WO2002084850A1

WO2002084850A1 - Canned linear motor armature and canned linear motor

Info

Publication number: WO2002084850A1
Application number: PCT/JP2002/003517
Authority: WO
Inventors: Toru Shikayama; Akihiko Maemura; Yuji Nitta; Mitsuhiro Matsuzaki; Yoshiyuki Nagamatsu
Original assignee: Kabushiki Kaisha Yaskawa Denki
Priority date: 2001-04-09
Filing date: 2002-04-08
Publication date: 2002-10-24

Abstract

A canned linear motor stator (100) (armature) includes a winding fixing frame (109), an armature winding (108) fixed to the winding fixing frame (109), a rectangular metal case (101) surrounding the winding fixing frame (109), a can (102) sealing both openings of the case (101), a coolant passage (110) formed in a sealed space defined by the metal case (101) and the can (102), a coolant inlet (106) and a coolant outlet (107) arranged at the entrance and the exit of the coolant passage (110), respectively. The can is made from a resin and especially a filler is made from a resin of glass fiber or carbon fiber. Thus, it is possible to eliminate heating of the can portion attributed to eddy current and the armature can also be used for a high-speed application. Furthermore, it is possible to provide a canned linear motor armature and a canned linear motor capable of suppressing vibration of the winding fixing frame.

Description

Specification

Cand 'linear motor

[Technical field]

INDUSTRIAL APPLICABILITY The present invention eliminates generation of eddy currents in the can and the winding fixed frame, prevents can deformation, and reduces dust and gas generation from the can surface even when exposed to a light source for exposure. Also, the present invention relates to a cand linear motor armature and a cand linear motor that can eliminate liquid leakage of a refrigerant flowing in a can.

[Background technology]

[First conventional technology]

Conventionally, canned linear motors that have been used for table feed of semiconductor manufacturing equipment and machine tools and that require low temperature rise and constant speed feed accuracy are, for example, those disclosed in FIGS. 6 and 7. is there.

FIG. 6 is an overall perspective view of a cand / liner motor showing the first related art. In FIG. 6, 10 is a stator, 11 is a stator base, 12 is a can, 13 is a header, 14 is a refrigerant supply port, 15 is a refrigerant outlet, 20 is a mover, 2 1 is a mover base, 2 is a field yoke, and 23 is a permanent magnet. An armature having an inverted T-shape that forms the stator 10 is disposed between the permanent magnets 23 and 23 that form the mover 20. The mover 20 is supported by the stator 10 by a linear guide or the like (not shown). By passing a predetermined current through the armature winding, a thrust is generated in the mover 20 by acting on the magnetic field created by the permanent magnet 23. Then, the mover 20 moves in the traveling direction indicated by the arrow.

FIG. 7 is a front sectional view of the cand linear motor taken along the line AA in FIG.

In FIG. 7, the stator 10 has an inverted T-shape. The stator 10 includes a stator base 11, a can 12 supported upward in a recess of the stator base 11, a header 13 sealing the can 12 (see FIG. 6), and a Winding fixed frame 16 placed in the space created by 1 2 and header 13 3, 3-phase armature winding 17 fixed along the longitudinal direction of winding fixed frame 16 It is constituted by a refrigerant passage 18 through which the refrigerant passes.

The armature winding 17 is composed of, for example, a plurality of concentrated winding coils prepared for three phases. It is affixed to the left and right sides of the winding fixed frame 16. In addition, since the winding fixed frame 16 requires its own strength, stainless steel is used.

The can 12 is constructed by symmetrically arranging two stainless steel thin plates formed in a U-shape and welding their joint end faces.The armature winding 17, the winding fixing frame 16 sealed. The two headers 13 also made of stainless steel have a refrigerant supply port 14 for allowing refrigerant to pass through one end of the can 12, and a refrigerant discharge port 15 at the other end. Have each. The can 12 and the header 13 are joined by welding at the joining surface.

Further, by supplying the refrigerant from the refrigerant supply port 14 and discharging the refrigerant from the refrigerant discharge port 15, the refrigerant flows through the refrigerant passage 18 between the armature winding 17 and the can 12. On the other hand, as shown in FIG. 7, the shape of the mover 20 has a concave shape so as to sandwich the armature portion of the stator 10. The mover 20 is composed of a permanent magnet 23 disposed on both sides of the can 12 of the stator 10 through a magnetic gap, and a magnetic field made of a magnetic material for passing a magnetic flux generated by the permanent magnet 23. It is composed of yokes 22 and a mover base 21 that supports them. Further, a plurality of permanent magnets 23 are arranged along the moving direction of the mover (perpendicular to the paper surface) so that the polarity is alternately different for each pole pitch. The canned linear motor configured as described above becomes the mover 20 by flowing a predetermined current according to the electrical relative position of the mover 20 and the stator 10 to the armature winding 17. Acting on the magnetic field generated by the permanent magnets 23, thrust is generated in the mover 20. At this time, the armature winding 17 that has generated heat due to the copper loss is cooled by the refrigerant, and the temperature rise on the surface of the stator 10 is suppressed to a low level.

However, in the first conventional technique, the can 12 and the winding fixing frame 16 are made of stainless steel, and the permanent magnet 23 of the mover 20 is provided on the surface of the member made of stainless steel. When passing above, eddy current is generated according to Lenz's law. Then, the eddy current and the magnetic flux generated by the permanent magnet 23 are linked, and a viscous braking force is generated in a direction opposite to the traveling direction of the mover 20. The magnitude of the viscous braking force is roughly proportional to the thickness and width of the stainless steel, the moving speed of the mover, the number of magnetic poles, and the square of the magnetic flux density. The following problems occurred due to the generation of such viscous braking force.

