WO2001088519A3 - Monolithic sensor for measuring impedance - Google Patents

Monolithic sensor for measuring impedance Download PDF

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Publication number
WO2001088519A3
WO2001088519A3 PCT/US2001/014534 US0114534W WO0188519A3 WO 2001088519 A3 WO2001088519 A3 WO 2001088519A3 US 0114534 W US0114534 W US 0114534W WO 0188519 A3 WO0188519 A3 WO 0188519A3
Authority
WO
WIPO (PCT)
Prior art keywords
oscillator
channel
sensing
substrate
environmental parameter
Prior art date
Application number
PCT/US2001/014534
Other languages
French (fr)
Other versions
WO2001088519A2 (en
Inventor
Milton Nance Ericson
David Eugene Holcomb
Original Assignee
Ut Battelle Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ut Battelle Llc filed Critical Ut Battelle Llc
Priority to AU2001255799A priority Critical patent/AU2001255799A1/en
Publication of WO2001088519A2 publication Critical patent/WO2001088519A2/en
Publication of WO2001088519A3 publication Critical patent/WO2001088519A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/26—Oils; viscous liquids; paints; inks
    • G01N33/28—Oils, i.e. hydrocarbon liquids

Abstract

A monolithic sensor includes a reference channel and at least one sensing channel. Each sensing channel has an oscillator and a counter driven by the oscillator. The reference channel and the at least one sensing channel being formed integrally with a substrate and intimately nested with one another on the substrate. Thus, the oscillator and the counter have matched component values and temperature coefficients. A frequency determining component of the sensing oscillator is formed integrally with the substrate and has an impedance parameter which varies with an environmental parameter to be measured by the sensor. A gating control is responsive to an output signal generated by the reference channel, for terminating counting in the at least one sensing channel at an output count, whereby the output count is indicative of the environmental parameter, and successive ones of the output counts are indicative of changes in the environmental parameter.
PCT/US2001/014534 2000-05-08 2001-05-07 Monolithic sensor for measuring impedance WO2001088519A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001255799A AU2001255799A1 (en) 2000-05-08 2001-05-07 Monolithic sensor for measuring impedance

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/566,764 2000-05-08
US09/566,764 US6456096B1 (en) 2000-05-08 2000-05-08 Monolithically compatible impedance measurement

Publications (2)

Publication Number Publication Date
WO2001088519A2 WO2001088519A2 (en) 2001-11-22
WO2001088519A3 true WO2001088519A3 (en) 2002-08-01

Family

ID=24264276

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/014534 WO2001088519A2 (en) 2000-05-08 2001-05-07 Monolithic sensor for measuring impedance

Country Status (3)

Country Link
US (1) US6456096B1 (en)
AU (1) AU2001255799A1 (en)
WO (1) WO2001088519A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6815958B2 (en) * 2003-02-07 2004-11-09 Multimetrixs, Llc Method and apparatus for measuring thickness of thin films with improved accuracy
US7721590B2 (en) 2003-03-21 2010-05-25 MEAS France Resonator sensor assembly
JP4455201B2 (en) * 2004-07-20 2010-04-21 富士通マイクロエレクトロニクス株式会社 Detection circuit
KR20080089867A (en) * 2007-04-02 2008-10-08 삼성에스디아이 주식회사 Differential signaling system and flat panel display using thereof
KR100846967B1 (en) * 2007-04-02 2008-07-17 삼성에스디아이 주식회사 Differential signaling system and flat panel display using thereof
US8040143B2 (en) * 2009-09-30 2011-10-18 Freescale Semiconductor, Inc. Capacitance sensing with mismatch compensation
US20140167795A1 (en) * 2012-12-14 2014-06-19 Texas Instruments Incorporated Active feedback silicon failure analysis die temperature control system
US20150293047A1 (en) * 2014-04-15 2015-10-15 Intevep, S.A. Method and apparatus for determining water content of oil and water mixtures by measurement of specific admittance
US10236900B1 (en) * 2017-12-11 2019-03-19 Texas Instruments Incorporated Capacitive mismatch measurement

