WO2001002289A1 - Movement sensor in a micro electro-mechanical device - Google Patents
Movement sensor in a micro electro-mechanical device Download PDFInfo
- Publication number
- WO2001002289A1 WO2001002289A1 PCT/AU2000/000582 AU0000582W WO0102289A1 WO 2001002289 A1 WO2001002289 A1 WO 2001002289A1 AU 0000582 W AU0000582 W AU 0000582W WO 0102289 A1 WO0102289 A1 WO 0102289A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- actuating arm
- pct
- contact element
- support structure
- arm
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04508—Control methods or devices therefor, e.g. driver circuits, control circuits aiming at correcting other parameters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0451—Control methods or devices therefor, e.g. driver circuits, control circuits for detecting failure, e.g. clogging, malfunctioning actuator
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04541—Specific driving circuit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04585—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on thermal bent actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04588—Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0459—Height of the driving signal being adjusted
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04591—Width of the driving signal being adjusted
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04596—Non-ejecting pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/07—Ink jet characterised by jet control
- B41J2/125—Sensors, e.g. deflection sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
- B41J29/393—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14346—Ejection by pressure produced by thermal deformation of ink chamber, e.g. buckling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14354—Sensor in each pressure chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
- B41J2002/14435—Moving nozzle made of thermal bend detached actuator
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8225—Position or extent of motion indicator
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8225—Position or extent of motion indicator
- Y10T137/8242—Electrical
Definitions
- This invention relates to an integrated movement sensor within a micro electro-mechanical (MEM) device.
- MEM micro electro-mechanical
- the invention has application in ink ejection nozzles of the type that are fabricated by integrating the technologies applicable to micro electro-mechanical systems (MEMS) and complementary metal-oxide semiconductor (“CMOS”) integrated circuits, and the invention is hereinafter described in the context of that application.
- MEMS micro electro-mechanical systems
- CMOS complementary metal-oxide semiconductor
- PCT/AU00/00554 PCT/AUOO/00556, PCT/AUOO/00557, PCT/AUOO/00558, PCT/AUOO/00559, PCT/AUOO/00560, PCT/AU00/00561.
- PCT/AU00/00581 PCT/AU00/00580, PCT/AUOO/00582, PCT/AU00/00587, PCT/AU00/00588, PCT/AU00/00589, PCT/AU00/00583, PCT/AU00/00593, PCT/AUOO/00590, PCT/AU00/00591, PCT/AU00/00592, PCT/AU00/00584, PCT/AUOO/00585, PCT/AUOO/00586, PCT/AU00/00594, PCT/AUOO/00595, PCT/AU00/00596, PCT/AU00/00597, PCT/AUOO/00598, PCT/AU00/00516, PCT/AU00/00517, PCT/AU00/0051 1.
- PCT/AU00/00501 PCT/AUOO/00502, PCT/AU00/00503,
- PCT/AU00/00504 PCT/AU00/00505, PCT/AU00/00506, PCT/AU00/00507, PCT/AU00/00508, PCT/AU00/00509.
- PCT/AU00/00510, PCT/AUOO/00512, PCT/AU00/00513, PCT/AU00/00514, PCT/AU00/00515 The disclosures of these co-pending applications are incorporated herein by cross-reference. d fficult to dete ⁇ mne the energy level required for actuating individual nozzles and for evaluating the continuing performance of a given nozzle
- the present invention may be defined broadly as providing a micro electro-mechanical device composing a support structure, an actuating arm having a first end coupled to the support structure and a second end that is movable with respect to the support structure, the actuating arm bemg formed in part from an electrically resistive matenal and bemg arranged to conduct heat inducing electrical current from a current source within the support structure to effect movement of the actuating arm, and a movement sensor incorporated in the device
- the movement sensor compnses - a moving contact element formed integrally with the actuating arm adjacent the second end of the actuating arm, a fixed contact element formed integrally with the support structure and positioned to be contacted by the moving contact element when the actuating arm moves to a predetermined extent under the influence of the heat inducing electncal current, and electncal ⁇ rcuit elements formed within the support structure for detecting contact between the fixed contact element and the moving contact element
- the MEM device preferably is m the form of a liquid ejector and most preferably is m the form of an ink ejection nozzle that is operable to eject an ink droplet upon actuation of the actuating arm
- the second end of the actuating arm preferably is coupled to an integrally formed paddle which is employed to displace ink from a chamber mto which the actuating arm extends
- the actuating arm most preferably is formed from two similarly shaped arm portions which are interconnected m mterlappmg relationship
- a first of the arm portions is connected to a current supply and is arranged m use to be heated by current flow
- the second arm portion functions to restrain linear expansion of the actuating arm as a complete unit and heat mduced elongation of the first arm portion causes bending to occur along the length of the actuating arm
- the actuating arm is effectively caused to pivot with respect to the substrate with heating and cooling of the first portion of the actuating arm
- Figure 2 shows a plan view of the inkjet nozzle of Figure 1
- Figure 3 shows a perspective view of an outer portion of an actuating arm and an ink ejecting paddle or of the inkjet nozzle, the actuating arm and paddle being illustrated independently of other elements of the nozzle
- Figure 4 shows an arrangement similar to that of Figure 3 but in respect of an inner portion of the actuating arm
- Figure 5 shows an arrangement similar to that of Figures 3 and 4 but in respect of the complete actuating arm incorporating the outer and inner portions shown in Figures 3 and 4,
- Figure 6 shows a detailed portion of a movement sensor arrangement that is shown encircled in Figure 5
- Figure 7 shows a sectional elevation view of the nozzle of Figure 1 but prior to charging with ink
- Figure 8 shows a sectional elevation view of the nozzle of Figure 7 but with the actuating arm and paddle actuated to a test position
- Figure 9 shows ink ejection from the nozzle when actuated under test conditions
- Figure 10 shows a blocked condition of the nozzle when the actuating arm and paddle are actuated to an extent that normally would be sufficient to eject ink from the nozzle
- Figure 11 shows a schematic representation of a portion of an electrical circuit that is embodied within the nozzle
- Figure 12 shows an excitation-time diagram applicable to normal (ink ejecting) actuation of the nozzle actuating arm
- Figure 13 shows an excitation-time diagram applicable to test actuation of the nozzle actuating arm
- Figure 14 shows comparative displacement-time curves applicable to the excitation-time diagrams shown in Figures 12 and 13
- Figure 15 shows an excitation-time diagram applicable to various testing and calibration procedures to which the nozzle might be subjected
- Figure 16 shows a temperature-time diagram that is applicable to the nozzle actuating arm and which corresponds with the excitation-time diagram of Figure 15, and
- Figure 17 shows a deflection-time diagram that is applicable to the nozzle actuator and which corresponds with the excitation/heating-time diagrams of Figures 15 and 16.
