WO1998048495A2 - Laser device - Google Patents
Laser device Download PDFInfo
- Publication number
- WO1998048495A2 WO1998048495A2 PCT/DE1998/001053 DE9801053W WO9848495A2 WO 1998048495 A2 WO1998048495 A2 WO 1998048495A2 DE 9801053 W DE9801053 W DE 9801053W WO 9848495 A2 WO9848495 A2 WO 9848495A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- laser
- laser device
- diodes
- laser diodes
- waveguide structure
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4031—Edge-emitting structures
- H01S5/4062—Edge-emitting structures with an external cavity or using internal filters, e.g. Talbot filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4031—Edge-emitting structures
- H01S5/4068—Edge-emitting structures with lateral coupling by axially offset or by merging waveguides, e.g. Y-couplers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/06233—Controlling other output parameters than intensity or frequency
- H01S5/0624—Controlling other output parameters than intensity or frequency controlling the near- or far field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/0625—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in multi-section lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
Definitions
- the invention relates to a laser device with at least ⁇ least a laser diode row.
- Laser diode arrays are for example tronic from R. Paul, Optoelek ⁇ semiconductor devices, Teubner study scripts, 2nd Edition, BG Teubner Stuttgart 1992, pages 205,206 known. Such laser diode arrays achieve high radiation powers, high radiation densities and efficiencies.
- IOW-lOkW powers are required on the workpiece to be irradiated with power densities between 0.1 and 10 MW / cm 2 .
- solid-state lasers eg Nd: YAG, (7) are currently preferred.
- Such two-stage systems which have to be pumped optically with the aid of flash lamps or semiconductor lasers, are technically complex and achieve conversion efficiencies of only 2 to 15%.
- lamp-pumped systems are very maintenance-intensive.
- Diode lasers achieve the necessary power densities, but the maximum power in a spatially coherent mode is only approx. 0.2W or approx. 1W in combination with semiconductor amplifiers.
- the object of the present invention is therefore to develop a laser device with which an increased maximum power can be achieved in a spatially coherent mode.
- This object is achieved by means of a laser device with a laser diode line which connects a plurality of side by side ordered mutually incoherent, ie laterally uncoupled laser diodes, and an external resonator in which the external resonator has a passive planar waveguide structure for coupling the modes of the individual laser diodes.
- This laser device advantageously uses uncoupled laser diodes (preferably single-mode laser diodes) which are very stable.
- the passive planar waveguide structure can be produced monolithically on a single mounting surface (which can be cooled during operation), as a result of which both a high degree of adjustment accuracy and, particularly because of the uniform temperature distribution and temperature stability, high stability the waveguide is reached.
- the waveguide structure is preferably implemented in a planar hybrid waveguide technology (eg Si0 2 on Si, diffused, ion-exchanged, deposited glass).
- planar lenses and lattice structures can be easily applied to the mounting surface in addition to the waveguide structure.
- the laser diode array has single-mode laser diodes and an optical device with branched waveguides is provided. Laser radiation from the individual laser diodes can be coupled into this.
- the optical arrangement guides the laser radiation of the individual laser diodes arranged next to one another into a laser beam that is compared to the number of laser diodes. smaller number, in particular in a single username and password, etc.
- the laser diode array has multimode laser diodes, in particular broad-strip laser diodes, and also an optical device with branched waveguides, into which laser radiation from the individual laser diodes can be coupled and which converts this laser radiation into a smaller number than the number of laser diodes. in particular merges into a single output waveguide.
- the monomode waveguides At the ends facing the laser diode array, the monomode waveguides have taper structures which convert the laser radiation of the individual laser diodes as adiabatically as possible into the respectively assigned monomode waveguide. Arrays of multi-mode broad-strip lasers advantageously allow very high area power densities.
- the optical device has a preferably binary tree-like branching structure.
- N 1 branching structure
- the or the output waveguides additionally have a DFB (Distributed Feed Back) grating structure for the longitudinal mode selection.
- DFB Distributed Feed Back
- the waveguide structure can advantageously be designed as a multimode interference filter (MMI in planar technology).
