WO1998006143A1 - Apparatus and methods for cleaning delicate parts - Google Patents
Apparatus and methods for cleaning delicate parts Download PDFInfo
- Publication number
- WO1998006143A1 WO1998006143A1 PCT/US1997/012853 US9712853W WO9806143A1 WO 1998006143 A1 WO1998006143 A1 WO 1998006143A1 US 9712853 W US9712853 W US 9712853W WO 9806143 A1 WO9806143 A1 WO 9806143A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- frequency
- generator
- transducer
- ultrasound
- bandwidth
- Prior art date
Links
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/10—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0207—Driving circuits
- B06B1/0223—Driving circuits for generating signals continuous in time
- B06B1/0269—Driving circuits for generating signals continuous in time for generating multiple frequencies
- B06B1/0276—Driving circuits for generating signals continuous in time for generating multiple frequencies with simultaneous generation, e.g. with modulation, harmonics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
- B06B1/0618—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile of piezo- and non-piezoelectric elements, e.g. 'Tonpilz'
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/004—Mounting transducers, e.g. provided with mechanical moving or orienting device
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/004—Mounting transducers, e.g. provided with mechanical moving or orienting device
- G10K11/006—Transducer mounting in underwater equipment, e.g. sonobuoys
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/71—Cleaning in a tank
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU39621/97A AU3962197A (en) | 1996-08-05 | 1997-08-01 | Apparatus and methods for cleaning delicate parts |
CA002262540A CA2262540C (en) | 1996-08-05 | 1997-08-01 | Apparatus and methods for cleaning delicate parts |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US2315096P | 1996-08-05 | 1996-08-05 | |
US60/023,150 | 1996-08-05 | ||
US08/718,945 US5834871A (en) | 1996-08-05 | 1996-09-24 | Apparatus and methods for cleaning and/or processing delicate parts |
US08/718,945 | 1996-09-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1998006143A1 true WO1998006143A1 (en) | 1998-02-12 |
Family
ID=26696789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1997/012853 WO1998006143A1 (en) | 1996-08-05 | 1997-08-01 | Apparatus and methods for cleaning delicate parts |
Country Status (6)
Country | Link |
---|---|
US (6) | US5834871A (en) |
AU (1) | AU3962197A (en) |
CA (1) | CA2262540C (en) |
MY (1) | MY121247A (en) |
TW (1) | TW407066B (en) |
WO (1) | WO1998006143A1 (en) |
Cited By (5)
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US7210354B2 (en) | 1997-06-16 | 2007-05-01 | Puskas William L | Sensing system for measuring cavitation |
FR3061836A1 (en) * | 2017-01-17 | 2018-07-20 | Gil Ching | DEVICE AND METHOD FOR CLEANING AND / OR DECONTAMINATING FOODS WITH HIGH FREQUENCY ACOUSTIC WAVES |
EP2217891B1 (en) * | 2007-11-13 | 2019-02-27 | Johnson Matthey PLC | Level measurement system |
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---|---|---|---|---|
US6016821A (en) * | 1996-09-24 | 2000-01-25 | Puskas; William L. | Systems and methods for ultrasonically processing delicate parts |
US5834871A (en) * | 1996-08-05 | 1998-11-10 | Puskas; William L. | Apparatus and methods for cleaning and/or processing delicate parts |
US6653760B1 (en) * | 1996-05-09 | 2003-11-25 | Crest Ultrasonics Corporation | Ultrasonic transducer using third harmonic frequency |
US7336019B1 (en) | 2005-07-01 | 2008-02-26 | Puskas William L | Apparatus, circuitry, signals, probes and methods for cleaning and/or processing with sound |
US7629726B2 (en) * | 2007-07-11 | 2009-12-08 | Puskas William L | Ultrasound system |
US6822372B2 (en) | 1999-08-09 | 2004-11-23 | William L. Puskas | Apparatus, circuitry and methods for cleaning and/or processing with sound waves |
US6313565B1 (en) * | 2000-02-15 | 2001-11-06 | William L. Puskas | Multiple frequency cleaning system |
US20060086604A1 (en) * | 1996-09-24 | 2006-04-27 | Puskas William L | Organism inactivation method and system |
US6462461B1 (en) | 2000-06-30 | 2002-10-08 | William L. Puskas | Circuitry to modify the operation of ultrasonic generators |
US8075695B2 (en) * | 1996-08-05 | 2011-12-13 | Puskas William L | Apparatus, circuitry, signals, probes and methods for cleaning and/or processing with sound |
