WO2002004991A3 - Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same - Google Patents

Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same Download PDF

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Publication number
WO2002004991A3
WO2002004991A3 PCT/US2001/021641 US0121641W WO0204991A3 WO 2002004991 A3 WO2002004991 A3 WO 2002004991A3 US 0121641 W US0121641 W US 0121641W WO 0204991 A3 WO0204991 A3 WO 0204991A3
Authority
WO
WIPO (PCT)
Prior art keywords
microelectromechanical
same
building blocks
constructions made
piezoelectric bimorphs
Prior art date
Application number
PCT/US2001/021641
Other languages
French (fr)
Other versions
WO2002004991A2 (en
Inventor
Johannes G Smits
Original Assignee
Univ Boston
Johannes G Smits
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/700,633 external-priority patent/US6657764B1/en
Application filed by Univ Boston, Johannes G Smits filed Critical Univ Boston
Priority to AU2001280500A priority Critical patent/AU2001280500A1/en
Priority to US10/332,559 priority patent/US6830944B1/en
Publication of WO2002004991A2 publication Critical patent/WO2002004991A2/en
Publication of WO2002004991A3 publication Critical patent/WO2002004991A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)

Abstract

A plurality of MEMS devices that can be easily configured to impart extended ranges of rotational and/or translational motion. The MEMS devices (3b) comprise a building block having a bendable member with a first end connected to a support structure, and a straight rigid member with a first end connected to the second end of the bendable member. The length of the rigid member is between one half to full length of the bendable member. The MEMS devices can be employed as actuators or sensors.
PCT/US2001/021641 1999-03-18 2001-07-10 Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same WO2002004991A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2001280500A AU2001280500A1 (en) 2000-07-10 2001-07-10 Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same
US10/332,559 US6830944B1 (en) 1999-03-18 2001-07-10 Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/700,633 US6657764B1 (en) 1999-03-18 2000-03-17 Very large angle integrated optical scanner made with an array of piezoelectric monomorphs
US21719100P 2000-07-10 2000-07-10
US60/217,191 2000-07-10
US09/700,633 2000-11-16

Publications (2)

Publication Number Publication Date
WO2002004991A2 WO2002004991A2 (en) 2002-01-17
WO2002004991A3 true WO2002004991A3 (en) 2003-01-16

Family

ID=26911704

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/021641 WO2002004991A2 (en) 1999-03-18 2001-07-10 Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same

Country Status (2)

Country Link
AU (1) AU2001280500A1 (en)
WO (1) WO2002004991A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108604008B (en) * 2016-02-17 2020-11-10 三菱电机株式会社 Mirror driving device, control method for mirror driving device, and manufacturing method for mirror driving device

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5446122B2 (en) * 2008-04-25 2014-03-19 パナソニック株式会社 Meander type vibrator and optical reflection element using the same
JP5598296B2 (en) 2010-12-08 2014-10-01 セイコーエプソン株式会社 Actuator, optical scanner and image forming apparatus
JP5990917B2 (en) * 2012-02-03 2016-09-14 船井電機株式会社 Electronic device having MEMS device and projector function
FR3030474B1 (en) 2014-12-23 2022-01-21 Commissariat Energie Atomique DEVICE FOR TRANSFORMING AN OFF-PLAN MOVEMENT INTO IN-PLAN MOVEMENT AND/OR VICE VERSA
CN111006809B (en) * 2019-12-25 2021-01-15 中国海洋大学 Three-dimensional MEMS ocean turbulence sensor
CN113655612B (en) * 2021-09-03 2023-07-25 上海科技大学 High-stability two-dimensional posture adjusting mechanism

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099690A (en) * 1989-07-31 1992-03-31 Allied-Signal Inc. Fiber-optic gyroscope accelerometer
US5209118A (en) * 1989-04-07 1993-05-11 Ic Sensors Semiconductor transducer or actuator utilizing corrugated supports
US5490421A (en) * 1992-03-25 1996-02-13 Fuji Electric Co., Ltd. Semi-conductor acceleration sensor having thin beam supported weight
US6020215A (en) * 1994-01-31 2000-02-01 Canon Kabushiki Kaisha Process for manufacturing microstructure
US6220561B1 (en) * 1999-06-30 2001-04-24 Sandia Corporation Compound floating pivot micromechanisms
US6311563B1 (en) * 1998-09-29 2001-11-06 Yamatake Corporation Pressure sensor
US20010048265A1 (en) * 2000-04-11 2001-12-06 Miller Samuel Lee Microelectromechanical apparatus for elevating and tilting a platform

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5209118A (en) * 1989-04-07 1993-05-11 Ic Sensors Semiconductor transducer or actuator utilizing corrugated supports
US5099690A (en) * 1989-07-31 1992-03-31 Allied-Signal Inc. Fiber-optic gyroscope accelerometer
US5490421A (en) * 1992-03-25 1996-02-13 Fuji Electric Co., Ltd. Semi-conductor acceleration sensor having thin beam supported weight
US6020215A (en) * 1994-01-31 2000-02-01 Canon Kabushiki Kaisha Process for manufacturing microstructure
US6311563B1 (en) * 1998-09-29 2001-11-06 Yamatake Corporation Pressure sensor
US6220561B1 (en) * 1999-06-30 2001-04-24 Sandia Corporation Compound floating pivot micromechanisms
US20010048265A1 (en) * 2000-04-11 2001-12-06 Miller Samuel Lee Microelectromechanical apparatus for elevating and tilting a platform

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108604008B (en) * 2016-02-17 2020-11-10 三菱电机株式会社 Mirror driving device, control method for mirror driving device, and manufacturing method for mirror driving device

Also Published As

Publication number Publication date
AU2001280500A1 (en) 2002-01-21
WO2002004991A2 (en) 2002-01-17

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