WO2003017427A3 - Vertically-stacked, field-programmable, nonvolatile memory and method of fabrication - Google Patents
Vertically-stacked, field-programmable, nonvolatile memory and method of fabrication Download PDFInfo
- Publication number
- WO2003017427A3 WO2003017427A3 PCT/US2002/023748 US0223748W WO03017427A3 WO 2003017427 A3 WO2003017427 A3 WO 2003017427A3 US 0223748 W US0223748 W US 0223748W WO 03017427 A3 WO03017427 A3 WO 03017427A3
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- WO
- WIPO (PCT)
- Prior art keywords
- programmable
- field
- fabrication
- stacked
- nonvolatile memory
- Prior art date
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
- G11C17/16—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2002330921A AU2002330921A1 (en) | 2001-08-13 | 2002-07-26 | Vertically-stacked, field-programmable, nonvolatile memory and method of fabrication |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/928,536 | 2001-08-13 | ||
US09/928,536 US6525953B1 (en) | 2001-08-13 | 2001-08-13 | Vertically-stacked, field-programmable, nonvolatile memory and method of fabrication |
Publications (2)
Publication Number | Publication Date |
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WO2003017427A2 WO2003017427A2 (en) | 2003-02-27 |
WO2003017427A3 true WO2003017427A3 (en) | 2003-08-21 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/US2002/023748 WO2003017427A2 (en) | 2001-08-13 | 2002-07-26 | Vertically-stacked, field-programmable, nonvolatile memory and method of fabrication |
Country Status (5)
Country | Link |
---|---|
US (4) | US6525953B1 (en) |
AU (1) | AU2002330921A1 (en) |
MY (1) | MY122896A (en) |
TW (1) | TWI268604B (en) |
WO (1) | WO2003017427A2 (en) |
Families Citing this family (276)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6483736B2 (en) * | 1998-11-16 | 2002-11-19 | Matrix Semiconductor, Inc. | Vertically stacked field programmable nonvolatile memory and method of fabrication |
US8706630B2 (en) | 1999-08-19 | 2014-04-22 | E2Interactive, Inc. | System and method for securely authorizing and distributing stored-value card data |
US20100040896A1 (en) * | 1999-08-27 | 2010-02-18 | Lex Kosowsky | Metal Deposition |
US20100038121A1 (en) * | 1999-08-27 | 2010-02-18 | Lex Kosowsky | Metal Deposition |
US20080035370A1 (en) * | 1999-08-27 | 2008-02-14 | Lex Kosowsky | Device applications for voltage switchable dielectric material having conductive or semi-conductive organic material |
US20100044080A1 (en) * | 1999-08-27 | 2010-02-25 | Lex Kosowsky | Metal Deposition |
US7825491B2 (en) * | 2005-11-22 | 2010-11-02 | Shocking Technologies, Inc. | Light-emitting device using voltage switchable dielectric material |
US20100038119A1 (en) * | 1999-08-27 | 2010-02-18 | Lex Kosowsky | Metal Deposition |
WO2001017320A1 (en) * | 1999-08-27 | 2001-03-08 | Lex Kosowsky | Current carrying structure using voltage switchable dielectric material |
US20100044079A1 (en) * | 1999-08-27 | 2010-02-25 | Lex Kosowsky | Metal Deposition |
US8575719B2 (en) | 2000-04-28 | 2013-11-05 | Sandisk 3D Llc | Silicon nitride antifuse for use in diode-antifuse memory arrays |
US20020105057A1 (en) * | 2001-02-02 | 2002-08-08 | Vyvoda Michael A. | Wafer surface that facilitates particle removal |
US20030001188A1 (en) * | 2001-06-27 | 2003-01-02 | Nakagawa Osamu Samuel | High-dielectric constant metal-insulator metal capacitor in VLSI multi-level metallization systems |
