photoresist is peeled off together with the metal film 8 as shown in FIG. 7 (d).

 In this case, a part of the support substrate 1 has been processed as a flattening layer.

 Therefore, the embodiment of the first invention is of two types in which the wiring layer is buried in the flattening film or the support substrate.

II. Second invention (organic EL device having interlayer insulating film)

1. Basic form

 In the second invention, as shown in FIG. 8 (a), the auxiliary electrode 5 has a force <, and is covered with a planarized interlayer insulating film 11 provided between the auxiliary electrode 5 and the organic layer 3.

 Therefore, the wiring layer 5 is flattened by the interlayer insulating film 11 as in the case of the first invention, so that the occurrence of the step due to the wiring layer 5 is reduced and the disconnection of the counter electrode 4 is effectively prevented. Is done.

The wiring layer 5 is electrically connected to the lower electrode 2. In the present invention, since the interlayer insulating film 11 is formed so as to cover the wiring layer 5, No leakage current is generated due to the intrusion of electric charges from the organic layer 3 into the organic layer 3, and crosstalk can be effectively prevented. As another modification of the second invention, for example, a form shown in FIG. 8B can be given. In this case, the lower electrode 2 and the wiring layer 5 are connected to the interlayer insulating film 11 via the contact hole 7.

 In the case of the embodiment shown in FIG. 8, as shown in FIG. 9, the interlayer insulating film 11 has a taper angle (0) (an angle formed between the upper base and the side of the trapezoidal cross section) of 45 ° or less. It is preferable to form a taper of 25 °, more preferably 25 ° or less.

 When the taper angle (ø) exceeds 45 °, the organic layer provided on the interlayer insulating film 11 becomes 1 1 ηπ! Since the thickness of the opposite electrode is as thin as about 200 nm, the possibility of disconnection is high, which is likely to cause display defects.

2. Components

 Hereinafter, the second invention will be described more specifically for each component thereof. (1) Wiring layer

 The same wiring layer as that used in the first invention can be used as the wiring layer. However, in the embodiment shown in FIG. 8, it is not preferable to completely remove the step due to the auxiliary electrode, so that it is preferable to taper the end of the wiring layer. The step portion of the interlayer insulating film described later may be formed in a tapered shape without performing the tapering process. This taper angle (the angle between the upper base and the side of the trapezoidal cross section) is preferably 45 ° or less, and more preferably 20 ° or less.

(2) Interlayer insulating film

 The same interlayer insulating film as that used for the flattening layer in the first invention can be used.

However, unlike the flattening layer, it is not always necessary to be transparent. Thickness: 100 nm to several meters to provide insulation and smooth steps It is preferred that In this case, it is preferable that the interlayer insulating film has no pinholes (no pinholes) and has a high dielectric breakdown strength. This is to prevent charges from entering the organic layer from the wiring layer. Specifically, oxides and nitrides that maintain a dielectric breakdown strength of 2 MV or more are preferred, such as Si 0 ₂ , A 12 0 3, Ta 2 0 3, Sia N 4, and Y b ₂ 0 ₃ can and Ageruko. Further, it is necessary that the step portion of the interlayer insulating film can be tapered in order to prevent disconnection of the counter electrode. _{Further, A 1 2 0 3, T} a 2 0 oxide such as ₃ prepared by the method of anodic oxidation is bi Nhoruresu, and particularly preferred arbitrarily because of excellent dielectric breakdown strength. As a manufacturing method, for example, in a dilute solution of citric acid, phosphoric acid, ammonium borate, ammonium tartrate, etc., the above metal is used as an anode, and a noble metal of platinum is used as a cathode, and 10 V to 300 V is used. And then oxidize by applying a voltage.

(3) Other components

 As the other components used in the present invention, those similar to the first invention can be used.

3. Method of forming wiring layer and interlayer insulating film

 (1) Anodizing method (Part 1)

 In this method, the surface of a wiring layer is anodized, and an oxide film formed there is used as an interlayer insulating film.

 As shown in FIG. 10A, a patterned lower electrode 2 is formed on a support substrate 1.

 Next, as shown in FIG. 10 (b), after the metal film 8 is formed, the metal film 8 is etched with the pattern of the wiring layer.

Next, as shown in FIG. 10 (c), the surface of the metal film 8 is anodized, and the oxide film thus formed is used as an interlayer insulating film 11 and oxidized. The part of the metal film 8 that does not exist is used as the wiring layer 5

(2) Anodizing method (Part 2)

 In this method, a wiring layer is formed first, then a lower electrode is formed, and a wiring layer not covered with the lower electrode is anodized to form an interlayer insulating film.

 As shown in FIG. 11 (a), a patterned wiring layer 5 is provided on a supporting substrate 1.

 Next, as shown in FIG. 11B, the lower electrode 2 is formed by patterning so as to be connected to the wiring layer 5.

 Next, as shown in FIG. 11 (c), the surface of the wiring layer not covered with the lower electrode 2 is oxidized by anodic oxidation, and the oxidized portion is used as the inter-layer insulating film 11.

(3) Flattening method

 In this method, a wiring layer not covered with a lower electrode is covered with an interlayer insulating film for planarization.

 As shown in FIG. 12 (a), the wiring layer 5 and the lower electrode 2 patterned on the support substrate 1 are formed in the same manner as in the case of (2).

 Next, as shown in FIG. 12B, an interlayer insulating film 11 is formed. When an insulating polymer is used as the inter-layer insulating film 11, after forming by spin coating, the wiring layer 5 is removed by a photo-etching method except for the lower electrode 2 and other external connection parts of the wiring. Is formed so as to cover. Sheet resistance and width of wiring layer,

The wiring layer used in the first and second inventions is electrically connected to the lower electrode. Here, “electrically” means that when a power supply is connected to the wiring layer and the counter electrode, the wiring layer and the lower electrode are connected so that a voltage is applied to the organic EL element. Therefore, the wiring layer is It is the one through which the current supplied to the element flows and preferably has a low sheet resistance. Specifically, it is preferable that the resistance is 1 Ω or less. This value, 0. 5 X 1 0 as the lower electrode - when a conventional material thin film to have a ⁴ Q 'cm or more resistivity, thickness Ι Ο Ο η η! This value cannot be achieved in the range of ~ 500 nm. If the thickness of the lower electrode is further increased in order to reduce the sheet resistance, a step is generated at the end of the lower electrode, causing inconvenience such as disconnection of the opposing electrode. In addition, when the lower electrode is a transparent electrode, at present, the resistivity is as large as 1 × 10−Ω · cm or more, and when the film thickness is further increased, the light transmittance becomes 80% or less. Drawback efficiency is reduced. Therefore, in the first and second inventions, by using a wiring layer having a sheet resistance of 1 Ω / Ε or less, it cannot be reached only by the lower electrode. Thus, a low-resistance electrode line (wiring) can be obtained. Further, it is particularly preferable to use a wiring layer of 0.3 ΩΖΟ or less. This can be achieved by using a material having a low resistivity of 10 to 30 ζΩ · Cm or less, for example, A 1, A 1: Ta, A 1: Nd, and A 1: T i. Is done. It is preferable that the width of the wiring in the wiring layer is smaller than the size of the pixel, because the wiring usually hinders light from being extracted from the pixel. It is preferably 50 m or less, particularly preferably 20 zm or less. On the other hand, the wiring in the wiring layer having a narrow width increases the resistance of the wiring in the wiring layer. However, even in the case of a narrow width of 10, if a wiring layer of 0.3 or less is used, the resistance value per 1 cm is less than 300 Ω, and an acceptable value can be obtained. Therefore, it is preferable to use a wiring having a resistance of 0.3 ΩΖ1 or less, since a wiring having a length of 10 cm and a wiring of 5 or less can be obtained.

