WO2001056919A3 - Micro-electro-mechanical-system (mems) mirror device and methods for fabricating the same - Google Patents

Micro-electro-mechanical-system (mems) mirror device and methods for fabricating the same Download PDF

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Publication number
WO2001056919A3
WO2001056919A3 PCT/US2001/003357 US0103357W WO0156919A3 WO 2001056919 A3 WO2001056919 A3 WO 2001056919A3 US 0103357 W US0103357 W US 0103357W WO 0156919 A3 WO0156919 A3 WO 0156919A3
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WO
WIPO (PCT)
Prior art keywords
mirror
pattern
mems
fabricating
methods
Prior art date
Application number
PCT/US2001/003357
Other languages
French (fr)
Other versions
WO2001056919A2 (en
Inventor
John E Bowers
Roger Jonathan Helkey
Charles M Corbalis
Robert Kehl Sink
Seung Bok Lee
Noel Macdonald
Original Assignee
Calient Networks Inc
John E Bowers
Roger Jonathan Helkey
Charles M Corbalis
Robert Kehl Sink
Seung Bok Lee
Noel Macdonald
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Calient Networks Inc, John E Bowers, Roger Jonathan Helkey, Charles M Corbalis, Robert Kehl Sink, Seung Bok Lee, Noel Macdonald filed Critical Calient Networks Inc
Priority to AU2001233228A priority Critical patent/AU2001233228A1/en
Publication of WO2001056919A2 publication Critical patent/WO2001056919A2/en
Publication of WO2001056919A3 publication Critical patent/WO2001056919A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Abstract

A micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same allow for a large range of angular motion for a center mirror component. The large range of angular motion for a center mirror component is dictated simply by a thickness of a substrate used or a thickness of a thick film used in making a support structure to support the center mirror component. The MEMS mirror device and methods for fabricating the same allow a large number mirror devices to be fabricated on a substrate. The MEMS mirror device includes a substrate. Electrodes are formed supported by the substrate. A support structure is formed adjacent to the electrodes. A hinge pattern and a mirror pattern having a center mirror component are formed such that the support structure supports the hinge pattern and mirror pattern. The support structure also supports the hinge pattern and mirror pattern such that a bottom surface of the center mirror component in a stationary non-rotating position is capable of exceeding a height of 50 νm above the electrodes.
PCT/US2001/003357 2000-02-01 2001-02-01 Micro-electro-mechanical-system (mems) mirror device and methods for fabricating the same WO2001056919A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001233228A AU2001233228A1 (en) 2000-02-01 2001-02-01 Micro-electro-mechanical-system (mems) mirror device and methods for fabricatingthe same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/497,270 2000-02-01
US09/497,270 US20020071169A1 (en) 2000-02-01 2000-02-01 Micro-electro-mechanical-system (MEMS) mirror device

Publications (2)

Publication Number Publication Date
WO2001056919A2 WO2001056919A2 (en) 2001-08-09
WO2001056919A3 true WO2001056919A3 (en) 2002-03-28

Family

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Family Applications (1)

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PCT/US2001/003357 WO2001056919A2 (en) 2000-02-01 2001-02-01 Micro-electro-mechanical-system (mems) mirror device and methods for fabricating the same

Country Status (3)

Country Link
US (2) US20020071169A1 (en)
AU (1) AU2001233228A1 (en)
WO (1) WO2001056919A2 (en)

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