WO2002011628A1 - Blade with body partly made from diamond - Google Patents

Blade with body partly made from diamond Download PDF

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Publication number
WO2002011628A1
WO2002011628A1 PCT/EP2001/008294 EP0108294W WO0211628A1 WO 2002011628 A1 WO2002011628 A1 WO 2002011628A1 EP 0108294 W EP0108294 W EP 0108294W WO 0211628 A1 WO0211628 A1 WO 0211628A1
Authority
WO
WIPO (PCT)
Prior art keywords
blade according
blade
sensor
functional element
electrical functional
Prior art date
Application number
PCT/EP2001/008294
Other languages
German (de)
French (fr)
Other versions
WO2002011628A8 (en
Inventor
Erhard Kohn
Stephan Ertl
Peter Gluche
André Flöter
Original Assignee
Gfd Gesellschaft Für Diamantprodukte Mbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gfd Gesellschaft Für Diamantprodukte Mbh filed Critical Gfd Gesellschaft Für Diamantprodukte Mbh
Priority to AU2001289683A priority Critical patent/AU2001289683A1/en
Priority to EP01969418A priority patent/EP1318755A1/en
Publication of WO2002011628A1 publication Critical patent/WO2002011628A1/en
Publication of WO2002011628A8 publication Critical patent/WO2002011628A8/en

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Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B17/00Surgical instruments, devices or methods, e.g. tourniquets
    • A61B17/32Surgical cutting instruments
    • A61B17/3209Incision instruments
    • A61B17/3211Surgical scalpels, knives; Accessories therefor
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/12Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating by passing a current through the tissue to be heated, e.g. high-frequency current
    • A61B18/14Probes or electrodes therefor
    • A61B18/1402Probes for open surgery
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007Methods or devices for eye surgery
    • A61F9/013Instruments for compensation of ocular refraction ; Instruments for use in cornea removal, for reshaping or performing incisions in the cornea
    • A61F9/0133Knives or scalpels specially adapted therefor
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/08Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating by means of electrically-heated probes
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/12Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating by passing a current through the tissue to be heated, e.g. high-frequency current
    • A61B18/1206Generators therefor
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B17/00Surgical instruments, devices or methods, e.g. tourniquets
    • A61B2017/00681Aspects not otherwise provided for
    • A61B2017/00734Aspects not otherwise provided for battery operated
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00636Sensing and controlling the application of energy
    • A61B2018/0066Sensing and controlling the application of energy without feedback, i.e. open loop control
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/08Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating by means of electrically-heated probes
    • A61B18/082Probes or electrodes therefor
    • A61B2018/087Probes or electrodes therefor using semiconductors as heating element
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/12Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating by passing a current through the tissue to be heated, e.g. high-frequency current
    • A61B18/1206Generators therefor
    • A61B2018/1226Generators therefor powered by a battery

Definitions

  • the present invention relates to a blade with a blade body and at least one electrical functional element in or on the blade body.
  • blades are used, for example, in medicine, in particular microsurgery, endoscopy, minimally invasive surgery as well as in general surgery, such as for example in eye operations as lancets or in skin incisions as cutting blades.
  • coagulation to stop bleeding for example in surgical use
  • Conventionally, coagulation to stop bleeding from open wounds is accomplished using a pair of pliers, tweezers, wire, or a blade that is used to compress the bleeding vessel in the case of forceps, for example, and then a high frequency current through the pliers tip 4-3
  • No. 5,792,137 shows a coagulation forceps provided with a cutting edge, which can be heated for coagulation.
  • These pliers essentially consist of a silicon substrate that is doped on its surface so that it has a high resistance.
  • silicon electrodes as electrical functional elements between which a current can flow, so that the substrate is heated. Since these pliers are heated in the depth of the substrate, adequate and rapid heat supply to the surface of the pliers cutting edge cannot be brought about; for example, local hot spots are generated.
  • a blade which consists, for example, of silicon or silicon carbide and carries electrical heating conductors as electrical functional elements on its surface. This surface is finally electrically insulated with a plastic cover.
  • the electrical heating conductors are made of metal, for example copper. This ensures sufficient heat input into the blade.
  • the plastic cover has a low thermal conductivity, which results in poor heat transfer from the inside of the blade ⁇ , 1 CD ⁇ I 1 1 I rl ..
  • SH 0 P SH SH 4-1 rö SH SH ⁇ TJ 0 -H ⁇ ⁇
  • CD ⁇ TJ Pl X rö N X! d ⁇ ⁇ J ⁇ ⁇ ro 4-3
  • TJ SH TJ TJ TJ! rl r-H ⁇ CQ ⁇ N CQ 4-3 TJ d ⁇ ⁇ 0 X! ⁇ ⁇ ⁇ ISI ⁇ CD
  • the heating phase for example the heating time and the course of the heating of the blade can be regulated in the blade according to the invention by the signal shape of the heating current supplied to the heating elements. Because of the high thermal conductivity and low heat capacity of the blade, the temperature of the blade follows the signal curve of the heating current quickly and with little delay.
  • conductive, for example boron-doped, and insulating diamond layers have similar thermal expansion coefficients, see above that no tension or damage occurs when the temperature of the blade changes.
  • silicon as used in the prior art for the blade body, has an expansion coefficient of 2.56 x 10 "6 l / K for conductive silicon layers and 0.4 x 10 " 6 for insulating silicon layers in the case of silicon dioxide l / K or, in the case of silicon nitride, 0.8 x 10 " ⁇ l / K.
  • silicon technology tension changes occur in the blade during temperature changes, so that damage occurs in a corresponding blade as in the prior art are expected.
  • Another advantage of the blade according to the invention is that diamond is known as the hardest material.
  • the blades according to the invention therefore retain prolonged use.
  • the elastic modulus of diamond is also the highest of all known materials.
  • diamond is relatively elastic with a high breaking stress of 10.5 GPa for single-crystal and 4.8 GPa for polycrystalline diamond.
  • the electrical functional element is made from very heavily doped diamond, it has no temperature dependence of its resistance. It is then suitable for the production of resistance heating elements, supply lines, electrodes, for example electrical, chemical or physiological electrodes, or also for mono- or bipolar coagulation electrodes.
  • heating element / temperature sensor combinations can be produced.
  • Hall sensors can also be used for magnetic field measurement, e.g. for location by means of nuclear magnetic resonance tomography (MR) or X-ray computed tomography (CT), chemo-sensitive components (ion-sensitive field effect transistors (FET), pH-dependent resistors), piezo-resistive sensors (pressure, force, acceleration), radiation sensors (UV, X-ray, gamma radiation) or flow sensors.
  • MR nuclear magnetic resonance tomography
  • CT X-ray computed tomography
  • FET chemo-sensitive components
  • pH-dependent resistors pH-dependent resistors
  • piezo-resistive sensors pressure, force, acceleration
  • radiation sensors UV, X-ray, gamma radiation
  • flow sensors d ⁇ 1 1 l xi 1 1 I ⁇
  • CD N SH ⁇ CD -. d rö J d ⁇ 4-1 SH CD xi CD 4-1 CQ TJ TJ ⁇ CQ • ⁇ TJ P ⁇
  • SH J P SH ⁇ d rö rö CQ 00 ⁇ ⁇ Pl rö r- P d 0 0 rö TJ CQ N ⁇ -rl
  • CD ⁇ Pl d ⁇ rl o ⁇ rH -rl CQ rl ⁇ 4-3 ⁇ d ⁇ SH 4-1 rl CQ ü rl or rl CD P d> CQ -H CD ⁇ TJ rl ⁇ CQ -rl ⁇ TJ C ⁇ CQ ⁇ r- ⁇ X CD CD CQ ⁇ CQ -rl P CD -. ⁇
  • FIG. 1 shows a heatable blade with a monolithically integrated temperature sensor
  • Figure 2 shows a cross section of the heatable blade of Figure 1 along the line A-A ';
  • Figure 3 shows a cross section through the heatable
  • Blade according to Figure 1 along the lines BB 1 ;
  • Figure 4 shows another heatable blade.
  • Figure 1 shows a heatable blade 1, with a blade body 8 made of diamond, which has a curved cutting edge 6.
  • heating conductors 2 made of highly doped diamond regions, for example doped with boron, on the surface of the blade body 8. These heating conductors are connected to metallizations 5 at one end of the blade body 8, via which an electrical voltage can be applied to the heating conductors 2.
  • the heating conductors 2 save an area on the blade surface in which a temperature sensor 3 with supply lines 4 is arranged.
  • the supply lines 4 are also connected to metallizations 5 in order to apply an electrical voltage to them.
  • the temperature sensor 3 consists of p ⁇ -doped diamond.
  • the respective endowments can already be introduced into the blade body 8 in a conventional manner during the manufacturing process. It is also possible to have the blade body 8 grown on a substrate, for example by means of the CVD method, and to incorporate the doping into the diamond of the blade body during the growth process.
  • FIG. 2 shows a section through a blade according to FIG. 1, the same reference numerals as in FIG. 1 designating corresponding elements.
  • the blade body 8 has an insulating diamond layer 11 which is arranged on a silicon substrate 10.
  • This diamond layer 12 also forms the cutting edge 6.
  • the temperature sensor 3 consists of doped diamond, and the temperature dependence of the resistance value can be adjusted via the level of the dopant concentration.
  • the temperature sensor 3 can also be produced during or immediately after the production of the diamond layers 11 and 12 on the substrate 10 by doping the growing diamond, with one also
  • Etching process can be provided in order to separate the temperature sensor 3 from the p + -doped heating conductors 2.
  • FIG. 3 shows a further section through the blade according to FIG. 1 along the line BB 1 .
  • Similar elements are denoted by the same reference numerals so that their description is partially omitted. It can be seen that only the supply lines 4 for the temperature sensor are now present in the central region of the blade.
  • a metallization 5 is provided on the diamond layer 12 of the p + -doped heating conductors 2 in the area of the section BB 'on both sides of the feed lines 4, which is in electrical contact with the p + -doped heating conductors 2.
  • a voltage can now be applied to the p + -doped regions of the heating conductors 2 via these metallizations 5 in order to heat the blade.
  • FIGS. 1 to 3 can be designed such that no silicon substrate 10 is present. However, all other elements of the blade are as they appear from Figures 1 to 3.
  • FIG. 4 shows a further example of a heatable blade, similar elements again being identified here with the same reference symbols and their description therefore being at least partially omitted.
  • the blade from FIG. 4 is a lancet with cutting edges 6, 6 'which form a tip.
  • a temperature sensor 3 with supply lines 4 is provided, which can be supplied with voltage via metallizations 5 '.
  • the heating conductors are not shown in FIG. 4, but are arranged in strips in the same way as in FIG. These heating conductors are contacted via the metallizations 5, as a result of which they can be supplied with voltage. The remaining areas can be used for contacting further functional elements.

Abstract

The invention relates to a blade (1) with a blade body (8) and at least one electrical function element (3) in or on the blade body, characterised in that the blade body consists at least partly of diamond and comprises electrically conducting diamond regions as electrical function element.