US20080047575A1 (en) * | 1996-09-24 | 2008-02-28 | Puskas William L | Apparatus, circuitry, signals and methods for cleaning and processing with sound |
US6039059A (en) | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
US5925966A (en) * | 1997-08-08 | 1999-07-20 | Green Clouds Ltd. | Method for protecting ultrasonic transducers from deterioration |
US6290778B1 (en) | 1998-08-12 | 2001-09-18 | Hudson Technologies, Inc. | Method and apparatus for sonic cleaning of heat exchangers |
US6424076B1 (en) * | 1998-10-07 | 2002-07-23 | The B. F. Goodrich Company | Incremental switched deformable mirror |
US6492284B2 (en) * | 1999-01-22 | 2002-12-10 | Semitool, Inc. | Reactor for processing a workpiece using sonic energy |
US6799583B2 (en) * | 1999-05-13 | 2004-10-05 | Suraj Puri | Methods for cleaning microelectronic substrates using ultradilute cleaning liquids |
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US6372389B1 (en) | 1999-11-19 | 2002-04-16 | Oki Electric Industry Co, Ltd. | Method and apparatus for forming resist pattern |
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US7451774B2 (en) * | 2000-06-26 | 2008-11-18 | Applied Materials, Inc. | Method and apparatus for wafer cleaning |
US20020157685A1 (en) * | 2000-09-11 | 2002-10-31 | Naoya Hayamizu | Washing method, method of manufacturing semiconductor device and method of manufacturing active matrix-type display device |
DE10109932A1 (en) * | 2001-02-21 | 2002-08-22 | Brunner Und Joachim Straka Johann | Piezo element for ultrasound generation and piezoelectric transducer |
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US6691578B1 (en) * | 2003-02-28 | 2004-02-17 | William L. Puskas | Measurement systems for ultrasound in a vessel |
US20040251780A1 (en) * | 2003-05-09 | 2004-12-16 | Goodson J. Michael | Advanced ceramics in ultrasonic transducerized devices |
US6890390B2 (en) * | 2003-05-22 | 2005-05-10 | Lawrence Azar | Method for ultrasonic cleaning using phased transducer arrays |
US7645343B2 (en) * | 2003-06-12 | 2010-01-12 | Sez America, Inc. | Uniform cavitation for particle removal |
US7235495B2 (en) * | 2003-07-31 | 2007-06-26 | Fsi International, Inc. | Controlled growth of highly uniform, oxide layers, especially ultrathin layers |
IL157229A (en) * | 2003-08-04 | 2006-08-20 | Zamir Tribelsky | Method for energy coupling especially useful for disinfecting and various systems using it |
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US7495371B2 (en) * | 2003-09-08 | 2009-02-24 | The Crest Group, Inc. | Cleaning tank with sleeved ultrasonic transducer |
TW200517192A (en) * | 2003-09-11 | 2005-06-01 | Fsi Int Inc | Semiconductor wafer immersion systems and treatments using modulated acoustic energy |
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US20050077182A1 (en) * | 2003-10-10 | 2005-04-14 | Applied Materials, Inc. | Volume measurement apparatus and method |
AU2004287498C1 (en) * | 2003-11-05 | 2010-06-17 | The Crest Group, Inc. | Ultrasonic Processing Method and Apparatus with Multiple Frequency Transducers |
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EP1791658A2 (en) * | 2004-09-15 | 2007-06-06 | Akrion Technologies, Inc. | System and method of powering a sonic energy source and use of the same to process substrates |
WO2007011379A2 (en) * | 2004-09-20 | 2007-01-25 | Dominion Engineering Inc. | Improved field transportable high-power ultrasonic transducer assembly |
US20060130870A1 (en) * | 2004-12-21 | 2006-06-22 | Ping Cai | Method for sonic cleaning of reactor with reduced acoustic wave cancellation |
DE102005021985A1 (en) * | 2005-05-09 | 2006-11-16 | Rena Sondermaschinen Gmbh | Sound generation and emission method for cleaning articles immersed in fluid involves generating signals that are modulated according to frequency or intensity |
US20070103034A1 (en) * | 2005-11-04 | 2007-05-10 | Impulse Devices Inc. | Acoustic driver assembly with increased head mass displacement amplitude |
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US20070235058A1 (en) * | 2006-04-10 | 2007-10-11 | Daniel Harrington | System and method for removing residue from a wafer processing chamber using sound waves |
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US8517728B2 (en) | 2007-01-24 | 2013-08-27 | Colgate-Palmolive Company | Oral care implement having fluid delivery system |