(1) Even if an armature current necessary to generate a certain thrust is applied, the thrust will be equal to the viscous braking force. Become smaller. Since the armature current must flow for the viscous braking force, the copper loss of the armature winding has increased and the temperature rise on the can surface has increased.

(2) Eddy current is converted to heat at the place where it is generated as so-called eddy current loss. In other words, the heat was generated at the can, the winding fixing frame, which caused the heat, causing a further rise in temperature. Therefore, it cannot be used in applications where the temperature rise is very limited.

(3) As described above, since the viscous braking force increases with the square of the speed, it cannot be used for applications requiring high-speed feed due to the problem (1).

(4) When the thickness of the can was reduced to reduce the viscous braking force, the deformation of the can (the amount of can swelling into the gap) increased due to the pressure of the refrigerant passing through the refrigerant passage. As a result, the flow rate of the refrigerant could not be increased, and the temperature of the can surface increased significantly.

(5) When the thickness of the winding fixed frame was reduced to reduce the viscous braking force, the strength of the winding fixed frame was significantly reduced. As a result, the winding fixed frame subject to the reaction of thrust vibrated or deformed, and it was no longer possible to ensure the required thrust, response and reliability. Therefore, a first object of the present invention is to reduce the viscous braking force, and at the same time, have a strength that can withstand the reaction of thrust, and furthermore, a can that can suppress can deformation into the magnetic gap between the mover and the stator. · Linear motor armature and cand · To provide linear motor overnight.

[Second conventional technology]

FIG. 12 is a front sectional view of an armature of Canned Linear Motors showing the second prior art.

In FIG. 12, 51 is a mover, 52 is a yoke, 53 is a permanent magnet, 54 is a stator, 55 is a can, 56 is a multi-phase armature winding, 57 is a refrigerant passage, Reference numeral 58 denotes a fixing screw, and reference numeral 59 denotes a fixing base. This cand linear motor has an armature winding 56 on the stator 54 side and a yoke 52 and permanent magnet 53 on the mover 51 side. belongs to. On the stator 54 side, the first and second cans 55, 55 are fixedly arranged on a fixed base 59 in a state where they are connected to each other with fixing screws 58. The cans 55, 55 are plate-shaped parts formed by a laminated material formed by impregnating a synthetic resin into a sheet-like member, laminating and pressing the same. Material. As a laminate, a laminated material obtained by laminating glass cloth impregnated with epoxy resin and press-molding is used. In this laminated material, first, a sheet-like member such as paper, thick yarn cloth, fine yarn cloth, or glass cloth is impregnated with a synthetic resin such as phenol resin, epoxy resin, silicon, melamine resin, or polyester. Then, a large number of the sheet-like members are stacked and laminated, and are pressed into a plate shape by a multi-stage laminating press or the like to be formed into a plate shape. An armature winding 56 is provided in a winding accommodating groove provided on the facing surface (inner surface side) of the cans 55, 55, and a refrigerant passage 57 for flowing a refrigerant is provided. Refrigerant is evenly distributed around the armature windings 56, so that heat generated from the armature windings 56 is efficiently absorbed.

On the other hand, as shown by the imaginary line, the mover 51 has a concave shape with the armature portion of the stator 54 interposed therebetween. The mover 51 includes permanent magnets 53, 53 arranged through magnetic gaps on both outer sides of the cans 55, 55 of the stator 54, and a magnetic flux generated by the permanent magnets 53, 53. It is composed of a field yoke 52 made of a magnetic material for passing through. Further, a plurality of permanent magnets 53 are arranged along the moving direction of the mover 51 (perpendicular to the paper surface) so that the polarity is alternately different for each pole pitch.

The canned linear motor configured as described above becomes the mover 51 by passing a predetermined current according to the electrical relative position of the mover 51 and the stator 54 to the armature winding 56. Acting on the magnetic field generated by the permanent magnet 53, a thrust is generated in the mover 51. At this time, the armature winding 56 heated by the copper loss is cooled by the refrigerant, and the temperature rise on the surface of the stator 54 is suppressed low.

However, in the above-described linear motor of the second prior art, as shown in FIG. 13 showing the relationship between the resin surface and dust generation, the surface of the resin can 55 is not smooth and a fine concave portion is formed. Therefore, it was found that particles of about 0.1 m may adhere to the concave portion directly or through the accumulated water.

Therefore, when used as a linear stage drive of a semiconductor exposure apparatus in a clean room, if the can surface is exposed to UV (ultraviolet rays) from the exposure light source, the adhesive force is weakened and particles are dispersed from the can surface, resulting in a decrease in cleanliness. It was also found that it caused.

FIG. 14 is an explanatory diagram showing the relationship between the resin composition and gas generation. Can surface When exposed to a light source, C and H for compositions of resin shown in Fig. 1 4, and 〇 _second aerial is excited by UV CH _4, C ₂ H _6, in air becomes C_〇 ₂ or H ₂ 0, etc. And the chemical cleanliness is reduced. Reduced chemical cleanliness, i.e. CH _4, C ₂ H _6, when C_〇 ₂ or H ₂ 〇 like exist, adheres these CH ₄ or the like on a silicon wafer, the manufacturing yield of the silicon chip is deteriorated.

