WO2000029855A1 - Dispositif micro-gyroscopique a plusieurs elements - Google Patents

Dispositif micro-gyroscopique a plusieurs elements Download PDF

Info

Publication number
WO2000029855A1
WO2000029855A1 PCT/US1999/023460 US9923460W WO0029855A1 WO 2000029855 A1 WO2000029855 A1 WO 2000029855A1 US 9923460 W US9923460 W US 9923460W WO 0029855 A1 WO0029855 A1 WO 0029855A1
Authority
WO
WIPO (PCT)
Prior art keywords
output
drive
micro
gyro device
axis
Prior art date
Application number
PCT/US1999/023460
Other languages
English (en)
Inventor
Ying W. Hsu
John W. Reeds, Iii
Christ H. Saunders
Original Assignee
Irvine Sensors Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1998/021798 external-priority patent/WO1999019734A2/fr
Application filed by Irvine Sensors Corporation filed Critical Irvine Sensors Corporation
Publication of WO2000029855A1 publication Critical patent/WO2000029855A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Definitions

  • Figure 1 is an isometric view of the two internally movable parts of a micro-gyro
  • Figure 2 is an isometric view of the substrate which supports the structure shown in Figure 1
  • Figure 3 is a plan view of the micro-gyro of Figures 1 and 2, showing a block diagram of the electrical circuitry which connects to the micro-gyro parts and electrodes
  • Figure 4 is a plan view enlargement of a portion of the micro-gyro
  • Figure 5 is a section on the line 5-5 of Figure 4
  • Figure 6 is a plan view of a micro-gyro so mounted that it can sense rates in either of two axes
  • Figure 7 is an isometric exploded view of an alternative micro-gyro design
  • Figure 8 is an isometric exploded view of a micro-gyro design similar to Figure 7, in which rate can be sensed in either of two axes
  • Figure 9 is a plan view of another alternative micro-gyro design.
  • Figure 3 is a plan view of the two elements shown in Figure 1 , with an electrical diagram added.
  • the elements of the micro-gyro and the substrate may be formed of silicon chip material (or other easily shaped, inexpensive material).
  • An outer ring-shaped element 20 is used as the driving element, and an inner disk-shaped element 22 is used as the sensing element.
  • the elements 20 and 22 have essentially independent motion around different axes.
  • the outer element 20 is caused to oscillate at a predetermined rate around a drive axis 21 , which is perpendicular to the plane of the micro-gyro.
  • the inner element 22 is caused by Coriolis force to oscillate, or rock, around an output axis 24, which is in the plane of the gyro elements.

Abstract

L'invention concerne un dispositif micro-gyroscopique combinant un élément d'entraînement (20) qui oscille autour d'un axe d'entraînement (21) et un élément de sortie (22) qui balance autour de l'axe de sortie (24). Ainsi, la force de Coriolis est transmise d'un élément à l'autre sans aucun transfert de mouvement d'un élément à l'autre dans son propre sens de déplacement. En d'autres termes, Les masses des deux éléments agissent indépendamment l'une de l'autre, donnant une meilleure performance et une flexibilité individuelle de façon à compenser un manque de précision de fabrication. Le dispositif actuellement préféré combine une bague extérieure (20) qui oscille autour de l'axe d'entraînement (21) et un disque intérieur (22) qui balance autour de l'axe de sortie (24) à chaque mouvement rotatif extérieur autour de l'axe de vitesse (40).
PCT/US1999/023460 1998-10-14 1999-10-06 Dispositif micro-gyroscopique a plusieurs elements WO2000029855A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
USPCT/US98/21798 1998-10-14
PCT/US1998/021798 WO1999019734A2 (fr) 1997-10-14 1998-10-14 Dispositif micro-gyroscopique a plusieurs elements

Publications (1)

Publication Number Publication Date
WO2000029855A1 true WO2000029855A1 (fr) 2000-05-25

Family

ID=22268093

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1999/023460 WO2000029855A1 (fr) 1998-10-14 1999-10-06 Dispositif micro-gyroscopique a plusieurs elements

Country Status (1)