US20080312460A1 (en) * | 2007-06-13 | 2008-12-18 | Goodson J Michael | Multi-Frequency Ultrasonic Apparatus and Process for Producing Biofuels |
US7530272B2 (en) * | 2007-08-15 | 2009-05-12 | Chang Gung University | Multiple frequency ultrasound apparatus |
WO2009038456A1 (en) * | 2007-09-18 | 2009-03-26 | Röntgen Technische Dienst B.V. | Inspection device and method for inspection |
US20090173358A1 (en) * | 2008-01-09 | 2009-07-09 | Micron Technology, Inc. | Megasonic cleaning with controlled boundary layer thickness and associated systems and methods |
PE20100041A1 (en) * | 2008-03-25 | 2010-02-06 | Albemarle Corp | METHODS TO REDUCE OR ELIMINATE BACTERIA FROM HUMAN CONSUMING EGGS |
JP2009248066A (en) * | 2008-04-11 | 2009-10-29 | Tiyoda Electric Co Ltd | Ultrasonic cleaning device |
US20100126942A1 (en) * | 2008-11-20 | 2010-05-27 | Thottathil Sebastian K | Multi-frequency ultrasonic apparatus and process with exposed transmitting head |
US20100146713A1 (en) * | 2008-11-21 | 2010-06-17 | Yoav Medan | Method and Apparatus for Washing Fabrics Using Focused Ultrasound |
JP2010162487A (en) * | 2009-01-16 | 2010-07-29 | Sony Corp | Piezo-electric vibration device system and electrical appliance |
US20110132404A1 (en) * | 2009-03-16 | 2011-06-09 | Lutz Todd M | Method and apparatus for cleaning of laparoscopic surgical instruments |
US8331196B2 (en) * | 2009-04-14 | 2012-12-11 | Covaris, Inc. | System and method for controlling an acoustic transducer |
US9475099B2 (en) * | 2009-10-12 | 2016-10-25 | Ultrasonic Power Corporation | Ultrasonic cleaning system with transducer failure indicator |
US8691145B2 (en) * | 2009-11-16 | 2014-04-08 | Flodesign Sonics, Inc. | Ultrasound and acoustophoresis for water purification |
CA2790849C (en) * | 2010-02-26 | 2016-07-05 | Colgate-Palmolive Company | Fluid delivery system for an oral care implement |
US20130206165A1 (en) * | 2010-03-03 | 2013-08-15 | Ahmed Busnaina | Damage Free Cleaning Using Narrow Band Megasonic Cleaning |
US8398326B2 (en) | 2010-03-04 | 2013-03-19 | Colgate-Palmolive Company | Fluid dispensing oral care implement |
US20140136366A1 (en) | 2012-11-12 | 2014-05-15 | Restaurant Technology Inc. | System and method for receiving and managing remotely placed orders |
US10640357B2 (en) | 2010-04-14 | 2020-05-05 | Restaurant Technology Inc. | Structural food preparation systems and methods |
US9228785B2 (en) | 2010-05-04 | 2016-01-05 | Alexander Poltorak | Fractal heat transfer device |
US10852069B2 (en) | 2010-05-04 | 2020-12-01 | Fractal Heatsink Technologies, LLC | System and method for maintaining efficiency of a fractal heat sink |
WO2011159957A2 (en) | 2010-06-16 | 2011-12-22 | Flodesign Sonics, Inc. | Phononic crystal desalination system and method of use |
JP5470186B2 (en) * | 2010-07-30 | 2014-04-16 | 日本発條株式会社 | Inspection device cleanliness inspection device and cleanliness inspection method |
US9421553B2 (en) | 2010-08-23 | 2016-08-23 | Flodesign Sonics, Inc. | High-volume fast separation of multi-phase components in fluid suspensions |
MY188904A (en) * | 2010-10-05 | 2022-01-13 | Univ Putra Malaysia | A method and apparatus for high intensity ultrasonic treatment of baking materials |
RU2557428C2 (en) | 2011-03-09 | 2015-07-20 | Колгейт-Палмолив Компани | Interdental space cleaning device |
CA2891982C (en) | 2011-03-28 | 2016-11-29 | Colgate-Palmolive Company | Toothbrush having oral care fluid delivery |
US9190881B1 (en) | 2011-08-02 | 2015-11-17 | Tooltek Engineering Corporation | Rotary-powered mechanical oscillator |
US9086346B2 (en) * | 2011-10-21 | 2015-07-21 | National Chung Cheng University | Method for processing a sensor chip |
US9567559B2 (en) | 2012-03-15 | 2017-02-14 | Flodesign Sonics, Inc. | Bioreactor using acoustic standing waves |
US10322949B2 (en) | 2012-03-15 | 2019-06-18 | Flodesign Sonics, Inc. | Transducer and reflector configurations for an acoustophoretic device |
US9272234B2 (en) | 2012-03-15 | 2016-03-01 | Flodesign Sonics, Inc. | Separation of multi-component fluid through ultrasonic acoustophoresis |
US9752113B2 (en) | 2012-03-15 | 2017-09-05 | Flodesign Sonics, Inc. | Acoustic perfusion devices |
US9752114B2 (en) | 2012-03-15 | 2017-09-05 | Flodesign Sonics, Inc | Bioreactor using acoustic standing waves |
US10689609B2 (en) | 2012-03-15 | 2020-06-23 | Flodesign Sonics, Inc. | Acoustic bioreactor processes |