In order to obtain such a low-resistance wiring, the wiring layer is formed from a material having a low resistivity of 10 to 30 β Q -cm or less, and the wiring thickness of the wiring layer is set to 200 nm. It is necessary to do above. This is easily achieved, but it is essential to flatten the steps in the wiring layer instead. For this reason, using the configuration of the first invention, the wiring layer is buried in the planarization layer or the support substrate, or an interlayer insulating film is formed, and if necessary, the shape of the step portion of the wiring layer is tapered. It is essential to use the configuration of the second invention described above. Wiring layer and lower electrode pattern example

 The wiring layer used in the first and second inventions is particularly effective when used for a display in which an XY matrix is formed by a lower electrode and a counter electrode. Such an XY matrix displays a display that performs line-sequential driving. At this time, the current pulse is sent to the selected pixel for the reciprocal of (the number of scanning lines) X (the frame frequency), so that the pulse current beak value increases. For this reason, it is necessary to use a wiring layer to reduce the resistance of the electrode line (wiring).

 An example of such a pattern for reducing the wiring resistance is shown in FIG.

 In Fig. 13 (a), the dots are the places where the lower electrode 2 and the wiring layer 5 are connected, and if the lower electrode 2 is above, the wiring layers 5 where the connection is not made are shown. Are covered with a planarizing layer or an interlayer insulating film. When the lower electrode 2 is below, the entire wiring layer 5 is covered with an interlayer insulating film.

 In FIG. 13 (b), the dots are the connection points between the wiring layer 5 and the lower electrode 2. Again, the wiring layer 5 is covered with an interlayer insulating film and a flattening layer.

 The first and second inventions can also be used for forming a matrix of two or three or more layers. As shown in FIG. 13 (c), for example, in the case of a double matrix, the odd-numbered and even-numbered lower electrodes 2 are connected to different wiring layers 5, respectively.

The above pattern examples are typical examples, and the present invention is not limited by these examples. FIG. 14 and FIG. 15 show wiring patterns of a display using a double matrix and a quad matrix, respectively.

 In the example shown in FIG. 14, the signal electrode is the lower electrode 2, and the XY matrix is configured using the pattern of FIG. 13 (c). In FIG. 14, the X-stripe (scanning electrode), which is the counter electrode, is also indicated by a dotted line. In such a double matrix example, the driving duty can be halved, so that the stress applied to the element during display driving can be reduced, and the power consumption can be reduced by reducing the applied voltage. There are advantages such as the size can be reduced.

 In the case where the double matrix is used in the first and second inventions, the disconnection and the crosstalk of the counter electrode have been caused by the conventional technology, which can be solved.

 Further, even when a matrix having three or more layers as shown in FIG. 15 is used, the present invention can be used for the formation thereof. FIG. 15 shows an example of a quadruple matrix.

Xi, X? , Χ ₃ , 対 向 ιι, Υ 12, Υ ΐ3, を

14 · · · Υ21, Yl22, Υ123, Yl24 indicate the lower (signal) electrodes, respectively.

 For example, the duty drive of 1Z480 can be reduced to 1/120 in this case. For this reason, a display such as a high-definition TV can be realized by using the technology of the present invention. This is because the electrode line (wiring) resistance of the present invention does not cause a voltage drop due to the small electrode line resistance, and can also suppress an increase in response time caused when the wiring resistance is large. is there.

Further, the first and second inventions can also be applied to an organic EL device using an active matrix. However, in the XY matrix used in the active matrix, the signal electrodes and the scanning electrodes are different from the wiring of the wiring layer in the present invention. In the present invention, the wiring is used to supply current to the lower electrode of the organic EL element. The signal or scan electrode of the Bumatrix is the wiring for turning on and off the active element (transistor).

 Furthermore, since the signal of the active matrix or the scanning electrode is used for driving control of the electric-elevation effect transistor, the amount of flowing current is small, and a wiring having a relatively high resistance value can be tolerated.

Therefore, the low-resistance electrode lines (wirings) required in the first and second inventions are not necessarily required. The interconnection of the interconnection layer in the present invention is used in the active Conclusions Li Tsu box, the wiring layers in the _c first and second invention is a common electrode line is a wiring for supplying a current to the lower electrode of the organic EL device By providing a common electrode line, the common electrode line can prevent disconnection of the counter electrode, suppress display crosstalk, and achieve an effect of suppressing a voltage drop due to wiring. .

I I I. Third Invention (Organic EL Device Having Flattening Layer: Part 2)

1. Basic form

 The third invention, as shown in FIG. 16 or 17, is an organic EL device having a support substrate 1, a lower electrode 2, an organic layer 3 including an organic light emitting layer, and a counter electrode 4 laminated in this order. In addition, a wiring layer 5 for reducing the resistance value of the lower electrode 2 is embedded in a planarization layer 6 provided between the support substrate 1 and the lower electrode 2.

 Therefore, the wiring layer 5 does not protrude above the lower electrode 2. There is no step caused by the wiring layer 5, and the disconnection of the opposing electric wire 4 is effectively prevented by the first and second wirings. The features of the third invention are the same as those of the invention.

Further, the wiring layer 5 is electrically connected to the lower electrode 2, but in the third invention, since the lower electrode 2 is provided on the wiring layer 5 so as to cover it, Leakage current does not occur due to the intrusion of charges from the wiring layer 5 to the organic layer 3, and crosstalk is effectively prevented. This is also the same as in the first and second inventions. Further, since the width of the wiring layer is in the range of 20 to 150% of the width of the lower electrode layer, the resistance value of the lower electrode can be sufficiently reduced, which is a feature of the third invention. Furthermore, for example, when a metal having a wiring width of 200 nm and a film thickness of 250 nm having a resistivity of 5 × 10 -6 Ω · cm is used for the wiring layer, the lower electrode having the same width as the wiring layer is used. The resistance of the layer per unit length (1 cm) (In this specification, the resistance value per unit length means the resistance value per 1 cm length. It may be abbreviated as a resistance value.) And 10 Ω (5 × 10−6 Ω · cm / (200 × m × 250 nm)) or less. As a result, the resistance value can be reduced to such an extent that the component composed of the lower electrode layer and the wiring layer can be applied to the scanning electrode line in the organic EL display device having the XY matrix configuration. As another embodiment of the present invention, for example, the one shown in FIG. 17 can be mentioned.

 In this embodiment, as shown in FIG. 17, the wiring layer 5 is covered with the planarization layer 6, and the electrical connection between the wiring layer 5 and the lower electrode 2 is formed in the contact hole formed in the planarization layer 6. Have gone through 7. In this embodiment as well, similarly to the first and second inventions, the wiring layer 5 does not protrude above the lower electrode 2, and it is possible to effectively prevent disconnection and crosstalk of the counter electrode 4. it can. In addition, since the wiring width is sufficient, the resistance can be reduced.

 Further, in the above-mentioned organic EL device, an XY matrix can be formed by the lower electrode and the counter electrode, and a luminescent pixel can be formed in the intersection area.

Further, as an embodiment different from FIGS. 16 and 17, the positional relationship between the wiring layer 5 and the lower electrode 2 as shown in FIG. 18 is shifted in parallel, and the planarization layer as shown in FIG. Although the film thickness of 6 is smaller than that of the wiring layer 5, the end of the wiring layer has a trapezoidal cross section (tapered shape) so that no disconnection occurs, and as shown in FIG. The same form as Can show the form without using the hole

2. Components

 Hereinafter, the third invention will be described more specifically for each of its constituent elements.

(1) Lower electrode

 As the lower electrode in the third invention, the same one as in the first and second inventions can be used.

(2) Wiring layer

 The wiring layer used in the present invention is not particularly limited as long as its width is 15 to 150% of the width (length of the short side) of the lower electrode, and is the same as in the first and second inventions. Can be used.

 In the third invention, the width of the wiring layer needs to be within a range of 20 to 150% of the width of the lower electrode, and is preferably 100 to 150%. If it is less than 20%, the resistance value of the lower electrode cannot be sufficiently reduced, and if it exceeds 150%, the filter factor of the luminescent pixel decreases and it is difficult to increase the luminance. In the range of 100% to 150%, light emission is extracted from the counter electrode side.

