WO2002045113A1 - Pattern forming method for carbon nanotube, and field emission cold cathode and method of manufacturing the cold cathode - Google Patents
Pattern forming method for carbon nanotube, and field emission cold cathode and method of manufacturing the cold cathode Download PDFInfo
- Publication number
- WO2002045113A1 WO2002045113A1 PCT/JP2001/010276 JP0110276W WO0245113A1 WO 2002045113 A1 WO2002045113 A1 WO 2002045113A1 JP 0110276 W JP0110276 W JP 0110276W WO 0245113 A1 WO0245113 A1 WO 0245113A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- carbon nanotube
- cold cathode
- pattern
- pattern forming
- etching
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
- H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/433,382 US20040043219A1 (en) | 2000-11-29 | 2001-11-26 | Pattern forming method for carbon nanotube, and field emission cold cathode and method of manufacturing the cold cathode |
KR10-2003-7007245A KR20030059291A (en) | 2000-11-29 | 2001-11-26 | Pattern forming method for carbon nanotube, and field emission cold cathode and method of manufacturing the cold cathode |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-362395 | 2000-11-29 | ||
JP2000362395A JP4802363B2 (en) | 2000-11-29 | 2000-11-29 | Field emission cold cathode and flat image display device |
JP2000367341 | 2000-12-01 | ||
JP2000-367341 | 2000-12-01 | ||
JP2001-337441 | 2001-11-02 | ||
JP2001337441A JP3843447B2 (en) | 2000-12-01 | 2001-11-02 | Carbon nanotube pattern formation method |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002045113A1 true WO2002045113A1 (en) | 2002-06-06 |
Family
ID=27345293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2001/010276 WO2002045113A1 (en) | 2000-11-29 | 2001-11-26 | Pattern forming method for carbon nanotube, and field emission cold cathode and method of manufacturing the cold cathode |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR20030059291A (en) |
WO (1) | WO2002045113A1 (en) |
Cited By (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005027226A1 (en) | 2003-09-12 | 2005-03-24 | Sony Corporation | Method for manufacturing field effect semiconductor device |
US7385266B2 (en) | 2003-05-14 | 2008-06-10 | Nantero, Inc. | Sensor platform using a non-horizontally oriented nanotube element |
US7416993B2 (en) | 2003-09-08 | 2008-08-26 | Nantero, Inc. | Patterned nanowire articles on a substrate and methods of making the same |
WO2009023304A2 (en) * | 2007-05-02 | 2009-02-19 | Atomate Corporation | High density nanotube devices |
US7598127B2 (en) | 2005-05-12 | 2009-10-06 | Nantero, Inc. | Nanotube fuse structure |
US7619291B2 (en) | 2001-07-25 | 2009-11-17 | Nantero, Inc. | Devices having horizontally-disposed nanofabric articles and methods of making the same |
US7719067B2 (en) | 2001-07-25 | 2010-05-18 | Nantero, Inc. | Devices having vertically-disposed nanofabric articles and methods of making the same |
US7835170B2 (en) | 2005-05-09 | 2010-11-16 | Nantero, Inc. | Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks |
US7859385B2 (en) | 2004-09-21 | 2010-12-28 | Nantero, Inc. | Resistive elements using carbon nanotubes |
US7927992B2 (en) | 2005-09-06 | 2011-04-19 | Nantero, Inc. | Carbon nanotubes for the selective transfer of heat from electronics |
US8044388B2 (en) | 2001-07-25 | 2011-10-25 | Nantero, Inc. | Method of forming a carbon nanotube-based contact to semiconductor |
US8110883B2 (en) | 2007-03-12 | 2012-02-07 | Nantero Inc. | Electromagnetic and thermal sensors using carbon nanotubes and methods of making same |
US8115187B2 (en) | 2007-05-22 | 2012-02-14 | Nantero, Inc. | Triodes using nanofabric articles and methods of making the same |
US8222704B2 (en) | 2009-12-31 | 2012-07-17 | Nantero, Inc. | Compact electrical switching devices with nanotube elements, and methods of making same |
US8351239B2 (en) | 2009-10-23 | 2013-01-08 | Nantero Inc. | Dynamic sense current supply circuit and associated method for reading and characterizing a resistive memory array |
US8525143B2 (en) | 2005-09-06 | 2013-09-03 | Nantero Inc. | Method and system of using nanotube fabrics as joule heating elements for memories and other applications |
