WO2000011628A8 - A metallic building element for optoelectronics - Google Patents

A metallic building element for optoelectronics

Info

Publication number
WO2000011628A8
WO2000011628A8 PCT/SE1999/001395 SE9901395W WO0011628A8 WO 2000011628 A8 WO2000011628 A8 WO 2000011628A8 SE 9901395 W SE9901395 W SE 9901395W WO 0011628 A8 WO0011628 A8 WO 0011628A8
Authority
WO
WIPO (PCT)
Prior art keywords
building element
sub
precision
metallic building
nickel
Prior art date
Application number
PCT/SE1999/001395
Other languages
French (fr)
Other versions
WO2000011628A1 (en
Inventor
Claes Blom
Christian Vieider
Olle Larsson
Original Assignee
Ericsson Telefon Ab L M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ericsson Telefon Ab L M filed Critical Ericsson Telefon Ab L M
Priority to EP99943588A priority Critical patent/EP1110188A1/en
Priority to CA002340987A priority patent/CA2340987A1/en
Priority to AU56655/99A priority patent/AU5665599A/en
Priority to JP2000566810A priority patent/JP2002523805A/en
Publication of WO2000011628A1 publication Critical patent/WO2000011628A1/en
Publication of WO2000011628A8 publication Critical patent/WO2000011628A8/en
Priority to HK02101929.2A priority patent/HK1040548A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/24—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a grooved structure, e.g. V-grooved, crescent active layer in groove, VSIS laser
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3696—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier by moulding, e.g. injection moulding, casting, embossing, stamping, stenciling, printing, or with metallic mould insert manufacturing using LIGA or MIGA techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12542—More than one such component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12944—Ni-base component

Abstract

The present invention relates to a method of patterning metallic building elements, and also to a metallic building element, where the measuring accuracy achieved can lie in the sub-micrometer range. Starting from a silicon master or original that can be etched to sub-micrometer precision and then plated with a metal, such as nickel (3), on the silicon surface, there can be produced a nickel shim where precision and surface fineness can lie in the sub-micrometer range. Subsequent to removal of the silicon master, a photo-sensitive material (5) can be used in liquid form or in film form to create mould cavities (9) that reach down to the nickel shim. These cavities can then be metal-plated to provide a building element (8) of higher precision in three dimensions.
PCT/SE1999/001395 1998-08-18 1999-08-18 A metallic building element for optoelectronics WO2000011628A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP99943588A EP1110188A1 (en) 1998-08-18 1999-08-18 A metallic building element for optoelectronics
CA002340987A CA2340987A1 (en) 1998-08-18 1999-08-18 A metallic building element for optoelectronics
AU56655/99A AU5665599A (en) 1998-08-18 1999-08-18 A metallic building element for optoelectronics
JP2000566810A JP2002523805A (en) 1998-08-18 1999-08-18 Metal structure elements for optoelectronic devices
HK02101929.2A HK1040548A1 (en) 1998-08-18 2002-03-13 A metallic building element for optoelectronics

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9802751A SE522114C2 (en) 1998-08-18 1998-08-18 Metallic building elements for optoelectronics
SE9802751-9 1998-08-18

Publications (2)

Publication Number Publication Date
WO2000011628A1 WO2000011628A1 (en) 2000-03-02
WO2000011628A8 true WO2000011628A8 (en) 2000-05-18

Family

ID=20412268

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SE1999/001395 WO2000011628A1 (en) 1998-08-18 1999-08-18 A metallic building element for optoelectronics

Country Status (11)

Country Link
US (2) US6523804B1 (en)
EP (1) EP1110188A1 (en)
JP (1) JP2002523805A (en)
KR (1) KR100575498B1 (en)
CN (1) CN1313956A (en)
AU (1) AU5665599A (en)
CA (1) CA2340987A1 (en)
HK (1) HK1040548A1 (en)
SE (1) SE522114C2 (en)
TW (1) TW396369B (en)
WO (1) WO2000011628A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7997889B2 (en) * 2006-05-26 2011-08-16 Richie Johnson Method for making hard mold
US8948562B2 (en) 2008-11-25 2015-02-03 Regents Of The University Of Minnesota Replication of patterned thin-film structures for use in plasmonics and metamaterials
CN102787333B (en) * 2012-08-22 2015-02-04 江苏大学 Manufacturing method and device for fibre laser and electrochemical complex nanosecond pulse deposition