- MMI multimode interference filter
- the invention described above enables a compact and, in particular, cooling-technically advantageous realization of power laser diodes with spatially (and temporally) coherent output and thus the highest power densities, e.g. B. for the ma- material processing, printer technology and medical applications.
- the planar optical resonator coherently couples the emission of the individual emitters (laser diodes) into a monomode waveguide at the output of the resonator.
- FIGS. 1 to 8. 1 shows a schematic illustration of a laser diode array in an external resonator
- FIG. 2 shows a schematic illustration of a laser diode array in an external resonator with a device for mode filtering
- FIG. 3 shows a schematic illustration of a laser device according to a first exemplary embodiment
- FIG. 4 shows a schematic illustration of a laser device according to a second exemplary embodiment
- FIG. 5 shows a schematic illustration of a laser device according to a third exemplary embodiment
- FIG. 6 shows a schematic illustration of a laser device according to a fourth exemplary embodiment
- Figure 7 is a schematic representation of a laser device according to a fifth embodiment and Figure 8 is a schematic representation of a laser device according to a sixth embodiment.
- a laser diode array 1, z. B. a power semiconductor laser diode array, which is provided only on one resonator side with a resonator mirror layer, arranged in an external optical resonator.
- the external optical resonator can be implemented using free beam technology or planar waveguide technology and optionally with a ner phase plate for correcting the phase fronts.
- the external optical resonator for mode selection is provided with a mode diaphragm (for example a monomode fiber), which can be implemented either in the resonator or in connection with a resonator mirror.
- a mode diaphragm for example a monomode fiber
- a single-mode laser diode array 1 is coupled to a passive single-mode waveguide plate 2.
- the single-mode waveguide plate 2 has a passive planar single-mode waveguide branching structure 6 m in the form of a binary branching tree composed of single-mode waveguides 7, which, starting from a single output waveguide 4 to the laser diode array 1 hm m, splits a number of single-mode waveguides 7, the number of which corresponds to the individual laser diodes of the laser diode array 1.
- the laser beams of the individual laser diodes of the laser diode array 1 arranged next to one another are coherently coupled to a single output waveguide 4 by means of a plurality of binary branches 3 m.
- a multimode laser diode array 1 is likewise connected to a passive single-mode
- Waveguide plate 2 coupled to a passive planar single-mode waveguide branching structure 6, which corresponds in principle to that of Figure 3.
- the single-mode waveguides each have a taper structure 5 which transfers the emitted laser radiation from the associated individual laser diode m to the single-mode waveguide 7 assigned to them.
- the starting point is Waveguide 4 additionally arranged a DFB grating structure, whereby a single-mode operation is achieved.
- the exemplary embodiment of FIG. 6 has a multimode interference filter plate 8 instead of the waveguide plate 2.
- the waveguides additionally have phase shifters 10 and contain the
- the resonator has at least one absorbent medium 11 for mode selection.
- These two components, phase shifter 10 and absorbing medium 11, can be used completely independently of one another, so that optionally only one of the two or both components can be implemented.
- FIG. 8 has curved, single-mode waveguides 7 for mode selection, which bring the laser radiation onto several or, as shown in the figure, onto a single output waveguide 4.
- the waveguides 7 and / or the laser diodes are widened by adiabatic taper and / or the widened coupling point is inclined to the optical axis of the Laser diodes arranged.
- the optical resonator has a phase plate or individually adjustable planar-optical phase shifters on the single-mode waveguides or the laser diodes for the correction of phase fronts.
- the laser diode array 1 and the passive planar waveguide structure are advantageously monolithically integrated.