US9950282B2 (en) | 2012-03-15 | 2018-04-24 | Flodesign Sonics, Inc. | Electronic configuration and control for acoustic standing wave generation |
US9458450B2 (en) | 2012-03-15 | 2016-10-04 | Flodesign Sonics, Inc. | Acoustophoretic separation technology using multi-dimensional standing waves |
US10370635B2 (en) | 2012-03-15 | 2019-08-06 | Flodesign Sonics, Inc. | Acoustic separation of T cells |
US9796956B2 (en) | 2013-11-06 | 2017-10-24 | Flodesign Sonics, Inc. | Multi-stage acoustophoresis device |
US9783775B2 (en) | 2012-03-15 | 2017-10-10 | Flodesign Sonics, Inc. | Bioreactor using acoustic standing waves |
US10953436B2 (en) | 2012-03-15 | 2021-03-23 | Flodesign Sonics, Inc. | Acoustophoretic device with piezoelectric transducer array |
US10967298B2 (en) | 2012-03-15 | 2021-04-06 | Flodesign Sonics, Inc. | Driver and control for variable impedence load |
US9745548B2 (en) | 2012-03-15 | 2017-08-29 | Flodesign Sonics, Inc. | Acoustic perfusion devices |
US9688958B2 (en) | 2012-03-15 | 2017-06-27 | Flodesign Sonics, Inc. | Acoustic bioreactor processes |
US10704021B2 (en) | 2012-03-15 | 2020-07-07 | Flodesign Sonics, Inc. | Acoustic perfusion devices |
US10737953B2 (en) | 2012-04-20 | 2020-08-11 | Flodesign Sonics, Inc. | Acoustophoretic method for use in bioreactors |
US11324873B2 (en) | 2012-04-20 | 2022-05-10 | Flodesign Sonics, Inc. | Acoustic blood separation processes and devices |
EP2703094B1 (en) | 2012-08-27 | 2019-10-02 | IMEC vzw | A system for delivering ultrasonic energy to a liquid and its use for cleaning of solid parts |
GB2506939B (en) | 2012-10-15 | 2017-04-05 | Alphasonics (Ultrasonic Cleaning Systems) Ltd | Improvements in and relating to ultrasonic cleaning |
RU2601930C1 (en) | 2012-10-26 | 2016-11-10 | Колгейт-Палмолив Компани | Oral care device |
US9242340B1 (en) * | 2013-03-12 | 2016-01-26 | Western Digital Technologies, Inc. | Method to stress relieve a magnetic recording head transducer utilizing ultrasonic cavitation |
US9675747B2 (en) * | 2013-03-15 | 2017-06-13 | William L Puskas | Methods and systems for improved cavitation efficiency and density, cancer cell destruction, and/or causing a target object to be a cavitation nucleus |
US9745569B2 (en) | 2013-09-13 | 2017-08-29 | Flodesign Sonics, Inc. | System for generating high concentration factors for low cell density suspensions |
CA2935960C (en) | 2014-01-08 | 2023-01-10 | Bart Lipkens | Acoustophoresis device with dual acoustophoretic chamber |
US9744483B2 (en) | 2014-07-02 | 2017-08-29 | Flodesign Sonics, Inc. | Large scale acoustic separation device |
US10106770B2 (en) | 2015-03-24 | 2018-10-23 | Flodesign Sonics, Inc. | Methods and apparatus for particle aggregation using acoustic standing waves |
US11708572B2 (en) | 2015-04-29 | 2023-07-25 | Flodesign Sonics, Inc. | Acoustic cell separation techniques and processes |
EP3288660A1 (en) | 2015-04-29 | 2018-03-07 | Flodesign Sonics Inc. | Acoustophoretic device for angled wave particle deflection |
US11377651B2 (en) | 2016-10-19 | 2022-07-05 | Flodesign Sonics, Inc. | Cell therapy processes utilizing acoustophoresis |
US11021699B2 (en) | 2015-04-29 | 2021-06-01 | FioDesign Sonics, Inc. | Separation using angled acoustic waves |
US9550134B2 (en) | 2015-05-20 | 2017-01-24 | Flodesign Sonics, Inc. | Acoustic manipulation of particles in standing wave fields |
US10161926B2 (en) | 2015-06-11 | 2018-12-25 | Flodesign Sonics, Inc. | Acoustic methods for separation of cells and pathogens |
US9663756B1 (en) | 2016-02-25 | 2017-05-30 | Flodesign Sonics, Inc. | Acoustic separation of cellular supporting materials from cultured cells |
EP3319739B1 (en) | 2015-07-09 | 2021-03-31 | Flodesign Sonics Inc. | Non-planar and non-symmetrical piezolectric crystals and reflectors |
US11459540B2 (en) | 2015-07-28 | 2022-10-04 | Flodesign Sonics, Inc. | Expanded bed affinity selection |
US11474085B2 (en) | 2015-07-28 | 2022-10-18 | Flodesign Sonics, Inc. | Expanded bed affinity selection |
US10710006B2 (en) | 2016-04-25 | 2020-07-14 | Flodesign Sonics, Inc. | Piezoelectric transducer for generation of an acoustic standing wave |
EP3481361A1 (en) | 2016-05-03 | 2019-05-15 | Flodesign Sonics, Inc. | Therapeutic cell washing, concentration, and separation utilizing acoustophoresis |
