WO2002021568A3 - Distributed mems electrostatic pumping devices - Google Patents

Distributed mems electrostatic pumping devices Download PDF

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Publication number
WO2002021568A3
WO2002021568A3 PCT/US2001/026349 US0126349W WO0221568A3 WO 2002021568 A3 WO2002021568 A3 WO 2002021568A3 US 0126349 W US0126349 W US 0126349W WO 0221568 A3 WO0221568 A3 WO 0221568A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
electrode
moveable
moveable membrane
disposed
Prior art date
Application number
PCT/US2001/026349
Other languages
French (fr)
Other versions
WO2002021568A2 (en
Inventor
Scott H Goodwin-Johansson
Original Assignee
Mcnc
Scott H Goodwin-Johansson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mcnc, Scott H Goodwin-Johansson filed Critical Mcnc
Priority to AU2001286670A priority Critical patent/AU2001286670A1/en
Publication of WO2002021568A2 publication Critical patent/WO2002021568A2/en
Publication of WO2002021568A3 publication Critical patent/WO2002021568A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type

Abstract

A MEMS pumping device driven by electrostatic forces comprises a substrate having at least one substrate electrode disposed thereon. Affixed to the substrate is a moveable membrane that generally overlies the at least one substrate electrode. The moveable membrane comprises at least one electrode element and a biasing element. The moveable membrane includes a fixed portion attached to the substrate and distal portion extending from the fixed portion and being moveable with respect to the substrate electrode. A dielectric element is disposed between the at least one substrate electrode and the at least one electrode element of the moveable membrane to provide for electrical isolation. In operation, a voltage differential is established between the at least one substrate electrode and the at least one electrode element which displaces the moveable membrane relative to the substrate to thereby controllably distribute matter residing between the substrate and the distal portion of the moveable membrane. In a further embodiment the MEMS pumping devices comprise more that two moveable membranes that are configured so as to maximize flow in a desired direction. Additional embodiments include more than one electrode element disposed within the moveable membrane that are capable of individual and sequential biasing to improve overall net flow in the desired flow direction.
PCT/US2001/026349 2000-09-01 2001-08-23 Distributed mems electrostatic pumping devices WO2002021568A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001286670A AU2001286670A1 (en) 2000-09-01 2001-08-23 Distributed mems electrostatic pumping devices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/654,446 2000-09-01
US09/654,446 US6485273B1 (en) 2000-09-01 2000-09-01 Distributed MEMS electrostatic pumping devices

Publications (2)

Publication Number Publication Date
WO2002021568A2 WO2002021568A2 (en) 2002-03-14
WO2002021568A3 true WO2002021568A3 (en) 2003-09-25

Family

ID=24624891

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/026349 WO2002021568A2 (en) 2000-09-01 2001-08-23 Distributed mems electrostatic pumping devices

Country Status (3)

Country Link
US (1) US6485273B1 (en)
AU (1) AU2001286670A1 (en)
WO (1) WO2002021568A2 (en)

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Also Published As

Publication number Publication date
WO2002021568A2 (en) 2002-03-14
AU2001286670A1 (en) 2002-03-22
US6485273B1 (en) 2002-11-26

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