WO2001050172A3 - An optical router including bistable optical switch and method thereof - Google Patents

An optical router including bistable optical switch and method thereof Download PDF

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Publication number
WO2001050172A3
WO2001050172A3 PCT/US2001/000122 US0100122W WO0150172A3 WO 2001050172 A3 WO2001050172 A3 WO 2001050172A3 US 0100122 W US0100122 W US 0100122W WO 0150172 A3 WO0150172 A3 WO 0150172A3
Authority
WO
WIPO (PCT)
Prior art keywords
micro
optical
switch
router including
including bistable
Prior art date
Application number
PCT/US2001/000122
Other languages
French (fr)
Other versions
WO2001050172A9 (en
WO2001050172A2 (en
WO2001050172B1 (en
Inventor
Rodney L Clark
Jay A Hammer
John R Karpinsky
Original Assignee
Mems Optical Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mems Optical Inc filed Critical Mems Optical Inc
Priority to EP01918153A priority Critical patent/EP1250620A2/en
Priority to JP2001550066A priority patent/JP4405705B2/en
Publication of WO2001050172A2 publication Critical patent/WO2001050172A2/en
Publication of WO2001050172A3 publication Critical patent/WO2001050172A3/en
Publication of WO2001050172B1 publication Critical patent/WO2001050172B1/en
Publication of WO2001050172A9 publication Critical patent/WO2001050172A9/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light

Abstract

A bistable optical micro-switch (110) controls the routing of an optical beam. The micro-switch (110) has at least one optical micro-element, which is stable through electrical power interrupts, for directing the optical beam. A change in the state of the optical micro-element is effected by a vertical micro-actuator (221, 222, 223, 224), which is biased by a micro-spring (225). A micro-latch (350) can be used to keep the tensed micro-spring (225) from un-tensing when electrical power is interrupted. A micro-latch (350) holds the micro-element in at least one mechanically tensed, stable state.
PCT/US2001/000122 2000-01-03 2001-01-03 An optical router including bistable optical switch and method thereof WO2001050172A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP01918153A EP1250620A2 (en) 2000-01-03 2001-01-03 An optical router including bistable optical switch and method thereof
JP2001550066A JP4405705B2 (en) 2000-01-03 2001-01-03 Optical router including bistable optical switch and method thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17416400P 2000-01-03 2000-01-03
US60/174,164 2000-01-03

Publications (4)

Publication Number Publication Date
WO2001050172A2 WO2001050172A2 (en) 2001-07-12
WO2001050172A3 true WO2001050172A3 (en) 2002-04-04
WO2001050172B1 WO2001050172B1 (en) 2002-05-16
WO2001050172A9 WO2001050172A9 (en) 2002-10-31

Family

ID=22635096

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/000122 WO2001050172A2 (en) 2000-01-03 2001-01-03 An optical router including bistable optical switch and method thereof

Country Status (3)

Country Link
EP (1) EP1250620A2 (en)
JP (1) JP4405705B2 (en)
WO (1) WO2001050172A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6459524B1 (en) 2001-03-22 2002-10-01 Adc Telecommunications, Inc. Apparatus and method for sensing switching positions of a MEMS optical switch
US6801682B2 (en) * 2001-05-18 2004-10-05 Adc Telecommunications, Inc. Latching apparatus for a MEMS optical switch
JP6264525B2 (en) 2013-03-25 2018-01-24 セイコーエプソン株式会社 Infrared sensor, heat detection element, and heat detection method using the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5960132A (en) * 1997-09-09 1999-09-28 At&T Corp. Fiber-optic free-space micromachined matrix switches
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5960132A (en) * 1997-09-09 1999-09-28 At&T Corp. Fiber-optic free-space micromachined matrix switches
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JUDY J W ET AL: "MAGNETICALLY ACTUATED ADDRESSABLE MICROSTRUCTURES", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 6, no. 3, 1 September 1997 (1997-09-01), pages 249 - 255, XP000727192, ISSN: 1057-7157 *
LIN L Y ET AL: "FREE-SPACE MICROMACHINED OPTICAL SWITCHES WITH SUBMILLISECOND SWITCHING TIME FOR LARGE-SCALE OPTICAL CROSSCONNECTS", IEEE PHOTONICS TECHNOLOGY LETTERS, IEEE INC. NEW YORK, US, vol. 10, no. 4, 1 April 1998 (1998-04-01), pages 525 - 527, XP000754214, ISSN: 1041-1135 *

Also Published As

Publication number Publication date
WO2001050172A9 (en) 2002-10-31
JP2003530583A (en) 2003-10-14
EP1250620A2 (en) 2002-10-23
WO2001050172A2 (en) 2001-07-12
WO2001050172B1 (en) 2002-05-16
JP4405705B2 (en) 2010-01-27

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