WO2001098740A3 - Spectrum measuring instrument - Google Patents

Spectrum measuring instrument Download PDF

Info

Publication number
WO2001098740A3
WO2001098740A3 PCT/JP2001/005199 JP0105199W WO0198740A3 WO 2001098740 A3 WO2001098740 A3 WO 2001098740A3 JP 0105199 W JP0105199 W JP 0105199W WO 0198740 A3 WO0198740 A3 WO 0198740A3
Authority
WO
WIPO (PCT)
Prior art keywords
spectrum
measuring instrument
region
detecting surface
spectrum measuring
Prior art date
Application number
PCT/JP2001/005199
Other languages
French (fr)
Other versions
WO2001098740A2 (en
Inventor
Kouichi Oka
Makoto Okawauchi
Original Assignee
Otsuka Denshi Kk
Kouichi Oka
Makoto Okawauchi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Otsuka Denshi Kk, Kouichi Oka, Makoto Okawauchi filed Critical Otsuka Denshi Kk
Priority to DE60109194T priority Critical patent/DE60109194T2/en
Priority to AU2001264319A priority patent/AU2001264319A1/en
Priority to EP01938734A priority patent/EP1340059B1/en
Priority to US10/311,994 priority patent/US6879395B2/en
Priority to KR10-2002-7017437A priority patent/KR100508847B1/en
Publication of WO2001098740A2 publication Critical patent/WO2001098740A2/en
Publication of WO2001098740A3 publication Critical patent/WO2001098740A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum

Abstract

In a spectrum measuring instrument of the present invention, a detecting surface (13a) of a detector (13) is a two-dimensional detecting surface and spectrum light coming out from a spectroscope is irradiated to a region A on the detecting surface (13a). Signal intensity at the regions on the detecting surface (13a) other than the region A where the spectrum light is irradiated is subtracted from signal intensity on the region A. Consequently, it is possible to obtain an accurate spectrum intensity signal by processing a detection signal in such a manner that adverse effects of stray light generated inside the spectrum measuring instrument and unwanted light generated by reflection and diffraction occurring on the surface of a detecting element are removed (Fig. 4).
PCT/JP2001/005199 2000-06-21 2001-06-19 Spectrum measuring instrument WO2001098740A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE60109194T DE60109194T2 (en) 2000-06-21 2001-06-19 INSTRUMENT FOR MEASURING A SPECTRUM
AU2001264319A AU2001264319A1 (en) 2000-06-21 2001-06-19 Spectrum measuring instrument
EP01938734A EP1340059B1 (en) 2000-06-21 2001-06-19 Spectrum measuring instrument
US10/311,994 US6879395B2 (en) 2000-06-21 2001-06-19 Spectrum measuring instrument
KR10-2002-7017437A KR100508847B1 (en) 2000-06-21 2001-06-19 Spectrum measuring instrument

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000-186514 2000-06-21
JP2000186514A JP4372314B2 (en) 2000-06-21 2000-06-21 Spectrum measuring device

Publications (2)

Publication Number Publication Date
WO2001098740A2 WO2001098740A2 (en) 2001-12-27
WO2001098740A3 true WO2001098740A3 (en) 2003-06-26

Family

ID=18686661

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/005199 WO2001098740A2 (en) 2000-06-21 2001-06-19 Spectrum measuring instrument

Country Status (9)