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
- Optical Integrated Circuits (AREA)
- Lasers (AREA)
- Radiation-Therapy Devices (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98931917A EP0976184A2 (en) | 1997-04-18 | 1998-04-14 | Laser device |
CA002286774A CA2286774A1 (en) | 1997-04-18 | 1998-04-14 | Laser device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19716422 | 1997-04-18 | ||
DE19716422.6 | 1997-04-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1998048495A2 true WO1998048495A2 (en) | 1998-10-29 |
WO1998048495A3 WO1998048495A3 (en) | 1999-01-28 |
Family
ID=7827025
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE1998/001053 WO1998048495A2 (en) | 1997-04-18 | 1998-04-14 | Laser device |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0976184A2 (en) |
CN (1) | CN1252901A (en) |
CA (1) | CA2286774A1 (en) |
WO (1) | WO1998048495A2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001081966A2 (en) * | 2000-04-20 | 2001-11-01 | Infineon Technologies Ag | Laser system |
WO2002042808A2 (en) * | 2000-11-24 | 2002-05-30 | Applied Wdm, Inc. | Optical waveguide multimode to single mode transformer |
DE102004038283B4 (en) * | 2004-08-03 | 2008-04-03 | Forschungsverbund Berlin E.V. | Optoelectronic element and method for the coherent coupling of active regions of optoelectronic elements |
US20210126421A1 (en) * | 2019-10-24 | 2021-04-29 | Fujitsu Limited | Wavelength tunable light source, optical transmission apparatus using the same, and method of controlling wavelength tunable light source |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6668003B2 (en) * | 2002-02-12 | 2003-12-23 | Quintessence Photonics Corporation | Laser diode array with an in-phase output |
CN106454648B (en) * | 2016-07-15 | 2019-07-02 | 南京大学 | A kind of acoustic waveguide |
CN106338800B (en) * | 2016-10-31 | 2018-06-12 | 华中科技大学 | It is a kind of to be used for optical fiber and the horizontal coupler of chip chamber optical signal transmission |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4578791A (en) * | 1982-12-20 | 1986-03-25 | Trw Inc. | High-power injection laser diode structure |
US4878724A (en) * | 1987-07-30 | 1989-11-07 | Trw Inc. | Electrooptically tunable phase-locked laser array |
US5023882A (en) * | 1990-05-07 | 1991-06-11 | Xerox Corporation | Phased locked arrays with single lobe output beam |
DE4123858C1 (en) * | 1991-07-18 | 1992-12-03 | Messerschmitt-Boelkow-Blohm Gmbh, 8012 Ottobrunn, De | Semiconductor laser array stabilising arrangement - provides fibre-shaped reflectors so that radiation characteristic extends as ray along X=axis |
US5513196A (en) * | 1995-02-14 | 1996-04-30 | Deacon Research | Optical source with mode reshaping |
EP0723323A2 (en) * | 1994-12-22 | 1996-07-24 | CeramOptec GmbH | Compound laser system for high power density |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07168040A (en) * | 1993-12-14 | 1995-07-04 | Nippon Steel Corp | Semiconductor laser converging apparatus |
-
1998
- 1998-04-14 EP EP98931917A patent/EP0976184A2/en not_active Withdrawn
- 1998-04-14 WO PCT/DE1998/001053 patent/WO1998048495A2/en not_active Application Discontinuation
- 1998-04-14 CN CN 98804305 patent/CN1252901A/en active Pending
- 1998-04-14 CA CA002286774A patent/CA2286774A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4578791A (en) * | 1982-12-20 | 1986-03-25 | Trw Inc. | High-power injection laser diode structure |
US4878724A (en) * | 1987-07-30 | 1989-11-07 | Trw Inc. | Electrooptically tunable phase-locked laser array |
US5023882A (en) * | 1990-05-07 | 1991-06-11 | Xerox Corporation | Phased locked arrays with single lobe output beam |
DE4123858C1 (en) * | 1991-07-18 | 1992-12-03 | Messerschmitt-Boelkow-Blohm Gmbh, 8012 Ottobrunn, De | Semiconductor laser array stabilising arrangement - provides fibre-shaped reflectors so that radiation characteristic extends as ray along X=axis |
EP0723323A2 (en) * | 1994-12-22 | 1996-07-24 | CeramOptec GmbH | Compound laser system for high power density |
US5513196A (en) * | 1995-02-14 | 1996-04-30 | Deacon Research | Optical source with mode reshaping |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 095, no. 010, 30. November 1995 & JP 07 168040 A (NIPPON STEEL CORP), 4. Juli 1995 * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001081966A2 (en) * | 2000-04-20 | 2001-11-01 | Infineon Technologies Ag | Laser system |