Country Link
WO (1) WO2000029855A1 (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002016871A1 (fr) * 2000-08-18 2002-02-28 Hahn-Schickard Gesellschaft Für Angewandte Forschung E.V. Capteur de vitesse de rotation et systeme de capteur de vitesse de rotation
EP1407279A1 (fr) * 2001-06-26 2004-04-14 Microsensors Inc. Procede de conception d'un systeme de flexion permettant de regler la reponse modale d'un gyroscope micro-usine decouple, et gyroscope concu conformement audit procede
US6766689B2 (en) 2001-04-27 2004-07-27 Stmicroelectronics S.R.L. Integrated gyroscope of semiconductor material
US6928872B2 (en) 2001-04-27 2005-08-16 Stmicroelectronics S.R.L. Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
EP1832841A1 (fr) * 2006-03-10 2007-09-12 STMicroelectronics S.r.l. Structure de capteur intégré microélectromécanique avec déplacement de commande rotative
DE102007035806A1 (de) * 2007-07-31 2009-02-12 Sd Sensordynamics Ag Mikromechanischer Drehratensensor
DE102008002748A1 (de) * 2008-06-27 2009-12-31 Sensordynamics Ag Mikro-Gyroskop
DE10162947B4 (de) * 2000-12-20 2010-01-14 DENSO CORPORATION, Kariya-shi Eine Halbleitervorrichtung mit Abschirmung
JP5052674B2 (ja) * 2008-08-06 2012-10-17 パイオニア株式会社 回転振動型ジャイロ
USRE45792E1 (en) 2007-09-11 2015-11-03 Stmicroelectronics S.R.L. High sensitivity microelectromechanical sensor with driving motion
US20220259035A1 (en) * 2021-02-17 2022-08-18 Kabushiki Kaisha Toshiba Sensor and electronic device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5377544A (en) * 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5377544A (en) * 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002016871A1 (fr) * 2000-08-18 2002-02-28 Hahn-Schickard Gesellschaft Für Angewandte Forschung E.V. Capteur de vitesse de rotation et systeme de capteur de vitesse de rotation
DE10162947B4 (de) * 2000-12-20 2010-01-14 DENSO CORPORATION, Kariya-shi Eine Halbleitervorrichtung mit Abschirmung
US6766689B2 (en) 2001-04-27 2004-07-27 Stmicroelectronics S.R.L. Integrated gyroscope of semiconductor material
US6928872B2 (en) 2001-04-27 2005-08-16 Stmicroelectronics S.R.L. Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
EP1407279A4 (fr) * 2001-06-26 2009-11-11 Aprolase Dev Co Llc Procede de conception d'un systeme de flexion permettant de regler la reponse modale d'un gyroscope micro-usine decouple, et gyroscope concu conformement audit procede
EP1407279A1 (fr) * 2001-06-26 2004-04-14 Microsensors Inc. Procede de conception d'un systeme de flexion permettant de regler la reponse modale d'un gyroscope micro-usine decouple, et gyroscope concu conformement audit procede
EP1832841A1 (fr) * 2006-03-10 2007-09-12 STMicroelectronics S.r.l. Structure de capteur intégré microélectromécanique avec déplacement de commande rotative
US7694563B2 (en) 2006-03-10 2010-04-13 Stmicroelectronics S.R.L. Microelectromechanical integrated sensor structure with rotary driving motion
DE102007035806A1 (de) * 2007-07-31 2009-02-12 Sd Sensordynamics Ag Mikromechanischer Drehratensensor
DE102007035806B4 (de) * 2007-07-31 2011-03-17 Sensordynamics Ag Mikromechanischer Drehratensensor
US8353212B2 (en) 2007-07-31 2013-01-15 Maxim Integrated Products Gmbh Micromechanical rate-of-rotation sensor
USRE45792E1 (en) 2007-09-11 2015-11-03 Stmicroelectronics S.R.L. High sensitivity microelectromechanical sensor with driving motion
USRE45855E1 (en) 2007-09-11 2016-01-19 Stmicroelectronics S.R.L. Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes
DE102008002748A1 (de) * 2008-06-27 2009-12-31 Sensordynamics Ag Mikro-Gyroskop
CN102077054A (zh) * 2008-06-27 2011-05-25 感应动力股份公司 微陀螺仪
US8429970B2 (en) 2008-06-27 2013-04-30 Maxim Integrated Products Gmbh Microgyroscope
JP5052674B2 (ja) * 2008-08-06 2012-10-17 パイオニア株式会社 回転振動型ジャイロ
US20220259035A1 (en) * 2021-02-17 2022-08-18 Kabushiki Kaisha Toshiba Sensor and electronic device
US11834326B2 (en) * 2021-02-17 2023-12-05 Kabushiki Kaisha Toshiba Sensor and electronic device

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