Description

Klinge blade
Die vorliegende Erfindung bezieht sich auf eine Klinge mit einem Klingenkörper und mindestens einem elek- trischen Funktionselement in oder auf dem Klingenkörper. Derartige Klingen werden beispielsweise in der Medizin, insbesondere der Mikrochirurgie, der Endo- skopie, der minimalinvasiven Chirurgie wie auch allgemein der Chirurgie, wie beispielsweise bei Au- genoperationen als Lanzetten oder bei Hautschnitten als Schneidklingen verwendet.The present invention relates to a blade with a blade body and at least one electrical functional element in or on the blade body. Such blades are used, for example, in medicine, in particular microsurgery, endoscopy, minimally invasive surgery as well as in general surgery, such as for example in eye operations as lancets or in skin incisions as cutting blades.
Die Anwendung der Koagulation zum Stoppen von Blutungen, beispielsweise im chirurgischen Einsatz, ist ei- ne gängige Methode. Herkömmlicherweise wird die Koagulation zum Stoppen von Blutungen an offenen Wunden mit Hilfe einer Zange, einer Pinzette, einem Draht oder einer Klinge bewirkt, mit der das blutende Gefäß im Falle einer Zange beispielsweise zusammengedrückt und dann ein Hochfrequenzstrom durch die Zangenspitze 4-3The use of coagulation to stop bleeding, for example in surgical use, is a common method. Conventionally, coagulation to stop bleeding from open wounds is accomplished using a pair of pliers, tweezers, wire, or a blade that is used to compress the bleeding vessel in the case of forceps, for example, and then a high frequency current through the pliers tip 4-3
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Die US 5,792,137 zeigt eine mit einer Schneide versehene Koagulationszange, die zur Koagulation beheizbar ist. Diese Zange besteht im wesentlichen aus einem Silizium-Substrat, das an seiner Oberfläche so do- tiert ist, daß es einen hohen Widerstand aufweist.No. 5,792,137 shows a coagulation forceps provided with a cutting edge, which can be heated for coagulation. These pliers essentially consist of a silicon substrate that is doped on its surface so that it has a high resistance.
Innerhalb des Siliziumsubstrats befinden sich Siliziumelektroden als elektrische Funktionselemente zwischen denen ein Strom fließen kann, so daß das Substrat aufgeheizt wird. Da diese Zange in der Tiefe des Substrats beheizt wird, kann keine ausreichende und rasche Wärmeversorgung der Oberfläche der Zangenschneide bewirkt werden; es werden beispielsweise lokale Hot-Spots erzeugt.Within the silicon substrate there are silicon electrodes as electrical functional elements between which a current can flow, so that the substrate is heated. Since these pliers are heated in the depth of the substrate, adequate and rapid heat supply to the surface of the pliers cutting edge cannot be brought about; for example, local hot spots are generated.
Weiterhin ergeben sich bei diesen Zangen aufgrund der unterschiedlichen Ausdehnungskoeffizienten der leitenden Silizium-Elektroden und den nichtleitenden Siliziumdioxid- oder Siliziumnitrid-Bereichen (Si02, Si3N4) Verspannungen und Beschädigungen innerhalb der Zangenschneide während des Aufwärmens bzw. Abkühlens.Furthermore, due to the different expansion coefficients of the conductive silicon electrodes and the non-conductive silicon dioxide or silicon nitride areas (Si0 2 , Si 3 N 4 ), these tongs result in tensions and damage within the pliers cutting edge during heating up or cooling down.
Demgegenüber gehen die Druckschriften US 4,485,810 und 4,069,336 einen anderen Weg zur Aufheizung einer Klinge. In beiden Druckschriften ist eine Klinge of- fenbart, die beispielsweise aus Silizium oder Siliziumkarbid besteht und auf ihrer Oberfläche elektrische Heizleiter als elektrische Funktionselemente trägt. Diese Oberfläche ist abschließend mit einem Kunst- Stoffüberzug elektrisch isoliert. Diese Klingen wer- den lediglich für Hautschnitte eingesetzt, nicht jedoch für augenchirurgische Zwecke. Die elektrischen Heizleiter bestehen aus Metall, beispielsweise Kupfer. Dadurch ist ein ausreichender Wärmeeintrag in die Klinge gewährleistet. Jedoch besitzt der Kunst- StoffÜberzug eine geringe Wärmeleitfähigkeit, wodurch sich ein schlechter Wärmeübergang von Klingeninnerem ^, 1 CD φ I 1 1 I rl ..In contrast, the publications US 4,485,810 and 4,069,336 go another way to heat a blade. In both publications, a blade is disclosed which consists, for example, of silicon or silicon carbide and carries electrical heating conductors as electrical functional elements on its surface. This surface is finally electrically insulated with a plastic cover. These blades are only used for skin incisions, but not for eye surgery purposes. The electrical heating conductors are made of metal, for example copper. This ensures sufficient heat input into the blade. However, the plastic cover has a low thermal conductivity, which results in poor heat transfer from the inside of the blade ^ , 1 CD φ I 1 1 I rl ..
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CD d SH -H d rH QA Φ SH TJ Xl υ -H CD φ xl TJ r-i P 4-1 r- Φ P 0 Φ • 03CD d SH -H d rH QA Φ SH TJ Xl υ -H CD φ xl TJ r-i P 4-1 r- Φ P 0 Φ • 03
SH d rö Φ CD SH xi « rH J 4-1 UH rl CD o - l X! - SH > r-H X! d =röSH d rö Φ CD SH xi «rH J 4-1 UH rl CD o - l X! - SH> r-H X! d = ro
Φ -H d TJ UH Φ SH X rö d X - P P rH d CQ =P 4-1 Φ CQ Φ Xl 4-3 4H CQ Φ dΦ -H d TJ UH Φ SH X rö d X - P P rH d CQ = P 4-1 Φ CQ Φ Xl 4-3 4H CQ Φ d
TJ rH -H φ εTJ rH -H φ ε
P~ TJ Φ -H SH X Φ Φ d rö TJ Φ CD CQ 4-3 P 4-1 O d rH P X, X) » rö φP ~ TJ Φ -H SH X Φ Φ d rö TJ Φ CD CQ 4-3 P 4-1 O d rH PX, X) »rö φ
« Φ -H rö 4-> d Φ CQ CD r-\ Φ CQ rH d ft -H rö CQ CQ (Ö rH rö υ -H Φ X CD φ 4-3 & d -H XI TJ r-H Φ Φ r-i d TJ Xl rö P CQ Φ 4-1 Φ -H ε rö Q 4-1 M CQ xi SH -H CD Φ φ υ rö -rl r-H Φ rl ü ε TJ d & CQ Φ X! SH rö 4-3 SH -rl rö ü d CD ü Φ ε X! d 4-3 £ Φ 4-3 ε rH B Φ CD -H P M d «C Φ XI 4-3 -H Φ Φ Φ d«Φ -H rö 4-> d Φ CQ CD r- \ Φ CQ rH d ft -H rö CQ CQ (Ö rH rö υ -H Φ X CD φ 4-3 & d -H XI TJ rH Φ Φ ri d TJ Xl rö P CQ Φ 4-1 Φ -H ε rö Q 4-1 M CQ xi SH -H CD Φ φ υ rö -rl rH Φ rl ü ε TJ d & CQ Φ X! SH rö 4-3 SH - rl rö ü d CD ü Φ ε X! d 4-3 £ Φ 4-3 ε rH B Φ CD -HPM d «C Φ XI 4-3 -H Φ Φ Φ d
-H ε P, Φ-H ε P, Φ
=rö CQ ü P d EH CQ d SH φ 4-> d & SH 03 TJ U -. M P ε Pl Φ ε £ TJ P rH Φ d -H CD Φ 4-1 P -H 0 d CQ P P. Φ UH d =rö d =rö d Φ SH XI 0 ISI SH TJ= rö CQ ü P d EH CQ d SH φ 4-> d & SH 03 TJ U -. M P ε Pl Φ ε £ TJ P rH Φ d -H CD Φ 4-1 P -H 0 d CQ P P. Φ UH d = rö d = rö d Φ SH XI 0 ISI SH TJ
UH -H Φ CQ -H -H CQ r-H w > -H X φ CQ s SH Φ ε -H rH -rt r-H CQ Φ =0 ü i Φ dUH -H Φ CQ -H -H CQ r-H w> -H X φ CQ s SH Φ ε -H rH -rt r-H CQ Φ = 0 ü i Φ d
SH TJ -H TJ N -H Φ SH Φ P d Xl d Φ CD φ ε 4H r-i Φ P d X. Φ ■5 -HSH TJ -H TJ N -H Φ SH Φ P d Xl d Φ CD φ ε 4H r-i Φ P d X. Φ ■ 5 -H
Φ r-H 4-3 =rö -H TJ Φ CQ SH ist =rö rö d -H CD P SH r-{ rö -rl d 4-1 X! X! mΦ r-H 4-3 = rö -H TJ Φ CQ SH ist = rö rö d -H CD P SH r- {rö -rl d 4-1 X! X! m
Xl P rö XI XI UH CD r-H Φ 4-1 SH CD Φ SH CD CQ N Φ rö 4-3 φ Φ d U o 4-1 SHXl P rö XI XI UH CD r-H Φ 4-1 SH CD Φ SH CD CQ N Φ rö 4-3 φ Φ d U o 4-1 SH
O rö -H -H U UH -H TJ CQ rö TJ -H CD XI m CQ TJ Φ d CD XI 4-1 d CQ CD rö CQ CQ N ΦO rö -H -H U UH -H TJ CQ rö TJ -H CD XI m CQ TJ Φ d CD XI 4-1 d CQ CD rö CQ CQ N Φ
XI SH CD CQ Φ rH d d ε d ü P Φ d τj =rö d rl O CQ φ r-H 4-3 d ε -rl -rt 4->XI SH CD CQ Φ rH d d ε d ü P Φ d τj = rö d rl O CQ φ r-H 4-3 d ε -rl -rt 4->
Φ UH Φ SH φ 0 -H rö 0 r) Φ P CQ < TJ φ X! φ -H £ H CQ -H rö d d Φ ΦΦ UH Φ SH φ 0 -H rö 0 r) Φ P CQ <TJ φ X! φ -H £ H CQ -H rö d d Φ Φ
-H P 4-3 Φ PQ X Φ 4-1 -H P X! Φ CD Φ d d X! TJ TJ SH rt Φ rö -rl rH -rl -rl -H CQ -H-H P 4-3 Φ PQ X Φ 4-1 -H P X! Φ CD Φ d d X! TJ TJ SH rt Φ rö -rl rH -rl -rl -H CQ -H
TJ Ü rö CQ 4-3 CΛ 4-> d rö CD =P m φ UH xl Φ rö d Φ M rH MH W P N ISI Φ TJTJ Ü rö CQ 4-3 CΛ 4-> d rö CD = P m φ UH xl Φ rö d Φ M rH MH W P N ISI Φ TJ
S Xl SH CD XI X CD d UH CQ MH υ CD -H -. d >i Φ d d -H -rl CDS Xl SH CD XI X CD d UH CQ MH υ CD -H -. d> i Φ d d -H -rl CD
00 UH SH u Φ d ü ε d rl UH -rl rt d φ -rt -rt d d UH 4H -H rH CQ φ 0 d 03 TJ TJ d 0300 UH SH u Φ d ü ε d rl UH -rl rt d φ -rt -rt d d UH 4H -H rH CQ φ 0 d 03 TJ TJ d 03
< P Φ Φ P TJ P rö φ P Φ P" r-H Φ Φ -H SH φ P Φ rl P Φ 0 d XI -H -H rö Φ φ -H rö so rö TJ d *Ü O d £ TJ En X! : W > r-π P CD N TJ TJ H rö CQ P. 0 Φ 4-3 H TJ ε ε Φ TJ o O<P Φ Φ P TJ P rö φ P Φ P " rH Φ Φ -H SH φ P Φ rl P Φ 0 d XI -H -H rö Φ φ -H rö so rö TJ d * Ü O d £ TJ En X !: W> r-π P CD N TJ TJ H rö CQ P. 0 Φ 4-3 H TJ ε ε Φ TJ o O
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Figure imgf000006_0001
1 CQ 1 1 1 SH 1 1 1 1 1 Φ Φ1 CQ 1 1 1 SH 1 1 1 1 1 Φ Φ
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SH -H H -H SH Φ XI d CQ CD TJ X! . X! SH Φ d d d rö & CD Φ Φ X!SH -H H -H SH Φ XI d CQ CD TJ X! , X! SH Φ d d d rö & CD Φ Φ X!