 As a method of connecting the wiring layer and the lower electrode, for example, a method of providing a lower electrode on the entire upper surface of the wiring layer, a method of connecting the wiring layer and the lower electrode through a contact hole opened in the planarization layer In addition, a method of separately forming a lower electrode constituting a pixel on a wiring layer for each pixel can be given.

(3) Flattening layer

 As the flattening layer used in the present invention, the same one as in the first invention can be used.

Inorganic materials for forming this layer include, for example, thermal CVD, LPCVD (reduced pressure CVD), and PECVD (plasma etching). (Sold CVD method), DC snow, copper ring method, AC sputtering method, ECR sputtering method, and the like. It is desirable to select the temperature during film formation in consideration of the heat-resistant temperature of the support substrate and the wiring layer.For example, the film is formed under the condition that the temperature of the support substrate is 80 to 400 ° C. Is preferred. If the temperature of the supporting substrate exceeds 400 ° C, defects that may lead to pixel defects may occur in the wiring layer

 This method can be used for the first invention.

 The anodic oxidation method described above can be used as another film forming method of the inorganic material. In this method, anodically oxidizable metals such as aluminum (A 1), tantalum (Ta), and A 1 alloy are added to a weakly acidic aqueous solution such as boric acid and citric acid by adding a weak base component. It is immersed in the obtained neutral aqueous solution and oxidized by applying a noble metal such as platinum as a counter electrode (cathode) and applying a voltage of 150 to 300 V using the above metal as an anode. A flattening layer made of an oxide is formed. A-Ta, A1 alloy, etc. can produce a pinhole-free dense film.

 As a method of forming this layer, for an organic material, for example, the above-mentioned polymer or its precursor, a method of spin-coating or applying a solution thereof and thermosetting is preferably used.

 Note that the flattening layer may be formed using glass of the same material as the supporting substrate, and in this case, the glass used as the supporting substrate may be processed to serve as the flattening layer. .

 This method can be used for the first invention.

 The thickness of the flattening layer need only be such that the wiring layer can be buried, and as shown in FIGS. 19 and 20, depending on the shape of the wiring layer, it is thinner than the wiring layer. can do.

(4) Other components

Other components are the same as those in the first and second inventions. Can be used.

3. Method of forming lower electrode, wiring layer and flattening layer

 Although there is no particular limitation on the forming method, for example, the following method can be mentioned as a preferred example.

 (1) Etchback method

 This method is a method of coating an inorganic insulating film and an organic polymer on a wiring layer, and then performing plasma etching or reactive ion etching to planarize the surface. As shown in Fig. 21 (a), a material for the wiring layer is formed on the supporting substrate 1 by a known film forming method such as vapor deposition, sputtering, or CVD until the film thickness reaches a predetermined value. Then, the wiring layer 5 is formed by performing photolithography.

Next, as shown in FIG. 21 (b), the inorganic insulating films S i 0 ₂ , S i Ο (1 ≤ x ≤ 2), S is N d, etc. were formed on the wiring layer 5. Films are formed by various CVD methods and sputtering.

Next, after planarizing by coating an organic polymer on the inorganic insulating film layer (one layer of an organic polymer is not shown), a reaction is performed using a mixed gas of CF ₄ and oxygen or the like. Etching is carried out uniformly by the property etching to form a flattening layer 6 as shown in FIG. 21 (c). Next, as shown in FIG. 21 (d), a contact hole is opened by photolithography.

 Finally, the lower electrode is formed by sputtering ring or the like, and then patterned by photolithography to form the wiring layer buried in the planarization layer 6 as shown in Fig. 21 (e). 5 can be formed.

 This method can be used for the first invention.

(2) Lift-off method In this method, a flattening layer is formed on a supporting substrate, and then a metal film is formed. When a transparent polymer is used as the flattening layer, a spin coating method, a coating method, a dip coating method, or the like can be used as a film forming method. In the case of using oxide, glass, etc., methods such as vapor deposition, sputtering, CVD, and anodic oxidation can be used.

 First, as shown in FIG. 22 (a), a flattening layer 6 is formed on the support substrate 1.

 Next, as shown in FIG. 22 (b), after applying a photoresist on the planarization layer 6, the photoresist was exposed, and an opening of a pattern for forming a wiring layer was opened. Position PhotoRegist 9.

 Next, as shown in FIG. 22 (c), the unmasked portion of the flattening layer is etched and removed by the photo resist 9.

 Next, the wiring layer 5 is formed by a known film forming method, and then, as shown in FIG. 22 (d), a lower electrode layer is formed.

 Further, as shown in FIG. 22 (e), the photoresist 9 is peeled off together with the lower electrode thereon, thereby forming the wiring layer 5 in the planarization layer 6 and forming the lower layer. Electrode 2 can be formed.

 If the required thickness of the wiring layer 5 is as thick as 1 to several 10 / m, an initial film may be formed by vapor deposition, sputtering, or CVD, and then a plating method may be used. By adopting this method, the time required for forming the wiring layer 5 can be reduced.

¾

 This method can be used for the first invention.

(3) Anodizing method

 In this method, a flattening layer is formed by using an anodic oxidation method.

As shown in Fig. 23 (a), first, a metal or alloy that can be anodized is formed on the supporting substrate 1 by using various CVD methods, sputtering methods, and evaporation methods. Film.

 Next, as shown in Fig. 23 (b), after applying a photo resist. This is exposed and cured so that a part without a flattening layer remains. The support substrate subjected to the immersion is immersed in an anodizing solution, and a current is applied to oxidize a portion to be a flattening layer (a portion where no photo resist is provided) (FIG. 23 (c)).

 Next, the photo resist 9 is separated (FIG. 23 (d)), the lower electrode layer is formed, and the photolithography is performed as shown in FIG. 23 (e). Thus, the wiring layer 5 to which the lower electrode 2 is connected can be formed in the planarization layer 6 by patterning.

 This method can also be used for the first invention.

(4) Polymer flattening method

 In this method, as described above, a contact hole is provided by covering the wiring layer pattern with a flattening layer.

 As shown in FIG. 24A, a wiring layer pattern 5 is formed on the support substrate 1 by using a photo-etching or a lift-off method.

 Next, as shown in FIG. 24 (b), a planarization layer 6 is formed using a polymer so as to cover the wiring layer pattern 5. As a forming method, spin coating, coating, vapor deposition, CVD, sputtering, or the like can be used. If the polymer used here has photosensitivity, the contact hole can be opened at the same time.

Next, as shown in FIG. 24 (c), a contact hole 7 is provided in the flattening layer 6 by etching using a photo resist. In order to prevent a layer provided on the contact hole from being disconnected, the contact hole 7 is preferably formed in a tapered shape extending upward. By connecting the lower electrode to the wiring layer 5 via the contact hole 7, the structure shown in FIG. 21 (d) can be manufactured. IV. Fourth invention (organic EL display device using organic EL element having flattening layer)

 The fourth invention relates to an organic EL display device using an organic EL element having substantially the same configuration as the organic EL elements of the first and third inventions.

 In the organic EL display device of the present invention, the plurality of scanning electrode lines and the plurality of signal electrode lines intersect, and the light emitting pixels are provided in the intersection area, and the plurality of light emitting pixels are arranged. Become. Each luminescent pixel is formed of an organic EL element having a lower electrode, an organic layer including an organic luminescent layer, and a counter electrode laminated in this order on a support substrate.

 Here, the scanning electrode line has a function of transmitting a scanning signal when the light emitting device is driven by simple matrix, and the signal electrode line emits light to the scanning electrode line selected by the scanning signal. It has the function of passing a signal current to select pixels.

 Further, the signal electrode line of the fourth invention is an electrode line including a counter electrode, and the term “including a counter electrode” as used herein includes, in addition to the counter electrode, a wiring through which a selection signal connected to the counter electrode flows a current. It means.

