WO2001031683A8 - Plasma doping system comprising a hollow cathode - Google Patents

Plasma doping system comprising a hollow cathode

Info

Publication number
WO2001031683A8
WO2001031683A8 PCT/US2000/025803 US0025803W WO0131683A8 WO 2001031683 A8 WO2001031683 A8 WO 2001031683A8 US 0025803 W US0025803 W US 0025803W WO 0131683 A8 WO0131683 A8 WO 0131683A8
Authority
WO
WIPO (PCT)
Prior art keywords
hollow cathode
plasma doping
target
cathode
doping system
Prior art date
Application number
PCT/US2000/025803
Other languages
French (fr)
Other versions
WO2001031683A1 (en
Inventor
Matthew J Goeckner
Ziwei Fang
Original Assignee
Varian Semiconductor Equipment
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Semiconductor Equipment filed Critical Varian Semiconductor Equipment
Priority to EP00966770A priority Critical patent/EP1249032A1/en
Priority to JP2001534185A priority patent/JP4666448B2/en
Publication of WO2001031683A1 publication Critical patent/WO2001031683A1/en
Publication of WO2001031683A8 publication Critical patent/WO2001031683A8/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32596—Hollow cathodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3438—Electrodes other than cathode

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

A plasma doping apparatus includes a hollow cathode to increase throughput and uniformity of ion implantations in a target. The hollow cathode is located adjacent an anode and a target cathode on which a target is placed. An ionizable gas is provided in a space between the anode and the target cathode. The space in which the ionizable gas is provided is surrounded by the hollow cathode. The hollow cathode has either a circular or rectangular cross-section.
PCT/US2000/025803 1999-10-27 2000-09-20 Plasma doping system comprising a hollow cathode WO2001031683A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP00966770A EP1249032A1 (en) 1999-10-27 2000-09-20 Plasma doping system comprising a hollow cathode
JP2001534185A JP4666448B2 (en) 1999-10-27 2000-09-20 A plasma doping system including a hollow cathode.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/427,869 1999-10-27
US09/427,869 US6182604B1 (en) 1999-10-27 1999-10-27 Hollow cathode for plasma doping system

Publications (2)

Publication Number Publication Date
WO2001031683A1 WO2001031683A1 (en) 2001-05-03
WO2001031683A8 true WO2001031683A8 (en) 2001-10-25

Family

ID=23696612

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/025803 WO2001031683A1 (en) 1999-10-27 2000-09-20 Plasma doping system comprising a hollow cathode

Country Status (6)

Country Link
US (2) US6182604B1 (en)
EP (1) EP1249032A1 (en)
JP (1) JP4666448B2 (en)
KR (1) KR100662678B1 (en)
TW (1) TW472290B (en)
WO (1) WO2001031683A1 (en)

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US7094316B1 (en) 2000-08-11 2006-08-22 Applied Materials, Inc. Externally excited torroidal plasma source
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Also Published As

Publication number Publication date
KR100662678B1 (en) 2007-01-02
TW472290B (en) 2002-01-11
KR20020060958A (en) 2002-07-19
JP4666448B2 (en) 2011-04-06
US6182604B1 (en) 2001-02-06
WO2001031683A1 (en) 2001-05-03
EP1249032A1 (en) 2002-10-16
JP2003513441A (en) 2003-04-08
US6500496B1 (en) 2002-12-31

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