WO2000069594A1 - Usinage au laser de pieces sur fond liquide et appareil a cet effet - Google Patents

Usinage au laser de pieces sur fond liquide et appareil a cet effet Download PDF

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Publication number
WO2000069594A1
WO2000069594A1 PCT/US1999/011044 US9911044W WO0069594A1 WO 2000069594 A1 WO2000069594 A1 WO 2000069594A1 US 9911044 W US9911044 W US 9911044W WO 0069594 A1 WO0069594 A1 WO 0069594A1
Authority
WO
WIPO (PCT)
Prior art keywords
liquid
laser beam
passage
workpiece
front wall
Prior art date
Application number
PCT/US1999/011044
Other languages
English (en)
Inventor
Bruce E. Warner
Charles T. Rockhold
Original Assignee
United States Enrichment Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Enrichment Corporation filed Critical United States Enrichment Corporation
Priority to AU40040/99A priority Critical patent/AU4004099A/en
Priority to PCT/US1999/011044 priority patent/WO2000069594A1/fr
Publication of WO2000069594A1 publication Critical patent/WO2000069594A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/42—Plastics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/52—Ceramics

Definitions

  • This invention relates to the precision machining of workpieces with radiation beams, such as laser beams, and protecting those portions of the workpiece which would otherwise be struck by the laser beam after it has made the cut against damage by the beam.
  • Many workpieces such as fuel injectors for internal combustion engines, for example, require the formation of very small-diameter precision holes through a variety of materials, from plastics to hard-to-machine materials such as metal or ceramics, for example. While holes are normally drilled, drilling becomes exceedingly difficult as the diameter of the holes becomes smaller.
  • Fuel injectors for internal combustion engines for example, require the formation of holes having diameters in the range of between 150-200 microns (" ⁇ ") with a tolerance of as little as ⁇ l ⁇ .
  • Such small-diameter holes for example, are ideally suited for laser machining; that is, directing a precisely controlled laser beam having the required energy against the workpiece to burn through it and thereby form the hole.
  • back wall When there is a wall (“back wall”) spaced from the wall (“front wall”) through which the hole is to be formed, the laser can impinge on the back wall after it has cut the hole in the front wall and damage it, e.g. burn a depression or even a hole into the back wall.
  • solid backing used in the past includes materials, such as metal or plastic, which are placed in the space between the walls to absorb the laser radiation penetrating through the front wall. This has several shortcomings .
  • solid backing materials can melt and/or become vaporized when subjected to the laser beam, causing a dispersion of the backing material onto the workpiece. This can cause problems when adhering backing material must be removed from the workpiece before it can be used.
  • the backing material is often more readily burned through by the laser beam than the material that it is to protect and, as a result, the backing material frequently offers only limited protection.
  • the backing material should be able to withstand, without adverse effects for the workpiece, full illumination by the laser beam while protecting the back wall against any damage from the beam.
  • Such backing materials should further be inexpensive, easily placed in the proper position, and their properties should be adjustable for different workpiece geometries and laser beam energies.
  • the present invention overcomes the shortcoming encountered with prior art backing methods to prevent radiation, e.g. laser beams, from damaging the workpiece by reducing the energy density or concentration of the beam so that it either does not reach the opposing wall at all, or reaches it with a sufficiently low energy density that it cannot cause damage.
  • This is accomplished by placing a laser beam absorbing or scattering fluid, typically a liquid, in the passage between the front and back walls.
  • Laser (or other radiation) beam absorbing liquids may include, but are not limited to, liquids, including water as well as other liquids, mixed with an energy absorbing dye . Sufficient dye is mixed into the liquid so that the laser beam is attenuated to the desired degree over the length of its beam which extends through the liquid.
  • a laser beam light scattering material such as small particles, may be added to the liquid in the needed concentration so that laser light breaking through the front wall of the workpiece is sufficiently scattered in the passageway between the front and back walls that no part of the walls receives laser light having an energy density which might cause damage.
  • the precise manner in which the passageway between the front and back walls is filled with the laser light absorbing fluid depends to a significant extent on the size and physical dimensions of the workpiece in question, including the shape and accessibility of the passageway. Further, the technique employed in any given instance will depend on the material of which the workpiece is constructed as well as the laser energy that is being employed. Generally speaking, however, the fluid may be a liquid, a viscous and/or gel-like substance, which may be flowed, injected or otherwise transported into the passageway and, under appropriate conditions, the fluid might even be a gas. Further, the fluid may remain stationary in the passage, e.g. it may be filled into the passage and remain there until after the laser cutting is over or, more typically, the fluid will be circulated through the passage. For purposes of this application, the fluid (whether a liquid, a gas, a gel, etc.) in the passage between the walls will at times be referred to as "liquid backing.”
