WO1999008832A1

WO1999008832A1 - Device for moving and positioning an object in a plane

Info

Publication number: WO1999008832A1
Application number: PCT/CH1998/000357
Authority: WO
Inventors: Oliver Zirn; Guido Baldini; Daniel Rutz
Original assignee: Mikron Sa Agno
Priority date: 1997-08-20
Filing date: 1998-08-20
Publication date: 1999-02-25

Abstract

The invention concerns a device (7) for moving and positioning an object in a plane, comprising a base structure, a mobile supporting member (10) and moving elements (12, 14, 16) each of which capable of being moved in translation, with some degree of freedom, relatively to the base structure, and has a rigid linking part (2, 4, 6) associated therewith. Each linking part is articulated at the moving element with which it is associated and at the mobile support member, such that it has exactly one degree of freedom in rotation relative to the moving element or to the mobile supporting member. The linking parts are further arranged such that the linking parts associated with the first two moving elements can pivot about a first pivoting axis (42), relative to the mobile support member, and the linking part associated with the third moving element can pivot about a second pivoting axis (44), relative to the mobile support member. The use of said device enables, in combination with the possibility of paralleling by distribution of axial movements between the part to be machined and the tool, on machine tools, to produce a machine with strictly parallel kinematics, for five-axes machining, without requiring the use of spatially parallel kinematics.

Description

Device for moving and positioning an object in a plane

Technical field

The invention relates to a device for moving and positioning an object in a plane, which is particularly suitable for use in machine tools and industrial robots. State of the art

Almost all machine tools in use today are based on a so-called serial kinematic (serial kinematic) structure. The multi-axis relative movement between tool and workpiece is achieved by connecting the corresponding number of linear or rotary movement axes in series. The drive for a movement axis must carry all drives of the downstream movement axes. This serial-kinematic machine concept on the one hand increases the masses to be moved by the drives, which has a disadvantageous effect on the maximum achievable accelerations and thus on the processing speed. On the other hand, the total error of the relative movement of tool and workpiece is made up of the sum of the deviations of the individual axes, which has a disadvantageous effect on the precision of the movement that can be achieved.

To overcome these disadvantages, kinematic structures for machine tools and for robots have therefore been developed which are based on a parallel kinematic (parallel kinematic) structure. In this machine concept, the drives for the different axes of the relative movement between tool and workpiece are not arranged in series, but in parallel. No drive has to support the other, which means that the masses to be accelerated are small compared to serial machine kinematics. The total error of the relative movement is of the order of magnitude of a single error in a drive.

Parallel kinematic structures of the hexapod type have been known for a long time. In Hexapod machines, a movable holding element (which, for example, carries the workpiece) is connected to a basic structure (which, for example, carries the tool) via six telescopic connecting links, the length of which can be adjusted by means of a drive. The six connecting links are attached to the base structure on the one hand and to the movable holding member on the one hand by means of swivel joints, each of which allows at least two degrees of freedom of rotation, so that a relative movement between tool and workpiece by six axes in a limited space and angle range sen is made possible. The movement is controlled by changing the length of the connecting links by means of the drives.

US Pat. No. 5,378,282 (Pollard) describes a device for moving and positioning based on a parallel kinematic structure with three translational degrees of freedom, which is particularly suitable for moving spray guns in the automotive industry. On three independently driven, parallel screw spindles, three carriages with an internal thread are arranged, which can be displaced linearly by corresponding rotation of the spindles in the manner of spindle-nut drives. Three legs are hinged at one end (by means of cardan joints) to a slide and pivotally connected to one another near the other ends by means of a connecting part. The tool or spray gun is carried on the end of one of the legs remote from the sled. This device, which, in contrast to the above-mentioned Hexapod machines, does not have any length-adjustable members, enables movement and positioning with three translational degrees of freedom in space.

