WO1998002284A1 - Batch loader arm - Google Patents
Batch loader arm Download PDFInfo
- Publication number
- WO1998002284A1 WO1998002284A1 PCT/US1997/012227 US9712227W WO9802284A1 WO 1998002284 A1 WO1998002284 A1 WO 1998002284A1 US 9712227 W US9712227 W US 9712227W WO 9802284 A1 WO9802284 A1 WO 9802284A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- further characterized
- base
- drive arm
- arm
- drive
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
- Y10T74/20323—Robotic arm including flaccid drive element
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU36623/97A AU3662397A (en) | 1996-07-15 | 1997-07-14 | Batch loader arm |
JP10506225A JP2001500320A (en) | 1996-07-15 | 1997-07-14 | Batch loader arm |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/679,845 | 1996-07-15 | ||
US08/679,845 US5954472A (en) | 1996-07-15 | 1996-07-15 | Batch loader arm |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1998002284A1 true WO1998002284A1 (en) | 1998-01-22 |
Family
ID=24728614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1997/012227 WO1998002284A1 (en) | 1996-07-15 | 1997-07-14 | Batch loader arm |
Country Status (5)
Country | Link |
---|---|
US (1) | US5954472A (en) |
JP (1) | JP2001500320A (en) |
KR (1) | KR20000023807A (en) |
AU (1) | AU3662397A (en) |
WO (1) | WO1998002284A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009037675A2 (en) * | 2007-09-22 | 2009-03-26 | Dynamic Micro Systems | Transfer mechanism with multiple wafer handling capability |
JP2013093615A (en) * | 1998-07-10 | 2013-05-16 | Brooks Automation Inc | Substrate extraction method of substrate handling robot |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3548373B2 (en) * | 1997-03-24 | 2004-07-28 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
US6034000A (en) * | 1997-07-28 | 2000-03-07 | Applied Materials, Inc. | Multiple loadlock system |
US6610150B1 (en) * | 1999-04-02 | 2003-08-26 | Asml Us, Inc. | Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system |
US6949143B1 (en) | 1999-12-15 | 2005-09-27 | Applied Materials, Inc. | Dual substrate loadlock process equipment |
KR20070037517A (en) * | 2000-09-15 | 2007-04-04 | 어플라이드 머티어리얼스, 인코포레이티드 | Double dual slot load lock for process equipment |
FR2823188B1 (en) * | 2001-04-06 | 2003-09-05 | R2D Ingenierie | METHOD AND MANIPULATOR FOR TRANSFERRING MEDIA OF ELECTRONIC AND / OR COMPUTER COMPONENTS IN DISCS |
US7316966B2 (en) | 2001-09-21 | 2008-01-08 | Applied Materials, Inc. | Method for transferring substrates in a load lock chamber |
JP3999723B2 (en) * | 2003-10-08 | 2007-10-31 | 川崎重工業株式会社 | Substrate holding device |
US7207766B2 (en) | 2003-10-20 | 2007-04-24 | Applied Materials, Inc. | Load lock chamber for large area substrate processing system |
US20060254379A1 (en) * | 2005-05-13 | 2006-11-16 | Texas Instruments Incorporated | Akrion solvent hood robot arm, non-warp modular design |
KR100663399B1 (en) | 2005-08-13 | 2007-01-02 | 주식회사 사이보그-랩 | Robot arm with single link arm |
US7845891B2 (en) | 2006-01-13 | 2010-12-07 | Applied Materials, Inc. | Decoupled chamber body |
US7665951B2 (en) | 2006-06-02 | 2010-02-23 | Applied Materials, Inc. | Multiple slot load lock chamber and method of operation |
US7845618B2 (en) | 2006-06-28 | 2010-12-07 | Applied Materials, Inc. | Valve door with ball coupling |
US8124907B2 (en) | 2006-08-04 | 2012-02-28 | Applied Materials, Inc. | Load lock chamber with decoupled slit valve door seal compartment |
US20080181757A1 (en) * | 2007-01-26 | 2008-07-31 | Applied Robotics, Inc | Belt-driven robotic gripping device and method for operating |
US8784033B2 (en) * | 2009-01-11 | 2014-07-22 | Applied Materials, Inc. | Robot systems, apparatus and methods for transporting substrates |
WO2013042489A1 (en) * | 2011-09-22 | 2013-03-28 | プラス精機株式会社 | Device for changing pitch of stacked objects |
WO2014008009A1 (en) | 2012-07-05 | 2014-01-09 | Applied Materials, Inc | Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems |
KR102285254B1 (en) | 2013-08-26 | 2021-08-03 | 브룩스 오토메이션 인코퍼레이티드 | Substrate transport apparatus |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4728252A (en) * | 1986-08-22 | 1988-03-01 | Lam Research Corporation | Wafer transport mechanism |
US4813845A (en) * | 1987-03-16 | 1989-03-21 | Advanced Control Engineering, Inc. | Object transport apparatus |
US4837650A (en) * | 1985-10-17 | 1989-06-06 | Mitsubishi Denki Kabushiki Kaisha | Head positioning device |
US5183370A (en) * | 1989-12-29 | 1993-02-02 | Commissariat A L'energie Atomique | Apparatus for placing or storing flat articles in a cassette with intermediate racks |
US5332352A (en) * | 1989-03-07 | 1994-07-26 | Ade Corporation | Robot prealigner |
US5613821A (en) * | 1995-07-06 | 1997-03-25 | Brooks Automation, Inc. | Cluster tool batchloader of substrate carrier |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4702668A (en) * | 1985-01-24 | 1987-10-27 | Adept Technology, Inc. | Direct drive robotic system |
US4687542A (en) * | 1985-10-24 | 1987-08-18 | Texas Instruments Incorporated | Vacuum processing system |
US4749330A (en) * | 1986-05-14 | 1988-06-07 | Hine Derek L | Transport mechanism |
US4775281A (en) * | 1986-12-02 | 1988-10-04 | Teradyne, Inc. | Apparatus and method for loading and unloading wafers |
US4951601A (en) * | 1986-12-19 | 1990-08-28 | Applied Materials, Inc. | Multi-chamber integrated process system |
US4897015A (en) * | 1987-05-15 | 1990-01-30 | Ade Corporation | Rotary to linear motion robot arm |
JPH0630372B2 (en) * | 1987-09-10 | 1994-04-20 | 東京エレクトロン株式会社 | Semiconductor wafer processing equipment |
GB9115991D0 (en) * | 1991-07-24 | 1991-09-11 | Crane John Uk Ltd | Mechanical face seals |
JP3030667B2 (en) * | 1991-07-29 | 2000-04-10 | 東京エレクトロン株式会社 | Transfer device |
US5431529A (en) * | 1992-12-28 | 1995-07-11 | Brooks Automation, Inc. | Articulated arm transfer device |
US5474410A (en) * | 1993-03-14 | 1995-12-12 | Tel-Varian Limited | Multi-chamber system provided with carrier units |
-
1996
- 1996-07-15 US US08/679,845 patent/US5954472A/en not_active Expired - Lifetime
-
1997
- 1997-07-14 WO PCT/US1997/012227 patent/WO1998002284A1/en active IP Right Grant
- 1997-07-14 AU AU36623/97A patent/AU3662397A/en not_active Abandoned
- 1997-07-14 JP JP10506225A patent/JP2001500320A/en not_active Ceased
-
1999
- 1999-01-15 KR KR1019997000291A patent/KR20000023807A/en active IP Right Grant
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4837650A (en) * | 1985-10-17 | 1989-06-06 | Mitsubishi Denki Kabushiki Kaisha | Head positioning device |
US4728252A (en) * | 1986-08-22 | 1988-03-01 | Lam Research Corporation | Wafer transport mechanism |
US4813845A (en) * | 1987-03-16 | 1989-03-21 | Advanced Control Engineering, Inc. | Object transport apparatus |
US5332352A (en) * | 1989-03-07 | 1994-07-26 | Ade Corporation | Robot prealigner |
US5183370A (en) * | 1989-12-29 | 1993-02-02 | Commissariat A L'energie Atomique | Apparatus for placing or storing flat articles in a cassette with intermediate racks |
US5613821A (en) * | 1995-07-06 | 1997-03-25 | Brooks Automation, Inc. | Cluster tool batchloader of substrate carrier |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013093615A (en) * | 1998-07-10 | 2013-05-16 | Brooks Automation Inc | Substrate extraction method of substrate handling robot |
WO2009037675A2 (en) * | 2007-09-22 | 2009-03-26 | Dynamic Micro Systems | Transfer mechanism with multiple wafer handling capability |
WO2009037675A3 (en) * | 2007-09-22 | 2009-07-23 | Dynamic Micro Systems | Transfer mechanism with multiple wafer handling capability |
US9728436B2 (en) | 2007-09-22 | 2017-08-08 | Brooks Automation, Gmbh | Transfer mechanism with multiple wafer handling capability |
Also Published As
Publication number | Publication date |
---|---|
JP2001500320A (en) | 2001-01-09 |
US5954472A (en) | 1999-09-21 |
KR20000023807A (en) | 2000-04-25 |
AU3662397A (en) | 1998-02-09 |
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