- a single inkjet nozzle device is shown as a portion of a chip that is fabricated by integrating MEMS and CMOS technologies.
- the complete nozzle device includes a support structure having a silicon substrate 20, a metal oxide semiconductor layer 21, a passivation layer 22, and a non-corrosive dielectric coatmg/chamber-defining layer 23.
- the nozzle device incorporates an ink chamber 24 which is connected to a source (not shown) of ink and, located above the chamber, a nozzle chamber 25.
- a nozzle opening 26 is provided in the chamber-defining layer 23 to permit displacement of ink droplets toward paper or other medium (not shown) onto which ink is to be deposited.
- a paddle 27 is located between the two chambers 24 and 25 and, when in its quiescent position, as indicated in Figures 1 and 7, the paddle 27 effectively divides the two chambers 24 and 25.
- the paddle 27 is coupled to an actuating arm 28 by a paddle extension 29 and a bridging portion 30 of the dielectric coating 23.
- the actuating arm 28 is formed (i.e. deposited during fabrication of the device) to be pivotable with respect to the support structure or substrate 20. That is, the actuating arm has a first end that is coupled to the support structure and a second end 38 that is movable outwardly with respect to the support structure.
- the actuating arm 28 comprises outer and inner arm portions 31 and 32.
- the outer arm portion 31 is illustrated in detail and in isolation from other components of the nozzle device in the perspective view shown in Figure 3.
- the inner arm portion 32 is illustrated in a similar way in Figure 4.
- the complete actuating arm 28 is illustrated in perspective in Figure 5, as well as in Figures 1, 7, 8, 9 and 10.
- the inner portion 32 of the actuating arm 28 is formed from an titanium-aluminum-nitride ((Ti,Al)N reactively sputtered) deposit during formation of the nozzle device and it is connected electrically to a current source 33, as illustrated schematically in Figure 11, within the CMOS structure.
- a current source 33 as illustrated schematically in Figure 11, within the CMOS structure.
- the electrical connection is made to end terminals 34 and 35, and application of an excitation (drive) voltage to the terminals results in current flow through the inner portion only of the actuating arm 28.
- the current flow causes resistance heating within the inner portion 32 of the actuating arm and consequential elongation of that portion of the arm.
- the outer arm portion 31 of the actuating arm 28 is mechanically coupled to but electrically isolated from the inner arm portion 32 by posts 36. No current-induced heating occurs within the outer arm portion 31 and, as a consequence, voltage induced current flow through the inner arm portion 32 causes bending of the complete actuating arm 28 in the manner indicated in Figures 8, 9 and 10 of the drawings. This bending of the actuating arm 28 is equivalent to pivotal movement of the arm with respect to the substrate 20 and it results in displacement of the paddle 27 within the chambers 24 and 25.
- An integrated movement sensor is provided within the device in order to determine the degree or rate of pivotal movement of the actuating arm 28 and, hence, of the paddle 27.
- the movement sensor comprises a moving contact element 37 that is formed integrally with the inner portion 32 of the actuating arm 28 and which is electrically active when current is passing through the inner portion of the actuating arm.
