WO2003013729A3 - Thermally efficient micromachined device - Google Patents

Thermally efficient micromachined device Download PDF

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Publication number
WO2003013729A3
WO2003013729A3 PCT/US2002/023305 US0223305W WO03013729A3 WO 2003013729 A3 WO2003013729 A3 WO 2003013729A3 US 0223305 W US0223305 W US 0223305W WO 03013729 A3 WO03013729 A3 WO 03013729A3
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WO
WIPO (PCT)
Prior art keywords
tube
fluid
structures
conducting tube
fluid conducting
Prior art date
Application number
PCT/US2002/023305
Other languages
French (fr)
Other versions
WO2003013729A2 (en
WO2003013729A9 (en
Inventor
Leonel R Arana
Aleksander J Franz
Klavs F Jensen
Samuel B Schaevitz
Martin A Schmidt
Original Assignee
Massachusetts Inst Technology
Leonel R Arana
Aleksander J Franz
Klavs F Jensen
Samuel B Schaevitz
Martin A Schmidt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Massachusetts Inst Technology, Leonel R Arana, Aleksander J Franz, Klavs F Jensen, Samuel B Schaevitz, Martin A Schmidt filed Critical Massachusetts Inst Technology
Priority to JP2003518722A priority Critical patent/JP4738734B2/en
Priority to CA002456672A priority patent/CA2456672A1/en
Priority to KR10-2004-7001901A priority patent/KR20040032896A/en
Priority to EP02748226A priority patent/EP1420885A4/en
Priority to AU2002317558A priority patent/AU2002317558A1/en
Priority to CN028154118A priority patent/CN1539035B/en
Priority to MXPA04001220A priority patent/MXPA04001220A/en
Publication of WO2003013729A2 publication Critical patent/WO2003013729A2/en
Publication of WO2003013729A3 publication Critical patent/WO2003013729A3/en
Publication of WO2003013729A9 publication Critical patent/WO2003013729A9/en

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    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0083—Temperature control
    • B81B7/0087—On-device systems and sensors for controlling, regulating or monitoring
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    • Y02P20/52—Improvements relating to the production of bulk chemicals using catalysts, e.g. selective catalysts

Abstract

A micromachined device (1) for efficient thermal processing at least one fluid conducting tube (5) having at least a region with wall thickness of less than 50um. The device optionally includes one or more thermally conductive structures in thermal communication with first and second thermally insulating protions of the fluid conducting tube (5). The devies also may include a thermally conductive region, and at least a portion of the fluid conducting tube (5) is disposed within the region. A plurality of structures may be provided projecting from a wall of the fluid conducting tube into an inner volume of the tube (5). The structures enhance thermal conduction between a fluid within the tube and a wall of the tube (5). A method for fabricating, from a substrate (3), a micromachined device for processing a fluid stream allows the selective removal of portions of the substrate (3) to provide desired structures integrated within the device. As an example, the micromachined device may be adapted to efficiently react fluid reactants to produce fuel for a fuel cell associated with the device, resulting in a system capable of conversion of chemical to electrical.
PCT/US2002/023305 2001-08-06 2002-07-23 Thermally efficient micromachined device WO2003013729A2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2003518722A JP4738734B2 (en) 2001-08-06 2002-07-23 Micromachine device with excellent thermal efficiency
CA002456672A CA2456672A1 (en) 2001-08-06 2002-07-23 Thermally efficient micromachined device
KR10-2004-7001901A KR20040032896A (en) 2001-08-06 2002-07-23 Thermally Efficient Micromachined Device
EP02748226A EP1420885A4 (en) 2001-08-06 2002-07-23 Thermally efficient micromachined device
AU2002317558A AU2002317558A1 (en) 2001-08-06 2002-07-23 Thermally efficient micromachined device
CN028154118A CN1539035B (en) 2001-08-06 2002-07-23 thermally efficient micromachined device
MXPA04001220A MXPA04001220A (en) 2001-08-06 2002-07-23 Thermally efficient micromachined device.

Applications Claiming Priority (2)

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US09/923,139 2001-08-06
US09/923,139 US6939632B2 (en) 2001-08-06 2001-08-06 Thermally efficient micromachined device

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WO2003013729A2 WO2003013729A2 (en) 2003-02-20
WO2003013729A3 true WO2003013729A3 (en) 2003-08-14
WO2003013729A9 WO2003013729A9 (en) 2003-09-18

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EP (1) EP1420885A4 (en)
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KR (1) KR20040032896A (en)
CN (2) CN1539035B (en)
AU (1) AU2002317558A1 (en)
CA (1) CA2456672A1 (en)
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WO (1) WO2003013729A2 (en)

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MXPA04001220A (en) 2005-06-06
US20060283584A1 (en) 2006-12-21
WO2003013729A2 (en) 2003-02-20
JP4738734B2 (en) 2011-08-03
JP2004537425A (en) 2004-12-16
CA2456672A1 (en) 2003-02-20
US20080171249A1 (en) 2008-07-17
CN1539035B (en) 2011-12-07
CN101444713B (en) 2011-04-06
AU2002317558A1 (en) 2003-02-24
WO2003013729A9 (en) 2003-09-18
US20030027022A1 (en) 2003-02-06
KR20040032896A (en) 2004-04-17
EP1420885A4 (en) 2006-03-01
CN101444713A (en) 2009-06-03
CN1539035A (en) 2004-10-20
EP1420885A2 (en) 2004-05-26
US7267779B2 (en) 2007-09-11
US6939632B2 (en) 2005-09-06

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