WO2002019509A3 - Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same - Google Patents
Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same Download PDFInfo
- Publication number
- WO2002019509A3 WO2002019509A3 PCT/US2001/026775 US0126775W WO0219509A3 WO 2002019509 A3 WO2002019509 A3 WO 2002019509A3 US 0126775 W US0126775 W US 0126775W WO 0219509 A3 WO0219509 A3 WO 0219509A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- comb drive
- fingers
- comb
- gap
- drive assembly
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
Abstract
A MEMS comb drive assembly and associated methods of fabrication are provide that are capable of gap variance between adjacent interdigitated comb drive fingers during comb drive operation. Gap variance allows for an increase in motive force by increasing the average capacitance variation of the comb structure as the distance between the comb fingers varies. The comb drive assembly includes first and second comb drive members that each comprise a series of comb drive fingers. The comb drive fingers will characteristically have cross-sections that vary in area along any lengthwise position of the comb drive finger. This variance in cross-sectional area provides for a gap differential between adjacent interdigitated comb drive fingers when the comb drive assembly is operational. As the gap varies during comb drive operation, the average variance in capacitance between opposing comb drive fingers increase, thereby increasing the motive force capabilities of the comb drive assembly. In one embodiment of the invention, the comb drive fingers are configured as wedge shaped structures in a plan view; moreover the comb drive fingers are frusto wedge shaped structures in a plan view. The wedge shaped configuration allows for the comb drive fingers of opposing comb drive members to be interdigitated such that the gap between adjacent comb fingers varies as the fingers are placed into motion. The frusto wedge shaped embodiment allows for the end of the body of the comb finger furthest from the base of the comb drive member to be truncated, so that ends of the comb drive fingers do not repeatedly contact the base of the opposing comb drive member during normal operation. In a further embodiment of the invention the comb drive assembly is a rotary comb drive assembly capable of imparting rotary motion to a torsional resonance plate. The invention further provides for methods of fabricating comb drive fingers.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US64962500A | 2000-08-28 | 2000-08-28 | |
US09/649,625 | 2000-08-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002019509A2 WO2002019509A2 (en) | 2002-03-07 |
WO2002019509A3 true WO2002019509A3 (en) | 2002-05-16 |
Family
ID=24605589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/026775 WO2002019509A2 (en) | 2000-08-28 | 2001-08-28 | Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2002019509A2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7012322B2 (en) | 2003-12-22 | 2006-03-14 | Honeywell International Inc. | Method for reducing harmonic distortion in comb drive devices |
US7036373B2 (en) | 2004-06-29 | 2006-05-02 | Honeywell International, Inc. | MEMS gyroscope with horizontally oriented drive electrodes |
FR2888394A1 (en) | 2005-07-08 | 2007-01-12 | Commissariat Energie Atomique | CAPACITIVE DEVICE WITH OPTIMIZED CAPACITIVE VOLUME |
EP1998345A1 (en) | 2007-05-31 | 2008-12-03 | Infineon Technologies SensoNor AS | Method of manufacturing capacitive elements for a capacitive device |
FR2955096B1 (en) * | 2010-01-12 | 2012-01-06 | Flowdit | MICRO-ELECTROMECHANICAL ACTUATOR MADE IN A SUBSTRATE AND MICROVALVE USING THE ACTUATOR |
AT11920U3 (en) | 2010-08-12 | 2012-03-15 | Oesterreichische Akademie Der Wissenschaften | METHOD FOR PRODUCING A MEMS DEVICE WITH HIGH ASPECT RATIO, AND CONVERTER AND CONDENSER |
US10523134B2 (en) * | 2015-03-12 | 2019-12-31 | Mems Drive, Inc. | Comb drive with non-parallel overlapping comb fingers |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5025346A (en) * | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
US6000280A (en) * | 1995-07-20 | 1999-12-14 | Cornell Research Foundation, Inc. | Drive electrodes for microfabricated torsional cantilevers |
-
2001
- 2001-08-28 WO PCT/US2001/026775 patent/WO2002019509A2/en active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5025346A (en) * | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
US6000280A (en) * | 1995-07-20 | 1999-12-14 | Cornell Research Foundation, Inc. | Drive electrodes for microfabricated torsional cantilevers |
Non-Patent Citations (1)
Title |
---|
GIANCHANDANI Y B ET AL: "A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Devices", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, no. 2, 1 June 1992 (1992-06-01), pages 77 - 85, XP000304539, ISSN: 1057-7157 * |
Also Published As
Publication number | Publication date |
---|---|
WO2002019509A2 (en) | 2002-03-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Yeh et al. | Electrostatic model for an asymmetric combdrive | |
KR100941403B1 (en) | Micro-shaking device and method of driving the same | |
US6798315B2 (en) | Lateral motion MEMS Switch | |
CN102107844B (en) | Bi-axial micromechanical actuator with multiple-plane comb electrodes | |
WO2006033839A3 (en) | Post-release capacitance enhancement in micromachined devices and a method of performing the same | |
WO2003034452A1 (en) | Variable capacitance capacitor device | |
JP4645227B2 (en) | Vibrator structure and manufacturing method thereof | |
WO2002019509A3 (en) | Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same | |
JP4580745B2 (en) | Piezoelectric drive MEMS device | |
KR970048472A (en) | Micro gyroscope | |
CN101000842B (en) | Mems switch | |
CN101246258A (en) | Electrostatic actuator with interdigitated electrode structure | |
US9476907B2 (en) | Variable capacitance accelerometer with meandering flexures | |
US20060082251A1 (en) | Bi-directional actuator utilizing both attractive and repulsive electrostatic forces | |
JP4550578B2 (en) | Micro movable element with torsion bar | |
US7253550B2 (en) | Torsional electrostatic actuator | |
JP2006162663A5 (en) | ||
US20100237737A1 (en) | Optimized bi-directional electrostatic actuators | |
WO2022117197A1 (en) | Mems having lid drive and method for operation thereof | |
JP4231062B2 (en) | MEMS element | |
EP2017949A1 (en) | Stepping actuator and method of fabrication | |
AU2002218625A1 (en) | Double electromechanical element | |
EP0897802A3 (en) | Ink-jet head and methods of manufacturing and driving the same | |
EP1293820A3 (en) | Micromirror device using interdigitated cantilevers and applications thereof | |
CN102195515A (en) | Vibrator in vibration type driving apparatus and manufacturing method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): JP KR |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
AK | Designated states |
Kind code of ref document: A3 Designated state(s): JP KR |
|
AL | Designated countries for regional patents |
Kind code of ref document: A3 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR |
|
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
122 | Ep: pct application non-entry in european phase | ||
NENP | Non-entry into the national phase |
Ref country code: JP |