EP-AS 0 760 272 (Seiko) describes a device for multi-axis spatial movement of a platform with respect to a basic structure, which is based on a parallel kinematic structure which is similar to that of Pollard mentioned above. Sledges, which can be moved linearly on straight guide rails, carry a platform by means of rigid or scissor-like legs. The legs are attached to the slide on the one hand and to the platform on the other hand by means of swivel joints, which allow rotary movements with at least two degrees of freedom of rotation. In embodiments which have more than three slides, in addition to translational movements with three degrees of freedom between the platform and the base structure, additional rotary movements with one or more degrees of freedom are possible.

In CH-PS 672 089 (Sogeva) a parallel kinematic structure is described which enables spatial displacement with three degrees of translational freedom of a platform with respect to a basic structure, the alignment of the platform with respect to the basic structure always remaining the same. For this purpose, three rotatable shafts are provided on the base structure, on each of which a control arm is attached, which by means of the shaft with a rotational degree of freedom with respect to the base structure. Each control arm is connected to the platform via an associated connecting part, the connecting part being attached to the control arm on the one hand and to the platform on the other hand by means of rotary joints which permit rotary movements with at least two degrees of freedom of rotation.

All of the above-mentioned devices require rotary joints with at least two degrees of freedom, usually in the form of cardanic joints or in the form of ball joints. The kinematic structures on which the devices are based are therefore referred to as spatial kinematic structures. In comparison to swivel joints of flat kinematic structures with only one degree of freedom of rotation, their swivel joints have disadvantages in terms of manufacturing costs, rigidity and service life.

DE-AS 195 25 482 (Richerzhagen) describes a device based on a parallel kinematic structure for moving and positioning an object in a plane, which is particularly suitable for applications in laser processing. Although this device manages with swivel joints with only one degree of freedom and is therefore based on a flat parallel-kinematic structure, apart from translational movements with two degrees of freedom, no further movements are possible and no moments can be recorded. The latter is acceptable in certain laser processing applications because the massless laser beam does not produce significant machining forces, but not in general for machine tool applications.

Presentation of the invention

The object of the present invention is to provide a device which can be produced from precise and inexpensive swivel joints with only one degree of freedom and with which an object with at least three kinematic degrees of freedom can be moved and positioned.

The solution to the problem is defined by the features of claim 1. According to the invention, the device for moving and positioning an object in a plane has a basic structure, a movable holding member for holding the object and three driving elements. Each driving element can be moved essentially independently of the others in the manner of a translational movement with a degree of freedom with respect to the basic structure. Each drive link has at least one associated rigid connecting part. Each connecting part is articulated on its associated driving member in such a way that it has exactly one degree of freedom of rotation with respect to the driving member, and on the other hand articulated on the movable holding member in such a way that it has exactly one degree of freedom of rotation with respect to the movable holding member. The connecting parts are arranged on the movable holding member in such a way that all associated connecting parts of the first two driving members can be pivoted about a first common pivot axis with respect to the movable holding member and each associated connecting part of the third driving member can be pivoted about a second common pivot axis with respect to the movable holding member.

The movable holding member of the device according to the invention can have the shape of a table or a platform which carries the object to be moved, for example a tool or a workpiece. However, the holding member can also comprise just any fastening means for the object to be moved or a housing for holding and / or driving, for example, a tool or a workpiece. The holding member of the device according to the invention has the function of carrying and / or holding the object to be moved, and it is by the Device moved together with the object to be moved with respect to the base structure

A driving member is understood to be a carriage, a carriage, a glider or any other device which can be moved translatively with respect to the basic structure

The basic structure can consist of a housing of a machine tool, a support frame, an assembly platform or another basic structure. It merely defines the reference basis for the relative movement of the movable holding element of the device according to the invention

The rigid connecting parts for creating articulated connections between the moving members and the holding member are preferably designed as a rod. However, they can also be designed as plates or in other suitable forms

With the device according to the invention, a movable holding member can be moved in one plane with respect to a base structure with three degrees of freedom, namely two translational and one rotary degree of freedom, the relative movement between the base structure and the movable holding member being based on a parallel kinematic structure. The control of the movement takes place via the control of the drives of the three travel members. Neither swivel joints with two or three degrees of freedom of rotation nor long adjustable members are required to design the device, but only standard components

