WO2002046819A3 - Tilting mirror device - Google Patents

Tilting mirror device Download PDF

Info

Publication number
WO2002046819A3
WO2002046819A3 PCT/DE2001/004546 DE0104546W WO0246819A3 WO 2002046819 A3 WO2002046819 A3 WO 2002046819A3 DE 0104546 W DE0104546 W DE 0104546W WO 0246819 A3 WO0246819 A3 WO 0246819A3
Authority
WO
WIPO (PCT)
Prior art keywords
material part
mirror
plane
perpendicularly
mirrors
Prior art date
Application number
PCT/DE2001/004546
Other languages
German (de)
French (fr)
Other versions
WO2002046819A2 (en
Inventor
Christof Abel-Keilhack
Manfred Burkhard Helm
Original Assignee
Siemens Ag
Christof Abel-Keilhack
Manfred Burkhard Helm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag, Christof Abel-Keilhack, Manfred Burkhard Helm filed Critical Siemens Ag
Publication of WO2002046819A2 publication Critical patent/WO2002046819A2/en
Publication of WO2002046819A3 publication Critical patent/WO2002046819A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G06K7/10653—Activating means using flexible or piezoelectric means

Abstract

The invention relates to an optical deflection device for deflecting an incident light beam (12) in a direction (P2). A material part (1, 2, 3, 4, 5) is tightly clamped at at least one end and can be excited by a drive device to perform linear movements perpendicularly to the plane of the material part. Two mirrors (10, 11) are located a distance apart from each other as seen in the direction of the longitudinal extension of the material part. When the material part is moved linearly, these mirrors (10, 11) are moved perpendicularly to the plane of said material part, so that the light beam (12) that is incident on one mirror (10) is reflected to the other mirror (11) and after reflection on said other mirror (11), is diverted in the direction (P2), perpendicularly to the plane of the material strip. Several pivot joints (6, 7, 8, 9) are preferably located in the longitudinal direction of the material part, dividing the material part into several elements.
PCT/DE2001/004546 2000-12-04 2001-12-04 Tilting mirror device WO2002046819A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10060111.1 2000-12-04
DE10060111A DE10060111C1 (en) 2000-12-04 2000-12-04 Optical deflection device

Publications (2)

Publication Number Publication Date
WO2002046819A2 WO2002046819A2 (en) 2002-06-13
WO2002046819A3 true WO2002046819A3 (en) 2003-06-05

Family

ID=7665662

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/004546 WO2002046819A2 (en) 2000-12-04 2001-12-04 Tilting mirror device

Country Status (2)

Country Link
DE (1) DE10060111C1 (en)
WO (1) WO2002046819A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003240315B2 (en) * 2002-06-28 2009-07-16 Cv Laser Pty Ltd Scanning device and method of scanning an optical beam over a surface
AUPS326102A0 (en) 2002-06-28 2002-07-18 Clvr Pty Ltd Scanning device and method of scanning an optical beam over a surface
ITTO20020602A1 (en) * 2002-07-10 2004-01-12 Infm Istituto Naz Per La Fisi OPTICAL MICROSCOPE SUITABLE TO OPERATE A QUICK THREE-DIMENSIONAL MODULATION OF THE POSITION OF THE OBSERVATION POINT
DE102005023985A1 (en) * 2005-05-20 2006-11-23 Keysystech Gmbh Laser welding device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4402575A (en) * 1981-05-01 1983-09-06 Bell & Howell Company Wideband optical beam deflector
JPH06160750A (en) * 1992-11-20 1994-06-07 Canon Inc Microactuator, light deflector and optical scanner
US5862003A (en) * 1995-06-23 1999-01-19 Saif; Muhammad T. A. Micromotion amplifier
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6072617A (en) * 1996-11-26 2000-06-06 Texas Instruments Incorporated Micro mechanical device with memory metal component

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19648727A1 (en) * 1996-11-25 1998-05-28 Piezosystem Jena Praezisionsju Drive for optical deflection system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4402575A (en) * 1981-05-01 1983-09-06 Bell & Howell Company Wideband optical beam deflector
JPH06160750A (en) * 1992-11-20 1994-06-07 Canon Inc Microactuator, light deflector and optical scanner
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5862003A (en) * 1995-06-23 1999-01-19 Saif; Muhammad T. A. Micromotion amplifier
US6072617A (en) * 1996-11-26 2000-06-06 Texas Instruments Incorporated Micro mechanical device with memory metal component

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 018, no. 481 (P - 1797) 7 September 1994 (1994-09-07) *

Also Published As

Publication number Publication date
WO2002046819A2 (en) 2002-06-13
DE10060111C1 (en) 2002-07-25

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