 (1) Luminescent pixel

 The luminescent pixel of the fourth invention is formed from the organic EL element having the above configuration. <The lower electrode is connected to a wiring layer, and the wiring layer is a flattened layer provided between the support substrate and the lower electrode. It is buried in the layer. The width (short side length) of the wiring layer is preferably 20 to 150% of the width (short side length) of the lower electrode.

 The organic EL device constituting the fourth invention can be manufactured using the same material as the organic EL device described in the first and third inventions, and by the same method. Further, the same configuration as described in the first and third inventions can be adopted.

(2) Scanning electrode line The scanning electrode line of the fourth invention is a lower electrode and a wiring layer connected to the lower electrode.

When driving an organic EL display device with 240 x 360 pixels and a pixel of 200 / m x 300 m with a duty of 1-120 and 2 split-passing, the luminance is 2 To achieve 0 cd / m2, a high brightness of 120 cd / m- ¹ is required instantaneously. In this case, even when the pixel of 10 cd A, which is an extremely high level of luminous efficiency, is fully lit, a large current of about 52 mA is instantaneously applied to the scan electrode line. 1/120 X 1 / frame frequency second). This value is the value when the aperture ratio of the display is 100%, and when the aperture ratio is 50% to 70%, higher brightness is required and the current as high as 100 mA May flow instantaneously. Furthermore, when the luminous efficiency is 10 cd / A or less, a larger current value is required.

 At this time, the resistance value per unit length of the wiring layer (that is, the resistance value per unit of the scanning electrode line) is about 100 Ω which is the level of the prior art, and the length of the scanning electrode line is In the case of 10 cm, the value of the voltage drop at the time of all lighting is evaluated as (52 m AX lk Q) Z 2-26 V, and since the low voltage drive cannot be performed and the power consumption is large, the display is completely It cannot be used. From the viewpoint of low power consumption, the resistance value of the scanning electrode line is preferably set to 15 Ω or less per unit length (1 cm).

 In the fourth invention, for example, when a wiring layer having a resistivity of 5 × 10−Ω · cm, a film thickness of 250 nm, and a width of 200 im is provided under the lower electrode. At least the unit length (1 10 Ω per cm)

Further, in the case of the fourth invention, since the flattening layer is provided, even if the wiring layer is thickened to reduce the resistance value, it is possible to prevent disconnection of the layer laminated on the lower electrode layer. For this reason, the wiring layer should be 1 to several tens // m. Therefore, the resistance value per unit length (1 cm) can be remarkably reduced to several Ω to several ten Ω.

 Table 2 shows the voltage drop when the organic EL display device with a pixel count of 240 x 360 and a pixel of 200 m x 300 m is driven in two-divisions with a duty of 1Z120. And the power loss are shown in relation to the resistance per unit length (1 cm) of the scanning electrode line. In determining the voltage drop, the luminous efficiency was set to 10 cd, A, and the luminance was set to 200 cd Zm 2. Table 2

In Table 2, when the resistance value per unit length is 100 Ω, which is the conventional level, the driving voltage is high and the power consumption is large as described above, so that the display device suffers disadvantage. With a resistance value of 10 Ω, the voltage drop falls within the allowable range of 2.6 V and the power loss is small, so it can be used as a display device, but the non-uniformity of light emission due to the voltage drop is small. Therefore, it is preferable to further reduce the resistance value. In the fourth invention. As described above, the resistance value per unit length can be reduced from several Ω to several tenths of Ω, so that the voltage drop is negligibly small. No performance degradation due to voltage drop such as uneven light emission

(3) Signal electrode wire

The signal electrode line is composed of a counter electrode or a counter electrode and a wiring connected thereto. The counter electrode used here may be an anode or a cathode, but when light is extracted from the counter electrode side, a certain degree of light transmittance is required. The light transmittance is preferably 30% or more at the emitted light wavelength. Light-transmissive anodes include In-Sn-0, Zn0: A1 (a mixture of ZnO and A1), In-Zn-0, Sn02: S b (S n 0 mixture was added S b ₂₎ a conductive transparent oxide such as, total conjugate port Rimmer of high transparency such as Porianiri down, graph eye bets, a semiconductor such as α- carbon and Mochiiruko it can. As the light-transmissive cathode, a metal or alloy having a film thickness of 20 nm or less and a low work function, or a metal or alloy laminated with a transparent conductive oxide film is preferably used. When light transmittance is not required, the same material as that of the lower electrode described above can be used.

 The electrode flowing through the signal electrode line is the same as the light emitting device (organic EL display device with 240 × 360 pixels, 200 pixels × 300 / m pixel) with a luminance of 200 cd Zm2. 0.14 mA (5.2 mA / 36 0 = 0.14 mA) when used in a, and a higher resistance value than the scanning electrode line is permissible. For example, the voltage drop at a resistance of 5 kΩ is 0.7, and up to this resistance is acceptable.

(4) Display device

 Table 2 shows the voltage drop and the resistance per unit length of the scanning electrode line in consideration of the EL display device corresponding to the QVGA standard with a diagonal of 5 inches. In this case, even if the resistance is 10 Ω as described above, it can be used.

However, large screens of 14 inches or more and high definition of VGA or more In the case of EL display devices (for example, 14-inch VGA, 14-inch SVGA, and 14-inch XGA), the duty may be less than 1/2400 or the scanning electrode lines may be more than 20 cm. Therefore, the resistance value per unit length must be several Ω to several tenths of Ω. In the organic EL display device of the fourth invention, since a wide range of wiring layers can be used, such a low resistance is realized, and a large screen and high definition can be achieved. It can also be used as an organic EL display device using Bumatrix.

V. Fifth invention (Organic EL device with trapezoidal layer formed by side layer and wiring layer)

 1. Basic form

 For example, as shown in FIG. 25, the fifth invention includes a lower electrode 2 and a side surface layer 8 provided between a wiring layer 5 and an organic layer 3 formed in a trapezoidal cross section (taper shape). Covered by By forming the side layer 8, pixel defects in this portion are suppressed.

 Since the wiring layer 5 is substantially flattened by the lower electrode 2 and the side layer 8 in the same manner as in the first and third inventions due to its shape, the occurrence of a step due to the wiring layer 5 is reduced, and the counter electrode is formed. 4 is effectively prevented.

 The wiring layer 5 is electrically connected to the lower electrode 2. In the fifth invention, the lower electrode 2 and the side layer 8 are formed so as to cover the wiring layer 5, so that There is no occurrence of abnormal leakage current due to intrusion of charges from the wiring layer 5 into the organic layer 3, and crosstalk can be effectively prevented.

The taper angle of the cross section of the wiring layer (or the cross section of the layer formed by the side layer and the wiring layer) ( _{6 /} ) (The angle between the lower base and the side of the trapezoidal section. 5) preferably forms a taper of 45 ° or less. It is more preferable that the angle is 25 ° or less.

 When the taper angle (ø) exceeds 45 °, the organic layer provided on the lower electrode 2 is extremely thin, from 100 nm to 20 nm, and the counter electrode is also about 200 nm. Since it is thin, the possibility of disconnection increases, and it is easy to cause display defects.

2. Components

Hereinafter, the fifth invention will be described more specifically for each constituent _element.c (1) Wiring layer

 The role of the wiring layer is the same as in the first to third inventions. Therefore, the same ones as used in the first to third inventions can be used. However, in the embodiment shown in FIG. 25, it is not possible to completely remove the step due to the wiring layer, so it is preferable to taper the end of the wiring layer. Even if taper processing is not performed, a step portion of the side layer described later may be formed in a taper shape. The taper angle (the angle between the lower base and the side of the trapezoidal cross section) is preferably 45 ° or less as described above, and more preferably 5 to 25. It is. The taper processing prevents the organic layer and the counter electrode layer from being thinned or broken at the pattern end, thereby preventing short circuit and leak current.