WO2001081966A3 (en) * | 2000-04-20 | 2002-02-07 | Infineon Technologies Ag | Laser system |
WO2002042808A2 (en) * | 2000-11-24 | 2002-05-30 | Applied Wdm, Inc. | Optical waveguide multimode to single mode transformer |
WO2002042808A3 (en) * | 2000-11-24 | 2003-04-17 | Applied Wdm Inc | Optical waveguide multimode to single mode transformer |
US6580850B1 (en) | 2000-11-24 | 2003-06-17 | Applied Wdm, Inc. | Optical waveguide multimode to single mode transformer |
DE102004038283B4 (en) * | 2004-08-03 | 2008-04-03 | Forschungsverbund Berlin E.V. | Optoelectronic element and method for the coherent coupling of active regions of optoelectronic elements |
US20210126421A1 (en) * | 2019-10-24 | 2021-04-29 | Fujitsu Limited | Wavelength tunable light source, optical transmission apparatus using the same, and method of controlling wavelength tunable light source |
US11664644B2 (en) * | 2019-10-24 | 2023-05-30 | Fujitsu Limited | Wavelength tunable light source, optical transmission apparatus using the same, and method of controlling wavelength tunable light source |
Also Published As
Publication number | Publication date |
---|---|
WO1998048495A3 (en) | 1999-01-28 |
CA2286774A1 (en) | 1998-10-29 |
CN1252901A (en) | 2000-05-10 |
EP0976184A2 (en) | 2000-02-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69736133T2 (en) | DIRECT HIGH-PERFORMANCE LASER DIODE SYSTEM WITH HIGH EFFICIENCY AND APPROPRIATE METHOD | |
DE60315599T2 (en) | Multimode interference optical waveguide device | |
DE19725262C2 (en) | Optical beam transformation device | |
DE19780124B4 (en) | Arrangement for forming the geometric cross section of a plurality of solid-state and / or semiconductor lasers | |
EP0565843A1 (en) | Device for focussing and coupling semiconductor laser radiation into optical fibers | |
EP1145390B1 (en) | Laser amplification system | |
EP0383138A2 (en) | Device for the direct optical reception of a plurality of wave lengths | |
WO2006047896A1 (en) | Fibre-lens arrangement and lens array for one such fibre-lens arrangement | |
DE69821447T2 (en) | Wavelength-tunable laser source | |
DE10005195A1 (en) | Laser amplifier system | |
DE112016002585T5 (en) | Pulse laser device | |
EP1540786B1 (en) | Semiconductor laser device | |
EP1151344B1 (en) | Laser radiation source for producing a coherent and entire laser radiation field | |
EP0704946B1 (en) | Optoelectronic multiwavelength element | |
WO1998048495A2 (en) | Laser device | |
EP1241749B1 (en) | Pump source with increased power for broadband optical Raman amplification | |
DE19838518A1 (en) | arrangement | |
EP0688069B1 (en) | Interferometric semiconductor laser with low loss outcoupler and assembly comprising such a laser | |
DE60113041T2 (en) | System for optically pumping a long-wavelength laser with a short-wave laser | |
DE69928801T2 (en) | Stabilized laser source | |
EP0262435A2 (en) | Narrow-band laser transmitter with an external resonator, the output power being extractable from the resonator | |
DE2205728C3 (en) | Optical component consisting of a multilayer semiconductor body | |
EP1779482A1 (en) | Diode laser comprising an optical device for increasing the beam density of an output laser beam emitted by said laser | |
DE3410729A1 (en) | Stabilised semiconductor laser | |
DE19647677A1 (en) | Laser and amplifier system for generating single-frequency laser radiation |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 98804305.X Country of ref document: CN |
|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): CA CN RU US |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
AK | Designated states |
Kind code of ref document: A3 Designated state(s): CA CN RU US |
|
AL | Designated countries for regional patents |
Kind code of ref document: A3 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 1998931917 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref document number: 2286774 Country of ref document: CA Ref document number: 2286774 Country of ref document: CA Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 09420462 Country of ref document: US |
|
WWP | Wipo information: published in national office |
Ref document number: 1998931917 Country of ref document: EP |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 1998931917 Country of ref document: EP |