US6927430B2 (en) * | 2001-06-28 | 2005-08-09 | Sharp Laboratories Of America, Inc. | Shared bit line cross-point memory array incorporating P/N junctions |
US6774457B2 (en) * | 2001-09-13 | 2004-08-10 | Texas Instruments Incorporated | Rectangular contact used as a low voltage fuse element |
US6624485B2 (en) | 2001-11-05 | 2003-09-23 | Matrix Semiconductor, Inc. | Three-dimensional, mask-programmed read only memory |
US7219271B2 (en) | 2001-12-14 | 2007-05-15 | Sandisk 3D Llc | Memory device and method for redundancy/self-repair |
US20040108573A1 (en) * | 2002-03-13 | 2004-06-10 | Matrix Semiconductor, Inc. | Use in semiconductor devices of dielectric antifuses grown on silicide |
US6842369B2 (en) * | 2002-05-07 | 2005-01-11 | Hewlett-Packard Development Company, L.P. | Intermesh memory device |
US6952043B2 (en) * | 2002-06-27 | 2005-10-04 | Matrix Semiconductor, Inc. | Electrically isolated pillars in active devices |
US6988825B2 (en) * | 2002-07-03 | 2006-01-24 | Bio/Data Corporation | Method and apparatus for using vertical magnetic stirring to produce turbulent and chaotic mixing in various states, without compromising components |
US6992503B2 (en) * | 2002-07-08 | 2006-01-31 | Viciciv Technology | Programmable devices with convertibility to customizable devices |
US7673273B2 (en) | 2002-07-08 | 2010-03-02 | Tier Logic, Inc. | MPGA products based on a prototype FPGA |
US7112994B2 (en) * | 2002-07-08 | 2006-09-26 | Viciciv Technology | Three dimensional integrated circuits |
US7129744B2 (en) * | 2003-10-23 | 2006-10-31 | Viciciv Technology | Programmable interconnect structures |
US6998722B2 (en) * | 2002-07-08 | 2006-02-14 | Viciciv Technology | Semiconductor latches and SRAM devices |
US20040004251A1 (en) * | 2002-07-08 | 2004-01-08 | Madurawe Raminda U. | Insulated-gate field-effect thin film transistors |
US6906939B2 (en) * | 2002-08-02 | 2005-06-14 | Unity Semiconductor Corporation | Re-writable memory with multiple memory layers |
US8643162B2 (en) | 2007-11-19 | 2014-02-04 | Raminda Udaya Madurawe | Pads and pin-outs in three dimensional integrated circuits |
US7812458B2 (en) * | 2007-11-19 | 2010-10-12 | Tier Logic, Inc. | Pad invariant FPGA and ASIC devices |
US6937508B1 (en) * | 2002-10-08 | 2005-08-30 | J. Mikko Hakkarainen | Non-volatile, high-density integrated circuit memory |
US6847047B2 (en) * | 2002-11-04 | 2005-01-25 | Advanced Micro Devices, Inc. | Methods that facilitate control of memory arrays utilizing zener diode-like devices |
TW583764B (en) * | 2002-11-11 | 2004-04-11 | Macronix Int Co Ltd | Mask ROM having diodes and manufacturing method thereof |
US6954394B2 (en) | 2002-11-27 | 2005-10-11 | Matrix Semiconductor, Inc. | Integrated circuit and method for selecting a set of memory-cell-layer-dependent or temperature-dependent operating conditions |
DE10259634B4 (en) * | 2002-12-18 | 2008-02-21 | Qimonda Ag | Method of making contacts on a wafer |
US7800932B2 (en) | 2005-09-28 | 2010-09-21 | Sandisk 3D Llc | Memory cell comprising switchable semiconductor memory element with trimmable resistance |
US7767499B2 (en) * | 2002-12-19 | 2010-08-03 | Sandisk 3D Llc | Method to form upward pointing p-i-n diodes having large and uniform current |
US7285464B2 (en) * | 2002-12-19 | 2007-10-23 | Sandisk 3D Llc | Nonvolatile memory cell comprising a reduced height vertical diode |