- the moving contact element 37 is positioned adjacent the second end 38 of the actuating arm and, thus, with a voltage V applied to the end terminals 34 and 35, the moving contact element will be at a potential of approximately V/2
- the movement sensor also compnses a fixed contact element 39 which is formed mtegrally with the CMOS layer 22 and which is positioned to be contacted by the moving contact element 37 when the actuating arm 28 pivots upwardly to a predetermined extent
- the fixed contact element is connected elect ⁇ cally to amplifier elements 40 and to a microprocessor arrangement 41, both of which are shown m Figure 11 and the component elements of which are embodied within the CMOS layer 22 of the device
- Figure 12 shows an excitation-time diagram that is apphcable to effecting actuation of the actuator arm 28 and the paddle 27 from a quiescent to a lower-than-normal ink ejecting position
- the displacement of the paddle 27 resulting from the excitation of Figure 12 is indicated by the lower graph 42 in Figure 14, and it can be seen that the maximum extent of displacement is less than the optimum level that is shown by the displacement lme 43
- Figure 13 shows an expanded excitation-time diagram that is applicable to effecting actuation of the actuator arm 28 and the paddle 27 to an excessive extent, such as is indicated m Figures 8 and 9
- the displacement of the paddle 27 resulting from the excitation of Figure 13 is indicated by the upper graph 44 m Figure 14, from which it can be seen that the maximum displacement level is greater than the optimum level indicated by the displacement lme 43
- Figures 15, 16 and 17 shows plots of excitation voltage, actuator arm temperature and paddle deflection against time for increasing excitation applied to the actuating arm 28 These plots have relevance to vanous tests that may be applied to the nozzle device using the movement sensor arrangement incorporating the moving contact 37 and the fixed contact 39 Variations and modifications may be made m respect of the device as descnbed above as a preferred embodiment of the invention without departing from the scope of the appended claims
Abstract
Description
Claims
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT00929094T ATE314306T1 (en) | 1999-06-30 | 2000-05-24 | MOTION SENSOR IN A MICROELECTROMECHANICAL COMPONENT |
AU47317/00A AU766416B2 (en) | 1999-06-30 | 2000-05-24 | Movement sensor in a micro electro-mechanical device |
EP20000929094 EP1214271B1 (en) | 1999-06-30 | 2000-05-24 | Movement sensor in a micro electro-mechanical device |
CA 2414741 CA2414741C (en) | 1999-06-30 | 2000-05-24 | Movement sensor in a micro electro-mechanical device |
DE60025227T DE60025227D1 (en) | 1999-06-30 | 2000-05-24 | MOTION SENSOR IN A MICROELECTROMECHANICAL COMPONENT |
HK02109044.5A HK1047572A1 (en) | 1999-06-30 | 2002-12-12 | Movement sensor in a micro electro-mechanical device |
AU2004200135A AU2004200135B2 (en) | 1999-06-30 | 2004-01-15 | Movement sensor in a micro electro-mechanical device |
IL164957A IL164957A (en) | 1999-06-30 | 2004-11-01 | Micro electro-mechanical device having an integrated movement sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPQ1309 | 1999-06-30 | ||
AUPQ1309A AUPQ130999A0 (en) | 1999-06-30 | 1999-06-30 | A method and apparatus (IJ47V11) |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001002289A1 true WO2001002289A1 (en) | 2001-01-11 |
WO2001002289A9 WO2001002289A9 (en) | 2005-03-24 |
Family
ID=3815498
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/AU2000/000586 WO2001002180A1 (en) | 1999-06-30 | 2000-05-24 | Fault detection in a micro electro-mechanical device |
PCT/AU2000/000584 WO2001002178A1 (en) | 1999-06-30 | 2000-05-24 | Calibrating a micro electro-mechanical device |
PCT/AU2000/000582 WO2001002289A1 (en) | 1999-06-30 | 2000-05-24 | Movement sensor in a micro electro-mechanical device |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/AU2000/000586 WO2001002180A1 (en) | 1999-06-30 | 2000-05-24 | Fault detection in a micro electro-mechanical device |
PCT/AU2000/000584 WO2001002178A1 (en) | 1999-06-30 | 2000-05-24 | Calibrating a micro electro-mechanical device |
Country Status (14)
Country | Link |
---|---|
US (41) | US6629745B1 (en) |
EP (3) | EP1200264B1 (en) |
JP (1) | JP4388251B2 (en) |
CN (4) | CN1246215C (en) |
AT (3) | ATE400436T1 (en) |
AU (1) | AUPQ130999A0 (en) |
BR (1) | BR0011991A (en) |
CA (4) | CA2414734C (en) |
DE (3) | DE60025227D1 (en) |
HK (1) | HK1047572A1 (en) |
IL (2) | IL147357A0 (en) |
MX (1) | MXPA02000179A (en) |
WO (3) | WO2001002180A1 (en) |
ZA (1) | ZA200200767B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2004210572B2 (en) * | 2000-06-30 | 2006-07-27 | Zamtec Limited | A micro-electromechanical actuator with buckle-resistant properties |
Families Citing this family (78)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AUPQ130999A0 (en) * | 1999-06-30 | 1999-07-22 | Silverbrook Research Pty Ltd | A method and apparatus (IJ47V11) |