  • a presently preferred embodiment of the invention uses the liquid backing for machining precision orifices, such as transpiration cooling channels in turbine blades, or fuel discharge orifices in fuel injectors of internal combustion engines.
  • the latter typically have a blind hole with an end wall through which one or more orifices of diameters in the range of between 100-500 ⁇ must be formed.
  • the laser beam attenuating liquid may be water mixed with a dye (for example, red dye) and it is circulated through the passage with two concentric conduits .
  • the inner conduit is a needle which has an open end located proximate the end wall of the injector and it serves as the inlet conduit for the liquid.
  • the outer conduit surrounds the needle, is sealed to the open end of the passage of the injector, serves as an outlet, and transports the liquid away from the passage.
  • the injector passage To prevent an overheating and possible evaporation of the liquid, which could expose and damage the back wall, it is circulated through the injector passage at a sufficient rate so that it is not overheated by the laser beam. For continuously operating lasers, this can be done by controlling the flow rate so that there is an energy balance between the power or heat absorbed by the liquid and the power or heat removed by flowing the liquid out of the passage.
  • overheating can be prevented by flowing the liquid through the passage at a sufficient rate so that any given liquid volume subjected to laser light during one laser pulse has been replaced with a fresh volume of liquid by the time the next succeeding laser pulse is generated.
  • the present invention operates the liquid circulating system so that the pressure at the outlet conduit is at or only minimally above or below atmospheric pressure (on the exterior of the injector) to prevent the liquid from emerging from the orifice, or have air enter through the orific (s) and become entrained in the liquid if its pressure is too much below atmospheric pressure.
  • the present invention additionally provides a system so that workpieces, such as the earlier discussed fuel injectors, can be moved relative to the laser beam for forming several, spaced-apart orifices in the injector.
  • workpieces such as the earlier discussed fuel injectors
  • the liquid backing provided by the present invention effectively prevents laser beams from damaging opposing walls after they have burned through the front wall without adversely affecting the workpiece, while requiring minimal labor. It therefore enhances the efficiency of laser machining and significantly reduces the costs thereof.
  • FIG. 2 schematically illustrates a second aspect of the present invention.
  • Fig. 3 is a schematic, side elevational view, partially in section, which illustrates the method and apparatus of the present invention in more detail.
  • a laser beam 2 is used to machine or, more precisely, to burn a hole 4 through a front wall 6 of a workpiece 8.
  • a back wall 10 is spaced apart from the front wall, overlies the hole in the latter, and with the front wall defines a passageway 12 inside the workpiece which is accessible through an access opening 14 of the workpiece.
  • the laser beam is aimed against the latter to burn a precision hole into the wall .
  • the laser beam breaks through the front wall after hole 4 has been opened, it impinges on liquid 16 in the passageway 12.
  • the radiation absorbing dye thereof attenuates the laser beam and reduces its energy density so that the front end of the beam either does not reach back wall 10 at all or its energy density will have been reduced sufficiently so that it does not damage the front wall; that is, so that it neither forms depressions therein or a hole therethrough.
  • the laser beam attenuating liquid 16 Since the passageway is typically of a given, unchangeable size, the laser beam attenuating liquid 16 must be capable of absorbing at least enough laser energy over the length of the path of the beam through the liquid to prevent the beam from damaging the back wall until the laser beam can be repositioned or turned off.
  • the type of liquid used in passageway 12 the concentration of laser energy absorbing material in the liquid, or the absorbing capacity of the liquid itself must be selected on the basis of the energy density of the laser beam and the length of its travel path through the liquid before it strikes the back wall.
  • the laser radiation absorbing capacity of the liquid can be increased by increasing the concentration of the earlier mentioned dye in the water.
  • liquid 16 absorbs energy from the laser beam, it becomes heated by it.
  • the liquid is circulated through the passage at a sufficient rate as was discussed above. This can be done, for example, by appropriately pumping the liquid at a controlled rate.
  • a hole 4 is formed in front wall 6 with a laser beam 2 in the same workpiece 8 as is shown in Fig. 1.