US11214789B2 (en) | 2016-05-03 | 2022-01-04 | Flodesign Sonics, Inc. | Concentration and washing of particles with acoustics |
US11085035B2 (en) | 2016-05-03 | 2021-08-10 | Flodesign Sonics, Inc. | Therapeutic cell washing, concentration, and separation utilizing acoustophoresis |
EP3485215B1 (en) | 2016-07-12 | 2023-06-07 | Alexander Poltorak | System and method for maintaining efficiency of a heat sink |
EP3529347A1 (en) | 2016-10-19 | 2019-08-28 | Flodesign Sonics, Inc. | Affinity cell extraction by acoustics |
CN106363003B (en) * | 2016-11-15 | 2018-10-23 | 深圳绿源轩电子技术有限公司 | A kind of power circuit being effectively improved ultrasonic cleaning effect |
EP3655718A4 (en) | 2017-07-17 | 2021-03-17 | Alexander Poltorak | Multi-fractal heat sink system and method |
SG11202003907WA (en) | 2017-12-14 | 2020-05-28 | Flodesign Sonics Inc | Acoustic transducer drive and controller |
US10327736B1 (en) * | 2018-04-17 | 2019-06-25 | William L. Puskas | Ultrasound transducer arrays and associated systems and methods |
CN113891767B (en) * | 2019-05-23 | 2023-04-07 | 弗劳恩霍夫应用研究促进协会 | Sensor and method for generating a spatially coded sound field by means of sound emission apertures having spatially varying frequencies and bandwidths |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2891176A (en) * | 1955-07-13 | 1959-06-16 | Branson Instr | Compressional wave generating apparatus |
US3315102A (en) * | 1963-01-14 | 1967-04-18 | Electromation Components Corp | Piezoelectric liquid cleaning device |
US3371233A (en) * | 1965-06-28 | 1968-02-27 | Edward G. Cook | Multifrequency ultrasonic cleaning equipment |
US3746897A (en) * | 1971-07-28 | 1973-07-17 | Ultrasonic Systems | Ultrasonic multi-frequency system |
GB2097890A (en) * | 1981-05-01 | 1982-11-10 | Boulton Ltd William | Ultrasonic cleaning |
US4554477A (en) * | 1983-11-25 | 1985-11-19 | Ratcliff Henry K | Drive circuit for a plurality of ultrasonic generators using auto follow and frequency sweep |
US4633119A (en) * | 1984-07-02 | 1986-12-30 | Gould Inc. | Broadband multi-resonant longitudinal vibrator transducer |
US4736130A (en) * | 1987-01-09 | 1988-04-05 | Puskas William L | Multiparameter generator for ultrasonic transducers |
US5218980A (en) * | 1991-10-10 | 1993-06-15 | Evans David H | Ultrasonic dishwasher system |
US5276376A (en) * | 1992-06-09 | 1994-01-04 | Ultrasonic Power Corporation | Variable frequency ultrasonic generator with constant power output |
US5496411A (en) * | 1991-06-14 | 1996-03-05 | Halcro Nominees Pty. Ltd. | Ultrasonic vibration generator and use of same for cleaning objects in a volume of liquid |
Family Cites Families (96)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US25433A (en) * | 1859-09-13 | Shingle-machine | ||
US2585103A (en) * | 1948-03-08 | 1952-02-12 | Otis A Brown | Apparatus for ultrasonic treatment of liquids |
USRE25433E (en) * | 1956-08-27 | 1963-08-13 | Electromechanical transducer system | |
US2985003A (en) * | 1957-01-11 | 1961-05-23 | Gen Motors Corp | Sonic washer |
US3066232A (en) * | 1959-06-12 | 1962-11-27 | Branson Instr | Ultrasonic transducer |
US3094314A (en) * | 1960-08-02 | 1963-06-18 | Detrex Chem Ind | Sandwich type transducer and coupling |
US3187207A (en) * | 1960-08-08 | 1965-06-01 | Giannini Controls Corp | Transducers |
US3140859A (en) * | 1961-01-17 | 1964-07-14 | Internat Ultrasonics Inc | Electroacoustic sandwich transducers |
US3152295A (en) * | 1961-05-01 | 1964-10-06 | Bendix Corp | Pulsed tank circuit magneto-or electrostrictive device excitation |
US3191913A (en) * | 1961-05-22 | 1965-06-29 | Hal C Mettler | Ultrasonic unit |
US3230403A (en) * | 1961-07-14 | 1966-01-18 | Bendix Corp | Prestressed ceramic transducer |
US3113761A (en) * | 1961-07-26 | 1963-12-10 | Ultrasonic Ind Inc | Ultrasonic tank housing |
US3218488A (en) * | 1961-08-01 | 1965-11-16 | Branson Instr | Transducer |
US3293456A (en) * | 1963-03-18 | 1966-12-20 | Branson Instr | Ultrasonic cleaning apparatus |
US3318578A (en) * | 1965-03-22 | 1967-05-09 | Branson Instr | Cleaning apparatus |
US3319219A (en) * | 1965-03-29 | 1967-05-09 | Dynamics Corp Massa Div | Electroacoustic transducer |
US3328751A (en) * | 1966-03-28 | 1967-06-27 | Dynamics Corp Massa Div | Electroacoustic transducer |
US3535159A (en) * | 1967-12-07 | 1970-10-20 | Branson Instr | Method and apparatus for applying ultrasonic energy to a workpiece |