 Further, the wiring layer needs to be connected below the lower electrode. This is because it is advantageous to prevent abnormal charge injection from the wiring layer to the organic layer as described above. If the wiring layer is located above or below the lower electrode, an interlayer insulating film is required in addition to the side layer, which complicates the configuration and manufacturing process of the organic EL device. However, if the wiring layer and the organic layer are separated by the lower electrode and the side layer, the wiring layer does not need to be completely located below the lower electrode.

Further, for the same reason as in the third invention, the width of the wiring layer is preferably set to 20 to 150% of the width of the lower electrode, and more preferably to 100 to 150%. . (2) Side layer

 The organic EL device of the fifth invention has a side surface layer on the side surface of the wiring layer. This side layer has the function of clarifying the threshold value of the current-voltage curve of the organic EL device and preventing crosstalk.

 The material of the side layer is not particularly limited as long as it has the following functions, but the following materials can be used.

(i) Insulating Material Specifically, the same material as the flattening layer in the first and third inventions of the present application can be used. Moreover, oxides of metals and alloys are found using the wiring layer, for example, the _{A 1 2 0 3, T a} 2 0 3, T i 0 2 can and Mochiiruko. In this case, an oxide film of the above-mentioned metal or alloy can be manufactured by an anodizing method.

 (ii) The same material as the lower electrode As such a material, for example, In—Sn—0, Zn0: A1, In—Zn-0, Sn02: Sb, etc. Can be raised. In this case, a configuration in which the lower electrode layer covers the wiring layer may be employed.

 (ii i) When the lower electrode is an anode, a metal whose work function is less than 4.2 eV, such as aluminum or aluminum alloy, can be used.

(iv) When the lower electrode is an anode, metals with a work function of 5 eV or more, for example, Au, Pt, Ni, and their alloys Au—A1 alloy and Pt—A1 alloy , Ni—A1 alloy can be used.

By using the above materials, the amount of charge injected from the taper on the side surface can be suppressed to less than 50 times less than the amount of charge injected from the lower electrode, and the leakage current is significantly reduced. can do. Another reason for providing the side layer is that the tapered portion of the wiring layer causes abnormal current injection due to etching residue and defects, and is likely to cause a short circuit or a leak current. When the tapered portion of the wiring layer has an etching residue or a defect, it is preferable to use a side surface layer made of the above-described material. T / JP97 / 0 78

Further, when the same material is used for the lower electrode ^{4 ()} as the side surface layer, by covering the entire wiring layer, there is an effect that normal charge injection can be obtained.

 Furthermore, if the amount of charge injected from the tapered side surface can be suppressed to 1/50 or less of the amount of charge injected from the lower electrode, the same material should be used for the wiring layer and the side layer. May be formed. Specifically, Al, A1 alloy, Mo, Mo alloy, or the like can be used as such a material.

(3) Other components

 As the other components used in the present invention, specifically, as the support substrate, the lower electrode, the organic layer including the organic light emitting layer, and the counter electrode, those similar to the first to third inventions can be used. .

3. Method of forming wiring layer, lower electrode and side layer

 (1) Lift-off method (Part 1)

 In this method, a wiring layer is formed on a supporting substrate, patterned using a photo resist, and then a lower electrode is laminated. First, a wiring layer is formed on the support substrate 1 as shown in FIG. As a method for forming the wiring layer, an evaporation method, a sputtering ring method, a CVD method, or the like can be used.

 Next, as shown in FIG. 26 (b), a photo resist is applied to the portion where the wiring layer is to be provided to form a pattern.

Next, as shown in FIG. 26 (c), etching is performed while removing unnecessary portions as a photoresist and a wiring layer by reactive ion etching. The taper processing of the wiring layer can be performed by a mixed gas of CF4 and oxygen. The mixing ratio of CF 4 and oxygen (CF ₄ κο ₂ ) is preferably 0.6 to 1.

Next, as shown in Fig. 26 (d), a lower electrode and side layers are formed. Place the photo register in the area where you do not want to use it. At this time, if exposure from the back surface of the supporting substrate is used, a photo resist pattern can be formed without using a photo mask.

 Next, as shown in FIG. 26 (e), the lower electrode and the side layer are formed by a vapor deposition method, a sputtering method, or the like, and the photo resist 9 is separated from the lower electrode layer thereon. Thus, a lower portion of the organic EL device according to the fifth invention is formed.

 In the case of FIG. 26, the lower electrode and the side layer are formed simultaneously with the same material.

(2) Lift-off method (Part 2)

 Using the lift-off method (part 1), first, a wiring layer and a lower electrode are formed on the support substrate 1 as shown in FIG. 27 (a), and the wiring layer and the lower electrode are provided. Apply photoresist 9 to the area and pattern.

 Next, as shown in FIG. 27 (b), etching is performed while removing unnecessary portions as a photo resist and a wiring layer by etching. At that time, leave the photo register.

 Next, as shown in FIG. 27 (c), a photo resist 9 is provided at a position where no wiring layer is provided by back surface exposure.

 Next, as shown in FIG. 27 (d), a side surface layer is formed by vapor deposition or sputtering.

 Next, as shown in FIG. 27 (e), the lower portion of the organic EL device according to the fifth invention is processed by lift-off so that the portion formed by the vapor deposition or the sputtering ring remains only on the side surface. Is formed.

(3) Anodizing method (Part 1)

In this method, a side surface of a wiring layer is anodized, and an oxide film formed there is used as a side surface layer. PT / JP97 / 00788

-42- As shown in FIG. 28 (a), a patterned wiring layer 5 is formed on the supporting substrate 1. As a means for forming the wiring layer 5, the lift-off method (part 1) can be employed (see FIGS. 26 (a), (b) and (c)).

Next, as shown in FIG. 28 (b), a photo resist 9 is provided by _(at this time, the photo resist is provided up to the side surface of the wiring layer 5 by the above-mentioned lift-off method ( It is different from the method 1).

 Next, as shown in FIG. 28 (c), a lower electrode is provided by a method similar to the lift-off method (part 1).

 Next, as shown in FIG. 28 (d), the side surface of the wiring layer is oxidized by anodic oxidation to form a side layer.

(4) Anodizing method (Part 2)

 The structure shown in FIG. 29A is formed by the same method as the lift-off method (part 1).

 Next, as shown in FIG. 29 (b), a patterned wiring layer having a tapered cross section is formed by a method similar to the lift-off method (part 1). However, the photo resist layer 9 is left.

 Next, as shown in FIG. 29 (c), the side surface of the wiring layer is oxidized by an anodizing method to form a side layer.

 Next, the portion other than the upper surface of the wiring layer is covered with a photo resist, and the lower electrode is laminated by sputtering and vapor deposition. As shown, the lower part of the organic EL device of the fifth invention is formed.

(5) Anodizing method (Part 3)

In this method, a wiring layer is laminated first, then a lower electrode is laminated, and after patterning, a wiring layer not covered with the lower electrode is anodized to form a side layer. Patterned, tapered cross-section The stacked body of the negative wiring layer and the lower electrode can be formed by the method shown in the lift-off method (part 2) (see FIGS. 27 (a) and (b)). However, in this case, unlike in FIG. 27 (b), the photo resist layer is completely removed. Next, a side layer is formed by anodization. In this method, a non-oxidized metal such as Au or Pt must be used for the lower electrode. This method is particularly preferable because the number of steps required to form the lower portion of the organic EL device of the fifth invention is small.

VI. Sixth invention (Organic EL display device using organic EL element having a tapered wiring layer)

 The sixth invention basically relates to an organic EL display device using the organic EL element of the fifth invention.

 In the organic EL display device according to a sixth aspect, a plurality of scanning electrode lines and a plurality of signal electrode lines intersect, and light-emitting pixels are provided in the crossing region, and the light-emitting pixels are arranged in a plurality. . Each luminescent pixel is formed of an organic EL element having a lower electrode, an organic layer including an organic luminescent layer, and a counter electrode laminated in this order on a support substrate.

 The scanning electrode line includes a lower electrode and a wiring layer connected to the lower electrode, and a layer formed from the side layer covering the side surface of the wiring layer and the wiring layer has a trapezoidal (taper) cross section. The wiring layer is separated from the organic layer by a lower electrode and a side layer, and the signal electrode line includes a counter electrode.