According to a preferred embodiment of the invention, the object which can be moved and positioned by means of the movement device comprises a processing device with a rotating spindle, the axis of rotation of which is arranged parallel to the plane for moving and positioning

The device according to the invention for guiding the driving members preferably has one or more straight-line guiding devices arranged parallel to one another

Forming a preferred direction in the direction of the one or more parallel lines This is in contrast to e.g. the Hexapod devices mentioned above or according to CH-PS 672 089 (Sogeva). The working area of a machine with a device according to this embodiment of the invention can be easily enlarged in its preferred direction without being something changes in the dynamic behavior of the machine

In one embodiment of the invention, the guide devices consist of threaded spindles and the driving members consist of nuts in order to form spindle-nut parts, as are particularly widespread in machine tools

In another embodiment of the invention, the driving members and guiding devices are designed in the form of linear motors. These have advantages over the conventional spindle-nut components in terms of dynamics and controlled goods

The three driving elements are preferably arranged on a single guide device, for example a linear rail, since the costs for additional linear rails can then be saved if the movement restriction for the due to the mutual restriction of the movements of the three driving elements on a single guide device movable holding member is unacceptable, the first two driving elements can alternatively be arranged on a first guide device and the third driving member on a second guide device in order to enlarge the usable space and / or angular range for the relative movement between the holding device and the basic structure Another embodiment of the invention, the three driving elements can be arranged on three separate guide devices

In a further embodiment of the invention, one of the first two driving members is fixedly connected to the third driving member, whereby the two connected driving members can only be moved translationally and in parallel at the same time translative degrees of freedom moved in one plane are, wherein the third, connected to one of the other two links link ensures that the holding member can absorb moments.

In an example of a machine tool with a first device according to the invention for moving and positioning an object in one plane, the machine tool has a further device for moving and positioning an object with a further movable holding member, two further travel members, each with a translational degree of freedom with respect to the Basic structure are movable and each have an associated rigid further connecting part, and a straight, further guide device arranged substantially perpendicular to the plane of the first movement device for guiding the further driving members. Each of the two further connecting parts is articulated on its associated further driving member and on the other hand on the other further connecting part in such a way that it has exactly one rotational degree of freedom with respect to the driving member or the other connecting part. The further movable holding member is firmly attached to one of the other connecting parts. Does this machine tool carry e.g. a tool on the movable holding member of the first movement device and a workpiece on the movable holding member of the second movement device, the machine enables a five-axis relative movement between tool and workpiece, which is based on a completely parallel kinematic structure, only swivel joints with one degree of freedom being required . The movement is controlled by controlling the drives of five links.

In another example of a machine tool with a first device according to the invention for moving and positioning an object in one plane, the machine has a further device for moving and positioning an object with a further driving element that is movable with a translational degree of freedom with respect to the basic structure, one rectilinear, essentially perpendicular to the plane of the first movement device arranged further guiding device for guiding the further driving element and a further movable holding member. The further movable holding member is arranged on the further drive member so as to be rotatable about an axis of rotation. This machine enables five Axial relative movement between the movable holding member of the movement device according to the invention and the further movable holding member, which, however, is no longer based on a completely parallel kinematic structure, but on a parallel / serial hybrid structure. The movement with a rotational degree of freedom of the further holding member is connected in series with the translative movement of the further driving member.

Numerous further embodiments of machine tools with the movement and positioning device according to the invention are possible, which are particularly advantageous depending on the application. For example, in a lathe, the tool can be moved in a horizontal or in a vertical plane by means of a device according to the invention, or the device according to the invention can be linked in series with further axes of movement in order to achieve a particularly advantageous effect for certain applications.

The following detailed description of the present invention in conjunction with the accompanying drawings serves only as an example for a better understanding of the invention and is not to be interpreted as a limitation of the scope of the patent claims. The person skilled in the art can readily recognize further advantageous embodiments and combinations of features from the following description in conjunction with the accompanying drawings and the entirety of the patent claims, but these are still within the scope of the present invention.

