WO1999013681B1 - Aerogels, piezoelectric devices, and uses therefor - Google Patents

Aerogels, piezoelectric devices, and uses therefor

Info

Publication number
WO1999013681B1
WO1999013681B1 PCT/GB1998/002675 GB9802675W WO9913681B1 WO 1999013681 B1 WO1999013681 B1 WO 1999013681B1 GB 9802675 W GB9802675 W GB 9802675W WO 9913681 B1 WO9913681 B1 WO 9913681B1
Authority
WO
WIPO (PCT)
Prior art keywords
aerogel
transducer
sound
acoustic
aerogels
Prior art date
Application number
PCT/GB1998/002675
Other languages
French (fr)
Other versions
WO1999013681A3 (en
WO1999013681A2 (en
Inventor
Anthony Hooley
David Henry Pearce
Original Assignee
1 Ipr Limited
Anthony Hooley
David Henry Pearce
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9718785.0A external-priority patent/GB9718785D0/en
Priority claimed from GBGB9805053.7A external-priority patent/GB9805053D0/en
Priority claimed from GBGB9805735.9A external-priority patent/GB9805735D0/en
Application filed by 1 Ipr Limited, Anthony Hooley, David Henry Pearce filed Critical 1 Ipr Limited
Priority to EP98941601A priority Critical patent/EP1012891A2/en
Priority to AU89918/98A priority patent/AU8991898A/en
Priority to JP2000511333A priority patent/JP2001517004A/en
Priority to US09/508,009 priority patent/US6677034B1/en
Publication of WO1999013681A2 publication Critical patent/WO1999013681A2/en
Publication of WO1999013681A3 publication Critical patent/WO1999013681A3/en
Publication of WO1999013681B1 publication Critical patent/WO1999013681B1/en

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00Details of transducers, loudspeakers or microphones
    • H04R1/20Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/28Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
    • H04R1/2869Reduction of undesired resonances, i.e. standing waves within enclosure, or of undesired vibrations, i.e. of the enclosure itself
    • H04R1/2876Reduction of undesired resonances, i.e. standing waves within enclosure, or of undesired vibrations, i.e. of the enclosure itself by means of damping material, e.g. as cladding
    • H04R1/288Reduction of undesired resonances, i.e. standing waves within enclosure, or of undesired vibrations, i.e. of the enclosure itself by means of damping material, e.g. as cladding for loudspeaker transducers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0603Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/02Sliding-contact bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/02Sliding-contact bearings
    • F16C29/025Hydrostatic or aerostatic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002Devices for damping, suppressing, obstructing or conducting sound in acoustic devices
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/16Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/162Selection of materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/44Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of magnetic liquids, e.g. ferrofluids
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K1/00Details of the magnetic circuit
    • H02K1/02Details of the magnetic circuit characterised by the magnetic material
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K33/00Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/035DC motors; Unipolar motors
    • H02K41/0352Unipolar motors
    • H02K41/0354Lorentz force motors, e.g. voice coil motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08Structural association with bearings
    • H02K7/086Structural association with bearings radially supporting the rotor around a fixed spindle; radially supporting the rotor directly
    • H02K7/088Structural association with bearings radially supporting the rotor around a fixed spindle; radially supporting the rotor directly radially supporting the rotor directly
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/08Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/084Shaping or machining of piezoelectric or electrostrictive bodies by moulding or extrusion
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/1071Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041Beam type
    • H10N30/2042Cantilevers, i.e. having one fixed end
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2217/00Details of magnetostrictive, piezoelectric, or electrostrictive transducers covered by H04R15/00 or H04R17/00 but not provided for in any of their subgroups
    • H04R2217/01Non-planar magnetostrictive, piezoelectric or electrostrictive benders
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/25Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/28Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2848Three or more layers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982Particulate matter [e.g., sphere, flake, etc.]