As described above, in the case of the second prior art Linamo, there was a problem that when exposed to UV from the exposure light source, dust and gas were generated from the can surface. Also, depending on the type of refrigerant flowing into the can, the refrigerant sometimes permeated and diffused into the resin and oozed from the surface of the can. Furthermore, the resin was gradually eroded by the refrigerant, and in the worst case over a long period of use, the resin could be perforated, causing liquid leakage.

Furthermore, when assembling to a linear stage, if the can surface comes into contact with the stage etc., the resin will be damaged and the resin surface will have more irregularities, so the exposed surface area of the resin will increase, and the dust and gas generation will increase. There was a problem.

Accordingly, a second object of the present invention is to reduce the generation of dust and gas from the can surface even when exposed to a light source for exposure, and to cause leakage of liquid due to erosion of the resin of the can by the refrigerant flowing in the can. A canned motor with a can structure that suppresses dust generation and gas generation due to increased exposure surface area due to the resin surface being damaged due to the contact of the can surface with the stage etc. To provide armature and canned linear motors.

[Disclosure of the Invention]

In order to solve the above problem, the present invention according to claim 1 includes a winding fixing frame, an armature winding fixed along a longitudinal direction of the winding fixing frame, and a frame including the winding fixing frame. A metal housing provided so as to surround the armature, a can for sealing both openings of the housing, and the housing and the can so that a refrigerant can flow around the armature winding. A can having a refrigerant passage formed in a closed space formed, and a refrigerant supply port and a refrigerant discharge port provided at one of one end and the other end of both ends of the can * In the linear motor armature, the can is made of resin. The configuration according to claim 1 eliminates the eddy current generated in the can and the winding fixed frame in the past, and eliminates the heat generated in the can part due to the eddy current and the heat generated in the armature winding due to an increase in the thrust corresponding to the viscous braking force. Can be. Also, since viscous braking force is not generated regardless of the speed, it can be used for high speed applications.Furthermore, the winding fixed frame that receives the reaction of thrust is fixed with a metal housing. As a result, vibration of the winding fixed frame can be suppressed.

According to a second aspect of the present invention, in the canned linear motor armature according to the first aspect, the can is curved in advance, and the can is connected to both openings of the housing such that the convex surfaces of the curvature face each other. It is characterized by being arranged in.

According to the configuration of claim 2, it is possible to suppress the deformation of the can into the gap facing the mover due to the pressure of the refrigerant, but it becomes smaller, so that the flow rate of the refrigerant can be increased. Further, a rise in the temperature of the can surface can be reduced.

Further, the invention according to claim 3 is the canned linear motor electric device according to claim 1 or 2, wherein the armature winding is constituted by a plurality of concentrated winding coils, and a nonmagnetic material is provided in the air core of the concentrated winding coil. A pillar of material is provided, and the pillar is fastened to the can.

According to the configuration of the third aspect, similarly to the second aspect, the flow rate of the refrigerant can be increased, and the rise in the temperature of the can surface can be reduced.

Further, according to the invention of claim 4, in the canned linear motor armature according to claim 1 or 2, the can and the winding fixing frame are formed of a resin filled with glass fiber or carbon fiber. It is characterized by.

According to the configuration of the fourth aspect, it is possible to suppress the deformation of the can into the gap facing the mover due to the pressure of the refrigerant. As in claims 2 and 3, the flow rate of the refrigerant can be increased, and the rise in temperature can be reduced.

The invention of a canned linear motor according to claim 5 is the canned linear motor armature according to claim 1 or 2, wherein the can is formed of a resin plate, and at least an outer surface or an inner surface of the resin plate is provided. A coating cover is provided.

According to the configuration of claim 5, at least the outer surface of the resin plate material constituting the can or Since the inner surface is covered with a coating cover, when used for driving a linear stage of a semiconductor exposure apparatus in a clean room, even if the can surface is exposed to a light source for exposure, it generates dust and gas from the can surface. Thus, the problem of dust generation and gas generation can be reduced, and liquid leakage can be reduced even if the resin in the can is eroded by the refrigerant flowing in the can.

According to a sixth aspect of the present invention, in the canned linear motor armature according to the fifth aspect, the coating cover is a metal film, foil, or plate. According to the configuration of claim 6, since the coating cover is formed of a metal film, foil or plate, at least the outer surface or the inner surface of the resin plate material forming the can is covered with the metal film, foil or plate, When used in a clean room to drive a linear stage of a semiconductor exposure apparatus, even if the can surface is exposed to a light source for exposure, it can reduce the generation of dust and gas from the can surface and reduce the problem of chemical clean. In addition, the refrigerant flowing into the can can erode the resin of the can and reduce the leakage of the liquid, and can also be made robust against mechanical shock.

Therefore, when assembling to the linear stage, it is possible to suppress the increase in the exposed area due to the unevenness of the can surface caused by the contact of the can surface with the stage, etc. .

The invention according to claim 7 is the canned linear motor armature according to claim 6, wherein the metal film is formed by plating.

According to the configuration of claim 7, since a metal plating film is used as the coating cover of claim 6, at least the outer surface or the inner surface of the resin plate material constituting the can is covered with a plating that is strong against mechanical shock. In other words, when used for driving a linear stage of a semiconductor exposure apparatus in a clean room, even if the can surface is exposed to an exposure light source, it is possible to reduce the problem of dust and gas generation from the can surface. In addition, the leakage of liquid can be reduced even if the resin in the can is eroded by the refrigerant flowing in the can. Since no equipment is required, small quantities can be manufactured at low cost. The invention according to claim 8 is the canned linear motor armature according to claim 6, characterized in that the metal foil or plate is made of stainless steel.