 The luminescent pixel used in the sixth invention is formed of an element having the same configuration as the organic EL element of the fifth invention. Therefore, the organic EL device constituting the present invention can be manufactured using the same material as the organic EL device described in the fifth invention and by the same method. Further, the same configuration as that described in the fifth invention can be employed.

Further, regarding the scanning electrode lines, signal electrode lines and display device of the present invention, Since the contents described in the fourth invention can be employed as they are, the resistance of the scan electrode lines can be reduced similarly to the fourth invention. However, in the present invention, disconnection of a layer laminated on the lower electrode layer is prevented by employing a wiring layer having a specific shape instead of a flat layer. Hereinafter, the present invention will be described more specifically with reference to examples.

[Example 1] (Preparation of substrate used for organic EL device of first invention)

l OO mm X l OO mm blue plate (soda lime) After photo coating the photo resist on glass, expose it, and open the photo resist with a width of 10 ^ m and a pitch of 100 m. The part was patterned. The number of opening lines was set to 960. Next, buffered hydrofluoric acid (HF: NH ₄ F

: H ₂ 0 = 5: 1: 6), and etching was performed until the depth of the groove became 0. Next, an A1 film was formed with a thickness of 0.5 m by sputtering. Next, the substrate was immersed in acetonitrile, and all but A1 formed in the groove were removed together with the photo resist. Next, 100 mm of ITO was formed on the substrate by sputtering ring. 80 μm width. IT0 lines with a pitch of 100 m are etched by photolithography on the A1 line, which is the wiring layer embedded in the board. This was formed. The A1 line was positioned so as to overlap the edge of the ITO line, and it was confirmed that the ITO line and the A1 line were in good electrical connection. When the resistance of one electrode line was measured, it was 800 Ω at a length of 10 cm, which proved to be a sufficiently low resistance.

[Example 2] (Production of the organic electroluminescent device of the first invention)

On a substrate prepared in Example 1, an amide oligomer was formed by a vacuum evaporation method. (TPD74 shown below) was coated at 80 nm, and a ΤPD shown below was coated thereon at 20 nm. Here, TPD 74 serves as a hole injection layer, and PD serves as a hole transport layer. Next, the tris (8-hydroxyquinoline) A1 complex (A

1q) was vacuum-deposited at 60 nm. Next, A 1: Si (Li concentration 0.5 atomic%) alloy cathode was formed to 200 nm by vacuum evaporation. O All of these were continuously formed without opening the vacuum chamber to air. did. Before the formation of the A1: Li alloy cathode, the cathode was covered with a vapor deposition mask having an open line perpendicular to the ITO line. The number of mask opening lines was 240 and the line width was 200 m. Therefore, an XY matrix display of 340X (320X3) could be produced.

TPD74

TPD

[Example 3] (Evaluation of device using lower electrode of first invention as signal line) The display manufactured in Example 2 was sealed with a glass lid. The lower substrate and the glass lid were bonded with an ultraviolet curing resin, and a fluorinated hydrocarbon solution was injected into the glass lid. Next, a drive circuit was connected, the cathode was used as the scanning electrode, and the anode (ITO) was used as the signal electrode. When a display was displayed (duty 1Z120), no crosstalk was observed. There were no line defects due to disconnection of the cathode. Further, when the image was displayed, the image could be displayed without delay in the response speed of the display due to the resistance.

[Comparative Example 1] (Evaluation of conventional device)

 ITO lines having a pitch and width similar to those of Example 1 (the sheet resistance of ITO was 20 Ω / □) were formed on a glass substrate of 1 × 100 mm × 100 mm. When the resistance of one ITO line was measured in the same manner as in Example 1, the resistance was extremely high at 25 kΩ. A display was produced in the same manner as in Example 2. Sealing was performed in the same manner as in Example 3, and a drive circuit was connected.

 Since the I T0 line has a high resistance, the pixel group corresponding to the middle I T0 line was turned on, but the luminance unevenness was extremely severe and uniform light emission could not be obtained. Therefore, character and image display could not be performed well due to luminance unevenness.

[Example 4] (Organic EL device of the first invention)

On a glass substrate of lOO mm X lOO mm, an Al: Ti alloy (Ti 3 atomic%) film was formed to a thickness of 0.3 m by sputtering. A photo resist was spin-coated on this film and then exposed, so that a line opening of 20Om in width and 100 / m in pitch was laid out with 9600 lines. Next, a current was passed through the A1 alloy film by anodization to oxidize it. As the electrolyte, an aqueous solution of about 0.01% by weight of citric acid was used. By this process, the flattening layer becomes an A1 oxide film, and the wiring layers are insulated from each other. Many lines were formed. Next, a Τ0 line having a width of 80 m and a pitch of 100 m was formed in the same manner as in Example 2. When one of the lines was measured, it was 400 Ω at a length of 1 cm. Next, a display was prepared and sealed in the same manner as in Examples 2 and 3. When this display was driven in the same manner as in Example 3, an image free of line defects could be displayed favorably.

[Comparative Example 2] (Example of conventional device)

 960 ITO lines having a pitch of 800 zm and a pitch of 100 zm were formed on a glass substrate of 100 mm × 100 mm. Next, an A1 film was formed to a thickness of 0.5 m on the IT0 line by sputtering. This was etched to form an A1 wiring layer line having a width of 10 / im on the ITO line. No interlayer insulating film was formed on the A1 wiring layer line.

[Comparative Example 3] (Example of conventional device)

 The cross section of the A1 wiring layer was observed with a scanning electron microscope. The taper angle formed on the step was 75 °, and the step was steep. Next, this A 1 was formed into an oxide film with a thickness of 0.2 μπι by anodizing. The electrolyte solution used was a mixture of 0.1 lmo 1 ammonium tartrate and ethylene glycol at a volume ratio of 1: 9. The voltage used was 240 V.

[Comparative Example 4] (Evaluation of conventional device)

Using the substrates of Comparative Examples 2 and 3, displays were produced in the same manner as in Example 2. When the substrate of Comparative Example 2 was used, a number of short-circuits between the cathode and the anode occurred, and there was much display crosstalk. In addition, many disconnections of the cathode occurred, resulting in many display defects and no good image display. This is because disconnection of the cathode occurred due to a step in the A1 wiring layer. When the substrate of Comparative Example 3 was used, the short circuit between the anodes It did not occur due to the effect of the insulating film. However, since the interlayer insulating film was not flattened, disconnection of the cathode occurred and display defects occurred.

[Example 5] (Organic EL device of the second invention)

Etching was performed in the same manner as in Comparative Example 2 to form 960 lines each provided with an AI having a width of 10 m on an ITO having a width of 80 m. However as the E Tsuchingu solution HF: HN 03: CH 3 CO OH: H 2 0 of 5: 1 5: 2 0: used as the 3 ratio was the A 1 step tapered, Te one path one The angle was 20 °, which was extremely smooth. The taper processing may be performed by dry etching using plasma gas of CC14. Next, anodic oxidation was performed using a 0.2 mo 11 ammonium borate solution using the A 1 line as an anode to form a 0.2 Å anodic oxide film. At this time, the voltage was 250 V. As a result, a planarized interlayer insulating film was formed on the A 1 wiring layer line. The step had a taper angle of 21 °, and was extremely smooth and flat. A display was manufactured in the same manner as in Example 2, and further, an image was displayed by driving in the same manner as in Example 3. There was no disconnection of the cathode and no line display defects. When the pixels were displayed, there was no delay in the response speed of the display due to the electrode resistance, and the display itself was good.