US7176064B2 (en) * | 2003-12-03 | 2007-02-13 | Sandisk 3D Llc | Memory cell comprising a semiconductor junction diode crystallized adjacent to a silicide |
US7618850B2 (en) * | 2002-12-19 | 2009-11-17 | Sandisk 3D Llc | Method of making a diode read/write memory cell in a programmed state |
US20070164388A1 (en) * | 2002-12-19 | 2007-07-19 | Sandisk 3D Llc | Memory cell comprising a diode fabricated in a low resistivity, programmed state |
US7800933B2 (en) * | 2005-09-28 | 2010-09-21 | Sandisk 3D Llc | Method for using a memory cell comprising switchable semiconductor memory element with trimmable resistance |
US6946719B2 (en) * | 2003-12-03 | 2005-09-20 | Matrix Semiconductor, Inc | Semiconductor device including junction diode contacting contact-antifuse unit comprising silicide |
US20050226067A1 (en) | 2002-12-19 | 2005-10-13 | Matrix Semiconductor, Inc. | Nonvolatile memory cell operating by increasing order in polycrystalline semiconductor material |
US7660181B2 (en) * | 2002-12-19 | 2010-02-09 | Sandisk 3D Llc | Method of making non-volatile memory cell with embedded antifuse |
US8008700B2 (en) * | 2002-12-19 | 2011-08-30 | Sandisk 3D Llc | Non-volatile memory cell with embedded antifuse |
JP2006511965A (en) * | 2002-12-19 | 2006-04-06 | マトリックス セミコンダクター インコーポレイテッド | Improved method for fabricating high density non-volatile memory |
US8637366B2 (en) * | 2002-12-19 | 2014-01-28 | Sandisk 3D Llc | Nonvolatile memory cell without a dielectric antifuse having high- and low-impedance states |
US20060249753A1 (en) * | 2005-05-09 | 2006-11-09 | Matrix Semiconductor, Inc. | High-density nonvolatile memory array fabricated at low temperature comprising semiconductor diodes |
US7005350B2 (en) * | 2002-12-31 | 2006-02-28 | Matrix Semiconductor, Inc. | Method for fabricating programmable memory array structures incorporating series-connected transistor strings |
US7505321B2 (en) * | 2002-12-31 | 2009-03-17 | Sandisk 3D Llc | Programmable memory array structure incorporating series-connected transistor strings and methods for fabrication and operation of same |
US7383476B2 (en) * | 2003-02-11 | 2008-06-03 | Sandisk 3D Llc | System architecture and method for three-dimensional memory |
US6868022B2 (en) * | 2003-03-28 | 2005-03-15 | Matrix Semiconductor, Inc. | Redundant memory structure using bad bit pointers |
US6879505B2 (en) | 2003-03-31 | 2005-04-12 | Matrix Semiconductor, Inc. | Word line arrangement having multi-layer word line segments for three-dimensional memory array |
US7233024B2 (en) * | 2003-03-31 | 2007-06-19 | Sandisk 3D Llc | Three-dimensional memory device incorporating segmented bit line memory array |
US6822903B2 (en) * | 2003-03-31 | 2004-11-23 | Matrix Semiconductor, Inc. | Apparatus and method for disturb-free programming of passive element memory cells |
US6815077B1 (en) * | 2003-05-20 | 2004-11-09 | Matrix Semiconductor, Inc. | Low temperature, low-resistivity heavily doped p-type polysilicon deposition |
US7243203B2 (en) * | 2003-06-13 | 2007-07-10 | Sandisk 3D Llc | Pipeline circuit for low latency memory |
US20050041467A1 (en) * | 2003-06-18 | 2005-02-24 | Macronix International Co., Ltd. | Chalcogenide memory |
US20050006719A1 (en) * | 2003-06-24 | 2005-01-13 | Erh-Kun Lai | [three-dimensional memory structure and manufacturing method thereof] |
TW594934B (en) * | 2003-07-09 | 2004-06-21 | Taiwan Semiconductor Mfg | Method of fabricating a semiconductor memory |