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2426347A1 (en) 1978-05-18 1979-12-14 Thomson Csf SEMICONDUCTOR LASER SOURCE AND ITS MANUFACTURING PROCESS
JPS58158225A (en) * 1982-03-15 1983-09-20 Toshiba Corp Manufacture of information recording substrate
DE3512093A1 (en) * 1985-03-29 1986-10-02 Siemens AG, 1000 Berlin und 8000 München METHOD FOR PRODUCING A FLAT LIGHTING UNIT
JPH06101616B2 (en) * 1986-02-21 1994-12-12 名幸電子工業株式会社 Method for manufacturing conductor circuit board
JPH01225789A (en) * 1988-03-05 1989-09-08 Hitake Seiko Kk Formation of metallic pattern
JPH0230786A (en) * 1988-07-19 1990-02-01 Seiko Epson Corp Method for duplicating stamper
DE4212208A1 (en) 1992-04-10 1993-10-14 Bosch Gmbh Robert Process for the production of optical polymer components with integrated fiber-chip coupling in impression technique
US5545367A (en) * 1992-04-15 1996-08-13 Soane Technologies, Inc. Rapid prototype three dimensional stereolithography
US5190637A (en) * 1992-04-24 1993-03-02 Wisconsin Alumni Research Foundation Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
US5378583A (en) * 1992-12-22 1995-01-03 Wisconsin Alumni Research Foundation Formation of microstructures using a preformed photoresist sheet
DE4300652C1 (en) 1993-01-13 1994-03-31 Bosch Gmbh Robert Hybrid integrated optical circuit manufacturing method - uses shaping tool into which electro-optical semiconductor component is inserted before enclosing in polymer material
US5412265A (en) * 1993-04-05 1995-05-02 Ford Motor Company Planar micro-motor and method of fabrication
US5483387A (en) * 1994-07-22 1996-01-09 Honeywell, Inc. High pass optical filter
US5630902A (en) * 1994-12-30 1997-05-20 Honeywell Inc. Apparatus for use in high fidelty replication of diffractive optical elements
US5706066A (en) * 1995-10-16 1998-01-06 Sharp Kabushiki Kaisha Deflecting device and projection-type display unit using same
US6129559A (en) * 1996-01-19 2000-10-10 Sumitomo Electric Industries, Ltd. Microconnector and method of manufacturing the same
SE510049C2 (en) 1996-03-25 1999-04-12 Ericsson Telefon Ab L M Device for connecting at least one waveguide to an optical transmitter or receiver
US5858622A (en) * 1996-07-23 1999-01-12 Wisconsin Alumni Research Foundation Thick metal integrated transmission line fabrication
US6094116A (en) * 1996-08-01 2000-07-25 California Institute Of Technology Micro-electromechanical relays
SE508068C2 (en) 1996-12-19 1998-08-24 Ericsson Telefon Ab L M Micro replication in metal
US20010014409A1 (en) * 1997-04-04 2001-08-16 Cohen Adam L. Article, method, and apparatus for electrochemical fabrication
JPH11326603A (en) * 1998-05-19 1999-11-26 Seiko Epson Corp Microlens array and its production thereof, and display
US6242163B1 (en) * 1998-08-31 2001-06-05 Board Of Trustees Of The Leland Stanford Junior University Shape deposition manufacturing of microscopic ceramic and metallic parts using silicon molds
US6163957A (en) * 1998-11-13 2000-12-26 Fujitsu Limited Multilayer laminated substrates with high density interconnects and methods of making the same
JP4733319B2 (en) * 2000-09-18 2011-07-27 アイメック Manufacturing method of probe tip structure

Also Published As

Publication number Publication date
JP2002523805A (en) 2002-07-30
EP1110188A1 (en) 2001-06-27
SE9802751D0 (en) 1998-08-18
SE522114C2 (en) 2004-01-13
TW396369B (en) 2000-07-01
WO2000011628A1 (en) 2000-03-02
CN1313956A (en) 2001-09-19
KR100575498B1 (en) 2006-05-03
AU5665599A (en) 2000-03-14
US7163639B2 (en) 2007-01-16
CA2340987A1 (en) 2000-03-02
HK1040548A1 (en) 2002-06-14
SE9802751L (en) 2000-02-19
KR20010072711A (en) 2001-07-31
US20020104826A1 (en) 2002-08-08
US6523804B1 (en) 2003-02-25

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