US3433462A (en) * | 1968-01-19 | 1969-03-18 | Crest Ultrasonics Corp | Method and apparatus for resonating small piezoelectric crystals at low frequencies |
SE329037B (en) * | 1969-02-20 | 1970-09-28 | Philips Nv | |
US3727112A (en) * | 1969-08-29 | 1973-04-10 | Surgical Design Corp | Generator for producing ultrasonic energy |
US3629726A (en) * | 1969-08-29 | 1971-12-21 | Surgical Design Corp | Oscillator and oscillator control circuit |
GB1331100A (en) * | 1969-11-03 | 1973-09-19 | Crest Ultrasonics Corp | Transducer suitable for use with ultrasonic processing tanks |
GB1323196A (en) * | 1970-04-27 | 1973-07-11 | Luke Eng Pty Ltd Kg | Electromechanical transducer |
US3648188A (en) * | 1970-06-10 | 1972-03-07 | Bendix Corp | Transistor power amplifier |
US3638087A (en) * | 1970-08-17 | 1972-01-25 | Bendix Corp | Gated power supply for sonic cleaners |
US3651352A (en) * | 1970-12-10 | 1972-03-21 | Branson Instr | Oscillatory circuit for ultrasonic cleaning apparatus |
US3690333A (en) * | 1971-05-17 | 1972-09-12 | Hans Kierner | Machine for cleaning small parts |
US3735159A (en) * | 1972-01-24 | 1973-05-22 | E Murry | Method and apparatus for translating ultrasonic energy |
US3778758A (en) * | 1972-09-25 | 1973-12-11 | Us Navy | Transducer |
US3804329A (en) * | 1973-07-27 | 1974-04-16 | J Martner | Ultrasonic generator and atomizer apparatus and method |
GB1488252A (en) * | 1973-12-15 | 1977-10-12 | Kerry Ultrasonics | Ultrasonic cleaning apparatus |
US3893869A (en) * | 1974-05-31 | 1975-07-08 | Rca Corp | Megasonic cleaning system |
US4120699A (en) * | 1974-11-07 | 1978-10-17 | Alvin B. Kennedy, Jr. | Method for acoustical cleaning |
JPS5635260Y2 (en) * | 1975-01-23 | 1981-08-19 | ||
US3975650A (en) * | 1975-01-30 | 1976-08-17 | Payne Stephen C | Ultrasonic generator drive circuit |
GB1537058A (en) * | 1975-05-20 | 1978-12-29 | Matsushita Electric Ind Co Ltd | Ultrasonic generators |
GB1571304A (en) * | 1976-02-24 | 1980-07-16 | Lucas Industries Ltd | Drive circuit for a piezo electric crystal |
US4069444A (en) * | 1976-06-01 | 1978-01-17 | Westinghouse Electric Corporation | Ultrasonic power generator |
US4081706A (en) * | 1976-10-21 | 1978-03-28 | Delta Sonics, Inc. | Oscillatory circuit for an ultrasonic cleaning device with feedback from the piezoelectric transducer |
DE2721225C2 (en) * | 1977-05-11 | 1981-10-29 | Siemens AG, 1000 Berlin und 8000 München | Circuit arrangement for frequency self-control of an ultrasonic transmitter transducer |
FR2391001A1 (en) * | 1977-05-18 | 1978-12-15 | Satelec Soc | ULTRA-SOUND GENERATOR |
US4118649A (en) * | 1977-05-25 | 1978-10-03 | Rca Corporation | Transducer assembly for megasonic cleaning |
US4141608A (en) * | 1977-11-10 | 1979-02-27 | L & R Manufacturing Company | Circuitry for driving a non-linear transducer for ultrasonic cleaning |
FR2446638A1 (en) * | 1979-01-18 | 1980-08-14 | Aussenac Jack | SOUND-ACTINIC DEVICE FOR CLEANING AND AEPING |
JPS5610792A (en) * | 1979-07-06 | 1981-02-03 | Taga Denki Kk | Method and circuit for driving ultrasonic-wave converter |
CA1167916A (en) * | 1979-10-10 | 1984-05-22 | Robert E. White | Converter circuit employing pulse-width modulation |
US4326553A (en) * | 1980-08-28 | 1982-04-27 | Rca Corporation | Megasonic jet cleaner apparatus |
US5834871A (en) * | 1996-08-05 | 1998-11-10 | Puskas; William L. | Apparatus and methods for cleaning and/or processing delicate parts |
US4418297A (en) * | 1981-03-16 | 1983-11-29 | L & R Manufacturing Company | Oscillatory resonant transducer driver circuit |
FI61735C (en) * | 1981-03-16 | 1982-09-10 | Valmet Oy | FOERFARANDE I SAMBAND MED PAPPERSTILLVERKNING |
US4431975A (en) * | 1981-04-16 | 1984-02-14 | Ultrasonic Power Corporation | Oscillator circuit for ultrasonic cleaning |
US4409999A (en) * | 1981-08-07 | 1983-10-18 | Pedziwiatr Edward A | Automatic ultrasonic cleaning apparatus |
JPS5850898A (en) * | 1981-09-21 | 1983-03-25 | Nec Corp | Bolt-clamped langevin oscillator |
US4439847A (en) * | 1981-12-21 | 1984-03-27 | The Stoneleigh Trust | High efficiency broadband directional sonar transducer |
US4398925A (en) * | 1982-01-21 | 1983-08-16 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Acoustic bubble removal method |
DE3314609A1 (en) * | 1983-04-22 | 1984-10-25 | Siemens AG, 1000 Berlin und 8000 München | METHOD FOR OPERATING AN ULTRASONIC VIBRATOR FOR LIQUID SPRAYING |