AU765063B2 (en) * | 1999-09-17 | 2003-09-04 | Silverbrook Research Pty Ltd | Method and system for instruction of a computer |
US7804767B1 (en) * | 1999-10-25 | 2010-09-28 | Tellabs Operations, Inc. | Protection/restoration of MPLS networks |
SG148836A1 (en) * | 2000-05-24 | 2009-01-29 | Silverbrook Res Pty Ltd | Print engine controller with dithering and compositing circuitry |
US6669909B2 (en) * | 2001-03-26 | 2003-12-30 | Allegro Technologies Limited | Liquid droplet dispensing |
US6460972B1 (en) * | 2001-11-06 | 2002-10-08 | Eastman Kodak Company | Thermal actuator drop-on-demand apparatus and method for high frequency |
US7052117B2 (en) | 2002-07-03 | 2006-05-30 | Dimatix, Inc. | Printhead having a thin pre-fired piezoelectric layer |
US7419258B2 (en) * | 2002-09-30 | 2008-09-02 | Brother Kogyo Kabushiki Kaisha | Electronic device having detachable controller |
CN100411969C (en) * | 2003-08-20 | 2008-08-20 | 台达电子工业股份有限公司 | Detecting method for micromachinery structure, micro electromechanical assembly and microdetecting structure |
US7281778B2 (en) | 2004-03-15 | 2007-10-16 | Fujifilm Dimatix, Inc. | High frequency droplet ejection device and method |
US8491076B2 (en) | 2004-03-15 | 2013-07-23 | Fujifilm Dimatix, Inc. | Fluid droplet ejection devices and methods |
US20060064786A1 (en) | 2004-09-17 | 2006-03-23 | Pioneer Hi-Bred International, Inc. | Isopentenyl transferase sequences and methods of use |
US20060123194A1 (en) * | 2004-12-02 | 2006-06-08 | Claudio Alex Cukierkopf | Variable effective depth write buffer and methods thereof |
EP1836056B1 (en) | 2004-12-30 | 2018-11-07 | Fujifilm Dimatix, Inc. | Ink jet printing |
US7738674B2 (en) * | 2005-09-19 | 2010-06-15 | Silverbrook Research Pty Ltd | Retrieving location data by sensing coded data on a surface |
US7708203B2 (en) | 2005-09-19 | 2010-05-04 | Silverbrook Research Pty Ltd | Link object to sticker |
US7880911B2 (en) * | 2005-09-19 | 2011-02-01 | Silverbrook Research Pty Ltd | Printing a position using a mobile device |
US20070065206A1 (en) * | 2005-09-19 | 2007-03-22 | Silverbrook Research Pty Ltd | Printing a coupon using a mobile device |
US7738862B2 (en) * | 2005-09-19 | 2010-06-15 | Silverbrook Research Pty Ltd | Retrieve information via card on mobile device |
US7407092B2 (en) * | 2005-09-19 | 2008-08-05 | Silverbrook Research Pty Ltd | Printing gaming information using a mobile device |
US7469829B2 (en) * | 2005-09-19 | 2008-12-30 | Silverbrook Research Pty Ltd | Printing video information using a mobile device |
US7848777B2 (en) | 2005-09-19 | 2010-12-07 | Silverbrook Research Pty Ltd | Printing a puzzle using a mobile device |
US7654444B2 (en) * | 2005-09-19 | 2010-02-02 | Silverbrook Research Pty Ltd | Reusable sticker |
US7641115B2 (en) | 2005-09-19 | 2010-01-05 | Silverbrook Research Pty Ltd | Type-specific sticker |
US7756526B2 (en) | 2005-09-19 | 2010-07-13 | Silverbrook Research Pty Ltd | Retrieving a web page via a coded surface |
US7689249B2 (en) * | 2005-09-19 | 2010-03-30 | Silverbrook Research Pty Ltd | Printing a security identification using a mobile device |
US7924450B2 (en) * | 2005-09-19 | 2011-04-12 | Silverbrook Research Pty Ltd | Reprint card on a mobile device |
US7917171B2 (en) * | 2005-09-19 | 2011-03-29 | Silverbrook Research Pty Ltd | Printing a receipt using a mobile device |
US7920896B2 (en) * | 2005-09-19 | 2011-04-05 | Kia Silverbrook | Printing an almanac using a mobile device |
US7920854B2 (en) * | 2005-09-19 | 2011-04-05 | Silverbrook Research Pty Ltd | Printing a map using a mobile device |
US7506802B2 (en) * | 2005-09-19 | 2009-03-24 | Silverbrook Research Pty Ltd | Method of performing an action in relation to a software object |
US7738919B2 (en) * | 2005-09-19 | 2010-06-15 | Silverbrook Research Pty Ltd | Link object to card |
US7970435B2 (en) * | 2005-09-19 | 2011-06-28 | Silverbrook Research Pty Ltd | Printing an advertisement using a mobile device |
US7761090B2 (en) * | 2005-09-19 | 2010-07-20 | Silverbrook Research Pty Ltd | Print remotely to a mobile device |
US7856225B2 (en) | 2005-09-19 | 2010-12-21 | Silverbrook Research Pty Ltd | Retrieving a program state via a coded surface |
US7637424B2 (en) * | 2005-09-19 | 2009-12-29 | Silverbrook Research Pty Ltd | Printing audio information using a mobile device |
US7380709B2 (en) * | 2005-09-19 | 2008-06-03 | Silverbrook Research Pty Ltd | Printing a trading card using a mobile device |
US7747280B2 (en) * | 2005-09-19 | 2010-06-29 | Silverbrook Research Pty Ltd | Retrieving a product via a coded surface |
US7357311B2 (en) * | 2005-09-19 | 2008-04-15 | Silverbrook Research Pty Ltd | Printing educational material using a mobile device |
US7855805B2 (en) | 2005-09-19 | 2010-12-21 | Silverbrook Research Pty Ltd | Printing a competition entry form using a mobile device |
US7953387B2 (en) * | 2005-09-19 | 2011-05-31 | Silverbrook Research Pty Ltd | Retrieving a program via a coded surface |