  • the liquid 20 in passageway 12, however, is not a laser beam absorbing but a laser beam scattering liquid.
  • small particles 22 of the appropriate size may be entrained in the liquid in sufficient concentration so that the laser beam entering the passage through the hole in the front wall becomes scattered and thereby diffused in many or all directions.
  • laser light eventually striking one of the walls 6, 10 will have a sufficiently low energy density that the walls will not be damaged.
  • Scattering liquid 20 may at times absorb relatively less heat from the laser light. Hence, there is a lesser danger of over-heating and the scattering liquid can flow at a lesser rate through passageway 12 or, under appropriate circumstances, blind holes and the like (not shown in Fig. 2) can be cut without having to circulate the liquid into and out of the hole. Further, since in such instances the liquid need not be flowable, substances such as highly viscous material, gels or the like can be placed into the passageway by flowing or injecting them, preferably after the scattering particles 22 have been entrained.
  • Fig. 3 in a specific embodiment of the invention it is used to burn or machine small -diameter orifice holes 24 in an end wall 26 of a fuel injector 28 for an internal combustion engine.
  • the fuel injector has a tubular body 30, a flange 32 at the end of the injector opposite from end wall 26, and an access opening 34. Before the orifices are formed, the injector is placed into an appropriately shaped mounting hole 36 in a positioning jig 38.
  • a flow tube 40 is inserted into an interior bore 42 of the injector and has a free end coupled to a T-shaped inlet fitting 44.
  • An elongated inlet conduit preferably in the form of a hollow needle 46, is inserted through an opening in the end of fitting 44 and extends deep into the blind bore 42 of the injector so that an open end 48 of the needle is proximate but spaced from injector end wall 26.
  • the other end 50 of the needle is fluidly coupled to a source 52 of laser beam attenuating liquid via a pressure regulator, valve or the like 54 so that the liquid can be flowed from the source through the regulator and the needle into the bore of the injector.
  • a locator plate 56 is slipped over flow tube 40 and includes a recess on the side of the plate facing jig 38 which receives a compression seal ring 58.
  • the locator plate is pressed against the jig with a sufficient clamping force 60 to compress seal ring 58 so that a seal is established which prevents liquid from leaking from between the exterior of flow tube 40 and injector bore 48.
  • Clamping force 60 can be generated in any desirable manner such as with a manually activated clamp, a mechanical, electrical, magnetic power drive, and the like, all of which are well known to those skilled in the art and, therefore, are not further described herein.
  • laser beam attenuating liquid is circulated through the laser bore by flowing it from the source 52 through the needle and out its open end.
  • the liquid flows over the inner surface of end wall 26 and then gradually migrates out of the injector bore in the annular space defined by the inside of flow tube 40 and the exterior or needle 46.
  • Seal ring 58 prevents any leakage of liquid and the liquid is eventually withdrawn through a hole 61 in a branch 63 of T-fitting 44.
  • withdrawn liquid is reconditioned by removing impurities from it, cooling it as needed, replenishing liquid and/or laser light attenuating materials therein (such as dye) , and then returning it to the liquid source for recirculation through the injector mounted in the jig.
  • a laser 62 is activated and jig 38 is repositioned with a positioning drive 64 so that a laser beam 67 strikes injector end wall 26 at the location where orifice 24 is to be formed.
  • the laser beam striking the end wall melts the material of the wall, may partially or wholly evaporate it, and after the orifice is formed the laser beam enters the laser beam attenuating liquid 66 in the base of the injector.
  • Dotted line 68 shows the path of the laser beam through the liquid and where the beam would strike the tubular body 30 of the injector, which, in the terminology of this application, forms a back wall.
  • the laser beam traverses the liquid in the bore of the injector, its energy density decreases, by absorption and/or scattering, so that it does not damage the body of the injector.
  • a positioning drive 64 can be activated to reposition the injector relative to the laser so that the laser beam strikes the end wall at a location where another orifice (not shown in the drawings) is to be formed. This can be repeated any number of times until all orifices have been formed in the end wall.
  • liquid 66 might leak through it from the injector bore 42 to the exterior of the injector. To prevent this, the pressure of the liquid in the bore is carefully controlled so that it is as close as possible to the ambient pressure, for example with pressure regulator 54. At such a pressure there will be no or only minimal leakage through the orifice.
  • liquid source is calibrated so that the liquid flows at a sufficient rate through the portion of injector bore 42 illuminated by laser beam 66 so that a new volume of liquid is traversed by each successive laser beam pulse as was described in more detail above.

Abstract

La présente invention concerne l'utilisation d'un faisceau de laser pulsé pour percer des petits trous de précision (24) dans la paroi antérieure (26) d'une pièce. En l'occurrence, la pièce à usiner comporte une paroi postérieure qui est à une certaine distance de la paroi antérieure (26) et définit par rapport à elle un passage. Dans le passage, on fait circuler un fluide atténuant le faisceau laser choisi de façon à absorber suffisamment d'énergie du faisceau laser pour éviter que la moindre partie du faisceau laser ne vienne percuter la paroi postérieure ou ne vienne se disperser sur cette paroi postérieure (26), évitant ainsi d'endommager les parois en y créant par brûlure des évitements ou des trous. Le liquide est mis à circuler par le passage avec un débit suffisant pour lui éviter la surchauffe ou l'évaporation sous l'effet du faisceau laser. Après conditionnement, ce liquide peut être remis dans le circuit pour passer dans le passage. Ce procédé de perçage de trous par faisceau laser convient à l'usinage des orifices de précision de petit diamètre des injecteurs de carburant (28) des moteurs à combustion interne.
PCT/US1999/011044 1999-05-18 1999-05-18 Usinage au laser de pieces sur fond liquide et appareil a cet effet WO2000069594A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU40040/99A AU4004099A (en) 1999-05-18 1999-05-18 Method and apparatus for laser machining workpieces with liquid backing
PCT/US1999/011044 WO2000069594A1 (fr) 1999-05-18 1999-05-18 Usinage au laser de pieces sur fond liquide et appareil a cet effet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1999/011044 WO2000069594A1 (fr) 1999-05-18 1999-05-18 Usinage au laser de pieces sur fond liquide et appareil a cet effet

Publications (1)

Publication Number Publication Date
WO2000069594A1 true WO2000069594A1 (fr) 2000-11-23

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WO (1) WO2000069594A1 (fr)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004002672A1 (fr) * 2002-06-28 2004-01-08 3M Innovative Properties Company Fabrication de tiges de soupapes
EP1454700A1 (fr) * 2003-03-05 2004-09-08 Trumpf Werkzeugmaschinen GmbH + Co. KG Lance de refroidissement et/ou de soufflage pour un dispositif d'usinage par laser et méthode d'aspiration des particules, des gaz ou des fumées pendant un usinage par laser
WO2007089469A2 (fr) * 2006-01-27 2007-08-09 The Ex One Company Protection de paroi arriere contre un laser par un ecran de matiere particulaire
WO2010065386A1 (fr) 2008-11-25 2010-06-10 Wisconsin Alumni Research Foundation Technique de rétro-percussion pour créer des nanotrous
WO2013004475A1 (fr) * 2011-07-05 2013-01-10 Robert Bosch Gmbh Procédé de production d'au moins un trou débouchant et dispositif de mise en oeuvre de ce procédé
US20140076857A1 (en) * 2012-09-14 2014-03-20 General Electric Company System and method for manufacturing an airfoil
WO2014206577A1 (fr) 2013-06-28 2014-12-31 Laser Zentrum Hannover E.V. Procédé de perçage au laser ou de découpage au laser d'une pièce
CN105899324A (zh) * 2013-09-11 2016-08-24 罗伯特·博世有限公司 对构件进行激光钻孔的方法
CN106166644A (zh) * 2015-05-21 2016-11-30 罗伯特·博世有限公司 用于工件的激光钻孔或激光切割的方法以及用于激光钻孔或激光切割的系统
US9575021B2 (en) 2009-11-06 2017-02-21 Wisconsin Alumni Research Foundation Piezoelectric substrate for the study of biomolecules
CN108044243A (zh) * 2017-12-18 2018-05-18 中国科学院西安光学精密机械研究所 具有复杂腔体工件的激光加工制孔方法及辅助填充系统
CN108406139A (zh) * 2018-02-02 2018-08-17 大族激光科技产业集团股份有限公司 激光在透明脆性材料上的钻孔装置及其钻孔方法
DE102017104044A1 (de) 2017-02-27 2018-08-30 Stoba Sondermaschinen Gmbh Verfahren zum Herstellen einer Brennstoff- oder Hydraulikmittelleiteinheit unter Einbringung eines Schutzmediums und Werkzeugmaschine
DE102017116943A1 (de) 2017-07-26 2019-01-31 Laser Zentrum Hannover E.V. Verfahren zum Laserbohren oder Laserschneiden eines Werkstückes
CN114273802A (zh) * 2020-09-27 2022-04-05 中国科学院宁波材料技术与工程研究所 一种激光打孔背伤防护方法及其装置