Abstract

In its first aspect the invention provides an electromechanical acoustic transducer (5) which is resistively terminated at the rear with a closely-coupled sound absorber (7) made from an aerogel with good acoustic absorption at low frequencies. The invention also provides an aerogel suitable for this use and which is a conglomerate of small particles packed so that there are spaces left therebetween to allow the passage of sound. Moreover, the invention provides an aerogel suitable for this use and comprised of multiple layers (17a etc.) of materials of graded properties, or comprised of material of continuously varying properties throughout the thickness of the absorbing structure, in the principal direction of sound from the source.

Claims

- 40 -AMENDED CLAIMS[received by the International Bureau on 1 July 1999 (01.07.99); original claims 1-23 amended; remaining claims unchanged (2 pages)]Aerogels as sound absorbers
1. An electromechanical acoustic transducer which is resistively terminated at the rear with a physically spaced and separate but acoustically closely- coupled sound absorber made from an aerogel with good acoustic absorption at low frequencies.
2. A transducer as claimed in Claim 1 which is placed at and across the front of a suitably-shaped box open at the rear, and the rear is then closed with the block of aerogel sound absorber.
3. A transducer as claimed in either of the preceding Claims, wherein the aerogel is made from silica, a polyurethane or a rubber.
4. A transducer as claimed in any of the preceding Claims, wherein the pore size in the aerogel is as small as several nanometres, and the internal surface area in the aerogel is as high as l,000m2/g of material.
5. A transducer as claimed in any of the preceding Claims, wherein there is employed a coupling and filling gas or gas mixture around the aerogel and trapped by an outer gas-impermeable but acoustically-transparent membrane, the gas or gases being chosen so as to optimize the matching of the acoustic resistance of the absorber to the radiation resistance of the transducer, or instead, or as well as, to optimize the absorption of the sound from the rear of the transducer.
5A. A transducer as claimed in any of the preceding Claims, which transducer includes: a moving-element sound-radiator suspended within a gaseous medium, the radiator operating to output useful sound from a front surface thereof into the medium; and to the rear of the radiator, and spaced and separate from the rear surface thereof at a distance greater than the rearward movement of the radiator, an acoustic resistive termination for the transducer, the termination being a sound absorber made from an aerogel having a low acoustic reflection coefficient at audio frequencies.
6. A transducer as claimed in any of the preceding Claims and substantially as described hereinbefore.
Aerogels from particles with gaps
7. An aerogel, suitable for use as an absorber of sound energy, which is constructed as a conglomerate of small particles with sizes in the several millimetre region with the packing of these particles being such that there are spaces left therebetween to allow the passage of sound.
8. An aerogel as claimed in Claim 7, wherein the particles are from 0.5-20mm across.
9. An aerogel as claimed in either of Claims 7 and 8, wherein the particle shapes are spheres and cylinders, and irregular particle sizes as are produced by crushing larger particles or monoliths.
10. An aerogel as claimed in any of Claims 7 to 9, wherein the particles are also rough-surfaced.
11. An aerogel as claimed in any of Claims 7 to 10, wherein the structure is stabilized by slightly bonding the particles together with an adhesive.
12. An aerogel as claimed in any of Claims 7 to 11 and substantially as described hereinbefore.
Aerogels that are graded
13. An aerogel, suitable for use as an absorber of sound energy, comprised of multiple layers of materials of graded acoustic reflection and acoustic absorption properties, or comprised of material of continuously varying such properties throughout the thickness of the absorbing structure, increasing in the principal direction of sound from the source.
14. An aerogel as claimed in Claim 13, which is formed as a continuously or stepwise/layered graded structure from one side to the other, and wherein on the input side (where the sound energy from the acoustic transducer is incident) the material is given the lowest possible reflection coefficient R (and the maximum possible concomitant absorption coefficient A), and on the output side (the side of the absorber furthest from the acoustic transducer) the material is given the greatest possible absorption coefficient A consistent with an acceptably-low reflection coefficient.
15. An aerogel as claimed in either of Claims 13 and 14, which is successive layers of material overlaid onto a supportive substrate that is substantially acoustically transparent over the frequency range of interest.
16. An aerogel as claimed in any of Claims 13 to 15, wherein materials other than aerogels form one or more additional layers further away from the sound source.
17. An aerogel as claimed in any of Claims 13 to 16, which is pre-filled with a gas with relevant properties differing from those of air.
18. An aerogel as claimed in any of Claims 13 to 17, which is an aerogel as claimed in any of Claims 7 to 12.
Aerogels as transducer drive elements
19. A moving magnet transducer wherein the moving magnet element is a magnetic aerogel structure.
20. A transducer as claimed in Claim 19, which includes a piston, or translator, forming the moving part of a linear electromagnetic transducer, which translator is made of a magnetic form of aerogel - either magnetically- doped non-magnetic-aerogel or intrinsically magnetic-aerogel - and is suspended in a controllable magnetic field.
21. A transducer as claimed in either of Claims 19 and 20, wherein the magnetic aerogels are made directly from materials that are inherently magnetic.
22. A transducer as claimed in any of Claims 19 to 21, wherein the moving aerogel element is supported by a linear bearing of the type the subject of Hooley British Patent Application No. 2,322,232 (P1481Sub), or by a pair of inverted thin-walled elastomer tube sections.
23. A transducer as claimed in any of Claims 19 to 22, wherein the aerogel translator has a coating of a thin, light, skin of gas-impervious material, or is enclosed in a thin impervious bag or sack from which is evacuated some or all of the air.
PCT/GB1998/002675 1997-09-05 1998-09-04 Aerogels, piezoelectric devices, and uses therefor WO1999013681A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP98941601A EP1012891A2 (en) 1997-09-05 1998-09-04 Aerogels, piezoelectric devices, and uses therefor
AU89918/98A AU8991898A (en) 1997-09-05 1998-09-04 Aerogels, piezoelectric devices, and uses therefor
JP2000511333A JP2001517004A (en) 1997-09-05 1998-09-04 Multi-bubble aggregates, piezoelectric devices, and uses thereof
US09/508,009 US6677034B1 (en) 1997-09-05 1998-09-04 Aerogels, piezoelectric devices, and uses therefor