According to a ninth aspect of the present invention, in the canned linear motor armature according to the eighth aspect, the stainless steel foil or plate is attached to the can by adhesion.

According to the configuration of claims 8 and 9, a foil or plate made of stainless steel is used as the coating cover of claim 6, and this is adhered to the can, so that at least the outer surface or the inner surface of the resin plate constituting the can is mechanical. It will be covered with stainless steel, which is strong against impact, and when used for driving the linear stage of a semiconductor exposure apparatus in a clean room, even if the can surface is exposed to the light source for exposure, it will generate dust and dust from the can surface. It can reduce the problem of gas generation, can reduce liquid leakage even if the resin in the can is eroded by the refrigerant flowing in the can, and the stainless steel has a high Young's modulus and does not easily wrinkle Therefore, the bonding work can be performed easily and large-scale equipment is not required, so that a small number of units can be manufactured at low cost.

According to a tenth aspect of the present invention, in the canned linear motor armature according to the fifth aspect, the resin plate is made of a resin filled with glass fiber or carbon fiber.

According to the configuration of the tenth aspect, it is possible to suppress the deformation of the can into the gap facing the mover due to the pressure of the refrigerant, so that the can-free fatigue of the can is eliminated and the liquid leakage can be reduced. The flow rate can be increased and the temperature rise can be reduced.

The invention of a canned linear motor according to claim 11 is the armature according to any one of claims 1 to 10, wherein the armature and the armature are arranged to face each other via a magnetic gap and are alternately polarized. A field yoke in which a plurality of permanent magnets different from each other are arranged side by side, and one of the armature and the field yoke as a stator and the other as a movable element, and the field yoke and the electric machine The feature is that the child runs relatively.

According to the configuration of claim 11, the can-structured electric machine according to any of claims 1 to 10. At least the outer or inner surface of the resin plate material that composes the can is covered with a coating cover, and when used for driving a linear stage of a semiconductor exposure apparatus in a clean room, the can surface is exposed to a light source for exposure. However, the problem of dust generation and gas generation from the can surface can be reduced, and liquid leakage can be reduced even if the resin of the can is eroded by the refrigerant flowing in the can. Further, in such a canned linear motor, when the electric loading means having the armature winding is a stator, and the magnetic loading means constituted by a permanent magnet is a moving element, the can covering the stator is directly The effect of reducing dust and gas generation due to exposure to the air is even greater.

In addition, since the eddy current generated in the can is eliminated, an armature that does not generate heat in the can portion due to the eddy current can be obtained, and a canned linear motor that does not generate heat can be obtained by disposing the field yoke opposed thereto. it can.

[Brief description of drawings]

FIG. 1 is an overall perspective view of a canned linear motor showing a first embodiment of the present invention, FIG. 2 is a cross-sectional view of a canned linear motor along the line A--A in FIG. 1, and FIG. FIG. 4 is a view showing the internal structure of the stator with the can removed, FIG. 4 is a front sectional view of a stator of a canned linear motor showing a second embodiment of the present invention, and FIG. 5 is a third embodiment of the present invention. Fig. 6 is an overall perspective view of a canned linear motor showing the first prior art, and Fig. 7 is a canned linear along the line A-A in Fig. 6. FIG. 8 is an overall perspective view of a canned linear motor according to a fifth embodiment of the present invention, and FIG. 9 is a front sectional view of the canned linear motor along line A--A in FIG. 10 is an enlarged front sectional view illustrating the configuration of the can 12 of FIG. 9, and FIG. 11 is a coat showing a sixth embodiment of the present invention. In enlarged front sectional view of the can in which a Ngukaba,

(A) is a specific example of a coating cover, (B) is a modified example of (A), FIG. 12 is a configuration explanatory view showing a configuration of a can of the second prior art, and FIG. 3 is an explanatory diagram of the resin surface and dust generation, and FIG. 14 is an explanatory diagram of the resin composition and gas generation.

[Best Mode for Carrying Out the Invention]

[First embodiment]

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an overall perspective view of a candid linear motor according to a first embodiment of the present invention.

In the figure, 100 is a stator, 101 is a housing, 102 is a can, 103 is a port for fixing a can, 100 is a holding plate, 105 is a terminal block, and 106 is a terminal block. Is a refrigerant supply port, 107 is a refrigerant discharge port, 200 is a mover, 201 is a field yoke support member, 202 is a field yoke, and 203 is a permanent magnet.

The mover 200 is provided with field yokes 202 above and below at a distance corresponding to the length of the field yoke support member 201, and the field support members 201 are arranged at the four corners. Then, permanent magnets 203 are attached to opposing surfaces of the field yokes 202, respectively.

Then, the stator 100 is inserted into the hollow space of the mover 200, in which case the permanent magnet 203 is arranged so as to face the armature 108 of the stator 100. . The mover 200 is supported by a linear guide (not shown) or the like.

Therefore, when a predetermined current is applied to the armature winding 108, a thrust is generated in the mover 100 by the action of the magnetic field generated by the permanent magnet 203, and the mover 100 moves in the traveling direction indicated by the arrow. Will move.