US8551806B2 (en) | 2009-10-23 | 2013-10-08 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US8562937B2 (en) | 2005-12-19 | 2013-10-22 | Nantero Inc. | Production of carbon nanotubes |
US8587989B2 (en) | 2008-06-20 | 2013-11-19 | Nantero Inc. | NRAM arrays with nanotube blocks, nanotube traces, and nanotube planes and methods of making same |
US8586424B2 (en) | 2008-11-19 | 2013-11-19 | Nantero Inc. | Switching materials comprising mixed nanoscopic particles and carbon nanotubes and method of making and using the same |
US8631562B2 (en) | 2004-11-02 | 2014-01-21 | Nantero Inc. | Methods of making nanotube switches |
US8771628B2 (en) | 2004-12-16 | 2014-07-08 | Nantero Inc. | Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof |
US8895950B2 (en) | 2009-10-23 | 2014-11-25 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US8941094B2 (en) | 2010-09-02 | 2015-01-27 | Nantero Inc. | Methods for adjusting the conductivity range of a nanotube fabric layer |
US9196615B2 (en) | 2005-05-09 | 2015-11-24 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9287356B2 (en) | 2005-05-09 | 2016-03-15 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9299430B1 (en) | 2015-01-22 | 2016-03-29 | Nantero Inc. | Methods for reading and programming 1-R resistive change element arrays |
US9422651B2 (en) | 2003-01-13 | 2016-08-23 | Nantero Inc. | Methods for arranging nanoscopic elements within networks, fabrics, and films |
US9617151B2 (en) | 2010-02-12 | 2017-04-11 | Nantero Inc. | Methods for controlling density, porosity, and/or gap size within nanotube fabric layers and films |
US9650732B2 (en) | 2013-05-01 | 2017-05-16 | Nantero Inc. | Low defect nanotube application solutions and fabrics and methods for making same |
US9911743B2 (en) | 2005-05-09 | 2018-03-06 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9934848B2 (en) | 2016-06-07 | 2018-04-03 | Nantero, Inc. | Methods for determining the resistive states of resistive change elements |
US9941001B2 (en) | 2016-06-07 | 2018-04-10 | Nantero, Inc. | Circuits for determining the resistive states of resistive change elements |
US10096363B2 (en) | 2001-07-25 | 2018-10-09 | Nantero, Inc. | Methods of forming nanotube films and articles |
US10654718B2 (en) | 2013-09-20 | 2020-05-19 | Nantero, Inc. | Scalable nanotube fabrics and methods for making same |
US10661304B2 (en) | 2010-03-30 | 2020-05-26 | Nantero, Inc. | Microfluidic control surfaces using ordered nanotube fabrics |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100816815B1 (en) * | 2007-02-09 | 2008-03-26 | 주식회사 나모텍 | Substrate for display device using carbon nanotube and method for manufacturing the same |
KR100924766B1 (en) * | 2007-06-22 | 2009-11-05 | 삼성전자주식회사 | Carbon nano-tubeCNT thin film comprising a metal nano-particle, and a manufacturing method thereof |
Citations (5)
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WO1999028939A1 (en) * | 1997-12-04 | 1999-06-10 | Printable Field Emitters Limited | Field electron emission materials and devices |
JP2000277002A (en) * | 1999-03-25 | 2000-10-06 | Matsushita Electric Ind Co Ltd | Manufacture of electron emission element |
JP2000285795A (en) * | 1999-03-31 | 2000-10-13 | Sony Corp | Electron emission source, its manufacture, and display device |
JP2000311578A (en) * | 1999-04-28 | 2000-11-07 | Sharp Corp | Electron source array, its manufacture, and image forming device formed by using electron source array or its manufacture |
EP1096533A1 (en) * | 1999-08-18 | 2001-05-02 | Lucent Technologies Inc. | Method for fabrication of patterned carbon nanotube films |
-
2001
- 2001-11-26 WO PCT/JP2001/010276 patent/WO2002045113A1/en not_active Application Discontinuation
- 2001-11-26 KR KR10-2003-7007245A patent/KR20030059291A/en not_active Application Discontinuation
Patent Citations (5)
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WO1999028939A1 (en) * | 1997-12-04 | 1999-06-10 | Printable Field Emitters Limited | Field electron emission materials and devices |