US7805162B2 (en) * | 2005-09-19 | 2010-09-28 | Silverbrook Research Pty Ltd | Print card with linked object |
US7428986B2 (en) * | 2005-09-19 | 2008-09-30 | Silverbrook Research Pty Ltd | Printing a health report using a mobile device |
US7672664B2 (en) * | 2005-09-19 | 2010-03-02 | Silverbrook Research Pty Ltd | Printing a reminder list using mobile device |
US7621442B2 (en) | 2005-09-19 | 2009-11-24 | Silverbrook Research Pty Ltd | Printing a subscription using a mobile device |
US20070064130A1 (en) * | 2005-09-19 | 2007-03-22 | Silverbrook Research Pty Ltd | Link object to form field on surface |
US7403797B2 (en) * | 2005-09-19 | 2008-07-22 | Silverbrook Research Pty Ltd | Obtaining a physical product via a coded surface |
US7843595B2 (en) | 2005-09-19 | 2010-11-30 | Silverbrook Research Pty Ltd | Printing a calendar using a mobile device |
US7668540B2 (en) * | 2005-09-19 | 2010-02-23 | Silverbrook Research Pty Ltd | Print on a mobile device with persistence |
US7953386B2 (en) | 2005-09-19 | 2011-05-31 | Silverbrook Research Pty Ltd | Bill per card print |
US7558597B2 (en) * | 2005-09-19 | 2009-07-07 | Silverbrook Research Pty Ltd. | Retrieving a ringtone via a coded surface |
US7992213B2 (en) * | 2005-09-19 | 2011-08-02 | Silverbrook Research Pty Ltd | Gaining access via a coded surface |
US7575172B2 (en) * | 2005-09-19 | 2009-08-18 | Silverbrook Research Pty Ltd | Printing a greeting card using a mobile device |
US20070064075A1 (en) * | 2005-09-19 | 2007-03-22 | Silverbrook Research Pty Ltd | Printing a membership using a mobile device |
US8072629B2 (en) * | 2005-09-19 | 2011-12-06 | Silverbrook Research Pty Ltd | Print subscribed content on a mobile device |
US7724399B2 (en) * | 2005-09-19 | 2010-05-25 | Silverbrook Research Pty Ltd | Method of downloading and installing a software object |
US7438215B2 (en) * | 2005-09-19 | 2008-10-21 | Silverbrook Research Pty Ltd | Printing location-based information using a mobile device |
US7558599B2 (en) * | 2005-09-19 | 2009-07-07 | Silverbrook Research Pty Ltd | Printing a bill using a mobile device |
US20070085332A1 (en) * | 2005-09-19 | 2007-04-19 | Silverbrook Research Pty Ltd | Link object to sticker and location on surface |
US7843596B2 (en) | 2005-09-19 | 2010-11-30 | Silverbrook Research Pty Ltd | Printing a ticket using a mobile device |
US7945943B2 (en) * | 2005-09-19 | 2011-05-17 | Silverbrook Research Pty Ltd | Retrieving an access token via a coded surface |
US7697714B2 (en) * | 2005-09-19 | 2010-04-13 | Silverbrook Research Pty Ltd | Associating an object with a sticker and a surface |
US7742755B2 (en) * | 2005-09-19 | 2010-06-22 | Silverbrook Research Pty Ltd | Retrieving a bill via a coded surface |
FR2894673B1 (en) * | 2005-12-14 | 2014-10-31 | Luc Montagnier | METHOD FOR CHARACTERIZING A BIOCHEMICAL ELEMENT HAVING BIOLOGICAL ACTIVITY BY ANALYZING LOW FREQUENCY ELECTROMAGNETIC SIGNALS |
JP2008132583A (en) | 2006-10-24 | 2008-06-12 | Seiko Epson Corp | Mems device |
SI2089229T1 (en) * | 2006-12-04 | 2012-12-31 | Zamtec Limited | Inkjet nozzle assembly having thermal bend actuator with an active beam defining substantial part of nozzle chamber roof |
US7988247B2 (en) | 2007-01-11 | 2011-08-02 | Fujifilm Dimatix, Inc. | Ejection of drops having variable drop size from an ink jet printer |
US7950622B2 (en) * | 2007-07-25 | 2011-05-31 | Honeywell International, Inc. | System, apparatus and method for controlling valves |
WO2009067580A2 (en) | 2007-11-20 | 2009-05-28 | Pioneer Hi-Bred International, Inc. | Maize ethylene signaling genes and modulation of same for improved stress tolerance in plants |
WO2010065867A1 (en) | 2008-12-04 | 2010-06-10 | Pioneer Hi-Bred International, Inc. | Methods and compositions for enhanced yield by targeted expression of knotted1 |
US8427698B2 (en) * | 2009-08-19 | 2013-04-23 | Eastman Kodak Company | Enhanced imaging with adjusted image swath widths |
US10445846B2 (en) | 2011-04-14 | 2019-10-15 | Elwha Llc | Cost-effective resource apportionment technologies suitable for facilitating therapies |
US10853819B2 (en) | 2011-04-14 | 2020-12-01 | Elwha Llc | Cost-effective resource apportionment technologies suitable for facilitating therapies |
US8867595B1 (en) | 2012-06-25 | 2014-10-21 | Rambus Inc. | Reference voltage generation and calibration for single-ended signaling |
US9341663B2 (en) * | 2013-11-26 | 2016-05-17 | Freescale Semiconductor, Inc. | MEMS device positioning apparatus, test system, and test method |
JP6470034B2 (en) * | 2014-12-24 | 2019-02-13 | 太陽化学株式会社 | Protein dry processed food |
US10179453B2 (en) * | 2016-01-08 | 2019-01-15 | Canon Kabushiki Kaisha | Liquid ejection head and liquid ejection apparatus |
US10955299B2 (en) * | 2017-04-24 | 2021-03-23 | Hewlett-Packard Development Company, L.P. | Fluid ejection dies including strain gauge sensors |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0691542A1 (en) * | 1994-06-29 | 1996-01-10 | Texas Instruments Incorporated | Improved accelerometers |