© Φ Φ Φ Φ Φ X! J φ Φ CQ d O 4-1 Xl O TJ -H P Φ P P d d -rl ε rö a. X! CQ d • ^ TJ 0 CQ d -rl CD =rö -H Pl d 4-1 ε CQ Φ d -H 4-3 Φ SH w -H X! CD CD -H d P d 4-3 SH Φ SH K -H UH Φ =0 • TJ d r-H 0 r-l CD© Φ Φ Φ Φ Φ X! J φ Φ CQ d O 4-1 Xl O TJ -H P Φ P P d d -rl ε rö a. X! CQ d • ^ TJ 0 CQ d -rl CD = rö -H Pl d 4-1 ε CQ Φ d -H 4-3 Φ SH w -H X! CD CD -H d P d 4-3 SH Φ SH K -H UH Φ = 0 • TJ d r-H 0 r-l CD
H X Φ υ d -H CD SH ε =0 P CQ Φ X SH Φ ε rö rH rH Xl rö « TJ Φ SH J -H £ CΛ P TJ d P Λi • TJ Φ TJ ti φ TJ 4-> >H X! Φ a u iH ^! d CQ ΦH X Φ υ d -H CD SH ε = 0 P CQ Φ X SH Φ ε rö rH rH Xl rö «TJ Φ SH J -H £ CΛ P TJ d P Λi • TJ Φ TJ ti φ TJ 4->> H X! Φ a u iH ^! d CQ Φ
Q- d CQ TJ d P d Xl d d PQ rö TJ =rö Φ d CQ -H =P rl P d >Q- d CQ TJ d P d Xl d d PQ rö TJ = rö Φ d CQ -H = P rl P d>
0 r-l CQ d =rö CD υ J Φ -rl d XI d 4-1 H -3. • d r-H UH φ Φ 00 r-l CQ d = rö CD υ J Φ -rl d XI d 4-1 H -3. • d r-H UH φ Φ 0
SH Φ rH Φ 4-3 -H -rl d TJ UH d rö SH CD Φ -H d 0 φ CD CD TJ rH -HSH Φ rH Φ 4-3 -H -rl d TJ UH d rö SH CD Φ -H d 0 φ CD CD TJ rH -H
4-1 -H rö & CQ d φ Φ P SH rl φ Φ d 4-1 N Φ Φ Φ -rl d =0 4-3 d r-{ 4-1 Φ4-1 -H rö & CQ d φ Φ P SH rl φ Φ d 4-1 N Φ Φ Φ -rl d = 0 4-3 d r- {4-1 Φ
X P. d Φ -H X! d φ Φ xi 4-1 -H P UH -rl 4-1 -H TJ 4-3 - lX P. d Φ -H X! d φ Φ xi 4-1 -H P UH -rl 4-1 -H TJ 4-3 - l
Φ CQ Xl rtl PQ φ rö xl d S ü d d r-H rö X! Φ TJ in X Φ ε -rl -H P) d Φ r-{ ε Φ XΦ CQ Xl rtl PQ φ rö xl d S ü d d r-H rö X! Φ TJ in X Φ ε -rl -H P) d Φ r- {ε Φ X
Φ d d SH rH -rl ü rü TJ 0 Φ Φ CQ rö -rl rH xi 0 d Φ d P Xi « TJ -H P =0Φ d d SH rH -rl ü rü TJ 0 Φ Φ CQ rö -rl rH xi 0 d Φ d P Xi «TJ -H P = 0
Φ φ P x! d xl 4-> -H -H ε ε Φ J Xi CD d S P 4-1 SH d ε FH XΦ φ P x! d xl 4-> -H -H ε ε Φ J Xi CD d S P 4-1 SH d ε FH X
0 X! rö CJ φ φ d 4-1 Φ d P ε . rö SH 4-1 CQ P. -H -H h CQ Φ Φ d -rl 0 d0 X! ro CJ φ φ d 4-1 Φ d P ε. ro SH 4-1 CQ P. -H -H h CQ Φ Φ d -rl 0 d
SH -H Xl 4-1 Φ d CD SH Φ r-l -H Φ CQ d 0 Φ Xi d -rl CD Xl Φ d φ ΦSH -H Xl 4-1 Φ d CD SH Φ r-l -H Φ CQ d 0 Φ Xi d -rl CD Xl Φ d φ Φ
X 4-1 SH φ u X! CD rö P Φ Xl Φ P EH d φ SH Φ rl Φ SH d ü 03 -. -rl CDX 4-1 SH φ u X! CD rö P Φ Xl Φ P EH d φ SH Φ rl Φ SH d ü 03 -. -rl CD
-rl Φ Φ SH CQ ü Φ ε N UH rl J XI -H CD TJ CD Φ TJ Φ 4-1 -H -H =rö d Φ TJ d-rl Φ Φ SH CQ ü Φ ε N UH rl J XI -H CD TJ CD Φ TJ Φ 4-1 -H -H = rö d Φ TJ d
S TJ TJ Φ -H -H - l rö d 4-1 rö -H d Φ H -H >1 4-> φ TJ Xi rH ε -H d -H d 0 PQ ε Φ rH -H -H d XI SH -U 0 -H H K X! -rl -rl J X, φ Φ -rl 03 rHS TJ TJ Φ -H -H - l rö d 4-1 rö -H d Φ H -H> 1 4-> φ TJ Xi rH ε -H d -H d 0 PQ ε Φ rH -H -H d XI SH -U 0 -HHKX! -rl -rl J X, φ Φ -rl 03 rH
TJ -rl Φ rH P Φ Φ TJ Φ rö > TJ Φ ü φ B d -H Φ CD CQ Φ rö « d UH d d X! d d TJ & -H d Φ SH £ 0 Xi 4-1 CQ TJTJ -rl Φ rH P Φ Φ TJ Φ rö> TJ Φ ü φ B d -H Φ CD CQ Φ rö «d UH d d X! d d TJ & -H d Φ SH £ 0 Xi 4-1 CQ TJ
P Φ φ ü TJ Φ ε TJ CQ Φ ε d 4-1 TJ Φ -rl P Φ -H ü φ X! CD 4-3 Φ H in φ d XI d CD Φ d 0 £ TJ 0 Φ X! xi TJ P 0 > 4-> CQ TJ =0 d SH Xi 0 φ i CD 0 u SH P d TJ P r-H rt d X 4-1 ü 4-1 ü CQ rö 4-1 Xi P Φ ü CQ TJP Φ φ ü TJ Φ ε TJ CQ Φ ε d 4-1 TJ Φ -rl P Φ -H ü φ X! CD 4-3 Φ H in φ d XI d CD Φ d 0 £ TJ 0 Φ X! xi TJ P 0> 4-> CQ TJ = 0 d SH Xi 0 φ i CD 0 u SH P d TJ P r-H rt d X 4-1 ü 4-1 ü CQ rö 4-1 Xi P Φ ü CQ TJ
-H d -rl CQ Φ P SH 4-> φ P o UH -H i CQ φ rl d d SH TJ -H =(Ö d -rl 4-1 -H TJ φ 4-> UH CD CQ > SH -H rö <-{ ü -H CQ Φ d Φ CD rö o Φ d rH .. d-H d -rl CQ Φ P SH 4-> φ P o UH -H i CQ φ rl dd SH TJ -H = (Ö d -rl 4-1 -H TJ φ 4-> UH CD CQ> SH -H rö <- {ü -H CQ Φ d Φ CD rö o Φ d rH .. d
XI rH rö CD SH CQ P SH Φ SH CD XI xl CD -rl ε -rl Xi d TJ φ ε -H -rl UH 4-1 -H υ ^ rl SH TJ Φ P rö Φ Φ UH CJ =9 Xi φ Φ J rö O 4-1 rö Φ UH CQ rl CQXI rH rö CD SH CQ P SH Φ SH CD XI xl CD -rl ε -rl Xi d TJ φ ε -H -rl UH 4-1 -H υ ^ rl SH TJ Φ P rö Φ Φ UH CJ = 9 Xi φ Φ J rö O 4-1 rö Φ UH CQ rl CQ
Φ φ P d XI SH 4-1 TJ P~ CD CQ ε ü xi =rö X d -H φ d SH CQ Φ -H dΦ φ P d XI SH 4-1 TJ P ~ CD CQ ε ü xi = rö X d -H φ d SH CQ Φ -H d
4-> Φ Pl SH P ü X X d TJ φ rö -H d CQ ü CQ rH 4-> H P 4-1 -H Φ rö XI Φ Φ4-> Φ Pl SH P ü X X d TJ φ rö -H d CQ ü CQ rH 4-> H P 4-1 -H Φ rö XI Φ Φ
0 • 03 o -H SH -rl SH -H d -rl TJ Φ Φ 4-1 r-\ UH Φ SH d Φ Pl O 5 D rl d =rö d xl CD CQ Φ rl P £ TJ d CD d SH Φ SH xi Φ SH φ Φ SH UH d0 • 03 o -H SH -rl SH -H d -rl TJ Φ Φ 4-1 r- \ UH Φ SH d Φ Pl O 5 D rl d = rö d xl CD CQ Φ rl P £ TJ d CD d SH Φ SH xi Φ SH φ Φ SH UH d
X d ε φ ü UH > 4-1 ε d =rö -H Φ rö Φ -H φ o -H Φ TJX d ε φ ü UH> 4-1 ε d = rö -H Φ rö Φ -H φ o -H Φ TJ
-H rö Φ CD 1 P φ rö Φ 4-1 SH -rl 4-1 Φ ε xi Φ Xi rl P P-H rö Φ CD 1 P φ rö Φ 4-1 SH -rl 4-1 Φ ε xi Φ Xi rl P P
CD ε TJ Pl X) =rö N X! d Φ υ J υ φ rö 4-3CD ε TJ Pl X) = rö N X! d Φ υ J υ φ ro 4-3
£ X CD P 0 rö d • S TJ Xi Φ CQ CQ 4-1 d rö 0 CQ O rH P J Φ r-\ -H CQ d -H£ X CD P 0 rö d • S TJ Xi Φ CQ CQ 4-1 d rö 0 CQ O rH P J Φ r- \ -H CQ d -H
CQ < rl -H Xl CJ Xi r-l rl -H -H "^^ -rl UH TJ CQ SH Φ CQ Φ -H -H 4J ΦCQ <rl -H Xl CJ Xi r-l rl -H -H "^^ -rl UH TJ CQ SH Φ CQ Φ -H -H 4J Φ
SH d CD ^ 4-1 φ ü CQ 4-3 -H rö d rH φ rH P TJ φ SH SH Φ -H Φ CQ XI SH φ xi r-HSH d CD ^ 4-1 φ ü CQ 4-3 -H rö d rH φ rH P TJ φ SH SH Φ -H Φ CQ XI SH φ xi r-H
Φ φ d -H -H CQ -rl rH -H Φ TJ φ 0 d « I d XI Φ Φ SH Xi -H d 4-1 υ 4-1 CQ o PΦ φ d -H -H CQ -rl rH -H Φ TJ φ 0 d «I d XI Φ Φ SH Xi -H d 4-1 υ 4-1 CQ o P
TJ TJ P Φ ε -rl 4-1 rH rö ε rH CD H d P TJ XI 4-1 rH 0 XI =rö X -rl tsqTJ TJ P Φ ε -rl 4-1 rH rö ε rH CD H d P TJ XI 4-1 rH 0 XI = rö X -rl tsq
SH TJ X! d CD 4-1 d rl Φ φ O Φ -H 0 -H -H r-\ Φ UH Xi d Φ d ε φ rö =0 XI d 4-1 CQ -rl x! SH Φ xl d -H X) rH CQ 4-1 CD UH r-H P CJ φSH TJ X! d CD 4-1 d rl Φ φ O Φ -H 0 -H -H r- \ Φ UH Xi d Φ d ε φ rö = 0 XI d 4-1 CQ -rl x! SH Φ xl d -H X) rH CQ 4-1 CD UH r-H P CJ φ
Φ £ -H Φ -H SH ε ε O Φ -H -H rH u Φ TJ ü Φ £ 4-1 rl Φ 0 -H -y SH SH Φ rö CQ -HΦ £ -H Φ -H SH ε ε O Φ -H -H rH u Φ TJ ü Φ £ 4-1 rl Φ 0 -H -y SH SH Φ rö CQ -H
SH UH 4-1 Φ <rj -H CD Φ i4 P TJ =rö xi =rö Φ <: d d Φ φ 4-1 TJSH UH 4-1 Φ <rj -H CD Φ i4 P TJ = rö xi = rö Φ < : dd Φ φ 4-1 TJ
Xl 4-1 rl 4-1 Φ TJ -H Φ rH d N Φ rö φ rH υ Φ 4-1 TJ Φ 0 Φ P SH XI d SH d rö r-H φ Φ CD d P CD xi P SH CD d d X! UH CQ xi -H CD ε -H H Xi Φ O -H Φ rö φXl 4-1 rl 4-1 Φ TJ -H Φ rH d N Φ rö φ rH υ Φ 4-1 TJ Φ 0 Φ P SH XI d SH d rö r-H φ Φ CD d P CD xi P SH CD d d X! UH CQ xi -H CD ε -H H Xi Φ O -H Φ rö φ
UH rH N d 0 d ü TJ Φ d Φ 4-1 Φ u SH -H ü r-H CD TJ U TJ Xl Pl -HUH rH N d 0 d ü TJ Φ d Φ 4-1 Φ u SH -H ü r-H CD TJ U TJ Xl Pl -H