Country Link
US (1) US6879395B2 (en)
EP (1) EP1340059B1 (en)
JP (1) JP4372314B2 (en)
KR (1) KR100508847B1 (en)
CN (1) CN100494924C (en)
AU (1) AU2001264319A1 (en)
DE (1) DE60109194T2 (en)
TW (1) TW513560B (en)
WO (1) WO2001098740A2 (en)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6816248B2 (en) * 2001-04-26 2004-11-09 Reichert, Inc. Hand-held automatic refractometer
US6801309B1 (en) * 2001-10-16 2004-10-05 Therma-Wave, Inc. Detector array with scattered light correction
US8564780B2 (en) 2003-01-16 2013-10-22 Jordan Valley Semiconductors Ltd. Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work pieces
US7126131B2 (en) 2003-01-16 2006-10-24 Metrosol, Inc. Broad band referencing reflectometer
DE10304312A1 (en) * 2003-02-04 2004-08-12 Carl Zeiss Jena Gmbh Compact spectrometer
US20050106876A1 (en) * 2003-10-09 2005-05-19 Taylor Charles A.Ii Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processing
US7804059B2 (en) 2004-08-11 2010-09-28 Jordan Valley Semiconductors Ltd. Method and apparatus for accurate calibration of VUV reflectometer
US20080129986A1 (en) 2006-11-30 2008-06-05 Phillip Walsh Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientations
TWI345050B (en) * 2007-08-03 2011-07-11 Oto Photonics Inc Optical system and method of manufacturing the same
US9146155B2 (en) * 2007-03-15 2015-09-29 Oto Photonics, Inc. Optical system and manufacturing method thereof
JP5012323B2 (en) * 2007-08-27 2012-08-29 コニカミノルタオプティクス株式会社 Polychromator and method for correcting stray light
NL2001016C2 (en) 2007-11-20 2009-05-25 Datascan Group B V Device and method for detecting small amounts of light, comprising an electronic image sensor executed in semiconductor technology.
US20090219537A1 (en) * 2008-02-28 2009-09-03 Phillip Walsh Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths
JP5150939B2 (en) * 2008-10-15 2013-02-27 大塚電子株式会社 Optical characteristic measuring apparatus and optical characteristic measuring method
US8153987B2 (en) 2009-05-22 2012-04-10 Jordan Valley Semiconductors Ltd. Automated calibration methodology for VUV metrology system
US8867041B2 (en) 2011-01-18 2014-10-21 Jordan Valley Semiconductor Ltd Optical vacuum ultra-violet wavelength nanoimprint metrology
JP5769453B2 (en) 2011-03-10 2015-08-26 大塚電子株式会社 Spectral characteristic measuring method and spectral characteristic measuring apparatus
US8565379B2 (en) 2011-03-14 2013-10-22 Jordan Valley Semiconductors Ltd. Combining X-ray and VUV analysis of thin film layers
JP5744655B2 (en) * 2011-07-15 2015-07-08 キヤノン株式会社 Spectral color sensor and image forming apparatus
US8773659B2 (en) * 2012-01-13 2014-07-08 Roper Scientific Inc. Anastigmatic imaging spectrograph
JP5484537B2 (en) * 2012-09-03 2014-05-07 大塚電子株式会社 Spectral characteristic measuring apparatus and spectral characteristic measuring method
CN103557940A (en) * 2013-10-24 2014-02-05 杭州远方光电信息股份有限公司 Spectrograph
KR101587241B1 (en) 2013-12-20 2016-01-20 (주)럭스콤 The Method And Device For Real-Time Optical Spectrum Analysis
JP6180954B2 (en) 2014-02-05 2017-08-16 浜松ホトニクス株式会社 Spectrometer and method of manufacturing the spectrometer
US9863809B2 (en) * 2015-08-31 2018-01-09 Mettler-Toledo Gmbh Spectrograph
EP3226065B1 (en) * 2016-03-31 2023-09-06 Fisba AG Light module and method for monitoring laser diodes in a light module
TWI715599B (en) 2016-07-12 2021-01-11 台灣超微光學股份有限公司 Spectrometer and manufacturing method thereof
JP2018128326A (en) * 2017-02-07 2018-08-16 大塚電子株式会社 Optical spectrum measuring device and method of measuring optical spectrum
DE102017206066A1 (en) * 2017-04-10 2018-10-11 Anvajo GmbH spectrometer
JP6328303B2 (en) * 2017-07-19 2018-05-23 浜松ホトニクス株式会社 Spectrometer
CN108489930A (en) * 2018-01-30 2018-09-04 中国科学院上海技术物理研究所 Passive type THz spectrometers based on unit born of the same parents' solid phase grating
JP6383126B1 (en) * 2018-04-17 2018-08-29 浜松ホトニクス株式会社 Spectrometer
JP6411693B1 (en) * 2018-08-02 2018-10-24 浜松ホトニクス株式会社 Spectrometer
JP2019002941A (en) * 2018-09-26 2019-01-10 浜松ホトニクス株式会社 Spectrometer
WO2023228450A1 (en) * 2022-05-27 2023-11-30 浜松ホトニクス株式会社 Spectrometry device
JP2024025075A (en) * 2022-08-10 2024-02-26 浜松ホトニクス株式会社 Photodetector and aperture section

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5657925A (en) * 1979-10-17 1981-05-20 Hitachi Ltd Multiwavelength spectrophotometer
JPS58178227A (en) * 1982-04-14 1983-10-19 Hitachi Ltd Multiple wavelength spectroscope device
EP0167750A2 (en) * 1984-06-13 1986-01-15 Abbott Laboratories Spectrophotometer
EP0449442A1 (en) * 1990-03-30 1991-10-02 Beckman Instruments, Inc. Stray radiation compensation
EP0652423A1 (en) * 1993-11-04 1995-05-10 Matsushita Electric Industrial Co., Ltd. Spectroradiometer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2814955C2 (en) * 1978-04-06 1983-05-05 Erich Ing.(Grad.) Luther Device for sorting tested circuit boards in a circuit board tester
JPS60192229A (en) * 1984-03-14 1985-09-30 Hitachi Ltd Photometer for simultaneously measuring multiwavelength light

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5657925A (en) * 1979-10-17 1981-05-20 Hitachi Ltd Multiwavelength spectrophotometer
JPS58178227A (en) * 1982-04-14 1983-10-19 Hitachi Ltd Multiple wavelength spectroscope device
EP0167750A2 (en) * 1984-06-13 1986-01-15 Abbott Laboratories Spectrophotometer
EP0449442A1 (en) * 1990-03-30 1991-10-02 Beckman Instruments, Inc. Stray radiation compensation
EP0652423A1 (en) * 1993-11-04 1995-05-10 Matsushita Electric Industrial Co., Ltd. Spectroradiometer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 005, no. 115 (P - 072) 24 July 1981 (1981-07-24) *
PATENT ABSTRACTS OF JAPAN vol. 008, no. 018 (P - 250) 26 January 1984 (1984-01-26) *

Also Published As

Publication number Publication date
US20030107733A1 (en) 2003-06-12
CN1541331A (en) 2004-10-27
DE60109194D1 (en) 2005-04-07
EP1340059A2 (en) 2003-09-03
CN100494924C (en) 2009-06-03
EP1340059B1 (en) 2005-03-02
TW513560B (en) 2002-12-11
JP2002005741A (en) 2002-01-09
AU2001264319A1 (en) 2002-01-02
DE60109194T2 (en) 2006-04-06
JP4372314B2 (en) 2009-11-25
WO2001098740A2 (en) 2001-12-27
US6879395B2 (en) 2005-04-12
KR100508847B1 (en) 2005-08-18
KR20030069799A (en) 2003-08-27

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