Brief description of the drawings

The drawings used to explain the exemplary embodiments show:

1 shows a perspective view of a first embodiment of the device according to the invention; 2 shows a schematic perspective illustration of a second embodiment of the device according to the invention in a lathe;

3 shows a schematic perspective illustration of a machine tool for five-axis machining with the device according to the invention from FIG. 1;

4a shows a schematic side view of a machine tool with a third embodiment of the device according to the invention in a first position;

4b shows a schematic side view of the machine tool from FIG. 4a with the device according to the invention in a second position;

4c shows a schematic side view of the machine tool from FIG. 4a with the device according to the invention in a third position.

In principle, the same parts are provided with the same reference symbols in the figures.

Ways of Carrying Out the Invention

FIG. 1 shows a perspective view of a first embodiment of the device 7 according to the invention for moving and positioning an object 40 in one plane, FIG. 3 shows a schematic representation of how the device 7 is arranged in a machine tool for five-axis machining.

The device 7 has a basic structure (not shown), a movable holding member 10 and three driving elements 12, 14, 16. Each drive member 12, 14, 16 is essentially independent of the others in the manner of a translational movement with a degree of freedom with respect to the base structure. In the case of FIGS. 1 and 3 Embodiment of the invention shown, the device 7 for guiding the driving members 12, 14, 16 has a rectilinear guide device in the form of a single guide rail 20, which guides all three driving members 12, 14, 16 and is arranged firmly on the base structure.

Each link 12, 14, 16 has an associated rigid connecting part 2, 4, 6. Each connecting part 2, 4, 6 is articulated at its end on the link side by means of a rotary joint 22, 24, 26 to its associated link 12, 14, 16. The three rotary joints 22, 24, 26 each have exactly one degree of freedom of rotation and are arranged such that their axes of rotation are parallel to one another. At the end of the holding member, the connecting parts 2, 4, 6 are articulated to the movable holding member 10 by means of rotary joints 32, 34. The three connecting parts 2, 4, 6 are in turn each pivotable with exactly one rotational degree of freedom with respect to the holding member 10.

The connecting parts 2, 4, 6 are arranged in an articulated manner on the holding member 10 such that the two connecting parts 2, 4, of the first two driving members 12, 14 can be pivoted about a first common pivot axis 42 with respect to the movable holding member 10. In the embodiment of the invention shown in FIGS. 1 and 3, this is achieved in that the connecting parts 2, 4 of the first two driving members 12, 14 are fastened in an articulated manner to the holding member 10 by means of a double swivel joint 32. The connecting part 6 belonging to the third driving element 16 is fastened to the holding element 10 so that it can pivot about a second pivot axis 44 with respect to the movable holding element 10 by means of a single rotary joint 34. The second pivot axis 44 is arranged parallel to the first pivot axis 42. The two pivot axes 42, 44 run parallel to the above-mentioned axes of rotation of the three rotary joints 22, 24, 26.

By linear displacements of the driving members 12, 14, 16, the holding member 10 can be displaced on the one hand in a plane (hereinafter referred to as the displacement plane) perpendicular to the two pivot axes 42, 44 mentioned above. In the representations of FIGS. 1 and 3, the plane of displacement is parallel to the plane spanned by the arrows Y and Z. On the other hand, by means of linear displacements of the driving members 12, 14, 16, the holding member 10 in one by the arrow A indicated direction of rotation can be rotated about an axis of rotation perpendicular to the plane of displacement. (This axis of rotation thus runs parallel to the two pivot axes 42, 44). When the first two driving members 12 and 14 are fixed with respect to the guide rail 20, the movement of the third driving member 16 causes the holding member 10 to rotate purely about the pivot axis 42. If the third driving element 16 is displaced uniformly to one of the two first driving elements 12, 14 in such a way that the distance between the third driving element 16 and one of the two first driving elements 12, 14 remains constant, the holding element 10 becomes a pure translational movement in the shift plane.