00 SH Φ φ d -rl CQ d -H =rö d TJ -H 03 -rl X) =rö Φ rH :fÖ -rl d d -rt SH SH d Φ SH SH ε rö00 SH Φ φ d -rl CQ d -H = rö d TJ -H 03 -rl X) = rö Φ rH: fÖ -rl d d -rt SH SH d Φ SH SH ε rö
< Φ 4-1 -rl rö rH φ o rH ^ -H Φ rH =rö φ φ r-H XI rö r-H Xl P 0 Φ d Φ P Φ -H Φ =0 -H O<Φ 4-1 -rl rö rH φ o rH ^ -H Φ rH = rö φ φ r-H XI rö r-H Xl P 0 Φ d Φ P Φ -H Φ = 0 -H O
> CQ P hH- J X! > X. UH Q -|—ι Ϊ4 ε ^ £ UH O X UH Pl SH > PQ -H TJ TJ £ P 4-1 X P CQ> CQ P hH- J X! > X. UH Q - | —ι Ϊ4 ε ^ £ UH O X UH Pl SH> PQ -H TJ TJ £ P 4-1 X P CQ
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© SH SH -rl Φ -rl 4-1 1 =P d X! fr d u H d ε ^-^ Λi φ X! TJ -H rö & Φ© SH SH -rl Φ -rl 4-1 1 = P d X! for you H d ε ^ - ^ Λi φ X! TJ -H rö & Φ
0- Φ X! CD r-l φ φ X! d UH d UH CQ -rl CQ -H -H P φ Ui CD Φ 4-1 0 d Φ d ω TJ J SH Ui d Xi ε i Φ -H P Φ rH φ d Φ rH rH d d -H 4-3 SH xi Φ -H d Φ 4-10- Φ X! CD r-l φ φ X! d UH d UH CQ -rl CQ -H -HP φ Ui CD Φ 4-1 0 d Φ d ω TJ J SH Ui d Xi ε i Φ -HP Φ rH φ d Φ rH rH dd -H 4-3 SH xi Φ -H d Φ 4-1
H CQ Φ -H CJ 0 CQ rö TJ . Φ -rl i Ui 4-1 Φ SH -H P Xl rl Φ Sä 4-3 Φ Φ EH UH U d -H > φ -H £ CQ Xi 4-1 4J J d rl Φ rH =rö φ Sä ε rl -H rH PH CQ Φ -H CJ 0 CQ rö TJ. Φ -rl i Ui 4-1 Φ SH -HP Xl rl Φ Sä 4-3 Φ Φ EH UH U d -H> φ -H £ CQ Xi 4-1 4J J d rl Φ rH = rö φ Sä ε rl - H rH P
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und außerdem eine Wärmezufuhr zur Klingenoberfläche auch bei sehr hohen Heizleistungen sowie eine geringe Aufheizzeit (bis zu < ls/100 °C) gesichert ist. Die Aufheizphase, beispielsweise die Aufheizzeit und der Verlauf der Aufheizung der Klinge können bei der erfindungsgemäßen Klinge durch die Signalform des den Heizelementen zugeführten Heizstromes geregelt werden. Denn aufgrund der hohen Wärmeleitfähigkeit und geringen Wärmekapazität der Klinge folgt die Tempera- tur der Klinge rasch und mit geringer Verzögerung dem Signalverlauf des Heizstromes.and also a heat supply to the blade surface is ensured even with very high heating outputs and a short heating-up time (up to <ls / 100 ° C). The heating phase, for example the heating time and the course of the heating of the blade can be regulated in the blade according to the invention by the signal shape of the heating current supplied to the heating elements. Because of the high thermal conductivity and low heat capacity of the blade, the temperature of the blade follows the signal curve of the heating current quickly and with little delay.
Vorteilhaft ist weiterhin, daß der thermische Ausdehnungskoeffizient von Diamant mit αDi = 0,8 - 1,0 x 10"6 l/K recht niedrig ist. Insbesondere haben leitende, beispielsweise Bor-dotierte, und isolierende Diamantschichten ähnliche thermische Ausdehnungskoeffizienten, so daß keine Verspannungen oder Beschädigungen bei einer Temperaturänderung der Klinge auftreten.It is also advantageous that the thermal expansion coefficient of diamond with α D i = 0.8 - 1.0 x 10 "6 l / K is quite low. In particular, conductive, for example boron-doped, and insulating diamond layers have similar thermal expansion coefficients, see above that no tension or damage occurs when the temperature of the blade changes.
Silizium, wie es im Stand der Technik für den Klingenkörper verwendet wird, hat demgegenüber für leitende Siliziumschichten einen Ausdehnungskoeffizien- ten von 2,56 x 10"6 l/K und für isolierende Siliziumschichten im Falle von Siliziumdioxid von 0,4 x 10"6 l/K oder im Falle von Siliziumnitrid von 0,8 x 10 l/K. Bei Verwendung der Siliziumtechnologie treten daher bei Temperaturwechseln in der Klinge Verspan- nungen auf, so daß Beschädigungen in einer entsprechenden Klinge wie nach dem Stand der Technik zu erwarten sind.In contrast, silicon, as used in the prior art for the blade body, has an expansion coefficient of 2.56 x 10 "6 l / K for conductive silicon layers and 0.4 x 10 " 6 for insulating silicon layers in the case of silicon dioxide l / K or, in the case of silicon nitride, 0.8 x 10 l / K. When using silicon technology, tension changes occur in the blade during temperature changes, so that damage occurs in a corresponding blade as in the prior art are expected.
Ein weiterer Vorteil der erfindungsgemäßen Klinge ist, daß Diamant als härtestes Material bekannt ist. Die erfindungsgemäßen Klingen behalten daher über längeren Gebrauch ihre Schärfe bei. Insbesondere treten aufgrund der hohen Stabilität der Schneide auch geringere Schäden, z.B. bei Funkenschlag, auf. Auch das Elastizitätsmodul von Diamant ist das höchste al- 1er bekannten Materialien. Trotz dieser Eigenschaften ist Diamant verhältnismäßig elastisch mit einer hohen Bruchspannung von 10,5 GPa bei einkristallinem und 4,8 GPa bei polykristallinem Diamant.Another advantage of the blade according to the invention is that diamond is known as the hardest material. The blades according to the invention therefore retain prolonged use. In particular, due to the high stability of the cutting edge, less damage occurs, for example in the event of a spark. The elastic modulus of diamond is also the highest of all known materials. Despite these properties, diamond is relatively elastic with a high breaking stress of 10.5 GPa for single-crystal and 4.8 GPa for polycrystalline diamond.
Wird das elektrische Funktionselement aus sehr hochdotiertem Diamant hergestellt, so weist es keine Temperaturabhängigkeit seines Widerstandes auf. Es eignet sich dann zur Herstellung von Widerstand- Heizelementen, Zuleitungen, Elektroden, beispielswei- se elektrische, chemische oder physiologische Elektroden, oder auch für mono- oder bipolare Koagulationselektroden.If the electrical functional element is made from very heavily doped diamond, it has no temperature dependence of its resistance. It is then suitable for the production of resistance heating elements, supply lines, electrodes, for example electrical, chemical or physiological electrodes, or also for mono- or bipolar coagulation electrodes.
Bei mittelstarker Dotierung können Heizelement/Tempe- ratursensor-Kombinationen hergestellt werden.With medium doping, heating element / temperature sensor combinations can be produced.
Schwache Dotierungen eignen sich für Temperatursensoren.Weak doping is suitable for temperature sensors.
