WO1999023514A1 - Polymer optical waveguide and method for fabricating the same - Google Patents
Polymer optical waveguide and method for fabricating the same Download PDFInfo
- Publication number
- WO1999023514A1 WO1999023514A1 PCT/KR1998/000352 KR9800352W WO9923514A1 WO 1999023514 A1 WO1999023514 A1 WO 1999023514A1 KR 9800352 W KR9800352 W KR 9800352W WO 9923514 A1 WO9923514 A1 WO 9923514A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polymer
- optical waveguide
- core
- icp
- etching
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA002308484A CA2308484C (en) | 1997-11-05 | 1998-11-04 | Polymer optical waveguide and method for fabricating the same |
AU97650/98A AU735433B2 (en) | 1997-11-05 | 1998-11-04 | Polymer optical waveguide and method for fabricating the same |
JP2000519315A JP3728398B2 (en) | 1997-11-05 | 1998-11-04 | Method for producing polymer optical waveguide |
EP98951804A EP1029251A1 (en) | 1997-11-05 | 1998-11-04 | Polymer optical waveguide and method for fabricating the same |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1997/58238 | 1997-11-05 | ||
KR19970058238 | 1997-11-05 | ||
KR1998/46821 | 1998-11-02 | ||
KR1019980046821A KR100283955B1 (en) | 1997-11-05 | 1998-11-02 | Polymer optical waveguide and its manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999023514A1 true WO1999023514A1 (en) | 1999-05-14 |
Family
ID=26633162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR1998/000352 WO1999023514A1 (en) | 1997-11-05 | 1998-11-04 | Polymer optical waveguide and method for fabricating the same |
Country Status (8)
Country | Link |
---|---|
US (1) | US6233388B1 (en) |
EP (1) | EP1029251A1 (en) |
JP (1) | JP3728398B2 (en) |
CN (1) | CN1122186C (en) |
AR (1) | AR014388A1 (en) |
AU (1) | AU735433B2 (en) |
CA (1) | CA2308484C (en) |
WO (1) | WO1999023514A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6377732B1 (en) | 1999-01-22 | 2002-04-23 | The Whitaker Corporation | Planar waveguide devices and fiber attachment |
US6901205B2 (en) | 2001-03-08 | 2005-05-31 | Daikin Industries, Ltd. | Fluorine-containing material for optical waveguide |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6864041B2 (en) * | 2001-05-02 | 2005-03-08 | International Business Machines Corporation | Gate linewidth tailoring and critical dimension control for sub-100 nm devices using plasma etching |
WO2002090401A2 (en) * | 2001-05-07 | 2002-11-14 | Corning Incorporated | Photosensitive material suitable for making waveguides and method of making waveguides utilizing this photosensitive optical material |
US6599957B2 (en) | 2001-05-07 | 2003-07-29 | Corning Incorporated | Photosensitive material suitable for making waveguides and method of making waveguides utilizing this photosensitive optical material |
US6947651B2 (en) * | 2001-05-10 | 2005-09-20 | Georgia Tech Research Corporation | Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof |
US7672560B2 (en) * | 2008-05-13 | 2010-03-02 | International Business Machines Corporation | Coupling device for use in optical waveguides |
KR102548183B1 (en) * | 2018-06-29 | 2023-06-28 | 주식회사 엘지화학 | Method for plasma etching process using faraday box |
CN109669234B (en) * | 2019-02-27 | 2020-11-03 | 南宁旭越光纤有限责任公司 | Light guide strip capable of emitting light on whole body and preparation method thereof |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0454590A2 (en) * | 1990-04-27 | 1991-10-30 | Nippon Telegraph And Telephone Corporation | Polyimide optical waveguide |
WO1993007200A1 (en) * | 1991-10-03 | 1993-04-15 | E.I. Du Pont De Nemours And Company | Novel polyimides from bis(4-aminophenoxy) naphthalene and 2,2-bis(3,4-dicarboxyphenyl) hexafluoropropane dianhydride |
US5324813A (en) * | 1992-07-22 | 1994-06-28 | International Business Machines Corporation | Low dielectric constant fluorinated polymers and methods of fabrication thereof |
WO1994014874A1 (en) * | 1992-12-22 | 1994-07-07 | Amoco Corporation | Photodefinable optical waveguides |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07159738A (en) * | 1993-12-06 | 1995-06-23 | Hitachi Chem Co Ltd | Composition for active optical waveguide, production of active optical waveguide using the same and active optical waveguide |
US5649045A (en) * | 1995-12-13 | 1997-07-15 | Amoco Corporation | Polymide optical waveguide structures |
-
1998
- 1998-11-04 AU AU97650/98A patent/AU735433B2/en not_active Ceased
- 1998-11-04 CA CA002308484A patent/CA2308484C/en not_active Expired - Fee Related
- 1998-11-04 WO PCT/KR1998/000352 patent/WO1999023514A1/en not_active Application Discontinuation
- 1998-11-04 EP EP98951804A patent/EP1029251A1/en not_active Withdrawn
- 1998-11-04 JP JP2000519315A patent/JP3728398B2/en not_active Expired - Fee Related
- 1998-11-04 CN CN98810616.7A patent/CN1122186C/en not_active Expired - Fee Related
- 1998-11-05 AR ARP980105586A patent/AR014388A1/en unknown
- 1998-11-05 US US09/186,361 patent/US6233388B1/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0454590A2 (en) * | 1990-04-27 | 1991-10-30 | Nippon Telegraph And Telephone Corporation | Polyimide optical waveguide |
WO1993007200A1 (en) * | 1991-10-03 | 1993-04-15 | E.I. Du Pont De Nemours And Company | Novel polyimides from bis(4-aminophenoxy) naphthalene and 2,2-bis(3,4-dicarboxyphenyl) hexafluoropropane dianhydride |
US5324813A (en) * | 1992-07-22 | 1994-06-28 | International Business Machines Corporation | Low dielectric constant fluorinated polymers and methods of fabrication thereof |
WO1994014874A1 (en) * | 1992-12-22 | 1994-07-07 | Amoco Corporation | Photodefinable optical waveguides |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6377732B1 (en) | 1999-01-22 | 2002-04-23 | The Whitaker Corporation | Planar waveguide devices and fiber attachment |
US6901205B2 (en) | 2001-03-08 | 2005-05-31 | Daikin Industries, Ltd. | Fluorine-containing material for optical waveguide |
US7106940B2 (en) | 2001-03-08 | 2006-09-12 | Daikin Industries, Ltd. | Fluorine-containing material for optical waveguide |
Also Published As
Publication number | Publication date |
---|---|
JP3728398B2 (en) | 2005-12-21 |
US6233388B1 (en) | 2001-05-15 |
CN1277677A (en) | 2000-12-20 |
CA2308484A1 (en) | 1999-05-14 |
CN1122186C (en) | 2003-09-24 |
JP2001522059A (en) | 2001-11-13 |
EP1029251A1 (en) | 2000-08-23 |
AR014388A1 (en) | 2001-02-28 |
AU9765098A (en) | 1999-05-24 |
CA2308484C (en) | 2004-03-23 |
AU735433B2 (en) | 2001-07-05 |
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