A tool or any other object to be moved parallel to the plane of displacement can be fastened to the holding member 10 by means of further fastening and / or drive devices. 1 and 3 schematically show a processing device with a drive device and a rotating spindle 40 driven by the drive device. This can serve, for example, as a drilling spindle 40 of a drilling machine or as a spindle spindle 40 of a tip lathe. The axis of rotation of the rotating spindle 40 lies parallel to the plane of displacement of the movement device 7. The rotating spindle 40 is held together with its drive device by the holding member 10 and is therefore translationally displaceable parallel to the plane of displacement by means of the movement device 7 and about a pivot axis perpendicular to the plane of displacement (and thus perpendicular to the The axis of rotation of the rotating spindle 40) can be pivoted.

FIG. 2 shows a schematic perspective illustration of a second embodiment of the device 107 according to the invention, as is used in connection with a lathe (not shown). On a guide rail 120, which is arranged parallel to the axis of rotation of a lathe (not shown) and firmly on a base structure thereof, which also forms the base structure of the device 107, three travel members 112, 114, 116 are arranged displaceably along the rail 120, the two driving members 114 and 116 being firmly connected to one another. Each driving member 112, 114, 116 has an associated rigid connecting part 102, 104, 106, which on one side by means of a swivel joint 122, 124, 126 on its associated driving member 112, 114, 116 and on the other side by means of a pivot joint 132, 134 is arranged on a movable holding member 110. The swivel joint 132 is a double swivel joint, by means of which the two first connecting parts 102, 104 are arranged on the holding member 110, the other swivel joints 122, 124, 126, 134 are single swivel joints. All swivel joints 122, 124, 126, 132, 134 allow pivoting movements between the parts attached to them with exactly one degree of freedom of rotation.

Due to linear displacements of the driving member 112 on the one hand and of the interconnected driving members 114, 116 on the other hand, the holding member 110, which carries a tool 140, is translationally displaceable in a displacement plane parallel to the plane X, Z, the displacement plane essentially through the guide rail 120 and the axis of rotation of the lathe is defined. Thus, the device 107 serves to machine a workpiece 145 which is rotated by the lathe in the direction indicated by the arrow C by the device 107 moving and positioning the tool 140 with respect to the workpiece 145. The connecting part 106 ensures that the orientation of the movable holding element 110 is maintained and thus prevents the holding element 110 from tipping over the joint 132 as a result of the moments transmitted from the workpiece 145 via the tool 140 to the holding element 110.

FIG. 3 shows how the device 7 according to the invention from FIG. 1 is used for moving and positioning an object in a plane in a machine tool (not shown) for five-axis machining.

In addition to the first device 107, the machine tool has a further device 57 for moving and positioning an object. The device 57 has a guide rail 70 which is arranged in the direction X, normal to the plane of movement Y, Z of the first device 7 and fixed to the base structure of the device 7. On the guide rail 70, two travel members 62, 64 are arranged displaceably along the rail 70. Each drive link 62, 64 has an associated rigid connecting part 52, 54 which is arranged on one side by means of a rotary joint 72, 74 on its associated drive link 62, 64. On the other hand, the two Binding parts 52, 54 articulated to one another by means of a swivel joint 76. The swivel joints 72, 74, 76 are single swivel joints which allow pivoting movements between the parts attached to them with exactly one degree of freedom of rotation. At the link end of the connecting part 52, close to the joint 72, a movable holding member 60 is further arranged fixedly on the connecting part 52, so that when the connecting part 52 is pivoted by means of the joint 72 with respect to the driving member 62, the holding member 60 together with the connecting part 52 is pivoted with respect to the driving element 62, and if the driving element 62 and thus also the joint 72 and the end of the connecting part 52 on the driving element side are displaced translationally, the holding member 60 is also translationally displaced.