JPH08244221A (en) * | 1995-03-15 | 1996-09-24 | Minolta Co Ltd | Electro-mechanical transducer and ink jet recorder using the same |
Family Cites Families (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US887186A (en) * | 1907-10-01 | 1908-05-12 | De Witt Bruce | Cigar-holder. |
DE887186C (en) | 1950-03-31 | 1953-08-20 | Saint Gobain | Process for hot working, in particular for extrusion or drawing of metals |
US3946398A (en) * | 1970-06-29 | 1976-03-23 | Silonics, Inc. | Method and apparatus for recording with writing fluids and drop projection means therefor |
CH642461A5 (en) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | ACCELEROMETER. |
JP2817657B2 (en) * | 1994-08-23 | 1998-10-30 | 富士ゼロックス株式会社 | Ink supply device and recording device |
JPS6476662A (en) | 1987-09-14 | 1989-03-22 | Dainippon Printing Co Ltd | Electron shower adjustment for ion beam correcting device |
US5457368A (en) * | 1993-03-09 | 1995-10-10 | University Of Utah Research Foundation | Mechanical/electrical displacement transducer |
US5355712A (en) * | 1991-09-13 | 1994-10-18 | Lucas Novasensor | Method and apparatus for thermally actuated self testing of silicon structures |
US5384507A (en) * | 1991-11-29 | 1995-01-24 | Hitachi Construction Machinery Co., Ltd. | Method of and device for driving piezo-electric elements and system for controlling micromotion mechanism |
JPH0691865A (en) | 1992-09-17 | 1994-04-05 | Seikosha Co Ltd | Ink jet head |
JP3574161B2 (en) * | 1992-11-19 | 2004-10-06 | セイコーエプソン株式会社 | Driving method and driving circuit for cathodoluminescent lighting device |
US5455608A (en) * | 1993-04-30 | 1995-10-03 | Hewlett-Packard Company | Pen start up algorithm for black and color thermal ink-jet pens |
US5666141A (en) * | 1993-07-13 | 1997-09-09 | Sharp Kabushiki Kaisha | Ink jet head and a method of manufacturing thereof |
US5456508A (en) * | 1994-06-09 | 1995-10-10 | Kozar; John J. | Contact lens suction cup |
JPH0890769A (en) * | 1994-09-27 | 1996-04-09 | Sharp Corp | Gusseted diaphragm type ink-jet head |
JPH08142323A (en) * | 1994-11-24 | 1996-06-04 | Sharp Corp | Ink jet head and manufacture thereof |
CH688960A5 (en) * | 1994-11-24 | 1998-06-30 | Pelikan Produktions Ag | Droplet generator for microdroplets, especially for an inkjet printer. |
US5619177A (en) * | 1995-01-27 | 1997-04-08 | Mjb Company | Shape memory alloy microactuator having an electrostatic force and heating means |
US5838351A (en) * | 1995-10-26 | 1998-11-17 | Hewlett-Packard Company | Valve assembly for controlling fluid flow within an ink-jet pen |
US6302504B1 (en) * | 1996-06-26 | 2001-10-16 | Canon Kabushiki Kaisha | Recording head and recording apparatus using the same |
JP3706715B2 (en) * | 1996-07-09 | 2005-10-19 | キヤノン株式会社 | Liquid ejection head, liquid ejection method, head cartridge, liquid ejection apparatus, printing system, and recovery processing method |
US5992984A (en) * | 1996-07-09 | 1999-11-30 | Canon Kabushiki Kaisha | Liquid discharging head, head cartridge and liquid discharge apparatus |
US5812159A (en) * | 1996-07-22 | 1998-09-22 | Eastman Kodak Company | Ink printing apparatus with improved heater |
JPH1084221A (en) * | 1996-09-10 | 1998-03-31 | Hitachi Chem Co Ltd | Polalization shared plane antenna |
US5971355A (en) * | 1996-11-27 | 1999-10-26 | Xerox Corporation | Microdevice valve structures to fluid control |
US5796152A (en) * | 1997-01-24 | 1998-08-18 | Roxburgh Ltd. | Cantilevered microstructure |
US5903380A (en) * | 1997-05-01 | 1999-05-11 | Rockwell International Corp. | Micro-electromechanical (MEM) optical resonator and method |
EP0887186B1 (en) * | 1997-06-27 | 2001-11-07 | STMicroelectronics S.r.l. | Integrated inkjet print head and manufacturing process thereof |
EP1508449B1 (en) | 1997-07-15 | 2007-01-24 | Silverbrook Research Pty. Limited | Inkjet nozzle with magnetic actuator chamber |
ATE409119T1 (en) | 1997-07-15 | 2008-10-15 | Silverbrook Res Pty Ltd | Nozzle chamber with paddle vane and externally located thermal actuator |
US6087638A (en) * | 1997-07-15 | 2000-07-11 | Silverbrook Research Pty Ltd | Corrugated MEMS heater structure |
AUPO794697A0 (en) * | 1997-07-15 | 1997-08-07 | Silverbrook Research Pty Ltd | A device (MEMS10) |
US7337532B2 (en) * | 1997-07-15 | 2008-03-04 | Silverbrook Research Pty Ltd | Method of manufacturing micro-electromechanical device having motion-transmitting structure |
JP3768648B2 (en) | 1997-07-31 | 2006-04-19 | キヤノン株式会社 | Liquid discharge method, liquid discharge head, and head cartridge and liquid discharge apparatus using the liquid discharge head |
US20010019463A1 (en) * | 1997-11-14 | 2001-09-06 | Castlewood Systems, Inc. | Head loading and unloading method and device |
US6126140A (en) * | 1997-12-29 | 2000-10-03 | Honeywell International Inc. | Monolithic bi-directional microvalve with enclosed drive electric field |
US6104334A (en) | 1997-12-31 | 2000-08-15 | Eremote, Inc. | Portable internet-enabled controller and information browser for consumer devices |