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
GBGB9718785.0A GB9718785D0 (en) 1997-09-05 1997-09-05 Electromechanical transducer
GBGB9805053.7A GB9805053D0 (en) 1998-03-11 1998-03-11 Improvements in actuators
GBGB9805735.9A GB9805735D0 (en) 1998-03-19 1998-03-19 Improvements in linear actuators
GB9718785.0 1998-03-19
GB9805053.7 1998-03-19
GB9805735.9 1998-03-19

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US09/508,009 A-371-Of-International US6677034B1 (en) 1997-09-05 1998-09-04 Aerogels, piezoelectric devices, and uses therefor
US10/716,819 Division US20040101150A1 (en) 1997-09-05 2003-11-19 Piezoelectric driver device with integral sensing layer

Publications (3)

Publication Number Publication Date
WO1999013681A2 WO1999013681A2 (en) 1999-03-18
WO1999013681A3 WO1999013681A3 (en) 1999-08-05
WO1999013681B1 true WO1999013681B1 (en) 1999-10-14

Family

ID=27268999

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB1998/002675 WO1999013681A2 (en) 1997-09-05 1998-09-04 Aerogels, piezoelectric devices, and uses therefor

Country Status (7)

Country Link
US (2) US6677034B1 (en)
EP (1) EP1012891A2 (en)
JP (1) JP2001517004A (en)
CN (1) CN1182598C (en)
AU (1) AU8991898A (en)
GB (1) GB2329514B (en)
WO (1) WO1999013681A2 (en)

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US6677034B1 (en) 2004-01-13
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US20040101150A1 (en) 2004-05-27

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