[Example 6] (Element of the second invention (double XY matrix))

A number of IT0 dot patterns were formed on a 100 Omm x 100 mm glass substrate in the pattern shown in Fig. 14. Next, the wiring line of the wiring layer having the pattern shown in FIG. 14 was formed by the A1 film. A film having a thickness of 0.5 m and a width of 10 μm was subjected to taper processing in the same manner as in Example 5, and an interlayer insulating film was provided thereon. This interlayer insulating film was flattened. Next, a display was prepared and sealed in the same manner as in Example 2. Because of the double XY matrix shown in Fig. 14, the driving duty for 240 scanning lightning poles is from 1Z240 to 1Z12. The display can be reduced to 0, and good display without crosstalk can be achieved. Because the duty was reduced, the drive voltage was reduced by 22%, and the power consumption was also reduced by 22%.

[Example 7] (Element of the second invention (quadruple XY matrix))

 An element having a quadruple matrix shown in FIG. 15 was produced in the same manner as in Example 6. Since the duty was reduced from 1/240 to 160, the drive voltage was reduced by 35% and the power consumption was reduced by 35%.

[Example 8] (Manufacturing by an anodizing method a support substrate having a lower electrode laminated thereon, which constitutes the organic EL device of the third invention)

 An Al-Ti alloy (Ti content = 3 atm%) film with a thickness of 400 nm was formed on a lOOmmXlOOmm glass substrate (supporting substrate) by sputtering.

 Next, a photo resist was spin-coated on this film, and then exposed, so that 240 lines with a width of 20 m and a pitch of 220 were opened.

 Next, an electric current was applied to the A1-1Ti alloy film by an anodizing method using an aqueous solution of citric acid having a concentration of 0.01% by weight as an electrolyte. By this treatment, the A 1 oxide film was used as a flattening layer, and a large number of A 1 _ T i alloy lines (wiring layer having a width of 200 / im) were formed in between each other while being insulated from each other.

Next, the photo-resist is removed and the In-Zn-0 oxide electrode (lower electrode) is formed on the Al-Ti alloy line (wiring layer) by sputtering. Formed. Spatter-ring is the atmospheric gas of argon: oxygen = 1 0 0 0: 2 and 8 (volume ratio), the degree of vacuum and 0. 2 P a, a sputtering-rings outputs a 2 W cm ² I went.

Next, a predetermined number of lines were patterned so as to cover the wiring layer, thereby forming a lower electrode line. After that, an arbitrary 10 electrodes were selected from the lower electrodes formed on the manufactured laminate, and the resistance value per unit length was measured. Table 3 shows the results.

[Example 9] (Manufacturing of a supporting substrate on which a lower electrode is laminated, which constitutes the organic EL device according to the fifth invention, by an anodizing method)

 On a 100 mm X 100 mm glass substrate (supporting substrate), an A 1 — Ti alloy (Ti content = 3 atm%) film with a thickness of 400 nm was formed by sputtering ring. A platinum thin film of 10 nm was formed thereon by sputtering ring.

 Next, the photoresist was spin-coated and exposed, so that a large number of 20 m wide, 22 m pitch lines were opened.

Next, etching was performed by RIE (reactive ion etching) at a flow rate ratio of CF ₄ to oxygen gas of 575: 625 sccm, a pressure of 40 Pa, and a supporting substrate temperature of 90 ° C. . It was confirmed beforehand that etching under this condition could be performed at a taper angle of 30 degrees. By this processing, the pattern cross section of the A 1 — Ti alloy becomes trapezoidal and becomes a wiring layer. On the other hand, platinum becomes the lower electrode.

 Next, the side surface of this wiring layer was formed into a side layer composed of A120 ::; by anodization. First, an aqueous solution of ammonium was added to a 1: 9 (volume ratio) mixed solution of an ammonium tartrate solution and ethylene glycol to prepare an electrolyte solution whose pH was adjusted to 7.0.

 Next, the supporting substrate on which the wiring layer and the lower electrode were laminated was immersed in this electrolyte solution, the wiring layer was used as an anode, and the platinum mesh electrode installed in the electrode solution tank was used as a cathode and the applied voltage Anodization was performed at 4 OV. As a result, the side of the oxide layer that is not covered by the lower electrode is oxidized, and A1? 0; ¾ A layer was formed.

Thereafter, the resistance was measured in the same manner as in Example 8. Table 3 shows the results. [Example 10] (Manufacture by a polymer-flattening method of a support substrate on which a lower electrode is laminated, which constitutes the organic EL element of the third invention)

 An Al-Ti alloy (Ti content = 3 atm%) film with a thickness of 2 ^ m is formed on a glass substrate (supporting substrate) of lOO mm X lOO mm by sputtering ring. The photo resist was exposed on the top after exposure, so that 240 openings with a width of 20 m and a pitch of 220 m were lined up.

 Next, etching was performed by RIE (reactive ion etching) using CF 4 and a gas species to form the opening. Then, after the photo resist was removed by stripping, a commercially available polyimide coating solution having a photosensitive function was applied by 4 m to flatten it. After that, curing was performed by exposure so that the contact holes were opened.

Next, an In—Zn—0 oxide electrode (lower electrode) was formed on the 1-alloy line (wiring layer) to a thickness of 100 nm by sputtering. . For sputtering, the atmospheric gas was argon: oxygen = 100: 0: 2.8 (volume ratio), the degree of vacuum was 0.2 Pa, and the snow output was 2 W / cm ² was performed. At that time, the lower electrode was formed such that the lower electrode and the wiring layer were in contact with each other in the contact hole. Then, it was processed into a line shape with a width of 20 zm and a pitch of 220 m.

 Thereafter, the resistance was measured in the same manner as in Example 8. Table 3 shows the results.

[Comparative Example 5] (Example of conventional device)

 On a lOOmmXlOOmm glass substrate (supporting substrate), a 200 nm thick In-Zn-0 film was formed by sputtering ring. For sputtering, the atmospheric gas was argon: oxygen = 100: 2.8.

(Volume ratio), the degree of vacuum is 0.2 Pa, and the sputtering output is The test was performed at 2 W / cm 2. The sheet resistance of the formed In—Zn—0 film was 15 Ω / □. This thin film was processed by photolithography so that a 1n-Zn-0 film line with a width of 200 μτη and a pitch of 220 m was formed.

 Thereafter, the resistance was measured in the same manner as in Example 8. Table 3 shows the results.

Comparative Example 6 (Evaluation of Resistance of Lower Electrode Sustained in Thin Wire Wiring Layer) A laminated board composed of a support substrate, a wiring layer, and a lower electrode was prepared in the same manner as in Example 8. At that time, the width of the wiring layer was set to 20 ^ m, and the width of the lower electrode was set to 1Z10.

 Thereafter, the resistance was measured in the same manner as in Example 8. Table 3 shows the results. Table 3

From Table 3, it can be seen that the lower electrode formed on the laminate constituting the organic EL device of the present invention has a very low resistance, a large screen and a high-density organic EL display. Applicable to the device as a scanning line

[Example 11] (Production of organic EL device of third invention)

 The laminate prepared in Example 8 was washed with isopropanol, and further washed for 5 minutes using both ultraviolet light and ozone.

 Next, using a vacuum evaporation method, TPD74 having a structure shown below was coated as a hole injection layer so as to have a film thickness of 8 O nm. NPD having the following structure was coated as a layer by vacuum evaporation at 2 O nm.

TPD74

Next, a tris (8-hydroxyquinoline) aluminum complex, which is a light-emitting material of blue color, was vacuum-deposited at 6 O nm. On top of that, an Mg-Ag alloy was vacuum-deposited at 10 nm to form an electron injection electrode layer. During vacuum deposition of the Mg-Ag alloy, Mg and Ag were deposited at a deposition rate of 14: 1 to form an alloy on the deposition surface. PT / JP97 / 00788

After that, the laminate was transferred to a sputtering chamber without opening the vacuum chamber in which the vacuum deposition was performed, and a 200 nm-thick In—Zn—0 layer was formed by DC sputtering. A film was formed to obtain an amorphous transparent conductive film. The conditions were as follows: the atmosphere gas was argon: oxygen = 100: 2.8 (volume ratio), the degree of vacuum was 0.2 Pa, and the sputtering output was 0.5 / cm. I went as 2.