FIG. 2 is a front cross-sectional view of the canned linear motor according to the present invention along the line AA in FIG. Fig. 3 shows the internal structure of the stator excluding the can of Fig. 2. In FIG. 2 and FIG. 3, the stator 100 has a mouth-shaped (frame-shaped) metal housing 101 having a hollow inside, and a stator 100 for covering the hollow of the mouth-shaped housing 101. A plate-shaped can 102 connected to an elephant (shape) of the outer shape of the housing 101, a port 1103 for fixing a can for fixing the can 102 to the housing 101, and a can for fixing the can A holding plate 104 having a through hole of a bolt 103 for holding the can with an even load; a three-phase armature winding 108 arranged in the hollow of the housing 101; Winding fixing frame 1 09 that fixes armature winding 108, refrigerant passage 1 110 through which refrigerant passes through housing 101 and can 102, and housing 1 O 1-ring 1 1 1 slightly larger than the edge of 0 1, and winding fixing port 1 1 2 for fixing the winding fixing frame 1 09 and the housing 1 1 1 ing. The material of the can 102 is made of stainless steel in the first prior art, but is made of resin according to the present invention. For example, an epoxy resin, which is a functionalizing resin, or a polyphenylene sulfide (PPS), which is a thermoplastic resin, is used.

The shape of the hollow portion of the housing 101 is drawn so as to surround the outer periphery of the armature winding 108. The armature windings 108 are arranged on both sides of a plate-shaped winding fixing frame 109. The winding fixed frame 1 09 integrated with the armature winding 108 is placed in the hollow space of the housing 101, and fixed to the housing 101 with the winding fixing port 1 1 2 Is done. Case 1 0

The front and back edges of 1 are provided with orbital grooves, in which the o-rings 11 are arranged. Then, the can 102 is arranged on the front and back of the housing 101 so as to cover the housing 101. A holding plate 104 is laid from the top of the can 102 along the edge of the housing 101, and is tightened with the can fixing bolts 103.

1 is fixed.

The armature winding 108 is formed by preparing a plurality of concentrated winding coils for three phases, and is attached to the left and right sides of the fixed winding frame 109. Power is supplied to the armature winding 108 from a terminal block 105 attached to the housing 101. The terminal block 105 and the armature winding 108 are electrically connected by lead wires (not shown). The refrigerant is supplied from a refrigerant supply port 106 provided in the housing 101 and discharged from a refrigerant discharge port 107. In the meantime, the refrigerant flows through the refrigerant passage 110 between the armature winding 108 and the can 102, and cools the armature winding 108 that generates heat.

On the other hand, as shown in FIG. 2, the cross-sectional shape of the mover 200 as viewed from the traveling direction has a mouth shape so as to sandwich the armature portion of the stator 100. The mover 200 is a magnetic material for passing the magnetic flux created by the permanent magnet 203 and the permanent magnet 203 arranged on both sides of the can 102 of the stator 100 via magnetic gaps. And a field yoke supporting member 201 that supports them. A plurality of magnets 203 are arranged along the moving direction of the mover (perpendicular to the plane of the drawing) so that the poles are alternately alternately arranged at every pole pitch.

The canned linear motor configured as described above is configured such that a predetermined current corresponding to the electrical relative position of the mover 200 and the stator 100 is supplied to the armature winding 108 so that the mover A thrust is generated in the mover 200 by acting on the magnetic field generated by the permanent magnet 203, which becomes 0. At this time, since the armature winding 108 heated by the copper loss is cooled by the refrigerant flowing through the refrigerant passage, it is possible to suppress a rise in the temperature of the surface of the can 102 as in the first related art. it can.

Here, the effect of the first embodiment is different from the first conventional technique in the following points. The use of resin for the can and winding fixing frame, which conventionally used stainless steel, has eliminated the eddy current generated in that part. In other words, problems such as heat generation in the can part due to eddy current and reduction in thrust due to viscous braking force can be solved. Even if the speed increases, no eddy current is generated, so it can be used for high-speed applications.

Also, simply changing the can and the winding fixing frame from stainless steel to resin deteriorates the strength of the stator or its member itself. The winding fixed frame must be strong enough to withstand the thrust reaction or rigid enough not to vibrate due to natural vibration. In the first embodiment, this problem is solved by increasing the rigidity of the stator itself by using a metal housing and increasing the thickness of each resin member.

[Second embodiment]

Next, a second embodiment of the present invention will be described.

FIG. 4 is a front sectional view of a stator of a canned linear motor according to a second embodiment of the present invention. 100 'is the stator according to the invention. As in the first embodiment, the stator 100 ′ has a frame-shaped metal casing 101 having a hollow inside, and a plate-shaped resin can 1 covering the hollow of the casing 101. 0 2a and resin can 1 0 2a in housing 1 0

Port 1 103 for fixing the can for fixing to 1, Port 104 for fixing the port 103 for fixing the can, and a holding plate 104 that evenly presses the can, and placed inside the hollow of the housing 101 The three-phase armature winding 108, the winding fixing frame 109 fixing the armature winding 108, the housing 101 and the coolant in the can 102a , Through which the refrigerant passes, an O-ring that is slightly larger than the edge of the housing, and a winding fixing frame

And 109 and winding fixing bolts 112 for fixing the casing 101.

Thus, the effect of the second embodiment is similar to that of the first embodiment. Since 2a is made of resin, eddy current can be eliminated.

The second embodiment differs from the first embodiment in that the can 102 of the first embodiment has a straight plate shape, whereas the can 10 of the second embodiment has a straight plate shape. 2a is that it is formed to be curved in advance. That is, when the refrigerant is not flowing through the refrigerant passage 110, the can 102 a is formed in a shape that is curved in advance so that it does not slightly contact the armature winding 108 at the center thereof. When the refrigerant flows through the refrigerant passage 110, the can 102a is deformed by the pressure of the refrigerant so that the central portion protrudes outward.

