WO2001095619A3 - Active matrix silicon substrate for lcos microdisplay - Google Patents

Active matrix silicon substrate for lcos microdisplay Download PDF

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Publication number
WO2001095619A3
WO2001095619A3 PCT/US2001/018597 US0118597W WO0195619A3 WO 2001095619 A3 WO2001095619 A3 WO 2001095619A3 US 0118597 W US0118597 W US 0118597W WO 0195619 A3 WO0195619 A3 WO 0195619A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
silicon substrate
active matrix
matrix silicon
lcos microdisplay
Prior art date
Application number
PCT/US2001/018597
Other languages
French (fr)
Other versions
WO2001095619A2 (en
Inventor
Richard Flasck
Edmund Sandberg
Gregory A Prior
Paul J Weihs
Philip John Cacharelis
Original Assignee
Digital Reflecton Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Digital Reflecton Inc filed Critical Digital Reflecton Inc
Priority to AU2001268271A priority Critical patent/AU2001268271A1/en
Publication of WO2001095619A2 publication Critical patent/WO2001095619A2/en
Publication of WO2001095619A3 publication Critical patent/WO2001095619A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133553—Reflecting elements
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3648—Control of matrices with row and column drivers using an active matrix
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G09G2300/0809—Several active elements per pixel in active matrix panels
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
    • G09G2310/0243—Details of the generation of driving signals
    • G09G2310/0259—Details of the generation of driving signals with use of an analog or digital ramp generator in the column driver or in the pixel circuit
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2320/00—Control of display operating conditions
    • G09G2320/02—Improving the quality of display appearance
    • G09G2320/0247—Flicker reduction other than flicker reduction circuits used for single beam cathode-ray tubes

Abstract

Method and system for providing improved performance of silicon substrate in a Liquid Crystal On Silicon (LCOS) microdisplay for use in video projection system with increased substrate reflectivity, reduced substrate scattering and diffraction, flicker suppression, minimized artifact of fringing and improved spatial uniformity of the gray scale, and allowing the substrate to operate in a high light environment is provided.
PCT/US2001/018597 2000-06-08 2001-06-07 Active matrix silicon substrate for lcos microdisplay WO2001095619A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001268271A AU2001268271A1 (en) 2000-06-08 2001-06-07 Active matrix silicon substrate for lcos microdisplay

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US21028400P 2000-06-08 2000-06-08
US60/210,284 2000-06-08

Publications (2)

Publication Number Publication Date
WO2001095619A2 WO2001095619A2 (en) 2001-12-13
WO2001095619A3 true WO2001095619A3 (en) 2002-07-18

Family

ID=22782307

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/018597 WO2001095619A2 (en) 2000-06-08 2001-06-07 Active matrix silicon substrate for lcos microdisplay

Country Status (2)

Country Link
AU (1) AU2001268271A1 (en)
WO (1) WO2001095619A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0214468D0 (en) 2002-06-24 2002-08-07 Imec Inter Uni Micro Electr Refresh pixel circuit for active matrix
WO2006006110A1 (en) * 2004-07-06 2006-01-19 Koninklijke Philips Electronics N.V. Liquid crystal display
US9958726B2 (en) 2015-02-25 2018-05-01 Omnivision Technologies, Inc. Highly-reflective liquid crystal on silicon panel comprising a continuous reflective coating covering pixel electrodes and an inter-pixel coating
US10283249B2 (en) * 2016-09-30 2019-05-07 International Business Machines Corporation Method for fabricating a magnetic material stack
US10761385B2 (en) 2017-12-22 2020-09-01 Omnivision Technologies, Inc. Liquid crystal on silicon panel having less diffraction
CN112925140A (en) * 2021-01-27 2021-06-08 豪威半导体（上海）有限责任公司 LCOS display and electronic equipment

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03211528A (en) * 1990-01-17 1991-09-17 Matsushita Electric Ind Co Ltd Production of active matrix substrate
JPH07294958A (en) * 1994-04-26 1995-11-10 Seiko Instr Inc Semiconductor device for light valve and its production
EP0751417A1 (en) * 1995-06-30 1997-01-02 Canon Kabushiki Kaisha Display device and production method thereof
EP0837354A2 (en) * 1996-10-18 1998-04-22 Canon Kabushiki Kaisha Pixel electrode substrate for reflection type liquid crystal apparatus, liquid crystal apparatus using the same and display apparatus using such liquid crystal apparatus
US5767827A (en) * 1994-12-22 1998-06-16 Victor Company Of Japan, Ltd. Reflective type active matrix display panel and method of manufacturing same
US6037197A (en) * 1997-07-14 2000-03-14 Semiconductor Energy Laboratory Co., Ltd. Preparation method of semiconductor device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03211528A (en) * 1990-01-17 1991-09-17 Matsushita Electric Ind Co Ltd Production of active matrix substrate
JPH07294958A (en) * 1994-04-26 1995-11-10 Seiko Instr Inc Semiconductor device for light valve and its production
US5767827A (en) * 1994-12-22 1998-06-16 Victor Company Of Japan, Ltd. Reflective type active matrix display panel and method of manufacturing same
EP0751417A1 (en) * 1995-06-30 1997-01-02 Canon Kabushiki Kaisha Display device and production method thereof
EP0837354A2 (en) * 1996-10-18 1998-04-22 Canon Kabushiki Kaisha Pixel electrode substrate for reflection type liquid crystal apparatus, liquid crystal apparatus using the same and display apparatus using such liquid crystal apparatus
US6037197A (en) * 1997-07-14 2000-03-14 Semiconductor Energy Laboratory Co., Ltd. Preparation method of semiconductor device

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
HUANG H C ET AL: "PLANARIZATION OF LIQUID-CRYSTAL-ON-SILICON PROJECTION DISPLAY WITH MULTILEVEL METALLIZATION AND CHEMICAL-MECHANICAL POLISHING", SID INTERNATIONAL SYMPOSIUM. DIGEST OF TECHNICAL PAPERS. SAN DIEGO, MAY 12 - 17, 1996, SANTA ANA, SID, US, vol. 27, 12 May 1996 (1996-05-12), pages 685 - 688, XP000621069, ISSN: 0097-966X *
O'HARA T ET AL: "FABRICATION OF SPATIAL LIGHT MODULATOR BACKPLANES USING DAMASCENE PROCESSING", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 3292, 28 January 1998 (1998-01-28), pages 107 - 115, XP001034711 *
PATENT ABSTRACTS OF JAPAN vol. 015, no. 487 (P - 1286) 10 December 1991 (1991-12-10) *
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 03 29 March 1996 (1996-03-29) *

Also Published As

Publication number Publication date
WO2001095619A2 (en) 2001-12-13
AU2001268271A1 (en) 2001-12-17

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