US6087743A (en) * | 1998-09-10 | 2000-07-11 | Wisconsin Alumni Research Foundation | Position control system for use with micromechanical actuators |
KR20000044155A (en) * | 1998-12-30 | 2000-07-15 | 이형도 | Method for optimizing input driving signal for shape-memory alloy ink jet head, and apparatus and method for preventing overheating |
US6860107B2 (en) * | 1999-02-15 | 2005-03-01 | Silverbrook Research Pty Ltd | Integrated circuit device having electrothermal actuators |
US6510752B1 (en) * | 1999-02-22 | 2003-01-28 | Seagate Technology Llc | Method and apparatus for testing microactuators on a suspension assembly |
US6382779B1 (en) * | 1999-06-30 | 2002-05-07 | Silverbrook Research Pty Ltd | Testing a micro electro- mechanical device |
AUPQ130999A0 (en) * | 1999-06-30 | 1999-07-22 | Silverbrook Research Pty Ltd | A method and apparatus (IJ47V11) |
US6275326B1 (en) * | 1999-09-21 | 2001-08-14 | Lucent Technologies Inc. | Control arrangement for microelectromechanical devices and systems |
US6474795B1 (en) * | 1999-12-21 | 2002-11-05 | Eastman Kodak Company | Continuous ink jet printer with micro-valve deflection mechanism and method of controlling same |
US6629448B1 (en) * | 2000-02-25 | 2003-10-07 | Seagate Technology Llc | In-situ testing of a MEMS accelerometer in a disc storage system |
US6417757B1 (en) * | 2000-06-30 | 2002-07-09 | Silverbrook Research Pty Ltd | Buckle resistant thermal bend actuators |
US6364302B2 (en) * | 2000-07-14 | 2002-04-02 | Ultimate Standard Tooling International Llc | Modular system and fixture for positioning and clamping a workpiece |
US7093932B2 (en) * | 2002-02-08 | 2006-08-22 | Matsushita Electric Industrial Co., Ltd. | Ink-jet recording device and control method thereof |
US6890050B2 (en) * | 2002-08-20 | 2005-05-10 | Palo Alto Research Center Incorporated | Method for the printing of homogeneous electronic material with a multi-ejector print head |
-
1999
- 1999-06-30 AU AUPQ1309A patent/AUPQ130999A0/en not_active Abandoned
-
2000
- 2000-05-23 US US09/575,175 patent/US6629745B1/en not_active Expired - Fee Related
- 2000-05-23 US US09/575,151 patent/US6322194B1/en not_active Expired - Fee Related
- 2000-05-23 US US09/575,190 patent/US6540319B1/en not_active Expired - Fee Related
- 2000-05-24 JP JP2001507647A patent/JP4388251B2/en not_active Expired - Fee Related
- 2000-05-24 CA CA 2414734 patent/CA2414734C/en not_active Expired - Fee Related
- 2000-05-24 DE DE60025227T patent/DE60025227D1/en not_active Expired - Lifetime
- 2000-05-24 IL IL14735700A patent/IL147357A0/en not_active IP Right Cessation
- 2000-05-24 CA CA 2414733 patent/CA2414733C/en not_active Expired - Fee Related
- 2000-05-24 AT AT00929097T patent/ATE400436T1/en not_active IP Right Cessation
- 2000-05-24 DE DE60039436T patent/DE60039436D1/en not_active Expired - Lifetime
- 2000-05-24 WO PCT/AU2000/000586 patent/WO2001002180A1/en active IP Right Grant
- 2000-05-24 AT AT00929094T patent/ATE314306T1/en not_active IP Right Cessation
- 2000-05-24 AT AT00929096T patent/ATE418454T1/en not_active IP Right Cessation
- 2000-05-24 CA CA 2414732 patent/CA2414732C/en not_active Expired - Fee Related
- 2000-05-24 WO PCT/AU2000/000584 patent/WO2001002178A1/en active IP Right Grant
- 2000-05-24 CN CNB008122148A patent/CN1246215C/en not_active Expired - Fee Related
- 2000-05-24 CN CNB200310113183XA patent/CN1319740C/en not_active Expired - Fee Related
- 2000-05-24 BR BR0011991A patent/BR0011991A/en not_active IP Right Cessation
- 2000-05-24 CN CNB2003101131844A patent/CN1270897C/en not_active Expired - Fee Related
- 2000-05-24 CN CNB008108242A patent/CN1138634C/en not_active Expired - Fee Related
- 2000-05-24 CA CA 2414741 patent/CA2414741C/en not_active Expired - Fee Related
- 2000-05-24 MX MXPA02000179A patent/MXPA02000179A/en active IP Right Grant
- 2000-05-24 EP EP20000929096 patent/EP1200264B1/en not_active Expired - Lifetime
- 2000-05-24 WO PCT/AU2000/000582 patent/WO2001002289A1/en active IP Right Grant
- 2000-05-24 EP EP20000929098 patent/EP1206352B1/en not_active Expired - Lifetime
- 2000-05-24 DE DE60041193T patent/DE60041193D1/en not_active Expired - Lifetime
- 2000-05-24 EP EP20000929094 patent/EP1214271B1/en not_active Expired - Lifetime
-
2002
- 2002-01-29 ZA ZA200200767A patent/ZA200200767B/en unknown
- 2002-11-23 US US10/303,350 patent/US6733104B2/en not_active Expired - Fee Related
- 2002-12-12 HK HK02109044.5A patent/HK1047572A1/en unknown
-
2003
- 2003-08-08 US US10/636,257 patent/US6997534B2/en not_active Expired - Fee Related
- 2003-08-08 US US10/636,273 patent/US6802587B2/en not_active Expired - Fee Related
-
2004
- 2004-05-10 US US10/841,571 patent/US6890052B2/en not_active Expired - Fee Related
- 2004-05-10 US US10/841,572 patent/US7021747B2/en not_active Expired - Fee Related
- 2004-05-10 US US10/841,512 patent/US6929345B2/en not_active Expired - Fee Related
- 2004-05-10 US US10/841,504 patent/US6811242B1/en not_active Expired - Fee Related