CN1320633C (en) * | 2003-07-22 | 2007-06-06 | 台湾积体电路制造股份有限公司 | Structure and producing method of back-fuse type memory assembly |
US7376008B2 (en) * | 2003-08-07 | 2008-05-20 | Contour Seminconductor, Inc. | SCR matrix storage device |
US6890819B2 (en) * | 2003-09-18 | 2005-05-10 | Macronix International Co., Ltd. | Methods for forming PN junction, one-time programmable read-only memory and fabricating processes thereof |
US7057958B2 (en) * | 2003-09-30 | 2006-06-06 | Sandisk Corporation | Method and system for temperature compensation for memory cells with temperature-dependent behavior |
DE10349750A1 (en) * | 2003-10-23 | 2005-05-25 | Commissariat à l'Energie Atomique | Phase change memory, phase change memory arrangement, phase change memory cell, 2D phase change memory cell array, 3D phase change memory cell array and electronic component |
US8655309B2 (en) | 2003-11-14 | 2014-02-18 | E2Interactive, Inc. | Systems and methods for electronic device point-of-sale activation |
US7682920B2 (en) * | 2003-12-03 | 2010-03-23 | Sandisk 3D Llc | Method for making a p-i-n diode crystallized adjacent to a silicide in series with a dielectric antifuse |
US8018024B2 (en) * | 2003-12-03 | 2011-09-13 | Sandisk 3D Llc | P-i-n diode crystallized adjacent to a silicide in series with a dielectric antifuse |
US7030651B2 (en) | 2003-12-04 | 2006-04-18 | Viciciv Technology | Programmable structured arrays |
US7423304B2 (en) | 2003-12-05 | 2008-09-09 | Sandisck 3D Llc | Optimization of critical dimensions and pitch of patterned features in and above a substrate |
US6951780B1 (en) * | 2003-12-18 | 2005-10-04 | Matrix Semiconductor, Inc. | Selective oxidation of silicon in diode, TFT, and monolithic three dimensional memory arrays |
US7176713B2 (en) * | 2004-01-05 | 2007-02-13 | Viciciv Technology | Integrated circuits with RAM and ROM fabrication options |
US6903437B1 (en) * | 2004-01-07 | 2005-06-07 | Micron Technology, Inc. | Semiconductor devices, capacitor antifuses, dynamic random access memories, and cell plate bias connection methods |
US20060171200A1 (en) | 2004-02-06 | 2006-08-03 | Unity Semiconductor Corporation | Memory using mixed valence conductive oxides |
US7082052B2 (en) | 2004-02-06 | 2006-07-25 | Unity Semiconductor Corporation | Multi-resistive state element with reactive metal |
KR100564611B1 (en) * | 2004-02-14 | 2006-03-29 | 삼성전자주식회사 | Damping structure for hard disk drive |
US20050212022A1 (en) * | 2004-03-24 | 2005-09-29 | Greer Edward C | Memory cell having an electric field programmable storage element, and method of operating same |
US7386652B2 (en) * | 2004-04-04 | 2008-06-10 | Guobiao Zhang | User-configurable pre-recorded memory |
US7410838B2 (en) * | 2004-04-29 | 2008-08-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fabrication methods for memory cells |
US7489164B2 (en) * | 2004-05-17 | 2009-02-10 | Raminda Udaya Madurawe | Multi-port memory devices |
US7220982B2 (en) * | 2004-07-27 | 2007-05-22 | Micron Technology, Inc. | Amorphous carbon-based non-volatile memory |
US7388251B2 (en) * | 2004-08-11 | 2008-06-17 | Micron Technology, Inc. | Non-planar flash memory array with shielded floating gates on silicon mesas |
US7288784B2 (en) * | 2004-08-19 | 2007-10-30 | Micron Technology, Inc. | Structure for amorphous carbon based non-volatile memory |
US7566974B2 (en) * | 2004-09-29 | 2009-07-28 | Sandisk 3D, Llc | Doped polysilicon via connecting polysilicon layers |