Bei verschieden starker Dotierung bzw. unterschiedlichen Dotierungsmaterialien in verschiedenen Bereichen können auch Hall-Sensoren zur Magnetfeldmessung, z.B. zur Ortung mittels Kernspinresonanztomographie ( MR) oder Röntgen-Computertomographie (CT) , chemo-sensi- tive Bauelemente (Ionen-sensititve Feldeffekttransistoren (FET) , pH-Wert-abhängige Widerstände) , piezo- resistive Sensoren (Druck, Kraft, Beschleunigung) , Strahlungssensoren (UV, Röntgen, Gammastrahlung) oder Flußsensoren hergestellt werden. d φ 1 1 l xi 1 1 I ΦWith different levels of doping or different doping materials in different areas, Hall sensors can also be used for magnetic field measurement, e.g. for location by means of nuclear magnetic resonance tomography (MR) or X-ray computed tomography (CT), chemo-sensitive components (ion-sensitive field effect transistors (FET), pH-dependent resistors), piezo-resistive sensors (pressure, force, acceleration), radiation sensors (UV, X-ray, gamma radiation) or flow sensors. d φ 1 1 l xi 1 1 I Φ
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CQ ε Φ Φ Φ d rö rö -H d rö u SH i ! =rö CQ -H Φ & SH X £ -H d Φ rt! Ui rH Φ d ε Φ Sä SH CD P ü d -H 0 rl 0 P rH d CD X SH Φ Φ P d ΦCQ ε Φ Φ Φ d rö rö -H d rö u SH i! = rö CQ -H Φ & SH X £ -H there! Ui rH Φ d ε Φ Sä SH CD P u d -H 0 rl 0 P rH d CD X SH Φ Φ P d Φ
0 -H 4-3 Φ =P d d φ SH CD 4-1 4J d UH Φ d CD Φ ε0 -H 4-3 Φ = P d d φ SH CD 4-1 4J d UH Φ d CD Φ ε
X » Φ SH -H rlX »Φ SH -H rl
4-1 4J d d d Φ d 03 rö CQ rö Φ rl CQ =rö -H > O d -rl CD φ P φ r ε in4-1 4J d d d Φ d 03 rö CQ rö Φ rl CQ = rö -H> O d -rl CD φ P φ r ε in
-rl SH l =rö-rl SH l = rö
4-1 -H Φ r-H -H d Φ rö CD φ :(Ö > 4-1 φ φ SH rl Φ SH xi CD Φ TJ SH UH ISI TJ =rö SS4-1 -H Φ r-H -H d Φ rö CD φ: (Ö> 4-1 φ φ SH rl Φ SH xi CD Φ TJ SH UH ISI TJ = rö SS
X Φ -H rH Φ rö CD Pl d xl ε -H CD CD Φ rö X P XI d CD SH 4-> Φ P 4-1 SS d XI ε Φ r-l TJ CQ -H u Φ TJ Φ -H d & X! O 4-1 rö =rö d Φ r-l ε TJ rö -H φ φ ΦX Φ -H rH Φ rö CD Pl d xl ε -H CD CD Φ rö XP XI d CD SH 4-> Φ P 4-1 SS d XI ε Φ rl TJ CQ -H u Φ TJ Φ -H d & X ! O 4-1 rö = rö d Φ r-l ε TJ rö -H φ φ Φ
P 0 -rl 4-1 N Φ CQ rH -H CD d X d -H ε ISI d d rö rl xi P TJ rö Φ Φ CQ xi d CD fr Sä 4-1 CQ -H d CQ CD « -l CQ P CD Φ φ Φ -rl Φ Φ rl P XI CQ Xi TJ CD -H X Φ υ Φ dP 0 -rl 4-1 N Φ CQ rH -H CD d X d -H ε ISI dd rö rl xi P TJ rö Φ Q CQ xi d CD fr Sä 4-1 CQ -H d CQ CD «-l CQ P CD Φ φ Φ -rl Φ Φ rl P XI CQ Xi TJ CD -HX Φ υ Φ d
Pl Φ Φ d •rl d rl CD -H £ EH φ TJ CD Φ 4-1 rö CQ in d d φ -H =rö ! -H d - 0 CD tu rö Φ P φ Φ d 4-1 CD φ X! rl d Q< rö rl Φ P P -H P Xl rö TJ r-l O SHPl Φ Φ d • rl d rl CD -H £ EH φ TJ CD Φ 4-1 rö CQ in d d φ -H = rö! -H d - 0 CD tu rö Φ P φ Φ d 4-1 CD φ X! rl d Q <rö rl Φ P P -H P Xl rö TJ r-l O SH
Φ d SH X Sä CD -rl TJ P d d ε X Φ Φ φ -rl B rl P ε 4-1 ISI SH rö X! UH xi Φ xl -H 4-3 Φ SH CQ rl TJ rl TJ rö =rö P φ -H XI Sä r-l φ φ 4 SH rö -. Φ TJ 4-1 d SH CD υ Φ -rl Xl Φ CD r-l 0 0 d 4-3 Xl Sä P Ui EH ε TJ d Φ CQ ε UH & rö P rl 4-1 d P CQ SH Φ dΦ d SH X Sä CD -rl TJ P d d ε X Φ Φ φ -rl B rl P ε 4-1 ISI SH rö X! UH xi Φ xl -H 4-3 Φ SH CQ rl TJ rl TJ rö = rö P φ -H XI Sä r-l φ φ 4 SH rö -. Φ TJ 4-1 d SH CD υ Φ -rl Xl Φ CD r-l 0 0 d 4-3 Xl Sä P Ui EH ε TJ d Φ CQ ε UH & rö P rl 4-1 d P CQ SH Φ d
CQ CQ -rl CQ ä rl φ d 4-3 ε SH 4-3 φ d Φ Φ d rö Φ X) Φ ΦCQ CQ -rl CQ ä rl φ d 4-3 ε SH 4-3 φ d Φ Φ d rö Φ X) Φ Φ
-H 4-1 P -H SH 3 rl UH d P CD Φ -l rl rl φ Φ rö Pl rö TJ 4-> d r-l UH O d d-H 4-1 P -H SH 3 rl UH d P CD Φ -l rl rl φ Φ rö Pl rö TJ 4-> d r-l UH O d d
SH 4-1 rl 4-> TJ d Pl Φ φ rl 0 d TJ 03 Φ Φ φ 4-1 & ε 4-1 rl CΛ rö Φ 0 -H -rlSH 4-1 rl 4-> TJ d Pl Φ φ rl 0 d TJ 03 Φ Φ φ 4-1 & ε 4-1 rl CΛ rö Φ 0 -H -rl
4-1 rl φ -H d d CQ > - Φ X d d SH =rö CD TJ d ε Φ φ CQ φ X X! Q SH Φ φ4-1 rl φ -H d d CQ> - Φ X d d SH = rö CD TJ d ε Φ φ CQ φ X X! Q SH Φ φ
X Xl 4-3 d rö rö -H > d -H Xl -rl - l φ 4-3 Φ P. EH d ä SH r- ΦX Xl 4-3 d rö rö -H> d -H Xl -rl - l φ 4-3 Φ P. EH d ä SH r- Φ
Φ =P -rl ε ΦΦ = P -rl ε Φ
X! 4 Pl Φ d 0 rl 4-3 0 Et Φ in UH X -H EH ε 0 P Q rö TJ 4J rl rH UH Φ O CQ CQ X! φ 00 -rl Φ UH Φ -H φ CD Φ P rö £ Φ Φ X 4-3 N H -H d d PX! 4 Pl Φ d 0 rl 4-3 0 Et Φ in UH X -H EH ε 0 P Q rö TJ 4J rl rH UH Φ O CQ CQ X! φ 00 -rl Φ UH Φ -H φ CD Φ P rö £ Φ Φ X 4-3 N H -H d d P
Φ Φ r-l CQ SH CQ CD rH 4-3 TJ P CD r-l N 4J CQ CD rö rl φ H -H r-l rt Φ SH rö dΦ Φ r-l CQ SH CQ CD rH 4-3 TJ P CD r-l N 4J CQ CD rö rl φ H -H r-l rt Φ SH rö d
CD N SH Φ CD -. d rö J d ε 4-1 SH CD xi CD 4-1 CQ TJ TJ Φ CQ • φ TJ P εCD N SH Φ CD -. d rö J d ε 4-1 SH CD xi CD 4-1 CQ TJ TJ Φ CQ • φ TJ P ε
00 CQ CQ -H Φ TJ d d -H TJ r-l -H -H 2 -H Xi d ü d rl d φ SH d CD d 4-1 4-1 rö TJ00 CQ CQ -H Φ TJ d d -H TJ r-l -H -H 2 -H Xi d ü d rl d φ SH d CD d 4-1 4-1 rö TJ
< -H<-H
SO rö P Φ P -H P φ r-l d P φ d rH =rö Pl =P P rö -H φ rö P rö φ rö -H d rö ö X! rl CΛ H τJ ε Φ Φ 0 ΦSO rö P Φ P -H P φ r-l d P φ d rH = rö Pl = P P rö -H φ rö P rö φ rö -H d rö ö X! rl CΛ H τJ ε Φ Φ 0 Φ
P K σ & CD TJ Ui 3 CD PQ r d H > ε P ISI 13 xi SH CQ TJ £ Sä SH P PP K σ & CD TJ Ui 3 CD PQ r d H> ε P ISI 13 xi SH CQ TJ £ Sä SH P P
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Figure imgf000011_0001
I 1 | CQ D 1 d CQI 1 | CQ D 1 d CQ
1 1 03 d -rl r- 1 CD 4-1 r-l d φ CQ -H . Φ 11 1 03 d -rl r- 1 CD 4-1 r-l d φ CQ -H. Φ 1
00 d rl rö d -H UH Φ I -rl d rl rl d rö P £ -H r-l00 d rl rö d -H UH Φ I -rl d rl rl d rö P £ -H r-l
© φ φ d d 1© φ φ d d 1
Φ Φ TJ φ -l 4-1 φ 4-> + UH P φ Φ φ Φ CD -rl P Φ TJ CQ Φ 1 -rt Φ φΦ Φ TJ φ -l 4-1 φ 4-> + UH P φ Φ φ Φ CD -rl P Φ TJ CQ Φ 1 -rt Φ φ
© CD £ TJ Ui CQ TJ CQ | Pl -rl SH d TJ ε d d SH -rl rl SH H Φ -H >© CD £ TJ Ui CQ TJ CQ | Pl -rl SH d TJ ε dd SH -rl rl SH H Φ -H>
0- d *. SH -H CQ 1 ISI Φ -H 0 φ φ -H 0 Xi • Ά UH 4-3 Φ φ Φ Φ r-l ω -H 4-3 P Φ rl φ d P. X! φ -rl Φ ^, r-l CD Φ CQ ü d CQ UH Φ CD TJ -H TJ CD 0 -H0- d * . SH -H CQ 1 ISI Φ -H 0 φ φ -H 0 Xi • Ά UH 4-3 Φ φ Φ Φ rl ω -H 4-3 P Φ rl φ d P. X! φ -rl Φ ^, rl CD Φ CQ ü d CQ UH Φ CD TJ -H TJ CD 0 -H
H rH SH N Sä Φ CQ d o ü Pl 4-3 TJ Φ d SH SH Φ -H -H d dH rH SH N Sä Φ CQ d o ü Pl 4-3 TJ Φ d SH SH Φ -H -H d d
X! Xi rö TJ rH -H -H Φ -H CQ o Φ d N P d φ P CD Φ rl TJ -H CQ - ε H d CQ φ rl U P H XX! Xi rö TJ rH -H -H Φ -H CQ o Φ d N P d φ P CD Φ rl TJ -H CQ - ε H d CQ φ rl U P H X