FR2570916B1 (en) * | 1983-06-23 | 1988-04-15 | France Etat Armement | ELECTRO-ACOUSTIC TRANSDUCER AND METHOD FOR TRANSMITTING OR RECEIVING ACOUSTIC WAVES IN SEVERAL BANDWIDTHS |
US4527901A (en) * | 1983-11-21 | 1985-07-09 | Ultrasonic Power Corporation | Ultrasonic cleaning tank |
GB2161037A (en) * | 1984-06-29 | 1986-01-02 | Philips Electronic Associated | Inverter circuit arrangement |
US4543130A (en) * | 1984-08-28 | 1985-09-24 | Rca Corporation | Megasonic cleaning apparatus and method |
US4559826A (en) * | 1984-09-14 | 1985-12-24 | Tab Leasing | Precision source of acoustic radiation |
GB2170663B (en) * | 1985-02-02 | 1989-06-14 | Brian Ernest Attwood | Harmonic-resonant power supply |
US4864547A (en) * | 1986-05-20 | 1989-09-05 | Crestek, Inc. | Regulated ultrasonic generator |
JPS6276399A (en) * | 1985-09-28 | 1987-04-08 | Sadayuki Ueha | High-frequency langevin type vibrator |
US5119840A (en) * | 1986-04-07 | 1992-06-09 | Kaijo Kenki Co., Ltd. | Ultrasonic oscillating device and ultrasonic washing apparatus using the same |
US4743789A (en) * | 1987-01-12 | 1988-05-10 | Puskas William L | Variable frequency drive circuit |
US4788992A (en) * | 1987-04-28 | 1988-12-06 | Lewis Corporation | Ultrasonic strip cleaning apparatus |
US4998549A (en) * | 1987-04-29 | 1991-03-12 | Verteq, Inc. | Megasonic cleaning apparatus |
US5037481B1 (en) * | 1987-04-29 | 1993-05-11 | Verteq, Inc. | Megasonic cleaning method |
US4869278A (en) * | 1987-04-29 | 1989-09-26 | Bran Mario E | Megasonic cleaning apparatus |
US4804007A (en) * | 1987-04-29 | 1989-02-14 | Verteq, Inc. | Cleaning apparatus |
JPS6411253A (en) * | 1987-06-23 | 1989-01-13 | Polaroid Corp | Exposer for image former |
US4836684A (en) * | 1988-02-18 | 1989-06-06 | Ultrasonic Power Corporation | Ultrasonic cleaning apparatus with phase diversifier |
US5305737A (en) * | 1988-03-30 | 1994-04-26 | Arjo Inc. | Ultrasonic treatment system |
US4854337A (en) * | 1988-05-24 | 1989-08-08 | Eastman Kodak Company | Apparatus for treating wafers utilizing megasonic energy |
US4979994A (en) * | 1989-04-06 | 1990-12-25 | Branson Ultrasonics Corporation | Method and apparatus for cleaning by ultrasonic wave energy |
US5037208A (en) * | 1989-04-06 | 1991-08-06 | Branson Ultrasonics Corporation | Immersible transducer assembly |
US5109174A (en) * | 1989-11-22 | 1992-04-28 | Mdt Corporation | Ultrasonic cleaner |
US5148823A (en) * | 1990-10-16 | 1992-09-22 | Verteg, Inc. | Single chamber megasonic energy cleaner |
US5090432A (en) * | 1990-10-16 | 1992-02-25 | Verteq, Inc. | Single wafer megasonic semiconductor wafer processing system |
US5143103A (en) * | 1991-01-04 | 1992-09-01 | International Business Machines Corporation | Apparatus for cleaning and drying workpieces |
US5247954A (en) * | 1991-11-12 | 1993-09-28 | Submicron Systems, Inc. | Megasonic cleaning system |
US5201958A (en) * | 1991-11-12 | 1993-04-13 | Electronic Controls Design, Inc. | Closed-loop dual-cycle printed circuit board cleaning apparatus and method |
US5365960A (en) * | 1993-04-05 | 1994-11-22 | Verteq, Inc. | Megasonic transducer assembly |
US5355048A (en) * | 1993-07-21 | 1994-10-11 | Fsi International, Inc. | Megasonic transducer for cleaning substrate surfaces |
JPH07163954A (en) | 1993-12-13 | 1995-06-27 | Yoshihide Shibano | Cleaning method and cleaner |
US5534076A (en) * | 1994-10-03 | 1996-07-09 | Verteg, Inc. | Megasonic cleaning system |
US5998908A (en) * | 1996-05-09 | 1999-12-07 | Crest Ultrasonics Corp. | Transducer assembly having ceramic structure |
US6822372B2 (en) * | 1999-08-09 | 2004-11-23 | William L. Puskas | Apparatus, circuitry and methods for cleaning and/or processing with sound waves |
ES2167025T3 (en) * | 1996-12-16 | 2002-05-01 | Mannesmann Ag | PROCEDURE FOR THE TRANSMISSION OF ROAD INFORMATION OF A VEHICLE, THAT CORRESPOND TO THE ROAD OF THE SAME IN A TRAFFIC NETWORK, BETWEEN A TRAFFIC CENTER AND A TERMINAL DEVICE IN A VEHICLE, A TRAFFIC CENTER AND A TERMINAL DEVICE. |
US6394111B1 (en) | 1997-06-11 | 2002-05-28 | Ethicon, Inc. | Detection of cleanliness of a medical device during a washing process |
US6150753A (en) * | 1997-12-15 | 2000-11-21 | Cae Blackstone | Ultrasonic transducer assembly having a cobalt-base alloy housing |
JP3180086B2 (en) | 1998-08-31 | 2001-06-25 | 株式会社シーメディア | Mobile communication device, information transmission system and method, non-contact IC media usable in mobile communication device |
