WO2000060645A2 - Dual cmp pad conditioner - Google Patents
Dual cmp pad conditioner Download PDFInfo
- Publication number
- WO2000060645A2 WO2000060645A2 PCT/US2000/008340 US0008340W WO0060645A2 WO 2000060645 A2 WO2000060645 A2 WO 2000060645A2 US 0008340 W US0008340 W US 0008340W WO 0060645 A2 WO0060645 A2 WO 0060645A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pad
- conditioning
- cmp
- polishing apparatus
- slurry
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/013—Application of loose grinding agent as auxiliary tool during truing operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU40444/00A AU4044400A (en) | 1999-04-01 | 2000-03-29 | Dual cmp pad conditioner |
KR1020007013508A KR20010071353A (en) | 1999-04-01 | 2000-03-29 | Dual cmp pad conditioner |
EP00919823A EP1190455A2 (en) | 1999-04-01 | 2000-03-29 | Dual cmp pad conditioner |
JP2000610047A JP2002540972A (en) | 1999-04-01 | 2000-03-29 | Double CMP pad adjustment device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US28371699A | 1999-04-01 | 1999-04-01 | |
US09/283,716 | 1999-04-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2000060645A2 true WO2000060645A2 (en) | 2000-10-12 |
WO2000060645A3 WO2000060645A3 (en) | 2002-01-17 |
Family
ID=23087250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2000/008340 WO2000060645A2 (en) | 1999-04-01 | 2000-03-29 | Dual cmp pad conditioner |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1190455A2 (en) |
JP (1) | JP2002540972A (en) |
KR (1) | KR20010071353A (en) |
CN (1) | CN1362907A (en) |
AU (1) | AU4044400A (en) |
WO (1) | WO2000060645A2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002043923A1 (en) * | 2000-11-29 | 2002-06-06 | Infineon Technologies Ag | Cleaning device for cleaning polishing cloths used for polishing semiconductor wafers |
EP1334802A1 (en) * | 2000-10-24 | 2003-08-13 | Ebara Corporation | Polisher |
DE10308064A1 (en) * | 2003-02-26 | 2004-09-16 | Infineon Technologies Ag | Mechanism for chemo-mechanical polishing (CMP) of semiconductor wafers with polishing medium specified supply, polishing plate and polishing head, which presses wafer onto plate, with supply appliance for polishing medium |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7125324B2 (en) * | 2004-03-09 | 2006-10-24 | 3M Innovative Properties Company | Insulated pad conditioner and method of using same |
US20100041316A1 (en) * | 2008-08-14 | 2010-02-18 | Yulin Wang | Method for an improved chemical mechanical polishing system |
JP5542818B2 (en) * | 2008-08-14 | 2014-07-09 | アプライド マテリアルズ インコーポレイテッド | Chemical mechanical polishing machine and method with movable slurry dispenser |
US20100291840A1 (en) * | 2009-05-12 | 2010-11-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | System and method for conditioning chemical mechanical polishing apparatus using multiple conditioning disks |
CN102554782A (en) * | 2010-12-20 | 2012-07-11 | 中芯国际集成电路制造(上海)有限公司 | Polishing pad cleaning device and polishing pad finisher |
US8920214B2 (en) * | 2011-07-12 | 2014-12-30 | Chien-Min Sung | Dual dressing system for CMP pads and associated methods |
US9149906B2 (en) * | 2011-09-07 | 2015-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for CMP pad conditioning |
CN103182681A (en) * | 2011-12-28 | 2013-07-03 | 青岛嘉星晶电科技股份有限公司 | Rectifying device for millstone of double-sided grinder, and rectifying method thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5421768A (en) * | 1993-06-30 | 1995-06-06 | Mitsubishi Materials Corporation | Abrasive cloth dresser |
US5683289A (en) * | 1996-06-26 | 1997-11-04 | Texas Instruments Incorporated | CMP polishing pad conditioning apparatus |
WO1998045090A1 (en) * | 1997-04-04 | 1998-10-15 | Obsidian, Inc. | Polishing media magazine for improved polishing |
-
2000
- 2000-03-29 CN CN00800898A patent/CN1362907A/en active Pending
- 2000-03-29 EP EP00919823A patent/EP1190455A2/en not_active Withdrawn
- 2000-03-29 KR KR1020007013508A patent/KR20010071353A/en not_active Application Discontinuation
- 2000-03-29 AU AU40444/00A patent/AU4044400A/en not_active Abandoned
- 2000-03-29 WO PCT/US2000/008340 patent/WO2000060645A2/en not_active Application Discontinuation
- 2000-03-29 JP JP2000610047A patent/JP2002540972A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5421768A (en) * | 1993-06-30 | 1995-06-06 | Mitsubishi Materials Corporation | Abrasive cloth dresser |
US5683289A (en) * | 1996-06-26 | 1997-11-04 | Texas Instruments Incorporated | CMP polishing pad conditioning apparatus |
WO1998045090A1 (en) * | 1997-04-04 | 1998-10-15 | Obsidian, Inc. | Polishing media magazine for improved polishing |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1334802A1 (en) * | 2000-10-24 | 2003-08-13 | Ebara Corporation | Polisher |
EP1334802A4 (en) * | 2000-10-24 | 2005-08-31 | Ebara Corp | Polisher |
WO2002043923A1 (en) * | 2000-11-29 | 2002-06-06 | Infineon Technologies Ag | Cleaning device for cleaning polishing cloths used for polishing semiconductor wafers |
DE10195157B4 (en) * | 2000-11-29 | 2010-08-26 | Qimonda Ag | Cleaning device for cleaning polishing cloths used for polishing semiconductor wafers |
DE10308064A1 (en) * | 2003-02-26 | 2004-09-16 | Infineon Technologies Ag | Mechanism for chemo-mechanical polishing (CMP) of semiconductor wafers with polishing medium specified supply, polishing plate and polishing head, which presses wafer onto plate, with supply appliance for polishing medium |
DE10308064B4 (en) * | 2003-02-26 | 2006-03-09 | Infineon Technologies Ag | Polishing agent supply in CMP processes |
Also Published As
Publication number | Publication date |
---|---|
KR20010071353A (en) | 2001-07-28 |
WO2000060645A3 (en) | 2002-01-17 |
CN1362907A (en) | 2002-08-07 |
EP1190455A2 (en) | 2002-03-27 |
JP2002540972A (en) | 2002-12-03 |
AU4044400A (en) | 2000-10-23 |
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