0- =P TJ 4-1 r-l Φ 4-1 rl CQ P r-l P -H rl 0 > TJ r X CD rl r-l P d TJ d UH r-l d rö rö φ ε r-l Φ φ > CQ 0 0 Ui rö -H Φ d Φ CQ φ Φ 4-1 Φ Φ UH 0 r-l TJ 4-1 Φ φ rö rl M -rl CD SH UH 4-1 ε Φ ε X Φ Xi φ0- = P TJ 4-1 rl Φ 4-1 rl CQ P rl P -H rl 0> TJ r X CD rl rl P d TJ d UH rl d rö rö φ ε rl Φ φ> CQ 0 0 Ui rö - H Φ d Φ CQ φ Φ 4-1 Φ Φ UH 0 rl TJ 4-1 Φ φ rö rl M -rl CD SH UH 4-1 ε Φ ε X Φ Xi φ
TJ CD rl CD N d CQ P d Φ d -rl fr o CQ CD d Φ rl CD φ CD rl Φ rö Sä U -HTJ CD rl CD N d CQ P d Φ d -rl fr o CQ CD d Φ rl CD φ CD rl Φ rö Sä U -H
Xl Xi φ -rl Φ rH CD 0 d -H P XI CQ -H d P TJ φ r-l TJ d φ 4-1 P TJ CQ TJXl Xi φ -rl Φ rH CD 0 d -H P XI CQ -H d P TJ φ r-l TJ d φ 4-1 P TJ CQ TJ
SH J =P SH φ d rö rö CQ 00 Φ ε Pl rö r- P d 0 0 rö TJ CQ N Φ -rlSH J = P SH φ d rö rö CQ 00 Φ ε Pl rö r- P d 0 0 rö TJ CQ N Φ -rl
=P SH UH Φ X! Φ 0 Φ -H ε -rl CQ TJ r-l d d d UH d P Xl > ε Xl= P SH UH Φ X! Φ 0 Φ -H ε -rl CQ TJ r-l d d d UH d P Xl> ε Xl
UH P CD UH X! d x! X Φ 4-1 0 rö d rö r- Φ rl -H 4-3 d rH • ü SH uUH P CD UH X! d x! X Φ 4-1 0 rö d rö r- Φ rl -H 4-3 d rH • ü SH u
TJ d P φ d CQ -rl o -. xi xi 4-1 rö P. Φ -rl Φ CQ 0 rl Sä -H rl Φ -HTJ d P φ d CQ -rl o -. xi xi 4-1 rö P. Φ -rl Φ CQ 0 rl Sä -H rl Φ -H
4-1 φ SH CD rö d d Φ ε α ε PLl u Φ Pl CΛ X rl Φ X! > Φ ISI CQ Φ X! CQ d d 4-1 Φ Φ A4 Φ -H 4J £ P P £ CΛ rö φ CD -H r-l > X TJ 4-1 rö φ r-l r-H CQ CD CD d Φ -H - rö Φ Ui 4-3 d TJ Φ -H Φ d TJ ε CD rö r-l Φ 0 -rl • Xi Φ CQ 00 Xi SH SH -rl 4-3 P CQ Φ ε d φ -H Φ d rö d XI Φ Xi CΛ r-l d ü ε - l » 4-1 UH Q φ Φ P rö CQ - X rl φ d Φ 4-1 Φ4-1 φ SH CD rö dd Φ ε α ε PL l u Φ Pl CΛ X rl Φ X! > Φ ISI CQ Φ X! CQ dd 4-1 Φ Φ A4 Φ -H 4J £ PP £ CΛ rö φ CD -H rl> X TJ 4-1 rö φ rl rH CQ CD CD d Φ -H - rö Φ Ui 4-3 d TJ Φ - H Φ d TJ ε CD rö rl Φ 0 -rl • Xi Φ CQ 00 Xi SH SH -rl 4-3 P CQ Φ ε d φ -H Φ d rö d XI Φ Xi CΛ rl d ü ε - l »4- 1 UH Q φ Φ P rö CQ - X rl φ d Φ 4-1 Φ
-H P rl d ü 4-1 -H Φ -rl Φ Φ U3 -rl UH r-l TJ Xi Φ PQ -H CD Φ rö =rö TJ D XI SH-H P rl d ü 4-1 -H Φ -rl Φ Φ U3 -rl UH r-l TJ Xi Φ PQ -H CD Φ rö = rö TJ D XI SH
P SH φ Xi CQ CQ • Φ TJ CQ rH ä l- 0 rö o J • X) Φ d CD TJ SS -H -H φ Xi o Φ > ü rö -rl Xi Sä SH Φ CQ rö 4-1 ^^ CQ 4-1 =P φ Pl P d Φ Φ -H TJ =röP SH φ Xi CQ CQ • Φ TJ CQ rH ä l- 0 rö o J • X) Φ d CD TJ SS -H -H φ Xi o Φ> ü rö -rl Xi Sä SH Φ CQ rö 4-1 ^^ CQ 4-1 = P φ Pl P d Φ Φ -H TJ = rö
H d CD xi CQ rl ü Φ Φ 4-1 N rH Sä rl CQ SH TJ -H CD 4-3 CQ 4-> -H φ ε ε Φ d SäH d CD xi CQ rl ü Φ Φ 4-1 N rH Sä rl CQ SH TJ -H CD 4-3 CQ 4-> -H φ ε ε Φ d Sä
0 =0 CJ X! -H -n ä Φ -H Φ 4 φ A4 0 d SH SH d rl d rH r- 4-1 P rl UH X) O0 = 0 CJ X! -H -n ä Φ -H Φ 4 φ A4 0 d SH SH d rl d rH r- 4-1 P rl UH X) O
> N Φ Φ d ü r-H d Φ -rl Φ TJ ü Q P 4 0 rl φ -H rö x! r-l φ UH 0 CQ> N Φ Φ d ü r-H d Φ -rl Φ TJ ü Q P 4 0 rl φ -H rö x! r-l φ UH 0 CQ
SH rl CD -rl -H CD rl 4-1 CD m P. O -rH d A4 CQ φ -H Φ X! r-l -, > -H E§ φ 03SH rl CD -rl -H CD rl 4-1 CD m P. O -rH d A4 CQ φ -H Φ X! r-l -,> -H E§ φ 03
CD Φ Pl d φ r-l =o Φ r-H -rl CQ rl ^^ 4-3 Φ d Φ SH 4-1 rl CQ ü rl o d rl CD P d > CQ -H CD ε TJ r-l φ CQ -rl φ TJ CΛ CQ φ r- Φ X CD CD CQ Φ CQ -rl P CD -. εCD Φ Pl d φ rl = o Φ rH -rl CQ rl ^^ 4-3 Φ d Φ SH 4-1 rl CQ ü rl or rl CD P d> CQ -H CD ε TJ rl φ CQ -rl φ TJ CΛ CQ φ r- Φ X CD CD CQ Φ CQ -rl P CD -. ε
P d r-l φ =0 Φ r-l φ 03 d SH CD Φ > φ φ d rH TJ φ N UH φP d r-l φ = 0 Φ r-l φ 03 d SH CD Φ> φ φ d rH TJ φ N UH φ
TJ d Ui rt ε X! d 4-1 rl X! =0 P 4-1 P d 4-3 P Φ Φ CQ d UH d d d Φ φ Φ rö CQ 0 rl -rl 4-1 P 4-1 CD φ d 4-1 CD d CD UH Φ 0 -H -HTJ d Ui rt ε X! d 4-1 rl X! = 0 P 4-1 P d 4-3 P Φ Φ CQ d UH d d d Φ φ Φ rö CQ 0 rl -rl 4-1 P 4-1 CD φ d 4-1 CD d CD UH Φ 0 -H -H
Φ r-l φ rl TJ d -H Φ CQ • «. CD SH B • rö 4-1 -H d CQ -rl CQ Φ -H d 4-1 UH TJ 4-1 Φ ΦΦ r-l φ rl TJ d -H Φ CQ • «. CD SH B • rö 4-1 -H d CQ -rl CQ Φ -H d 4-1 UH TJ 4-1 Φ Φ
S rö xi φ d Φ SH rl CD d 4 4-1 0 d SH -H ε P -rl -H r! -rl rl -H CQ CQS rö xi φ d Φ SH rl CD d 4 4-1 0 d SH -H ε P -rl -H r! -rl rl -H CQ CQ
SH ε u TJ 0 N 4-1 P d φ d d TJ PQ Xi Φ Φ Φ CD φ φ Φ Xi r- φ rl 4-1 CQSH ε u TJ 0 N 4-1 P d φ d d TJ PQ Xi Φ Φ Φ CD φ φ Φ Xi r- φ rl 4-1 CQ
Φ -rl CQ CQ 4-1 Φ 4-1 -H CQ rö rö d ü CD & rH Φ SH Sä CD j Φ J Ui -rl CD =P CQ Φ dΦ -rl CQ CQ 4-1 Φ 4-1 -H CQ rö rö d ü CD & rH Φ SH Sä CD j Φ J Ui -rl CD = P CQ Φ d
> d rö φ -rl X rö Φ SH ε ε rö 4-1 P r-l ε P 4-1 0 CQ d d P rH UH d UH Φ> d rö φ -rl X rö Φ SH ε ε rö 4-1 P r-l ε P 4-1 0 CQ d d P rH UH d UH Φ
-rl SH P XI Xi CQ SH P rö rö 4-1 -rl rö 0 Φ N d CQ -l --H rl -rl rö o d P UH xi-rl SH P XI Xi CQ SH P rö rö 4-1 -rl rö 0 Φ N d CQ -l --H rl -rl rö o d P UH xi
-H ε 4-1 CQ SH r-H Φ 4-1 4-1 -H -H CQ ε UH EH φ SH Φ rH φ Φ Φ CQ Φ rH x! -rl Φ-H ε 4-1 CQ SH r-H Φ 4-1 4-1 -H -H CQ ε UH EH φ SH Φ rH φ Φ Φ CQ Φ rH x! -rl Φ
Φ CQ rö d Φ P & rl rö P P rl CD SH SH ε Φ -rl x! TJ rl TJ -H TJ rö rl CQΦ CQ rö d Φ P & rl rö P P rl CD SH SH ε Φ -rl x! TJ rl TJ -H TJ rö rl CQ
X 4-3 φ rl -rl X! CL, ε φ SH φ -H d Φ SH Φ > Pl φ -H SH CD φX 4-3 φ rl -rl X! CL, ε φ SH φ -H d Φ SH Φ> Pl φ -H SH CD φ
-rl CQ φ =!=3 Φ Xi Φ SH SH TJ φ P Φ XI rH CQ CQ rl CD φ TJ UH Xl d rl φ r-l CD-rl CQ φ =! = 3 Φ Xi Φ SH SH TJ φ P Φ XI rH CQ CQ rl CD φ TJ UH Xl d rl φ r-l CD
CD ε φ & TJ d EH ü & φ Φ -rl X SH r-l TJ =P Φ CD -H Φ d XI o UH ü -H φ TJ Xl SH d -H ε d Φ -H -H ε 4-1 4-1 S rö Φ φ 4-1 d Φ TJ P =P -H CQ 4-1 0 rö 0CD ε φ & TJ d EH ü & φ Φ -rl X SH rl TJ = P Φ CD -H Φ d XI o UH ü -H φ TJ Xl SH d -H ε d Φ -H -H ε 4-1 4 -1 S rö Φ φ 4-1 d Φ TJ P = P -H CQ 4-1 0 rö 0
P P φ P d Φ Φ CQ Φ SH SH TJ -H UH r- d A4 P X rl φ rl -H Φ rö 4-1 > r-H φ EH i 4-1 Φ EH Φ Φ d 4-1 Φ X! Φ rö d UH φ φ CD CD ε CD 2 rH CQ φ P. d 0 Xl SH CD -H -H Φ d 0 Sä 0 TJ 4-1 d d UH P CQ d d SH d XI r-l CDPP φ P d Φ Φ CQ Φ SH SH TJ -H UH r- d A4 PX rl φ rl -H Φ rö 4-1> rH φ EH i 4-1 Φ EH Φ Φ d 4-1 Φ X! Φ rö d UH φ φ CD CD ε CD 2 rH CQ φ P. d 0 Xl SH CD -H -H Φ d 0 Sä 0 TJ 4-1 dd UH P CQ dd SH d XI rl CD
00 CD rt d Φ d J Φ Q 4-1 4-1 x! d P xi Sä SH d rö d -H φ - l -H d rl Φ -rl CQ rö φ d00 CD rt d Φ d J Φ Q 4-1 4-1 x! d P xi Sä SH d rö d -H φ - l -H d rl Φ -rl CQ rö φ d
< Φ =0 φ -H rö φ P -H Φ r- 0 0 o rö 1 υ 0 Φ q Pl rö SH 4-3 Φ rH fß Φ Xi r-l rH 4-1 TJ<Φ = 0 φ -H rö φ P -H Φ r- 0 0 o rö 1 υ 0 Φ q Pl rö SH 4-3 Φ rH fß Φ Xi r-l rH 4-1 TJ
SO PSO P
(Ü A4 TJ TJ A4 CD rö d r-l TJ TJ CQ A4 d CΛ CΛ ä x! CΛ A4 CD CΛ £ X! A4 P 4-1 Ui rt! CQ fr SH(Ü A4 TJ TJ A4 CD rö d r-l TJ TJ CQ A4 d CΛ CΛ ä x! CΛ A4 CD CΛ £ X! A4 P 4-1 Ui rt! CQ fr SH
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Figure imgf000012_0001
Figure imgf000012_0001
wendung geeigneter Kunststoffe erübrigt .use of suitable plastics is unnecessary.