By thus forming the can in a curved shape in advance, it is possible to suppress can deformation to the gap facing the mover due to the flow rate of the refrigerant, as an effect exceeding that of the first embodiment. Therefore, the flow rate of the refrigerant can be increased as compared with the first embodiment, and the temperature rise can be further reduced.

[Third embodiment]

Next, a third embodiment of the present invention will be described.

FIG. 5 is a front sectional view of a canned linear motor stator according to a third embodiment. Reference numeral 100 "denotes a stator according to the present invention. As in the first and second embodiments, a stator 100" includes a frame-shaped metal casing 101 having a hollow interior, A plate-shaped resin can 102 b that covers the hollow of the body 101, a can-fixing port 110 3 for fixing the resin can 102 b to the housing 101, and a can-fix Presser plate 104 that has through-holes of Porto 103 and presses cans evenly, 3-phase armature winding 108 arranged in the hollow of housing 101, Armature winding 1 From the edge of the housing 101, the winding fixing frame 1 09 fixing the housing 8, the refrigerant passage 1 10 through which the refrigerant passes through the housing 101 and the can 102 b, It is composed of an O-ring 111, which is slightly larger, a winding fixing frame 109, and a winding fixing port 112 for fixing the housing 101. Numeral 113 denotes a non-magnetic material column provided in the concentrated coil air core of the armature winding 108, and numeral 114 denotes a column fixing screw.

The difference between the third embodiment and the first and second embodiments is that the pillar 1 13 passing through the air core of the concentrated winding coil and the pillar fixing screw 1 14 are mechanically fastened. . In other words, the can 1 102 b is fixed by the support 113 fixed to the winding fixed frame 109. Supported in the center. When the refrigerant flows through the refrigerant passage 110, the can 102 b b projects the middle of the column 113 and the housing 101 to the gap facing the mover.

The effect of the third embodiment is that the eddy current is eliminated, as in the first and second embodiments. Further, as an effect surpassing the first embodiment, the center of the can is supported by a column. By doing so, it is possible to suppress can deformation into the void due to the pressure of the refrigerant. Since the flow rate of the refrigerant can be increased as compared with the first embodiment, the flow rate of the refrigerant can be increased and the temperature rise can be further reduced as in the second embodiment.

[Fourth embodiment]

Next, a fourth embodiment of the present invention will be described.

The fourth embodiment is different from the first to third embodiments in that a resin filled with glass fiber or carbon fiber is used as the material of the can and the winding frame.

In general, the Young's modulus of the unidirectional glass fiber laminated thermosetting resin (GFRP) is about 6 0, 0 0 0 N / mm 2, the Young's modulus of the thermosetting resin laminated carbon fibers (CFRP) also becomes about ^{2 0, 0 0 O NZmm 2} . In this way, GFRP and CFRP can obtain a Young's modulus comparable to that of aluminum or stainless steel, so it is possible to reduce the can deformation rate or improve the strength of the winding fixed frame. In the present invention, since the can and the winding fixing frame are formed in a flat plate shape, these materials can be easily applied.

That is, the effect of the fourth embodiment is that, as in the first to third embodiments, the eddy current is eliminated and the can deformation to the gap facing the mover can be suppressed. The coolant flow rate can be increased, and the temperature rise can be further reduced.

In the above embodiment, the structure in which the armature has the armature winding and the stator has the permanent magnet as the magnetic field has been described, but the permanent magnet is used in the mover, and the armature winding is used in the stator. The structure may be good.

In addition, although the shape of the mover is a mouth shape, it goes without saying that the present invention is also applicable to the same concave shape as that of the first prior art or a structure in which permanent magnets are simply arranged on one side.

[Fifth embodiment]

Hereinafter, a fifth embodiment of the present invention will be described with reference to FIGS. FIG. 8 is an overall perspective view of a canned linear motor (magnetic flux penetration type) showing a fifth embodiment of the present invention. In the figure, 10 is a stator, 11 is a stator base, 12 is a can, 13 is a header, 14 is a refrigerant supply port, 15 is a refrigerant discharge port, 20 is a mover, and 21 is a mover. The mover base, 22 is a field yoke, and 23 is a permanent magnet.

The stator 10 includes two cans 12, a housing 19 connecting the two cans 12 to each other at an upper portion and a lower portion, and two cans 12 and a housing 19. A winding fixing frame arranged in a closed space consisting of a header 13 that seals the space at the front and rear ends in the longitudinal direction, and a can 12, a housing 19, and a header 13. 16, a three-phase armature winding 17 fixed along the longitudinal direction of the winding fixing frame 16, and a refrigerant passage 18 through which the refrigerant passes through the can 12. I have.

The header 13 is formed of a stainless steel material, and has a refrigerant supply port 14 for allowing a refrigerant to pass at one end and a refrigerant discharge port 15 at the other end of both ends of the can 12. The can 12 and the housing 19 and the header 13 are joined by welding at the joining surface. Further, by supplying the refrigerant from the refrigerant supply port 14 and discharging the refrigerant from the refrigerant discharge port 15, the refrigerant flows through the refrigerant passage 18 between the armature winding 17 and the can 12.