US6333703B1 (en) * | 1998-11-24 | 2001-12-25 | International Business Machines Corporation | Automated traffic mapping using sampling and analysis |
US6295873B1 (en) | 1999-07-22 | 2001-10-02 | The United States Of America As Represented By The United States Department Of Energy | Ultrasonic sensor and method of use |
-
1996
- 1996-09-24 US US08/718,945 patent/US5834871A/en not_active Expired - Lifetime
-
1997
- 1997-08-01 CA CA002262540A patent/CA2262540C/en not_active Expired - Lifetime
- 1997-08-01 AU AU39621/97A patent/AU3962197A/en not_active Abandoned
- 1997-08-01 WO PCT/US1997/012853 patent/WO1998006143A1/en active Application Filing
- 1997-08-04 MY MYPI97003552A patent/MY121247A/en unknown
- 1997-08-05 TW TW086111153A patent/TW407066B/en not_active IP Right Cessation
-
1998
- 1998-04-24 US US09/066,158 patent/US6181051B1/en not_active Expired - Lifetime
- 1998-04-24 US US09/066,171 patent/US6002195A/en not_active Expired - Lifetime
-
2000
- 2000-10-03 US US09/678,576 patent/US6433460B1/en not_active Expired - Lifetime
-
2002
- 2002-06-12 US US10/167,704 patent/US6914364B2/en not_active Expired - Lifetime
-
2004
- 2004-03-30 US US10/814,672 patent/US6946773B2/en not_active Expired - Lifetime
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2891176A (en) * | 1955-07-13 | 1959-06-16 | Branson Instr | Compressional wave generating apparatus |
US3315102A (en) * | 1963-01-14 | 1967-04-18 | Electromation Components Corp | Piezoelectric liquid cleaning device |
US3371233A (en) * | 1965-06-28 | 1968-02-27 | Edward G. Cook | Multifrequency ultrasonic cleaning equipment |
US3746897A (en) * | 1971-07-28 | 1973-07-17 | Ultrasonic Systems | Ultrasonic multi-frequency system |
GB2097890A (en) * | 1981-05-01 | 1982-11-10 | Boulton Ltd William | Ultrasonic cleaning |
US4554477A (en) * | 1983-11-25 | 1985-11-19 | Ratcliff Henry K | Drive circuit for a plurality of ultrasonic generators using auto follow and frequency sweep |
US4633119A (en) * | 1984-07-02 | 1986-12-30 | Gould Inc. | Broadband multi-resonant longitudinal vibrator transducer |
US4736130A (en) * | 1987-01-09 | 1988-04-05 | Puskas William L | Multiparameter generator for ultrasonic transducers |
US5496411A (en) * | 1991-06-14 | 1996-03-05 | Halcro Nominees Pty. Ltd. | Ultrasonic vibration generator and use of same for cleaning objects in a volume of liquid |
US5218980A (en) * | 1991-10-10 | 1993-06-15 | Evans David H | Ultrasonic dishwasher system |
US5276376A (en) * | 1992-06-09 | 1994-01-04 | Ultrasonic Power Corporation | Variable frequency ultrasonic generator with constant power output |
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US7210354B2 (en) | 1997-06-16 | 2007-05-01 | Puskas William L | Sensing system for measuring cavitation |
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FR3061836A1 (en) * | 2017-01-17 | 2018-07-20 | Gil Ching | DEVICE AND METHOD FOR CLEANING AND / OR DECONTAMINATING FOODS WITH HIGH FREQUENCY ACOUSTIC WAVES |
FR3061835A1 (en) * | 2017-01-17 | 2018-07-20 | Gil Ching | DEVICE AND METHOD FOR TREATING HIGH-FREQUENCY ACOUSTIC WAVES |
WO2018134181A1 (en) * | 2017-01-17 | 2018-07-26 | Université D'avignon Et Des Pays De Vaucluse | Device and method for treating with high-frequency acoustic waves |
WO2023072486A1 (en) * | 2021-10-29 | 2023-05-04 | Endress+Hauser Flowtec Ag | Ultrasonic sensor for an ultrasonic measuring device, and ultrasonic measuring device |
CN114204583A (en) * | 2021-11-24 | 2022-03-18 | 华北电力大学 | Device parameter design method for inhibiting medium-frequency and high-frequency oscillation of flexible direct-current transmission |
CN114204583B (en) * | 2021-11-24 | 2023-12-05 | 华北电力大学 | Device parameter design method for inhibiting intermediate frequency and high frequency oscillation of flexible direct current transmission |
Also Published As
Publication number | Publication date |
---|---|
US5834871A (en) | 1998-11-10 |
US6002195A (en) | 1999-12-14 |
US6914364B2 (en) | 2005-07-05 |
CA2262540C (en) | 2008-02-05 |
US6433460B1 (en) | 2002-08-13 |
US6181051B1 (en) | 2001-01-30 |
US20020171331A1 (en) | 2002-11-21 |
AU3962197A (en) | 1998-02-25 |
MY121247A (en) | 2006-01-28 |
US6946773B2 (en) | 2005-09-20 |
US20040182414A1 (en) | 2004-09-23 |
CA2262540A1 (en) | 1998-02-12 |
TW407066B (en) | 2000-10-01 |
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