WO2002079719A3 - Microinterferometers with performance optimization - Google Patents

Microinterferometers with performance optimization Download PDF

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Publication number
WO2002079719A3
WO2002079719A3 PCT/US2002/009768 US0209768W WO02079719A3 WO 2002079719 A3 WO2002079719 A3 WO 2002079719A3 US 0209768 W US0209768 W US 0209768W WO 02079719 A3 WO02079719 A3 WO 02079719A3
Authority
WO
WIPO (PCT)
Prior art keywords
diffraction grating
incident light
microinterferometer
microinterferometers
substrate
Prior art date
Application number
PCT/US2002/009768
Other languages
French (fr)
Other versions
WO2002079719A2 (en
Inventor
Fahrettin L Degertekin
Thomas Roland Kurfess
Byungki Kim
Hosein Ali Razavi
Original Assignee
Georgia Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Georgia Tech Res Inst filed Critical Georgia Tech Res Inst
Priority to EP02728608A priority Critical patent/EP1393014A4/en
Priority to JP2002578093A priority patent/JP2005512018A/en
Publication of WO2002079719A2 publication Critical patent/WO2002079719A2/en
Publication of WO2002079719A3 publication Critical patent/WO2002079719A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Abstract

The present invention relates to microinterferometers. An embodiment of a microinterferometer (100) for accurately measuring the distance to an object surface (110) includes a substrate (152) and a tuneable, phase-sensitive, reflective diffraction grating (156) formed atop said substrate (152). The diffraction grating (156) is configured to reflect a first portion of an incident light and transmit a second portion of the incident light, such that the second portion of the incident light is diffracted. The diffraction grating (156) is further configured to be controllably adjusted. The microinterferometer (100) also includes a photodetector (120) for receiving interference patterns produced from the first portion of the incident light reflected from the diffraction grating (156) and the second portion of the incident lights reflected from the object surface (110). The microinterferometer (100) also includes a controller (170) coupled to the photo-detector (120) and the diffraction grating (156) for adjusting the diffraction grating (156), such that the interference patterns are altered. Systems and methods are also disclosed.
PCT/US2002/009768 2001-03-29 2002-03-29 Microinterferometers with performance optimization WO2002079719A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP02728608A EP1393014A4 (en) 2001-03-29 2002-03-29 Microinterferometers with performance optimization
JP2002578093A JP2005512018A (en) 2001-03-29 2002-03-29 Performance-optimized microinterferometer

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US27957501P 2001-03-29 2001-03-29
US60/279,575 2001-03-29
US35696002P 2002-02-13 2002-02-13
US35694202P 2002-02-13 2002-02-13
US60/356,960 2002-02-13
US60/356,942 2002-02-13

Publications (2)

Publication Number Publication Date
WO2002079719A2 WO2002079719A2 (en) 2002-10-10
WO2002079719A3 true WO2002079719A3 (en) 2002-12-12

Family

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Family Applications (3)

Application Number Title Priority Date Filing Date
PCT/US2002/009768 WO2002079719A2 (en) 2001-03-29 2002-03-29 Microinterferometers with performance optimization
PCT/US2002/009984 WO2002079720A1 (en) 2001-03-29 2002-03-29 Microinterferometer for distance measurements
PCT/US2002/009983 WO2002079718A1 (en) 2001-03-29 2002-03-29 System and method for surface profiling

Family Applications After (2)

Application Number Title Priority Date Filing Date
PCT/US2002/009984 WO2002079720A1 (en) 2001-03-29 2002-03-29 Microinterferometer for distance measurements
PCT/US2002/009983 WO2002079718A1 (en) 2001-03-29 2002-03-29 System and method for surface profiling

Country Status (4)

Country Link
US (2) US7068377B2 (en)
EP (1) EP1393014A4 (en)
JP (1) JP2005512018A (en)
WO (3) WO2002079719A2 (en)

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Also Published As

Publication number Publication date
WO2002079719A2 (en) 2002-10-10
JP2005512018A (en) 2005-04-28
WO2002079720A1 (en) 2002-10-10
EP1393014A4 (en) 2007-06-20
US20030038949A1 (en) 2003-02-27
EP1393014A2 (en) 2004-03-03
US7068377B2 (en) 2006-06-27
US20030184761A1 (en) 2003-10-02
US20060098208A9 (en) 2006-05-11
WO2002079718A1 (en) 2002-10-10
US6753969B2 (en) 2004-06-22

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