On the other hand, the shape of the mover 20 is an inverted concave shape so as to sandwich the armature portion of the stator 10. The mover 20 is composed of a permanent magnet 23 disposed on both sides of the can 12 of the stator 10 through a magnetic gap, and a magnetic field made of a magnetic material for passing a magnetic flux generated by the permanent magnet 23. It is composed of yokes 22 and a mover base 21 that supports them. Further, a plurality of permanent magnets 23 are arranged along the moving direction of the mover (the direction of the arrow in the figure) so that the polarity is alternately different for each pole pitch.

The mover 20 is supported by the stator 10 by a linear guide or the like (not shown).

The canned linear motor configured as described above becomes a mover 20 by flowing a predetermined current according to the electrical relative position of the mover 20 and the stator 10 through the armature winding 17. Acting on the magnetic field generated by the permanent magnet 23, a thrust is generated in the mover 20, and the mover 20 moves in the traveling direction indicated by the arrow. At this time, the armature windings 17 generated by the copper loss are cooled by the refrigerant to reduce the temperature rise on the surface of the stator 10. I keep it down.

FIG. 9 is a front sectional view of the cand linear motor taken along the line AA in FIG. In FIG. 9, 10 is a stator, 12 is a can, 16 is a winding fixing frame, 17 is an armature winding, 18 is a refrigerant passage, and 19 is a housing.

The can 12 uses a resin plate 1 2 2 as a base material, and the resin plate 1 2 2 uses a plate-like GFRP made of glass cloth solidified with epoxy resin, or a plate made of carbon fiber solidified with epoxy resin CFRP can be used. These have good distribution and can be obtained at relatively low cost.

Since the winding fixed frame 16 requires its own strength, stainless steel is used.

The armature winding 17 is formed, for example, by preparing a plurality of concentrated winding coils for three phases, and is attached to the left and right sides of the winding fixed frame 16.

The housing 19 is a strength material against the deflection of the stator 10. In the case of the present embodiment, the housing 19 can be formed by machining stainless steel, machining aluminum, or die casting. Then, it was constructed by machining aluminum material. As described above, the armature winding 17 is attached to the winding fixing frame 16 so as to sandwich both sides along the longitudinal direction, and the winding fixing frame 16 is fixed between the upper and lower housings 19. ing. The housing 19 is provided with a can 12 so as to cover these armature windings 17 while keeping a desired gap from the surface of the armature windings 17. A coolant for cooling the armature winding 17 flows through the gap between the armature winding 17 and the can 12, so that the housing 19 and the can 12 are illustrated. It was fixed so that it was tightly closed using a 0 ring or the like. Due to the problem of depletion of the ozone layer in recent years, HFE-7200 and the like have been used in place of florinate, and the solubility of water cannot be ignored. In the examples of the present invention, HFE-720 was used as the refrigerant.

Reference numeral 121 denotes a coating cover (to be described later) provided according to the present invention, which covers the resin plate 122, which is the base material of the can 12, and separates dust and gas from the surface of the resin plate 122. Has been reduced.

FIG. 10 is an enlarged front sectional view illustrating the configuration of the can 12 of FIG. In FIG. 10, reference numeral 10 denotes a stator, reference numeral 12 denotes a can, reference numeral 121 denotes a coating cover provided by the present invention, reference numeral 122 denotes a can material (resin plate material), and reference numeral 19 denotes a housing. As shown in FIG. 10, the can 12 has a resin plate 1 on the outer surface of the resin plate 1 2 facing the permanent magnet 3 (FIG. 9) and an inner surface facing the armature winding 17 (FIG. 9). It was configured to provide a coating cover 1 2 1 covering 2 2.

According to the above-described structure of the can, the coating cover 1 2 1 is provided on at least the outer surface or the inner surface of the resin plate 1 2 2 constituting the can material 1 2, so that the linear stage of the semiconductor exposure apparatus can be driven in a clean room. When the can surface is used, even if the can surface is exposed to the UV light from the light source for exposure, the generation of dust and gas from the can surface can be reduced, and the problem of chemical clean can be reduced. Even if the resin of the can is eroded, liquid leakage can be reduced. Table 1 shows the results of counting the number of particles with and without a coating cover by irradiating the surface with UV.

[1]

In this example, a plate-like C F R P was used for the resin plate material, and the coating cover 121 was formed by the nickel plating shown in the following sixth example.

As shown in Table 1, particles were generated in class 15 without the coating cover, but dropped dramatically to class 3 with the coating cover 121. As described above, by attaching the coating cover 1 2 1, the irregularities on the surface of the lumber plate 55 are reduced, so that the particles are less likely to adhere to the surface of the resin plate 55 directly or via moisture. As a result, dust generation has been dramatically reduced. That is, it was confirmed that the linear motor with the coating cover hardly generated dust even when exposed to the light source.

In addition, when the coating cover is used as in the present invention, even if the resin is eroded by the refrigerant, even if a hole is formed in the resin, it can be prevented by the coating cover.

In addition, the erosion of the resin gradually causes a capillary phenomenon between the resin and the coating cover. As a result, rapid and sudden large leaks can be prevented.

[Sixth embodiment]

Next, specific examples of the coating cover of the present invention will be described.

FIG. 11 is an enlarged front sectional view of a can provided with a coating cover according to a sixth embodiment of the present invention. (A) is a specific example of a coating cover, and (B) is a modified example of (A). Is shown.