Im folgenden werden einige Beispiele erfindungsgemä- ßer Klingen beschrieben werden.Some examples of blades according to the invention will be described below.
Es zeigen:Show it:
Figur 1 eine beheizbare Klinge mit monolithisch in- tegriertem Temperatursensor;1 shows a heatable blade with a monolithically integrated temperature sensor;
Figur 2 einen Querschnitt der beheizbaren Klinge aus Figur 1 längs der Linie A-A' ;Figure 2 shows a cross section of the heatable blade of Figure 1 along the line A-A ';
Figur 3 einen Querschnitt durch die beheizbareFigure 3 shows a cross section through the heatable
Klinge gemäß Figur 1 längs der Linien B-B1;Blade according to Figure 1 along the lines BB 1 ;
sowiesuch as
Figur 4 eine weitere beheizbare Klinge.Figure 4 shows another heatable blade.
Figur 1 zeigt eine beheizbare Klinge 1, mit einem Klingenkörper 8 aus Diamant, der eine gebogene Schneidkante 6 aufweist. Auf der Oberfläche des Klin- genkörpers 8 befinden sich Heizleiter 2 aus hochdotierten Diamantbereichen, beispielsweise dotiert mit Bor. Diese Heizleiter sind mit Metallisierungen 5 an einem Ende des Klingenkδrpers 8 verbunden, über die eine elektrische Spannung an die Heizleiter 2 ange- legt werden kann. Die Heizleiter 2 sparen dabei auf der Klingenoberfläche einen Bereich aus, in dem ein Temperatursensor 3 mit Zuleitungen 4 angeordnet ist. Auch die Zuleitungen 4 sind mit Metallisierungen 5 verbunden, um an diese eine elektrische Spannung an- zulegen. Der Temperatursensor 3 besteht dabei aus p~- dotiertem Diamant. Die jeweiligen Dotierungen können bereits während des Fertigungsprozesses in herkömmlicher Weise in den Klingenkörper 8 eingebracht werden. Es ist auch möglich, den Klingenkörper 8, beispielsweise durch CVD-Verfahren auf einem Substrat aufwach- sen zu lassen und während des Wachstumsprozesses bereits die Dotierung in den Diamant des Klingenkörpers miteinzubauen.Figure 1 shows a heatable blade 1, with a blade body 8 made of diamond, which has a curved cutting edge 6. There are heating conductors 2 made of highly doped diamond regions, for example doped with boron, on the surface of the blade body 8. These heating conductors are connected to metallizations 5 at one end of the blade body 8, via which an electrical voltage can be applied to the heating conductors 2. The heating conductors 2 save an area on the blade surface in which a temperature sensor 3 with supply lines 4 is arranged. The supply lines 4 are also connected to metallizations 5 in order to apply an electrical voltage to them. The temperature sensor 3 consists of p ~ -doped diamond. The respective endowments can can already be introduced into the blade body 8 in a conventional manner during the manufacturing process. It is also possible to have the blade body 8 grown on a substrate, for example by means of the CVD method, and to incorporate the doping into the diamond of the blade body during the growth process.
Figur 2 stellt einen Schnitt durch eine Klinge gemäß Figur 1 dar, wobei gleiche Bezugszeichen wie in Figur 1 entsprechende Elemente bezeichnen. Es ist zu erkennen, daß der Klingenkörper 8 eine isolierende Diamantschicht 11 aufweist, die auf einem Siliziumsubstrat 10 angeordnet ist. Auf der dem Siliziumsubstrat 10 abgewandten Seite der Diamantschicht 11 befindet sich eine weitere DiamantSchicht 12 des Klingenkörpers 8, als p+-dotierter Heizleiter 2. Diese Diamantschicht 12 bildet auch die Schneidkante 6 aus.FIG. 2 shows a section through a blade according to FIG. 1, the same reference numerals as in FIG. 1 designating corresponding elements. It can be seen that the blade body 8 has an insulating diamond layer 11 which is arranged on a silicon substrate 10. On the side of the diamond layer 11 facing away from the silicon substrate 10 there is a further diamond layer 12 of the blade body 8, as a p + -doped heating conductor 2. This diamond layer 12 also forms the cutting edge 6.
Längs des Querschnittes ist zu erkennen, daß etwa mittig in der Klinge ein Bereich der Diamantschicht 12 ausgespart ist, in der der Temperatursensor 3 angeordnet ist. Der Temperatursensor 3 besteht aus dotiertem Diamant, wobei die Temperaturabhängigkeit des Widerstandswertes über die Höhe der Dotierstoffkonzentration eingestellt werden kann. Auch der Temperatursensor 3 kann bereits während oder unmittelbar im Anschluß an die Herstellung der Diamantschichten 11 und 12 auf dem Substrat 10 durch Dotierung des auf- wachsenden Diamants erzeugt werden, wobei auch einAlong the cross section it can be seen that a region of the diamond layer 12 in which the temperature sensor 3 is arranged is recessed approximately in the center of the blade. The temperature sensor 3 consists of doped diamond, and the temperature dependence of the resistance value can be adjusted via the level of the dopant concentration. The temperature sensor 3 can also be produced during or immediately after the production of the diamond layers 11 and 12 on the substrate 10 by doping the growing diamond, with one also
Ätzprozeß vorgesehen sein kann, um den Temperatursensor 3 von den p+-dotierten Heizleitern 2 zu separieren.Etching process can be provided in order to separate the temperature sensor 3 from the p + -doped heating conductors 2.
Figur 3 zeigt einen weiteren Schnitt durch die Klinge gemäß Figur 1 längs der Linie B-B1. Wiederum sind ähnliche Elemente mit den gleichen Bezugszeichen bezeichnet, so daß ihre Beschreibung teilweise weggelassen wird. Es ist zu erkennen, daß im mittleren Bereich der Klinge nunmehr lediglich die Zuleitungen 4 für den Temperatursensor vorhanden sind. Auf der Diamantschicht 12 der p+-dotierten Heizleiter 2 ist im Bereich des Schnittes B-B' jeweils zu beiden Seiten der Zuleitungen 4 eine Metallisierung 5 vorgesehen, die in elektrischem Kontakt mit den p+-dotierten Heizleitern 2 steht.FIG. 3 shows a further section through the blade according to FIG. 1 along the line BB 1 . Are again Similar elements are denoted by the same reference numerals so that their description is partially omitted. It can be seen that only the supply lines 4 for the temperature sensor are now present in the central region of the blade. A metallization 5 is provided on the diamond layer 12 of the p + -doped heating conductors 2 in the area of the section BB 'on both sides of the feed lines 4, which is in electrical contact with the p + -doped heating conductors 2.
Über diese Metallisierungen 5 kann nunmehr eine Spannung an die p+-dotierten Bereiche der Heizleiter 2 angelegt werden, um die Klinge aufzuheizen.A voltage can now be applied to the p + -doped regions of the heating conductors 2 via these metallizations 5 in order to heat the blade.
Als weitere Variante einer erfindungsgemäßen beheizbaren Klinge, die hier jedoch nicht im Detail dargestellt ist, kann die Klinge gemäß den Figuren 1 bis 3 so ausgebildet werden, daß kein Silizium-Substrat 10 vorhanden ist. Alle weiteren Elemente der Klinge sind jedoch so, wie sie aus den Figuren 1 bis 3 hervorgehen.As a further variant of a heatable blade according to the invention, which is not shown here in detail, however, the blade according to FIGS. 1 to 3 can be designed such that no silicon substrate 10 is present. However, all other elements of the blade are as they appear from Figures 1 to 3.
Figur 4 zeigt ein weiteres Beispiel einer beheizbaren Klinge, wobei auch hier wiederum mit gleichen Bezugs- zeichen ähnliche Elemente bezeichnet sind und daher ihre Beschreibung zumindest teilweise weggelassen wird.FIG. 4 shows a further example of a heatable blade, similar elements again being identified here with the same reference symbols and their description therefore being at least partially omitted.
Bei der Klinge aus Figur 4 handelt es sich um eine Lanzette mit Schneidkanten 6, 6', die eine Spitze ausbilden. Die Fläche 7, die zwischen den Schneidkanten 6, 6' und der in Figur 4 gestrichelt eingezeichneten Linie ausgebildet ist, bildet dabei abgeschräg- te Schneidflächen. Auch bei der in Figur 4 dargestellten Lanzette ist ein Temperatursensor 3 mit Zuleitungen 4 vorgesehen, die über Metallisierungen 5 ' mit Spannung versorgt werden können. In Figur 4 sind die Heizleiter nicht weiter dargestellt, sie sind jedoch in gleicher Weise wie in Figur 1 streifenformig angeordnet. Diese Heizleiter werden über die den Metallisierungen 5 kontaktiert, wodurch sie mit Spannung versorgt werden können. Die übrigen Flächen können zur Kontaktierung weiterer Funktionselemente verwendet werden. The blade from FIG. 4 is a lancet with cutting edges 6, 6 'which form a tip. The surface 7, which is formed between the cutting edges 6, 6 'and the line drawn in dashed lines in FIG. 4, forms beveled cutting surfaces. In the lancet shown in FIG. 4, too, a temperature sensor 3 with supply lines 4 is provided, which can be supplied with voltage via metallizations 5 '. The heating conductors are not shown in FIG. 4, but are arranged in strips in the same way as in FIG. These heating conductors are contacted via the metallizations 5, as a result of which they can be supplied with voltage. The remaining areas can be used for contacting further functional elements.