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3778706A (en) * 1970-06-26 1973-12-11 Chevron Res Dielectric constant measurement method
FR2473626A1 (en) * 1979-10-10 1981-07-17 Puechberty Lucien Microprocessor controlled IC engine regulating system - uses data provided by differential capacitive sensors each having two oscillators to provide as respective pulse trains to microprocessor
US4517547A (en) * 1981-11-20 1985-05-14 Motorola, Inc. Water-in-fuel sensor circuit and method
US4567437A (en) * 1983-06-10 1986-01-28 Hubbard Lincoln W Dual oscillator method for detecting flaws in a moving chain
WO1998027409A1 (en) * 1996-12-17 1998-06-25 Akzo Nobel N.V. Device and method for determining liquid-probe contact
WO1998045672A1 (en) * 1997-04-08 1998-10-15 Sentech As Apparatus for capacitive electrical detection
US6057693A (en) * 1996-08-27 2000-05-02 Raytheon Company Dielectric mixture composition sensor with compensation for mixture electrical conductivity

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Publication number Priority date Publication date Assignee Title
US3626285A (en) * 1969-08-04 1971-12-07 Kev Electronics Corp Testing apparatus for voltage-variable capacitors employing phase-locked oscillators
FR2208121B1 (en) * 1972-11-29 1978-12-29 Commissariat Energie Atomique
US4041382A (en) * 1976-08-16 1977-08-09 The Sippican Corporation Calibrating a measurement system including bridge circuit
DE2753871C2 (en) * 1976-12-03 1982-02-25 Tokyo Shibaura Electric Co., Ltd., Kawasaki, Kanagawa Electronic temperature measuring circuit
GB2065946B (en) * 1979-11-21 1983-08-24 Redland Automation Ltd Vehicle detiction installation
US5332961A (en) 1986-11-06 1994-07-26 Ford Motor Company Resistive oil quality sensor
US4733556A (en) * 1986-12-22 1988-03-29 Ford Motor Company Method and apparatus for sensing the condition of lubricating oil in an internal combustion engine
US5089780A (en) 1989-10-04 1992-02-18 Hughes Aircraft Company Oil quality monitor sensor and system
US5260667A (en) 1991-12-02 1993-11-09 Intevep, S.A. Method and apparatus for determining the percentage water condent of oil in water emulsion by specific admittance measurement
US5274335A (en) 1992-04-06 1993-12-28 General Motors Corporation Oil sensor systems and methods of qualitatively determining oil type and condition

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3778706A (en) * 1970-06-26 1973-12-11 Chevron Res Dielectric constant measurement method
FR2473626A1 (en) * 1979-10-10 1981-07-17 Puechberty Lucien Microprocessor controlled IC engine regulating system - uses data provided by differential capacitive sensors each having two oscillators to provide as respective pulse trains to microprocessor
US4517547A (en) * 1981-11-20 1985-05-14 Motorola, Inc. Water-in-fuel sensor circuit and method
US4567437A (en) * 1983-06-10 1986-01-28 Hubbard Lincoln W Dual oscillator method for detecting flaws in a moving chain
US6057693A (en) * 1996-08-27 2000-05-02 Raytheon Company Dielectric mixture composition sensor with compensation for mixture electrical conductivity
WO1998027409A1 (en) * 1996-12-17 1998-06-25 Akzo Nobel N.V. Device and method for determining liquid-probe contact
WO1998045672A1 (en) * 1997-04-08 1998-10-15 Sentech As Apparatus for capacitive electrical detection

Also Published As

Publication number Publication date
WO2001088519A2 (en) 2001-11-22
AU2001255799A1 (en) 2001-11-26
US6456096B1 (en) 2002-09-24

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