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US4288679A (en) * 1980-02-28 1981-09-08 Fiat Auto S.P.A. Method of microdrilling metal workpieces using a power laser
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Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004002672A1 (fr) * 2002-06-28 2004-01-08 3M Innovative Properties Company Fabrication de tiges de soupapes
EP1454700A1 (fr) * 2003-03-05 2004-09-08 Trumpf Werkzeugmaschinen GmbH + Co. KG Lance de refroidissement et/ou de soufflage pour un dispositif d'usinage par laser et méthode d'aspiration des particules, des gaz ou des fumées pendant un usinage par laser
US7321104B2 (en) 2003-03-05 2008-01-22 Trumpf Werkzeugmaschinen Gmbh & Co. Kg Cooling duct of a laser processing machine
WO2007089469A2 (fr) * 2006-01-27 2007-08-09 The Ex One Company Protection de paroi arriere contre un laser par un ecran de matiere particulaire
WO2007089469A3 (fr) * 2006-01-27 2007-09-20 Ex One Company Protection de paroi arriere contre un laser par un ecran de matiere particulaire
WO2010065386A1 (fr) 2008-11-25 2010-06-10 Wisconsin Alumni Research Foundation Technique de rétro-percussion pour créer des nanotrous
US8092739B2 (en) 2008-11-25 2012-01-10 Wisconsin Alumni Research Foundation Retro-percussive technique for creating nanoscale holes
US9575021B2 (en) 2009-11-06 2017-02-21 Wisconsin Alumni Research Foundation Piezoelectric substrate for the study of biomolecules
WO2013004475A1 (fr) * 2011-07-05 2013-01-10 Robert Bosch Gmbh Procédé de production d'au moins un trou débouchant et dispositif de mise en oeuvre de ce procédé
US8969760B2 (en) * 2012-09-14 2015-03-03 General Electric Company System and method for manufacturing an airfoil
US20140076857A1 (en) * 2012-09-14 2014-03-20 General Electric Company System and method for manufacturing an airfoil
DE102013212665B4 (de) * 2013-06-28 2015-06-25 Laser Zentrum Hannover E.V. Verfahren zum Laserbohren oder Laserschneiden eines Werkstücks
DE102013212665A1 (de) 2013-06-28 2014-12-31 Laser Zentrum Hannover E.V. Verfahren zum Laserbohren oder Laserschneiden eines Werkstücks
CN105339127A (zh) * 2013-06-28 2016-02-17 汉诺威激光中心 用于工件的激光钻孔或激光切割的方法
JP2016528039A (ja) * 2013-06-28 2016-09-15 レーザー・ツェントルム・ハノーバー・イー．ブイ．Ｌａｓｅｒ Ｚｅｎｔｒｕｍ Ｈａｎｎｏｖｅｒ ｅ．Ｖ． ワークピースをレーザ孔あけし、またはレーザ切断するための方法
WO2014206577A1 (fr) 2013-06-28 2014-12-31 Laser Zentrum Hannover E.V. Procédé de perçage au laser ou de découpage au laser d'une pièce
CN105899324A (zh) * 2013-09-11 2016-08-24 罗伯特·博世有限公司 对构件进行激光钻孔的方法
CN106166644A (zh) * 2015-05-21 2016-11-30 罗伯特·博世有限公司 用于工件的激光钻孔或激光切割的方法以及用于激光钻孔或激光切割的系统
CN106166644B (zh) * 2015-05-21 2021-04-27 罗伯特·博世有限公司 用于工件的激光钻孔或激光切割的方法以及用于激光钻孔或激光切割的系统
DE102017104044B4 (de) 2017-02-27 2024-02-01 Stoba Sondermaschinen Gmbh Verfahren zum Herstellen einer Brennstoff- oder Hydraulikmittelleiteinheit unter Einbringung eines Schutzmediums und Werkzeugmaschine
DE102017104044A1 (de) 2017-02-27 2018-08-30 Stoba Sondermaschinen Gmbh Verfahren zum Herstellen einer Brennstoff- oder Hydraulikmittelleiteinheit unter Einbringung eines Schutzmediums und Werkzeugmaschine
DE102017116943A1 (de) 2017-07-26 2019-01-31 Laser Zentrum Hannover E.V. Verfahren zum Laserbohren oder Laserschneiden eines Werkstückes
WO2019020741A1 (fr) 2017-07-26 2019-01-31 Laser Zentrum Hannover E.V. Procédé pour le perçage ou le découpage par laser d'une pièce à l'aide d'un liquide de protection
DE102017116943B4 (de) 2017-07-26 2019-04-11 Laser Zentrum Hannover E.V. Verfahren zum Laserbohren oder Laserschneiden eines Werkstückes
CN108044243A (zh) * 2017-12-18 2018-05-18 中国科学院西安光学精密机械研究所 具有复杂腔体工件的激光加工制孔方法及辅助填充系统
CN108406139A (zh) * 2018-02-02 2018-08-17 大族激光科技产业集团股份有限公司 激光在透明脆性材料上的钻孔装置及其钻孔方法
CN114273802A (zh) * 2020-09-27 2022-04-05 中国科学院宁波材料技术与工程研究所 一种激光打孔背伤防护方法及其装置

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