Claims

Patentansprüche claims
1. Klinge mit einem Klingenkörper und mindestens einem elektrischen Funktionselement in oder auf dem Klingenkörper, dadurch gekennzeichnet, daß der Klingenkörper zumindest zum Teil aus Diamant besteht und als elektrisches Funktionselement elektrisch leitende Diamant-Bereiche aufweist.1. Blade with a blade body and at least one electrical functional element in or on the blade body, characterized in that the blade body consists at least partially of diamond and has electrically conductive diamond areas as an electrical functional element.
2. Klinge nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß das Funktionselement ein Widerstands-Heizelement, eine Zuleitung, eine elektrische, chemische und/oder physiologische Elektrode, eine monopolare oder bipolare Koagulationselektrode, eine Heizelement - Temperatursensor-Kombination, ein Temperatursensor, ein Hall-Sensor zur Magnetfeldmessung, ein chemo-sensitives Bauelement, wie ein ionensensitiver Feldeffekttransistor oder ein pH-Wertabhängiger Widerstand, ein piezoresistiver Sen- sor, wie ein Drucksensor, Kraftsensor oder Beschleunigungssensor, ein Strahlungssensor, wie für UV-, Röntgen- oder γ-Strahlung, oder ein Flußsensor ist. 2. Blade according to the preceding claim, characterized in that the functional element is a resistance heating element, a feed line, an electrical, chemical and / or physiological electrode, a monopolar or bipolar coagulation electrode, a heating element - temperature sensor combination, a temperature sensor, a Hall -Sensor for magnetic field measurement, a chemo-sensitive component, such as an ion-sensitive field effect transistor or a pH-dependent resistor, a piezoresistive sensor, such as a pressure sensor, force sensor or acceleration sensor, a radiation sensor, such as for UV, X-ray or γ radiation , or is a flow sensor.
3. Klinge nach Anspruch 1, dadurch gekennzeichnet, daß die Bereiche des elektrischen Funktionselementes mit Bor, Phosphor, Stickstoff, Schwefel und/oder Lithium dotiert sind.3. Blade according to claim 1, characterized in that the areas of the electrical functional element are doped with boron, phosphorus, nitrogen, sulfur and / or lithium.
4. Klinge nach Anspruch 2 oder 3, dadurch gekennzeichnet, daß die Bereiche des elektrischen Funktionselementes für ein Widerstands- Heizelement, eine Zuleitung, eine elektrische, chemische und/oder physiologische Elektrode, eine monopolare oder bipolare Koagulationselektrode stark dotiert, für eine Heizelement - Temperatursensor-Kombination mittelstark dotiert, für einen Temperatursensor schwach do- tiert oder für einen Hall -Sensor zur Magnetfeld- messung, ein chemo-sensitives Bauelement, wie ein ionensensitiver Feldeffekttransistor oder ein pH-Wert-abhängiger Widerstand, einen piezo- resistiven Sensor, wie ein Drucksensor, Kraftsensor oder Beschleinigungssensor, ein4. Blade according to claim 2 or 3, characterized in that the areas of the electrical functional element for a resistance heating element, a feed line, an electrical, chemical and / or physiological electrode, a monopolar or bipolar coagulation electrode heavily doped, for a heating element - temperature sensor Combination of medium doping, weakly doped for a temperature sensor or for a Hall sensor for magnetic field measurement, a chemo-sensitive component such as an ion-sensitive field effect transistor or a pH-dependent resistor, a piezo-resistive sensor such as a Pressure sensor, force sensor or acceleration sensor, on
Strahlungssensor, wie für UV-, Röntgen- oder γ- Strahlung, oder einen Flußsensor bereichsweise unterschiedlich stark dotiert sind.Radiation sensors, such as for UV, X-ray or γ radiation, or a flow sensor are doped in different areas in some areas.
5. Klinge nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß das elektrische Funktionselement ein Heizelement ist, das eine Do- tierstoffkonzentration größer 1 x 1018 cm"3 aufweist 5. Blade according to one of the preceding claims, characterized in that the electrical functional element is a heating element which has a doping concentration greater than 1 x 10 18 cm "3
Klinge nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß das Heizelement eine Dotierstoffkonzentration von 5 x 1020 cm-3 aufweist. Blade according to the preceding claim, characterized in that the heating element has a dopant concentration of 5 x 10 20 cm -3 .
7. Klinge nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß das elektrische Funktionseiement die Form von Leiterbahnen aufweist .7. Blade according to one of the preceding claims, characterized in that the electrical functional element has the form of conductor tracks.
8. Klinge nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß das elektrische Funktionselement zumindest teilweise an der Oberfläche des Klingenkörpers und/oder in dem Klingenkörper vergraben verläuft.8. Blade according to one of the preceding claims, characterized in that the electrical functional element is at least partially buried on the surface of the blade body and / or in the blade body.
9. Klinge nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß auf dem Klingenkörper mit dem elektrischen Funktionselement minde- stens ein elektrisch verbundenes Kontaktelement als weiteres elektrisches Funktionselement angeordnet ist.9. Blade according to one of the preceding claims, characterized in that at least one electrically connected contact element is arranged as a further electrical functional element on the blade body with the electrical functional element.
10. Klinge nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß die Kontaktelemente Metall enthalten.10. Blade according to the preceding claim, characterized in that the contact elements contain metal.
11. Klinge nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß auf der Oberfläche des Klingenkörpers und/oder in dem Klingenkörper vergraben mindestens ein Temperatursensor als elektrisches Funktionselement angeordnet ist.11. Blade according to one of the preceding claims, characterized in that on the surface of the blade body and / or buried in the blade body, at least one temperature sensor is arranged as an electrical functional element.
12. Klinge nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß der Temperatursensor eine Breite von ca. 0,03 mm und eine Länge von ca. 0,06 mm aufweist.12. Blade according to the preceding claim, characterized in that the temperature sensor has a width of approximately 0.03 mm and a length of approximately 0.06 mm.
13. Klinge nach einem der beiden vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der Temperatursensor aus dotiertem Diamant besteht.13. Blade according to one of the two preceding claims, characterized in that the temperature sensor consists of doped diamond.
14. Klinge nach einem der drei vorhergehenden An- Sprüche, dadurch gekennzeichnet, daß mit dem14. Blade according to one of the three preceding claims, characterized in that with the
Temperatursensor elektrische Zuleitungen als weitere elektrische Funktionseiemente verbunden sind.Temperature sensor electrical leads are connected as further electrical functional elements.
15. Klinge nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß die elektrischen Zuleitungen aus dotiertem Diamant bestehen.15. Blade according to the preceding claim, characterized in that the electrical leads consist of doped diamond.
16. Klinge nach einem der beiden vorhergehenden An- Sprüche, dadurch gekennzeichnet, daß die elektrischen Zuleitungen mit Bor, Phosphor, Stickstoff, Schwefel und/oder Lithium dotiert sind.16. Blade according to one of the two preceding claims, characterized in that the electrical feed lines are doped with boron, phosphorus, nitrogen, sulfur and / or lithium.
17. Klinge nach einem der beiden vorhergehenden An- Sprüche, dadurch gekennzeichnet, daß die Zuleitungen eine Dotierstoffkonzentration zwischen 1 x 1018 cm-3 und 1 x 1022 cm"3 aufweisen.17. Blade according to one of the two previous approaches Sayings, characterized in that the feed lines have a dopant concentration between 1 x 10 18 cm -3 and 1 x 10 22 cm "3 .
18. Klinge nach einem der drei vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die Zuleitungen eine Dotierstoffkonzentration von 5 x 1020 cm3 aufweisen.18. Blade according to one of the three preceding claims, characterized in that the feed lines have a dopant concentration of 5 x 10 20 cm 3 .
19. Klinge nach einem der Ansprüche 14 bis 18, dadurch gekennzeichnet, daß die Zuleitungen die Form von Leiterbahnen aufweisen.19. Blade according to one of claims 14 to 18, characterized in that the feed lines have the shape of conductor tracks.
20. Klinge nach einem der Ansprüche 12 bis 17, da- durch gekennzeichnet, daß auf der der Klingenspitze abgewandten Seite mit den Zuleitungen elektrisch verbundene Kontaktelemente als weitere elektrische Funktionseiemente angeordnet sind.20. Blade according to one of claims 12 to 17, characterized in that on the side facing away from the blade tip with the leads electrically connected contact elements are arranged as further electrical functional elements.
21. Klinge nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß die Kontaktelemente der Zuleitungen Metall enthalten.21. Blade according to the preceding claim, characterized in that the contact elements of the leads contain metal.
22. Klinge nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die Oberfläche der Klinge im Bereich des elektrischen Funktionselementes eine gegebenenfalls mit Ausnahme der Kontaktelemente geschlossene, nominell undotierte DiamantSchicht aufweist.22. Blade according to one of the preceding claims, characterized in that the surface of the blade in the area of the electrical functional element is a nominally undoped, possibly closed with the exception of the contact elements Has a diamond layer.
23. Klinge nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die gesamte Oberfläche der Klinge gegebenenfalls mit Ausnahme der Kontaktelemente eine geschlossene, nominell undotierte DiamantSchicht aufweist.23. Blade according to one of the preceding claims, characterized in that the entire surface of the blade, with the possible exception of the contact elements, has a closed, nominally undoped diamond layer.
24. Klinge nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß sie eine Steuerschaltung zur Steuerung der an das elektrische Funktionselement angelegten Spannung und/oder des an das elektrische Funktionselement angelegten Stromes aufweist.24. Blade according to one of the preceding claims, characterized in that it has a control circuit for controlling the voltage applied to the electrical functional element and / or the current applied to the electrical functional element.
25. Klinge nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß die Steuerung in Abhängigkeit von Signalen weiterer Funktionseiemente erfolgt.25. Blade according to the preceding claim, characterized in that the control is carried out as a function of signals from other functional elements.
26. Klinge nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß die Steuerschaltung eine integrierte Schaltung ist.26. Blade according to the preceding claim, characterized in that the control circuit is an integrated circuit.
27. Klinge nach einem der beiden vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die Steuerschaltung eine integrierte Schaltung auf Diamantbasis ist. 27. Blade according to one of the two preceding claims, characterized in that the control circuit is an integrated circuit based on diamond.
8. Klinge nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß sie eine Spannungsversorgung aufweist. 8. Blade according to one of the preceding claims, characterized in that it has a voltage supply.
PCT/EP2001/008294 2000-08-04 2001-07-18 Blade with body partly made from diamond WO2002011628A1 (en)

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DE10038015A1 (en) 2002-02-21

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