JP2000277002A (en) * | 1999-03-25 | 2000-10-06 | Matsushita Electric Ind Co Ltd | Manufacture of electron emission element |
JP2000285795A (en) * | 1999-03-31 | 2000-10-13 | Sony Corp | Electron emission source, its manufacture, and display device |
JP2000311578A (en) * | 1999-04-28 | 2000-11-07 | Sharp Corp | Electron source array, its manufacture, and image forming device formed by using electron source array or its manufacture |
EP1096533A1 (en) * | 1999-08-18 | 2001-05-02 | Lucent Technologies Inc. | Method for fabrication of patterned carbon nanotube films |
Cited By (58)
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---|---|---|---|---|
US8058089B2 (en) | 2001-07-25 | 2011-11-15 | Nantero Inc. | Electromechanical memory array using nanotube ribbons and method for making same |
US8044388B2 (en) | 2001-07-25 | 2011-10-25 | Nantero, Inc. | Method of forming a carbon nanotube-based contact to semiconductor |
US10096363B2 (en) | 2001-07-25 | 2018-10-09 | Nantero, Inc. | Methods of forming nanotube films and articles |
US8400053B2 (en) | 2001-07-25 | 2013-03-19 | Nantero Inc. | Carbon nanotube films, layers, fabrics, ribbons, elements and articles |
US7719067B2 (en) | 2001-07-25 | 2010-05-18 | Nantero, Inc. | Devices having vertically-disposed nanofabric articles and methods of making the same |
US7619291B2 (en) | 2001-07-25 | 2009-11-17 | Nantero, Inc. | Devices having horizontally-disposed nanofabric articles and methods of making the same |
US9422651B2 (en) | 2003-01-13 | 2016-08-23 | Nantero Inc. | Methods for arranging nanoscopic elements within networks, fabrics, and films |
US10124367B2 (en) | 2003-01-13 | 2018-11-13 | Nantero, Inc. | Methods for arranging nanoscopic elements within networks, fabrics and films |
US8357559B2 (en) | 2003-05-14 | 2013-01-22 | Nantero Inc. | Method of making sensor platform using a non-horizontally oriented nanotube element |
US7538400B2 (en) | 2003-05-14 | 2009-05-26 | Nantero, Inc. | Sensor platform using a non-horizontally oriented nanotube element |
US7385266B2 (en) | 2003-05-14 | 2008-06-10 | Nantero, Inc. | Sensor platform using a non-horizontally oriented nanotube element |
US7416993B2 (en) | 2003-09-08 | 2008-08-26 | Nantero, Inc. | Patterned nanowire articles on a substrate and methods of making the same |
US7948082B2 (en) | 2003-09-08 | 2011-05-24 | Nantero, Inc. | Method of fabricating a patterned nanoscopic article |
EP1667238A4 (en) * | 2003-09-12 | 2009-09-16 | Sony Corp | Method for manufacturing field effect semiconductor device |
WO2005027226A1 (en) | 2003-09-12 | 2005-03-24 | Sony Corporation | Method for manufacturing field effect semiconductor device |
EP1667238A1 (en) * | 2003-09-12 | 2006-06-07 | Sony Corporation | Method for manufacturing field effect semiconductor device |
US7859385B2 (en) | 2004-09-21 | 2010-12-28 | Nantero, Inc. | Resistive elements using carbon nanotubes |
US8631562B2 (en) | 2004-11-02 | 2014-01-21 | Nantero Inc. | Methods of making nanotube switches |
US8771628B2 (en) | 2004-12-16 | 2014-07-08 | Nantero Inc. | Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof |
US9911743B2 (en) | 2005-05-09 | 2018-03-06 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9767902B2 (en) | 2005-05-09 | 2017-09-19 | Nantero, Inc. | Non-volatile composite nanoscopic fabric NAND memory arrays and methods of making same |
US7835170B2 (en) | 2005-05-09 | 2010-11-16 | Nantero, Inc. | Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks |
US9406349B2 (en) | 2005-05-09 | 2016-08-02 | Nantero Inc. | Memory elements and cross point switches and arrays for same using nonvolatile nanotube blocks |
US10339982B2 (en) | 2005-05-09 | 2019-07-02 | Nantero, Inc. | Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks |
US9287356B2 (en) | 2005-05-09 | 2016-03-15 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9196615B2 (en) | 2005-05-09 | 2015-11-24 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US7598127B2 (en) | 2005-05-12 | 2009-10-06 | Nantero, Inc. | Nanotube fuse structure |
US8630091B2 (en) | 2005-09-06 | 2014-01-14 | Nantero Inc. | Carbon nanotubes for the selective transfer of heat from electronics |