- 2004-05-10 US US10/841,534 patent/US6921145B2/en not_active Expired - Fee Related
- 2004-09-27 US US10/949,346 patent/US6969142B2/en not_active Expired - Fee Related
- 2004-09-27 US US10/949,356 patent/US6910755B2/en not_active Expired - Fee Related
- 2004-10-14 US US10/963,559 patent/US6997537B2/en not_active Expired - Fee Related
- 2004-10-20 US US10/968,121 patent/US7004567B2/en not_active Expired - Fee Related
- 2004-11-01 IL IL164957A patent/IL164957A/en not_active IP Right Cessation
- 2004-12-02 US US11/001,025 patent/US7210759B2/en not_active Expired - Fee Related
-
2005
- 2005-01-10 US US11/030,875 patent/US7163276B2/en not_active Expired - Fee Related
- 2005-05-09 US US11/124,348 patent/US7328977B2/en not_active Expired - Fee Related
- 2005-06-06 US US11/144,806 patent/US7025436B2/en not_active Expired - Fee Related
- 2005-06-20 US US11/155,634 patent/US7093920B2/en not_active Expired - Fee Related
- 2005-06-24 US US11/165,198 patent/US7128093B2/en not_active Expired - Fee Related
- 2005-09-22 US US11/231,857 patent/US7093921B2/en not_active Expired - Fee Related
- 2005-10-17 US US11/250,457 patent/US7147297B2/en not_active Expired - Fee Related
-
2006
- 2006-01-26 US US11/339,493 patent/US7210666B2/en not_active Expired - Fee Related
- 2006-07-13 US US11/485,255 patent/US7467842B2/en not_active Expired - Fee Related
- 2006-10-25 US US11/585,964 patent/US7325901B2/en not_active Expired - Fee Related
- 2006-12-08 US US11/635,535 patent/US7465011B2/en not_active Expired - Fee Related
-
2007
- 2007-04-04 US US11/730,785 patent/US7661795B2/en not_active Expired - Fee Related
- 2007-04-04 US US11/730,786 patent/US7635177B2/en not_active Expired - Fee Related
- 2007-12-06 US US11/951,940 patent/US7470005B2/en not_active Expired - Fee Related
- 2007-12-20 US US11/961,662 patent/US7802873B2/en not_active Expired - Fee Related
-
2008
- 2008-11-23 US US12/276,360 patent/US7669977B2/en not_active Expired - Fee Related
- 2008-11-24 US US12/277,293 patent/US7695092B2/en not_active Expired - Fee Related
- 2008-11-26 US US12/324,725 patent/US7703875B2/en not_active Expired - Fee Related
-
2009
- 2009-11-29 US US12/626,930 patent/US20100073429A1/en not_active Abandoned
-
2010
- 2010-02-08 US US12/702,157 patent/US20100134565A1/en not_active Abandoned
- 2010-02-08 US US12/702,192 patent/US20100141710A1/en not_active Abandoned
- 2010-03-30 US US12/750,610 patent/US7980661B2/en not_active Expired - Fee Related
- 2010-04-22 US US12/765,757 patent/US7938514B2/en not_active Expired - Fee Related
-
2011
- 2011-04-03 US US13/078,998 patent/US8038252B2/en not_active Expired - Fee Related
- 2011-10-03 US US13/252,187 patent/US8317301B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0691542A1 (en) * | 1994-06-29 | 1996-01-10 | Texas Instruments Incorporated | Improved accelerometers |
JPH08244221A (en) * | 1995-03-15 | 1996-09-24 | Minolta Co Ltd | Electro-mechanical transducer and ink jet recorder using the same |
Non-Patent Citations (1)
Title |
---|
DATABASE WPI Derwent World Patents Index; Class P75, AN 1996-481086/48, XP002953313 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2004210572B2 (en) * | 2000-06-30 | 2006-07-27 | Zamtec Limited | A micro-electromechanical actuator with buckle-resistant properties |
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2001002289A1 (en) | Movement sensor in a micro electro-mechanical device | |
AU766416B2 (en) | Movement sensor in a micro electro-mechanical device | |
AU2004200135B2 (en) | Movement sensor in a micro electro-mechanical device | |
AU2005203482B2 (en) | Inkjet Printhead with Excess Actuator Movement Detection | |
EP1206351B1 (en) | Testing a micro electro-mechanical device | |
AU761821B2 (en) | Fault detection in a micro electro-mechanical device | |
AU4732000A (en) | Testing a micro electro-mechanical device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2000929094 Country of ref document: EP |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2002/00767 Country of ref document: ZA Ref document number: 200200767 Country of ref document: ZA Ref document number: 47317/00 Country of ref document: AU |
|
WWE | Wipo information: entry into national phase |
Ref document number: 008122148 Country of ref document: CN |
|
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
WWP | Wipo information: published in national office |
Ref document number: 2000929094 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2414741 Country of ref document: CA |
|
WWG | Wipo information: grant in national office |
Ref document number: 47317/00 Country of ref document: AU |
|
NENP | Non-entry into the national phase |
Ref country code: JP |
|
COP | Corrected version of pamphlet |
Free format text: PAGE 1A, DESCRIPTION, ADDED; AFTER RECTIFICATION OF OBVIOUS ERRORS AS AUTHORIZED BY THE INTERNATIONAL SEARCHING AUTHORITY |
|
WWG | Wipo information: grant in national office |
Ref document number: 2000929094 Country of ref document: EP |