 When forming the electron injection electrode layer and the amorphous transparent conductive film, a polyimide film deposition mask (width of 200 / m, pitch of 300 μm) was used for 240 lines. (Opening).

 Next, the organic EL device produced by the above method was sealed with a glass lid. The sealing was carried out in a nitrogen atmosphere by bonding the supporting substrate and the glass lid with an ultraviolet curing resin.

 Then, a wiring layer connected to the lower electrode is used as a scanning line, and a counter electrode formed of the electron injection electrode layer and the amorphous transparent conductive film is used as a signal line. As a result, the luminous efficiency of the organic EL device was 3.2 cd / A, and there was no crosstalk. Also, there was no line defect due to disconnection of the signal line, and good pixel display was obtained.

[Example 12] (Fabrication of the organic EL device of the fifth invention or the organic EL display device of the sixth invention)

 When pixel display was performed using an OLED display manufactured using the same method as that of Example 11 using the mating board prepared by the method of Example 9, no crosstalk was observed. Also, there was no line defect due to disconnection of the signal line, and good pixel display was obtained.

Example 13 (Production of Organic EL Element of Third Invention or Organic EL Display Device of Fourth Invention)

Using the laminate prepared by the method of Example 10, the same as in Example 11 When pixel display was performed using an organic EL display device manufactured by the method, no crosstalk was found, and no line defect was caused by disconnection of a signal line, and good pixel display was obtained.

[Comparative Example 7]

 When pixel display was performed using an organic EL display device manufactured using the same method as in Example 11 using the laminate prepared by the method of Comparative Example 5, the resistance of the scanning line was high. However, uniform light emission cannot be obtained and display is not possible.

[Comparative Example 8]

 When pixel display was performed using an organic EL display device manufactured using the same method as in Example 11 using the laminate prepared by the method of Comparative Example 6, the drive voltage increased. Compared to the case of 1, the brightness reached 100 V at full brightness at 100 cdm ^, and it became clear that a higher voltage was required during driving. In this case, the applied voltage can be increased by constant current driving. Note that the display device of Comparative Example 8 can extract light emission from below and above the substrate. For this reason, the luminance is corrected taking this point into account. Industrial applicability

 As described above, the organic electroluminescent element and the organic electroluminescent display of the present invention are suitably used mainly for various displays for information industry equipment. Particularly, in a display with a high definition and a large size, it is particularly preferably used because a voltage drop due to wiring and a response delay at the time of driving due to a voltage resistance can be prevented.

Claims

The scope of the claims

1. An organic electroluminescent device having a lower electrode, an organic layer including an organic light emitting layer, and a counter electrode laminated in this order on a support substrate,

The lower electrode, 0. 5 X 1 0 - are those having ⁴ Omega · cm or more resistivity, the lower electrode of the brackets, to the wiring layer for the resistance value decreases is connected to al An organic electroluminescent element characterized in that the wiring layer is embedded in a flattening layer provided between the supporting substrate and the lower electrode or in the supporting substrate.

2. The wiring layer, wherein the wiring layer is embedded in a flattening layer provided between the support substrate and the lower electrode or embedded in the support substrate and covered by the lower electrode. The organic electroluminescent element according to 1.

3. An organic electroluminescence element having a lower electrode, an organic layer including an organic light emitting layer, and a counter electrode laminated in this order on a supporting substrate,

The lower electrode, 0. 5 XI 0 - are those having ⁴ Omega · cm or more resistivity, the lower electrode of the brackets, wiring layer for reducing the resistance value is connected, wires Furthermore, the child An organic electroluminescent element, wherein the layer is covered with a planarized interlayer insulating film provided between the organic layer and an organic layer including an organic light emitting layer.

4. The organic electroluminescence device according to claim 1, wherein the lower electrode is a transparent electrode.

5. The organic EL device according to claim 1, wherein the planarization layer or the interlayer insulating film is an oxide film formed by oxidizing a surface of a metal film forming a wiring layer. Luminescent element.

6. The organic electroluminescent element according to claim 3, wherein the cross-sectional shape of the interlayer insulating film is trapezoidal (tapered).

7. The organic electroluminescent device according to any one of claims 1 to 3, wherein the lower electrode and the counter electrode form an XY matrix. Sensing element.

8. The organic electroluminescent element according to claim 1, wherein the resistance of the electrode line reduced in resistance by the wiring layer is 5 kΩ or less. .

9. The organic electronic opening according to claim 7, wherein the XY matrix formed by the lower electrode and the counter electrode is a double, triple, or quadruple matrix. Luminescence element.

10. A wiring layer is connected to the lower electrode in an organic electroluminescence element in which a lower electrode, an organic layer including an organic light emitting layer, and a counter electrode are laminated in this order on a supporting substrate. The width (short side length) of the wiring layer is 15 to 150% of the width (short side length) of the lower electrode, and the wiring layer is between the supporting substrate and the lower electrode. An organic electroluminescence device, wherein the organic electroluminescence device is buried in a flattening layer provided in the device.

11. The organic electroluminescent element according to claim 10, wherein the lower electrode and the counter electrode form an XY matrix.

12. The organic electroluminescence device according to claim 10 or 11, wherein the resistance value of the wiring layer per unit length (1 cm) is smaller than 100 ohm.

13. A plurality of scanning electrode lines and a plurality of signal electrode lines intersect, and a light-emitting pixel is provided in the crossing area, and an organic electroluminescence device in which a plurality of the light-emitting pixels are arranged. In the luminescence display device, the light-emitting element is an organic electroluminescent element in which a lower electrode, an organic layer including an organic light-emitting layer, and a counter electrode are laminated in this order on a supporting substrate, and a scanning electrode is provided. The line is composed of a lower electrode and a wiring layer connected to the lower electrode.The wiring layer is embedded in a flattening layer provided between the supporting substrate and the lower electrode, and the signal electrode line includes a counter electrode. An organic electroluminescence display device characterized by the following.

14. The organic electroluminescence display device according to claim 13, wherein the width (short side length) of the wiring layer is 15 to 150% of the width (short side length) of the lower electrode.

15. The organic electroluminescence display device according to claim 13 or 14, wherein the resistance value of the wiring layer per unit length (1 cm) is smaller than 100 ohm.

16. In an organic EL device with a lower electrode, an organic layer including an organic light-emitting layer, and a counter electrode laminated in this order on a supporting substrate, a wiring layer is formed below the lower electrode. Is connected, the layer formed by the side surface layer covering the side surface of the wiring layer and the wiring layer has a trapezoidal (tapered) cross section, and the wiring layer is organic by the lower electrode and the side layer. An organic electroluminescent luminescent device characterized by being isolated from a layer.

17. The luminescent element according to claim 16, wherein the lower electrode and the counter electrode form an XY matrix.

18. The side layer is selected from the same material as the lower electrode layer, an insulating material, or a material in which the amount of charge injected into the organic layer is 1 150 or less compared to the lower electrode. 17. The organic electroluminescent element according to 7.

19. A plurality of scanning electrode lines and a plurality of signal electrode lines intersect, and a light-emitting pixel is provided in the crossing area, and an organic electrode in which a plurality of the light-emitting pixels are arranged. In the emission light emitting device, a light emitting pixel is formed by laminating a lower electrode, an organic layer including an organic light emitting layer, and a counter electrode on a supporting substrate in this order. The scanning electrode line is composed of a lower electrode and a wiring layer connected to the lower electrode. The layer formed by the side layer covering the side surface of the wiring layer and the wiring layer has a trapezoidal cross section (taper). The wiring layer is separated from the organic layer by a lower electrode and a side layer that covers the side surface of the wiring layer, and the signal electrode line includes a counter electrode. Troll luminescence display.

20. The side surface layer is selected from the same material as the lower electrode layer, an insulating material, or a material in which the amount of charge injected into the organic layer is 1Z50 or less as compared with the lower electrode. Organic electroluminescence display