US20060067117A1 (en) * | 2004-09-29 | 2006-03-30 | Matrix Semiconductor, Inc. | Fuse memory cell comprising a diode, the diode serving as the fuse element |
US7157341B2 (en) | 2004-10-01 | 2007-01-02 | International Business Machines Corporation | Gate stacks |
US7218570B2 (en) * | 2004-12-17 | 2007-05-15 | Sandisk 3D Llc | Apparatus and method for memory operations using address-dependent conditions |
US7277336B2 (en) * | 2004-12-28 | 2007-10-02 | Sandisk 3D Llc | Method and apparatus for improving yield in semiconductor devices by guaranteeing health of redundancy information |
US7286439B2 (en) | 2004-12-30 | 2007-10-23 | Sandisk 3D Llc | Apparatus and method for hierarchical decoding of dense memory arrays using multiple levels of multiple-headed decoders |
US7259038B2 (en) * | 2005-01-19 | 2007-08-21 | Sandisk Corporation | Forming nonvolatile phase change memory cell having a reduced thermal contact area |
US7307268B2 (en) * | 2005-01-19 | 2007-12-11 | Sandisk Corporation | Structure and method for biasing phase change memory array for reliable writing |
US7517796B2 (en) * | 2005-02-17 | 2009-04-14 | Sandisk 3D Llc | Method for patterning submicron pillars |
US20130082232A1 (en) | 2011-09-30 | 2013-04-04 | Unity Semiconductor Corporation | Multi Layered Conductive Metal Oxide Structures And Methods For Facilitating Enhanced Performance Characteristics Of Two Terminal Memory Cells |
US8565003B2 (en) | 2011-06-28 | 2013-10-22 | Unity Semiconductor Corporation | Multilayer cross-point memory array having reduced disturb susceptibility |
US8937292B2 (en) | 2011-08-15 | 2015-01-20 | Unity Semiconductor Corporation | Vertical cross point arrays for ultra high density memory applications |
US8270193B2 (en) | 2010-01-29 | 2012-09-18 | Unity Semiconductor Corporation | Local bit lines and methods of selecting the same to access memory elements in cross-point arrays |
US8559209B2 (en) | 2011-06-10 | 2013-10-15 | Unity Semiconductor Corporation | Array voltage regulating technique to enable data operations on large cross-point memory arrays with resistive memory elements |
US7359279B2 (en) * | 2005-03-31 | 2008-04-15 | Sandisk 3D Llc | Integrated circuit memory array configuration including decoding compatibility with partial implementation of multiple memory layers |
US7054219B1 (en) | 2005-03-31 | 2006-05-30 | Matrix Semiconductor, Inc. | Transistor layout configuration for tight-pitched memory array lines |
US7272052B2 (en) * | 2005-03-31 | 2007-09-18 | Sandisk 3D Llc | Decoding circuit for non-binary groups of memory line drivers |
US7142471B2 (en) * | 2005-03-31 | 2006-11-28 | Sandisk 3D Llc | Method and apparatus for incorporating block redundancy in a memory array |
US7728390B2 (en) * | 2005-05-06 | 2010-06-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multi-level interconnection memory device |
US7212454B2 (en) * | 2005-06-22 | 2007-05-01 | Sandisk 3D Llc | Method and apparatus for programming a memory array |
US7453755B2 (en) * | 2005-07-01 | 2008-11-18 | Sandisk 3D Llc | Memory cell with high-K antifuse for reverse bias programming |
US20070069241A1 (en) | 2005-07-01 | 2007-03-29 | Matrix Semiconductor, Inc. | Memory with high dielectric constant antifuses and method for using at low voltage |
US20070009821A1 (en) * | 2005-07-08 | 2007-01-11 | Charlotte Cutler | Devices containing multi-bit data |
US20070010100A1 (en) * | 2005-07-11 | 2007-01-11 | Matrix Semiconductor, Inc. | Method of plasma etching transition metals and their compounds |
