WO2003010580A1 - Tooling fixture for packaged optical micro-mechanical devices - Google Patents
Tooling fixture for packaged optical micro-mechanical devices Download PDFInfo
- Publication number
- WO2003010580A1 WO2003010580A1 PCT/US2002/017837 US0217837W WO03010580A1 WO 2003010580 A1 WO2003010580 A1 WO 2003010580A1 US 0217837 W US0217837 W US 0217837W WO 03010580 A1 WO03010580 A1 WO 03010580A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- die
- optical
- package
- mechanical devices
- tooling fixture
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
- G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
- G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
- G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Couplings Of Light Guides (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02732044A EP1410083A1 (en) | 2001-07-24 | 2002-06-04 | Tooling fixture for packaged optical micro-mechanical devices |
JP2003515895A JP2004538504A (en) | 2001-07-24 | 2002-06-04 | Tooling fixture for packaged optical micromechanical devices |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/912,147 US6834154B2 (en) | 2001-07-24 | 2001-07-24 | Tooling fixture for packaged optical micro-mechanical devices |
US09/912,147 | 2001-07-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003010580A1 true WO2003010580A1 (en) | 2003-02-06 |
Family
ID=25431444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/017837 WO2003010580A1 (en) | 2001-07-24 | 2002-06-04 | Tooling fixture for packaged optical micro-mechanical devices |
Country Status (5)
Country | Link |
---|---|
US (1) | US6834154B2 (en) |
EP (1) | EP1410083A1 (en) |
JP (1) | JP2004538504A (en) |
TW (1) | TW590981B (en) |
WO (1) | WO2003010580A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1890180A1 (en) * | 2006-08-15 | 2008-02-20 | STMicroelectronics (Research & Development) Limited | Lens unit |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6798954B2 (en) | 2001-07-24 | 2004-09-28 | 3M Innovative Properties Company | Packaged optical micro-mechanical device |
US6888233B2 (en) * | 2003-03-10 | 2005-05-03 | Honeywell International Inc. | Systems for buried electrical feedthroughs in a glass-silicon MEMS process |
DE102007002725A1 (en) * | 2007-01-18 | 2008-07-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Housing for micromechanical and micro-optical components used in mobile applications |
TWI400435B (en) * | 2010-01-28 | 2013-07-01 | Taiwan Semiconductor Mfg | Fixture and method for vibration or shock testing of mems component |
US9500808B2 (en) * | 2012-05-09 | 2016-11-22 | The Boeing Company | Ruggedized photonic crystal sensor packaging |
US20150029038A1 (en) * | 2013-07-26 | 2015-01-29 | Ford Global Technologies, Llc | Method and Apparatus for Message Delivery Via HD Radio |
JP2015225205A (en) * | 2014-05-28 | 2015-12-14 | 京セラドキュメントソリューションズ株式会社 | Optical deflector and image forming apparatus including the optical deflector |
Citations (4)
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EP0548440A1 (en) * | 1991-12-23 | 1993-06-30 | International Business Machines Corporation | Bilithic composite for optoelectronic integration |
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US6007208A (en) * | 1995-12-19 | 1999-12-28 | The Board Of Trustees Of The Leland Stanford Junior University | Miniature scanning confocal microscope |
US6021243A (en) * | 1997-10-06 | 2000-02-01 | Nec Research Institute, Inc. | Low-cost planar star-coupling structure for large-core polymer optical fibers |
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-
2001
- 2001-07-24 US US09/912,147 patent/US6834154B2/en not_active Expired - Lifetime
-
2002
- 2002-06-04 JP JP2003515895A patent/JP2004538504A/en not_active Withdrawn
- 2002-06-04 EP EP02732044A patent/EP1410083A1/en not_active Withdrawn
- 2002-06-04 WO PCT/US2002/017837 patent/WO2003010580A1/en not_active Application Discontinuation
- 2002-07-01 TW TW091114528A patent/TW590981B/en not_active IP Right Cessation
Patent Citations (4)
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EP0548440A1 (en) * | 1991-12-23 | 1993-06-30 | International Business Machines Corporation | Bilithic composite for optoelectronic integration |
US6007208A (en) * | 1995-12-19 | 1999-12-28 | The Board Of Trustees Of The Leland Stanford Junior University | Miniature scanning confocal microscope |
US6021243A (en) * | 1997-10-06 | 2000-02-01 | Nec Research Institute, Inc. | Low-cost planar star-coupling structure for large-core polymer optical fibers |
EP0961150A2 (en) * | 1998-06-01 | 1999-12-01 | Lucent Technologies Inc. | Micro-opto-electromechanical devices and method therefor |
Non-Patent Citations (1)
Title |
---|
MOHR J ET AL: "MICROOPTICAL DEVICES BASED ON FREE SPACE OPTICS WITH LIGA MICROOPTICAL BENCHES EXAMPLES & PERSPECTIVES", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 2783, 12 June 1996 (1996-06-12), pages 48 - 54, XP002045040 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1890180A1 (en) * | 2006-08-15 | 2008-02-20 | STMicroelectronics (Research & Development) Limited | Lens unit |
US7672060B2 (en) | 2006-08-15 | 2010-03-02 | Stmicroelectronics (Research & Development) Limited | Lens unit |
Also Published As
Publication number | Publication date |
---|---|
JP2004538504A (en) | 2004-12-24 |
US6834154B2 (en) | 2004-12-21 |
US20030021570A1 (en) | 2003-01-30 |
TW590981B (en) | 2004-06-11 |
EP1410083A1 (en) | 2004-04-21 |
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