US8525143B2 (en) | 2005-09-06 | 2013-09-03 | Nantero Inc. | Method and system of using nanotube fabrics as joule heating elements for memories and other applications |
US7927992B2 (en) | 2005-09-06 | 2011-04-19 | Nantero, Inc. | Carbon nanotubes for the selective transfer of heat from electronics |
US8562937B2 (en) | 2005-12-19 | 2013-10-22 | Nantero Inc. | Production of carbon nanotubes |
US8110883B2 (en) | 2007-03-12 | 2012-02-07 | Nantero Inc. | Electromagnetic and thermal sensors using carbon nanotubes and methods of making same |
WO2009023304A2 (en) * | 2007-05-02 | 2009-02-19 | Atomate Corporation | High density nanotube devices |
WO2009023304A3 (en) * | 2007-05-02 | 2009-07-09 | Atomate Corp | High density nanotube devices |
US8115187B2 (en) | 2007-05-22 | 2012-02-14 | Nantero, Inc. | Triodes using nanofabric articles and methods of making the same |
US8587989B2 (en) | 2008-06-20 | 2013-11-19 | Nantero Inc. | NRAM arrays with nanotube blocks, nanotube traces, and nanotube planes and methods of making same |
US8969142B2 (en) | 2008-11-19 | 2015-03-03 | Nantero Inc. | Switching materials comprising mixed nanoscopic particles and carbon nanotubes and methods of making and using the same |
US10181569B2 (en) | 2008-11-19 | 2019-01-15 | Nantero, Inc. | Two-terminal switching devices comprising coated nanotube elements |
US9337423B2 (en) | 2008-11-19 | 2016-05-10 | Nantero Inc. | Two-terminal switching device using a composite material of nanoscopic particles and carbon nanotubes |
US8586424B2 (en) | 2008-11-19 | 2013-11-19 | Nantero Inc. | Switching materials comprising mixed nanoscopic particles and carbon nanotubes and method of making and using the same |
US9755170B2 (en) | 2008-11-19 | 2017-09-05 | Nantero, Inc. | Resistive materials comprising mixed nanoscopic particles and carbon nanotubes |
US8351239B2 (en) | 2009-10-23 | 2013-01-08 | Nantero Inc. | Dynamic sense current supply circuit and associated method for reading and characterizing a resistive memory array |
US9502675B2 (en) | 2009-10-23 | 2016-11-22 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US9281185B2 (en) | 2009-10-23 | 2016-03-08 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US8551806B2 (en) | 2009-10-23 | 2013-10-08 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US10084138B2 (en) | 2009-10-23 | 2018-09-25 | Nantero, Inc. | Methods for forming nanotube fabric layers with increased density |
US8895950B2 (en) | 2009-10-23 | 2014-11-25 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US8222704B2 (en) | 2009-12-31 | 2012-07-17 | Nantero, Inc. | Compact electrical switching devices with nanotube elements, and methods of making same |
US9617151B2 (en) | 2010-02-12 | 2017-04-11 | Nantero Inc. | Methods for controlling density, porosity, and/or gap size within nanotube fabric layers and films |
US10773960B2 (en) | 2010-02-12 | 2020-09-15 | Nantero, Inc. | Low porosity nanotube fabric articles |
US10661304B2 (en) | 2010-03-30 | 2020-05-26 | Nantero, Inc. | Microfluidic control surfaces using ordered nanotube fabrics |
US8941094B2 (en) | 2010-09-02 | 2015-01-27 | Nantero Inc. | Methods for adjusting the conductivity range of a nanotube fabric layer |
US9650732B2 (en) | 2013-05-01 | 2017-05-16 | Nantero Inc. | Low defect nanotube application solutions and fabrics and methods for making same |
US10654718B2 (en) | 2013-09-20 | 2020-05-19 | Nantero, Inc. | Scalable nanotube fabrics and methods for making same |
US9715927B2 (en) | 2015-01-22 | 2017-07-25 | Nantero, Inc. | 1-R resistive change element arrays using resistive reference elements |
US9299430B1 (en) | 2015-01-22 | 2016-03-29 | Nantero Inc. | Methods for reading and programming 1-R resistive change element arrays |
US9941001B2 (en) | 2016-06-07 | 2018-04-10 | Nantero, Inc. | Circuits for determining the resistive states of resistive change elements |
US9934848B2 (en) | 2016-06-07 | 2018-04-03 | Nantero, Inc. | Methods for determining the resistive states of resistive change elements |
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