Does this machine tool carry e.g. a tool on the movable holding element 10 of the first movement device 7 and a workpiece on the movable holding element 60 of the second movement device 57, the machine enables a five-axis relative movement between the tool and the workpiece, which is based on a completely parallel kinematic structure, with only rotary joints with one degree of freedom required are. The holding member 10 is translationally displaceable parallel to the plane Y, Z with two degrees of freedom and can be pivoted with a degree of freedom of rotation in the direction of the arrow A about an axis of rotation parallel to the axis X. The holding member 60 can be moved parallel to the axis X with a translational degree of freedom and can be pivoted with a degree of rotational freedom in the direction of the arrow B about an axis of rotation parallel to the axis Y. Overall, the machine enables a five-axis relative movement between the tool and the workpiece, the movement being controlled via the control of the linear drives of the five driving elements 12, 14, 16, 62, 64.

FIGS. 4a, 4b and 4c each show, in different working positions, a schematic side view of a machine tool with a third embodiment of the device 207 according to the invention.

The device 207 has a base structure 211, a movable holding member 210 in

Form of a housing for holding and / or driving a tool 240 and three driving elements 212, 214, 216. The driving members 212 and 214 are on a first guide The guide rail 220 and the drive member 216 can be moved linearly on a second guide rail 230, the two guide rails 220, 230 being fixedly arranged parallel to one another on the base structure 211. Each drive member 212, 214, 216 has an associated rigid connecting point 202, 204, 206. Each connecting part 202 , 204, 206 is articulated on one side by means of a swivel joint 222, 224, 226 on its associated driving member 212, 214, 216 and on the other side by swivel joints 232, 234 on the movable holding member 210. The swivel joint 232 is a double Swivel joint, by means of which the two first connecting parts 202, 204 are arranged on the holding member 210, the remaining swivel joints 222, 224, 226, 234 are single swivel joints. All swivel joints 222, 224, 226, 232, 234 allow swivel movements between the parts attached to them with exactly one degree of freedom of rotation

In addition to the first device 207, the machine tool has a further device 257 for moving and positioning an object. The device 257 has a further rectilinear guide device 270, which is in the direction X, normal to the plane of movement Y, Z of the first device 207 and firmly on the base structure 211 is arranged on the further guide device 270, a further drive member 262 is arranged to be translationally movable along the further guide device 270. Another movable holding member 260 is rotatably arranged on a directly driven rotary axis 268 with a degree of freedom of rotation on the further drive member 262 and carries the workpiece 245

This machine enables a five-axis relative movement between the movable holding element 210 of the movement device 207 and the movable holding element 260 of the movement device 257. The holding element 210 can be displaced translationally parallel to the plane Y, Z with two degrees of freedom and can be pivoted In with a degree of freedom of rotation about an axis of rotation parallel to the axis X In FIGS. 4 a, 4 b and 4 c each show the device 207 in a different working position, wherein in FIG. 4 a the holding element 210 is inclined parallel to the axis Z, in FIG. 4 b by 45 ° to the axis Z and in FIG. 4 c is aligned perpendicular to the Z axis. The further holding member 260 can be displaced parallel to the X axis with a translational degree of freedom and can be rotated with a rotational degree of freedom about an axis of rotation parallel to the Y axis However, the relative movement between tool 240 and workpiece 245 is no longer based on a completely parallel-kinematic structure, but on a parallel / serial hybrid structure. The movement with a rotational degree of freedom of the further holding member 260 follows the translative movement of the further driving element 262 in a serial manner.

In summary, it should be noted that the invention provides a device for moving and positioning an object in a plane, which is based on a parallel kinematic structure and only requires swivel joints with one degree of freedom. The use of the device according to the invention, which is based on a flat parallel kinematic structure, in conjunction with the use of the parallelization option once given, by distributing the axis movements to workpiece and tool movements in machine tools, enables the construction of a pure parallel kinematic machine for five-axis machining without having to use spatial parallel kinematics.

