WO2001059504A3 - Stiction release mechanism - Google Patents

Stiction release mechanism Download PDF

Info

Publication number
WO2001059504A3
WO2001059504A3 PCT/US2001/004687 US0104687W WO0159504A3 WO 2001059504 A3 WO2001059504 A3 WO 2001059504A3 US 0104687 W US0104687 W US 0104687W WO 0159504 A3 WO0159504 A3 WO 0159504A3
Authority
WO
WIPO (PCT)
Prior art keywords
movable electrode
contact surface
stiction
released
auxiliary electrodes
Prior art date
Application number
PCT/US2001/004687
Other languages
French (fr)
Other versions
WO2001059504A2 (en
Inventor
John S Berg
Chong Won Byun
Scott Friends
John Ritter
Michael Chung
David Kindler
Original Assignee
Zygo Corp
John S Berg
Chong Won Byun
Scott Friends
John Ritter
Michael Chung
David Kindler
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp, John S Berg, Chong Won Byun, Scott Friends, John Ritter, Michael Chung, David Kindler filed Critical Zygo Corp
Priority to AU2001236992A priority Critical patent/AU2001236992A1/en
Publication of WO2001059504A2 publication Critical patent/WO2001059504A2/en
Publication of WO2001059504A3 publication Critical patent/WO2001059504A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements

Abstract

An optical switch includes a stiction release mechanism for overcoming stiction between a structure defining a contact surface, and a movable electrode. At least two auxiliary electrodes are provided. A movable electrode is movable between a first position in which the movable electrode is retracted from the contact surface, and a second position in which the movable electrode contacts the contact surface and has at least one portion spaced from the contact surface proximate each of the auxiliary electrodes. When the movable electrode is held in the second position by stiction, the movable electrode can be released from the second position by applying electric fields between the movable electrode and the auxiliary electrodes in a predetermined sequence so that fluid can be forced in between the movable electrode and the contact surface while the movable electrode is in contact with the contact surface. Stiction is thereby overcome and the movable electrode is caused to be released from the contact surface. Alternatively, electric fields are applied at a resonant frequency of the movable electrode so that transverse resonant vibrations are excited in the portions of the movable electrode spaced apart from the contact surface. Stiction is thereby progressively overcome, and the movable electrode is caused to be released from the contact surface.
PCT/US2001/004687 2000-02-11 2001-02-12 Stiction release mechanism WO2001059504A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001236992A AU2001236992A1 (en) 2000-02-11 2001-02-12 Stiction release mechanism

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US18182900P 2000-02-11 2000-02-11
US60/181,829 2000-02-11
US61444100A 2000-07-12 2000-07-12
US09/614,441 2000-07-12

Publications (2)

Publication Number Publication Date
WO2001059504A2 WO2001059504A2 (en) 2001-08-16
WO2001059504A3 true WO2001059504A3 (en) 2002-04-25

Family

ID=26877553

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/004687 WO2001059504A2 (en) 2000-02-11 2001-02-12 Stiction release mechanism

Country Status (2)

Country Link
AU (1) AU2001236992A1 (en)
WO (1) WO2001059504A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7969262B2 (en) 2004-10-27 2011-06-28 Epcos Ag Reduction of air damping in MEMS device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5411769A (en) * 1990-11-13 1995-05-02 Texas Instruments Incorporated Method of producing micromechanical devices
US5679436A (en) * 1994-08-23 1997-10-21 Analog Devices, Inc. Micromechanical structure with textured surface and method for making same
US5784189A (en) * 1991-03-06 1998-07-21 Massachusetts Institute Of Technology Spatial light modulator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5411769A (en) * 1990-11-13 1995-05-02 Texas Instruments Incorporated Method of producing micromechanical devices
US5784189A (en) * 1991-03-06 1998-07-21 Massachusetts Institute Of Technology Spatial light modulator
US5679436A (en) * 1994-08-23 1997-10-21 Analog Devices, Inc. Micromechanical structure with textured surface and method for making same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MATSUMOTO Y ET AL: "Novel prevention method of stiction using silicon anodization for SOI structure", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 72, no. 2, 19 January 1999 (1999-01-19), pages 153 - 159, XP004155657, ISSN: 0924-4247 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7969262B2 (en) 2004-10-27 2011-06-28 Epcos Ag Reduction of air damping in MEMS device

Also Published As

Publication number Publication date
AU2001236992A1 (en) 2001-08-20
WO2001059504A2 (en) 2001-08-16

Similar Documents

Publication Publication Date Title
WO2004038819A3 (en) Piezoelectric switch for tunable electronic components
EP1343190A3 (en) Variable capacitance element
WO2007072408A3 (en) A mems resonator, a method of manufacturing thereof, and a mems oscillator
WO2003041133A3 (en) Electrothermal self-latching mems switch and method
WO2002050874A3 (en) Mems device having an actuator with curved electrodes
MY134267A (en) Electrode configuration in a mems switch
AU2003300925A1 (en) Varactor apparatuses and methods
AU2315497A (en) Piezoelectric actuator or motor, method therefor and method for fabrication thereof
AU2002331725A1 (en) Diaphragm activated micro-electromechanical switch
ATE533171T1 (en) MICRO-ELECTROMECHANICAL SYSTEM SWITCH
MY135407A (en) Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation
AR036694A1 (en) MECHANISM TO ACT BY COMPRESSION, THROUGH AN OSCILLATING WRENCH, SWITCHES, SWITCHES, SELECTORS AND SIMILAR
TW200618014A (en) Liquid metal switch employing electrowetting for actuation and architectures for implementing same
BR0102950A (en) Door handle for a vehicle
WO2005104256A3 (en) Electric functional unit and method for the production thereof
JPH09288956A (en) Contact unit slide of contactor
WO2005064701A3 (en) Electronic device
WO2001059504A3 (en) Stiction release mechanism
WO2003021735A8 (en) Overload protection device
WO2003015128A3 (en) An electromechanical switch and method of fabrication
WO2002099904A3 (en) Electromechanical converter comprising at least one piezoelectric element
US1448058A (en) Electric switch
EP1246216A3 (en) Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method
AU7112801A (en) Switch with auxiliary and main contacts
WO2002041006A3 (en) Silicon capacitive accelerometer

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

Ref country code: DE

Ref legal event code: 8642

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP