WO2002097409A1 - Verfahren zur automatisierten erkennung, spektroskopischen analyse und identifizierung von partikeln - Google Patents

Verfahren zur automatisierten erkennung, spektroskopischen analyse und identifizierung von partikeln Download PDF

Info

Publication number
WO2002097409A1
WO2002097409A1 PCT/EP2002/005779 EP0205779W WO02097409A1 WO 2002097409 A1 WO2002097409 A1 WO 2002097409A1 EP 0205779 W EP0205779 W EP 0205779W WO 02097409 A1 WO02097409 A1 WO 02097409A1
Authority
WO
WIPO (PCT)
Prior art keywords
particle
scattered light
particles
identification
analysis
Prior art date
Application number
PCT/EP2002/005779
Other languages
German (de)
English (en)
French (fr)
Inventor
Heiko Leonhardt
Ludwig Pohlmann
Lothar Holz
Markus Lankers
Original Assignee
Rap.Id Particle Systems Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rap.Id Particle Systems Gmbh filed Critical Rap.Id Particle Systems Gmbh
Priority to DE10292357T priority Critical patent/DE10292357D2/de
Publication of WO2002097409A1 publication Critical patent/WO2002097409A1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4412—Scattering spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G01N15/1468—Electro-optical investigation, e.g. flow cytometers with spatial resolution of the texture or inner structure of the particle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G01N15/1434—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
    • G01N2015/1452—Adjustment of focus; Alignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N2021/646—Detecting fluorescent inhomogeneities at a position, e.g. for detecting defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G01N2021/656—Raman microprobe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/103—Scanning by mechanical motion of stage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/108—Miscellaneous
    • G01N2201/1087—Focussed scan beam, e.g. laser

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
PCT/EP2002/005779 2001-05-31 2002-05-24 Verfahren zur automatisierten erkennung, spektroskopischen analyse und identifizierung von partikeln WO2002097409A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10292357T DE10292357D2 (de) 2001-05-31 2002-05-24 Verfahren zur automatisierten Erkennung, spektroskopischen Analyse und Identifizierung von Partikeln

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10127538 2001-05-31
DE10127538.2 2001-05-31

Publications (1)

Publication Number Publication Date
WO2002097409A1 true WO2002097409A1 (de) 2002-12-05

Family

ID=7687430

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/005779 WO2002097409A1 (de) 2001-05-31 2002-05-24 Verfahren zur automatisierten erkennung, spektroskopischen analyse und identifizierung von partikeln

Country Status (2)

Country Link
DE (1) DE10292357D2 (es)
WO (1) WO2002097409A1 (es)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004008762A1 (de) * 2004-02-23 2005-09-08 Erwin Kayser-Threde Gmbh Verfahren und Vorrichtung zur Detektion und zum Identifizieren von Biopartikeln
WO2008020343A2 (en) * 2006-08-18 2008-02-21 Primus Special Projects (Pty) Ltd A sorter
NL1039263C2 (nl) * 2011-12-23 2013-06-26 Zevenaar Elektronica & Sensoren B V Apparaat en werkwijze voor het tellen en bemeten van deeltjes.
EP1904826B1 (en) * 2005-07-14 2019-02-20 Battelle Memorial Institute Systems and methods for biological and chemical detection
CN110346042A (zh) * 2019-08-01 2019-10-18 南京邮电大学 一种多传感器杂散光消除光谱仪

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0056426A2 (de) * 1980-10-08 1982-07-28 Firma Carl Zeiss Vorrichtung zur Darstellung von Probenparametern
US4766324A (en) * 1987-08-07 1988-08-23 Tencor Instruments Particle detection method including comparison between sequential scans
DE4111903A1 (de) * 1991-04-12 1992-10-15 Bayer Ag Spektroskopiekorrelierte licht-rastermikroskopie
EP0685731A1 (en) * 1994-06-02 1995-12-06 Mitsubishi Denki Kabushiki Kaisha Positioning method and analysis method of fine foreign matter and analyzer used therefor
DE19946110C1 (de) * 1999-09-17 2001-02-01 Apsys Advanced Particle System Optisches Verfahren zur Charakterisierung von Partikeln in einem System, z.B. einem Reinraum, und Vorrichtung zur Durchführung des Verfahrens

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0056426A2 (de) * 1980-10-08 1982-07-28 Firma Carl Zeiss Vorrichtung zur Darstellung von Probenparametern
US4766324A (en) * 1987-08-07 1988-08-23 Tencor Instruments Particle detection method including comparison between sequential scans
DE4111903A1 (de) * 1991-04-12 1992-10-15 Bayer Ag Spektroskopiekorrelierte licht-rastermikroskopie
EP0685731A1 (en) * 1994-06-02 1995-12-06 Mitsubishi Denki Kabushiki Kaisha Positioning method and analysis method of fine foreign matter and analyzer used therefor
DE19946110C1 (de) * 1999-09-17 2001-02-01 Apsys Advanced Particle System Optisches Verfahren zur Charakterisierung von Partikeln in einem System, z.B. einem Reinraum, und Vorrichtung zur Durchführung des Verfahrens

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004008762A1 (de) * 2004-02-23 2005-09-08 Erwin Kayser-Threde Gmbh Verfahren und Vorrichtung zur Detektion und zum Identifizieren von Biopartikeln
DE102004008762B4 (de) * 2004-02-23 2006-10-12 Erwin Kayser-Threde Gmbh Verfahren und Vorrichtung zur Detektion und zum Identifizieren von Biopartikeln
EP1904826B1 (en) * 2005-07-14 2019-02-20 Battelle Memorial Institute Systems and methods for biological and chemical detection
WO2008020343A2 (en) * 2006-08-18 2008-02-21 Primus Special Projects (Pty) Ltd A sorter
WO2008020343A3 (en) * 2006-08-18 2008-04-24 Primus Special Projects Pty Lt A sorter
NL1039263C2 (nl) * 2011-12-23 2013-06-26 Zevenaar Elektronica & Sensoren B V Apparaat en werkwijze voor het tellen en bemeten van deeltjes.
CN110346042A (zh) * 2019-08-01 2019-10-18 南京邮电大学 一种多传感器杂散光消除光谱仪
CN110346042B (zh) * 2019-08-01 2022-03-08 南京邮电大学 一种多传感器杂散光消除光谱仪

Also Published As

Publication number Publication date
DE10292357D2 (de) 2004-07-01

Similar Documents

Publication Publication Date Title
JP5864559B2 (ja) デジタル化された顕微鏡スライドのスライド品質を判断するシステム及び方法
WO2005124422A1 (de) Vorrichtung und verfahren zur optischen auf- und/oder durchlichtinspektion von mikrostrukturen im ir
DE102004029012B4 (de) Verfahren zur Inspektion eines Wafers
EP2411787B1 (de) Vorrichtung zum bestimmen von partikelngrössen
DE60128721T2 (de) Verfahren und vorrichtung zur fluoreszenzlumineszenzmessung
DE3048053C2 (es)
DE102010026351B4 (de) Verfahren und Vorrichtung zur Untersuchung einer Halbleiterscheibe
DE19916749B4 (de) Verfahren zur Untersuchung von Proben
DE102009000528B4 (de) Inspektionsvorrichtung und -verfahren für die optische Untersuchung von Objektoberflächen, insbesondere von Waferoberflächen
EP0904558A2 (de) Konfokale mikroskopische anordnung
Bollmann et al. Automated particle analysis: calcareous microfossils
DE19749331A1 (de) Verfahren zum Detektieren von auf einer Windschutzscheibe befindlichen Objekten sowie Vorrichtung
DE10083372B4 (de) Verfahren zum Untersuchen der Oberfläche von Halbleiterwafern
DE102017107857A1 (de) Flüssigkeitszelle zur mikroskopischen Bildgebung und ramanspektroskopischen Materialanalyse von Partikelsuspensionen
DE102021105946A1 (de) Messvorrichtung und Verfahren zur Rauheits- und/oder Defektmessung an einer Oberfläche
DE102004008762B4 (de) Verfahren und Vorrichtung zur Detektion und zum Identifizieren von Biopartikeln
WO2002097409A1 (de) Verfahren zur automatisierten erkennung, spektroskopischen analyse und identifizierung von partikeln
DE19804370A1 (de) Verfahren und Vorrichtung zum Detektieren des Oberflächenzustandes eines Wafers
DE102008028869A1 (de) Verfahren und Vorrichtung zur Inspektion eines scheibenförmigen Gegenstandes
WO2005031427A1 (de) Verfahren zur probenuntersuchung und mikroskop mit evaneszenter probenbeleuchtung
DE10323139A1 (de) Verfahren und Vorrichtung zum Hochauflösenden Fehlerfinden und Klassifizieren
DE60115064T2 (de) Analyseeinrichtung und -verfahren für flüssigkeitshaltige substanzen
DE102008001171B4 (de) Inspektionssytem und -verfahren für die optische Untersuchung von Objektkanten, insbesondere von Waferkanten
WO2003009043A2 (de) Mikroskopobjektivanordnung
EP1697722B1 (de) Verfahren und vorrichtung zur aufnahme mikroskopischer bilder

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG US UZ VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
REF Corresponds to

Ref document number: 10292357

Country of ref document: DE

Date of ref document: 20040701

Kind code of ref document: P

WWE Wipo information: entry into national phase

Ref document number: 10292357

Country of ref document: DE

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Ref document number: JP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8607