First, in Fig. 11 (A), 10 is a stator, 12 is a can, 12 la is a metal film according to the present embodiment, 122 is a can material (resin plate material), and 19 is a housing. It is. The can material 122 and the casing 19 were the same as those shown in FIG. 10, and the can 121 was fixed tightly using an O-ring or the like (not shown). As a coating cover 122 on the outer and inner surfaces of the resin plate material 122 shown in FIG. 10, a metal film 121 a is formed. The metal film 122 a is provided by plating. In this embodiment, nickel plating is used, but zinc plating, copper plating, or aluminum plating may be used. The thickness is preferably about 3 to 20 m.

According to the above-described can structure, at least the outer or inner surface of the resin plate material 1 2 2 constituting the can material 12 is provided with a coating cover made of a metal film 12 1 a, thereby providing a clean room. When used for driving a linear stage of a semiconductor exposure apparatus, the problem of dust generation and gas generation from the can surface can be reduced even if the can surface is exposed to the UV light from the exposure light source. It is possible to reduce liquid leakage even if the resin of the can is eroded by the refrigerant flowing inside, and to make the resin can covered with metal made of metal to make it strong against mechanical shock. it can. Therefore, when assembling to a linear stage, it is possible to suppress the increase in the exposed area due to the unevenness of the can surface caused by the contact of the can surface with the stage, etc., and to suppress the increase in dust generation or gas generation. it can. In addition, since the coating cover is formed by plating, the work of providing the coating cover on the surface of the resin plate material can be greatly simplified, and a large number of units can be manufactured at low cost.

Next, FIG. 11B will be described. In FIG. 11 (B), 10 is a stator, 12 is a can, 12 lb is a metal foil according to the present embodiment, 122 is a can material (resin plate material), and 19 is a housing. .

The can material 122 and the housing 19 were the same as those shown in FIG. 10, and the can 122 was fixed so as to be hermetically closed using a ring or the like (not shown). Metal foils 1 2 1 b are formed as coating covers 1 2 1 on the outer and inner surfaces of the resin plate 1 2 2 shown in FIG. In the present embodiment, the metal foil 121b was made of stainless steel having a thickness of about 5 to 20 m, and this was adhered to the can 122 by bonding.

According to the above-described can structure, at least the outer or inner surface of the resin plate material 12 constituting the can material 12 is provided with the coating cover 1 21 b made of stainless steel which is strong against mechanical shock. When used for driving a linear stage of a semiconductor exposure apparatus in a clean room, even if the surface of the can is exposed to the UV light from the exposure light source, the generation of dust and gas from the can surface is reduced, and the problem of chemical clean is reduced. In addition, the leakage of liquid can be reduced even if the resin in the can is eroded by the refrigerant flowing in the can.Foils made of stainless steel have a high Young's modulus and are unlikely to wrinkle, so they are used as metal foils. The use of stainless steel has the advantage that the bonding work can be performed easily and large-scale equipment is not required when a small number is manufactured.

Although a metal foil is used as the coating cover in this embodiment, a metal plate may be used instead.

The number of particles with and without the coating cover using a metal foil was counted by irradiating the surface with UV and the results were similar to those in Table 1. In other words, the generation of particles was class 15 without the coating cover, but it was reduced to class 3 by providing a coating cover 121 using metal foil.

In the above embodiment, the structure has been described in which the stator has the armature winding and the mover has the permanent magnet as the field, but the armature winding is used for the mover and the permanent magnet is used for the stator. The structure may be good.

[Industrial applicability] As described above, the canned linear motor armature and the canned linear motor according to the present invention are useful as, for example, those used in semiconductor manufacturing equipment and machine tools that require high precision, fine feed and low temperature rise. is there.

Claims

The scope of the claims

1.A winding fixed frame, an armature winding fixed along the longitudinal direction of the winding fixed frame, a metal housing provided so as to surround the winding fixed frame in a frame shape, A can that seals both openings of the housing, a refrigerant passage formed in a closed space formed by the housing and the can so that a refrigerant can flow around the armature winding, A canned linear motor armature comprising a refrigerant supply port and a refrigerant discharge port provided on one of one end side and the other end side of both ends of the can.

The canned linear motor overnight electric machine wherein the can is made of resin.

2. The can-linear motor armature according to claim 1, wherein the can is curved in advance, and the can is arranged in both openings of the housing such that the convex surfaces of the curve face each other. .

3. The armature winding is composed of a plurality of concentrated winding coils, a support made of a non-magnetic material is provided in the air core of the concentrated winding coil, and the support and the can are fastened. The canned linear motor armature according to 1 or 2.

4. The canned linear motor armature according to claim 1, wherein the can and the winding fixing frame are made of a resin filled with glass fiber or carbon fiber.

5. The armature according to claim 1, wherein the can is made of a resin plate, and a coating cover is provided on at least an outer surface or an inner surface of the resin plate.

6. The canned linear motor armature according to claim 5, wherein the coating cover is a metal film, foil or plate.

7. The can-linear motor armature according to claim 6, wherein the metal film is formed by plating.

8. The canned linear motor armature according to claim 6, wherein said metal foil or plate is made of stainless steel.

9. The armature for a canned linear motor according to claim 8, wherein the stainless steel foil or plate is attached to the can by adhesion.

10. The canned linear motor armature according to claim 5, wherein the resin plate is made of a resin filled with glass fiber or carbon fiber.

11. The armature according to any one of claims 1 to 10, and a plurality of permanent magnets, which are arranged to face the armature with a magnetic gap therebetween and alternately have different polarities, are arranged side by side. A field yoke, wherein one of the armature and the field yoke serves as a stator, and the other serves as a mover, and the field yoke and the armature run relatively. It is characterized by cand linear motion.