Claims

claims

1. Device (7; 107; 207) for moving and positioning an object in a plane, with a base structure, a movable holding member (10; 110; 210) for holding the object and three travel members (12, 14, 16; 112, 114, 116; 212, 214, 216), each of which is movable in the manner of a translational movement with one degree of freedom with respect to the base structure and an associated rigid connecting part (2, 4, 6; 102, 104, 106; 202, 204, 206) , characterized in that each connecting part (2, 4, 6; 102, 104, 106; 202, 204, 206) on the one hand on its associated driving member (12, 14, 16; 1 12, 114, 116; 212, 214, 216) and on the other hand is articulated on the movable holding member (10; 1 10; 210) in such a way that it has exactly one degree of freedom of rotation with respect to the driving member (12, 14, 16; 112, 114, 116; 212, 214, 216) or the movable one Holding member (10; 110; 210), wherein the connecting parts (2, 4, 6; 102, 104, 106; 202, 204, 206) are arranged so that all closed associated connecting parts (2, 4; 102, -104; 202, 204) of the first two driving members (12, 14; 112, 114; 212, 214) by a first one

Pivot axis (42) with respect to the movable holding member (10; 1 10; 210) are pivotable and each associated connecting part (6; 106; 206) of the third driving element (16; 116; 216) about a second pivot axis (44) with respect to the movable holding member (10; 1 10; 210) is pivotable.

2. Device (7; 207) according to claim 1, characterized in that the object comprises a processing device with a rotating spindle (40; 240), the axis of rotation of which is arranged parallel to the movement and positioning plane.

3. Device (7; 107; 207) according to claim 1 or 2, characterized in that for guiding the driving members (12, 14, 16; 112, 114, 116; 212, 214, 216) one or more rectilinear, parallel to each other arranged guide devices (20; 120; 220, 230) are provided.

4. The device according to claim 3, characterized in that the guide devices consist of threaded spindles and the driving members consist of nuts which are displaceable along the spindles in the manner of a spindle-nut drive.

5. The device (7; 107; 207) according to claim 3, characterized in that the driving members (12, 14, 16; 112, 1 14, 116; 212, 214, 216) and guide devices

(20; 120; 220, 230) are designed as linear motors.

6. The device (207) according to one of claims 3 to 5, characterized in that the first two driving elements (212, 214) are arranged on a first guide device (220) and the third driving element (216) on a second guide device (230) .

7. The device (7; 107) according to one of claims 3 to 5, characterized in that the three driving elements (12, 14, 16; 112, 114, 1 16) are arranged on a single guide device (20; 120).

8. The device (107) according to any one of claims 1 to 7, characterized in that one (1 14) of the first two driving members is fixedly connected to the third driving member (116), whereby the two connected driving members (114, 116) only simultaneously and are translationally movable in parallel.

9. Machine tool with a first device (7) for moving and positioning an object in a plane according to one of claims 3 to 8, characterized in that the machine tool has a further device (57) for moving and positioning an object with a further movable holding member (60), two further travel members (62, 64), each of which is movable in the manner of a translational movement with one degree of freedom with respect to the base structure and has an associated rigid further connecting part (52, 54), a rectilinear, essentially Further guide device arranged perpendicular to the plane (Y, Z) of the first movement device (7) (70) for guiding the further driving elements (62, 64), each of the two further connecting parts (52, 54) on the one hand on its associated further driving element (62, 64) and on the other hand on the other further connecting point (54, 52) (76) is articulated in such a way that it has exactly one degree of freedom of rotation with respect to the driving member (62, 64) or the other connecting part (54, 52), the further movable holding member (60) being fixedly attached to one of the further connecting parts (52) so that it is movable with exactly one translative and exactly one rotational degree of freedom with respect to the basic structure

Machine tool with a first device (207) for moving and positioning an object in a plane according to one of claims 3 to 8, characterized in that the machine tool is a further device

(257) for moving and positioning an object, with a further drive member (262), which in the manner of a translational movement with a

Degree of freedom with respect to the base structure (211) is movable, a straight line, substantially perpendicular to the plane (Y, Z) of the first movement device

(207) arranged further guide means (270) for guiding the further

Drive member (262) and a further movable holding member (260) by one

Axis of rotation is arranged rotatably on the further drive member so that it can be moved with exactly one translational and exactly one rotary degree of freedom with respect to the base structure (211)