US7955515B2 (en) * | 2005-07-11 | 2011-06-07 | Sandisk 3D Llc | Method of plasma etching transition metal oxides |
US7800934B2 (en) * | 2005-09-28 | 2010-09-21 | Sandisk 3D Llc | Programming methods to increase window for reverse write 3D cell |
US20070102724A1 (en) * | 2005-11-10 | 2007-05-10 | Matrix Semiconductor, Inc. | Vertical diode doped with antimony to avoid or limit dopant diffusion |
US20100263200A1 (en) * | 2005-11-22 | 2010-10-21 | Lex Kosowsky | Wireless communication device using voltage switchable dielectric material |
WO2007062122A2 (en) * | 2005-11-22 | 2007-05-31 | Shocking Technologies, Inc. | Semiconductor devices including voltage switchable materials for over-voltage protection |
US7486534B2 (en) * | 2005-12-08 | 2009-02-03 | Macronix International Co., Ltd. | Diode-less array for one-time programmable memory |
US7615502B2 (en) * | 2005-12-16 | 2009-11-10 | Sandisk 3D Llc | Laser anneal of vertically oriented semiconductor structures while maintaining a dopant profile |
US7486111B2 (en) * | 2006-03-08 | 2009-02-03 | Tier Logic, Inc. | Programmable logic devices comprising time multiplexed programmable interconnect |
US8395199B2 (en) * | 2006-03-25 | 2013-03-12 | 4D-S Pty Ltd. | Systems and methods for fabricating self-aligned memory cell |
US7283414B1 (en) | 2006-05-24 | 2007-10-16 | Sandisk 3D Llc | Method for improving the precision of a temperature-sensor circuit |
US7932548B2 (en) * | 2006-07-14 | 2011-04-26 | 4D-S Pty Ltd. | Systems and methods for fabricating self-aligned memory cell |
US7968967B2 (en) * | 2006-07-17 | 2011-06-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | One-time-programmable anti-fuse formed using damascene process |
US7968010B2 (en) * | 2006-07-29 | 2011-06-28 | Shocking Technologies, Inc. | Method for electroplating a substrate |
US20080032049A1 (en) * | 2006-07-29 | 2008-02-07 | Lex Kosowsky | Voltage switchable dielectric material having high aspect ratio particles |
US20080029405A1 (en) * | 2006-07-29 | 2008-02-07 | Lex Kosowsky | Voltage switchable dielectric material having conductive or semi-conductive organic material |
US8279704B2 (en) * | 2006-07-31 | 2012-10-02 | Sandisk 3D Llc | Decoder circuitry providing forward and reverse modes of memory array operation and method for biasing same |
US7499366B2 (en) * | 2006-07-31 | 2009-03-03 | Sandisk 3D Llc | Method for using dual data-dependent busses for coupling read/write circuits to a memory array |
US7596050B2 (en) * | 2006-07-31 | 2009-09-29 | Sandisk 3D Llc | Method for using a hierarchical bit line bias bus for block selectable memory array |
US7554832B2 (en) * | 2006-07-31 | 2009-06-30 | Sandisk 3D Llc | Passive element memory array incorporating reversible polarity word line and bit line decoders |
US7463536B2 (en) * | 2006-07-31 | 2008-12-09 | Sandisk 3D Llc | Memory array incorporating two data busses for memory array block selection |
US7486587B2 (en) * | 2006-07-31 | 2009-02-03 | Sandisk 3D Llc | Dual data-dependent busses for coupling read/write circuits to a memory array |
US7570523B2 (en) * | 2006-07-31 | 2009-08-04 | Sandisk 3D Llc | Method for using two data busses for memory array block selection |
US7463546B2 (en) * | 2006-07-31 | 2008-12-09 | Sandisk 3D Llc | Method for using a passive element memory array incorporating reversible polarity word line and bit line decoders |
US7542338B2 (en) * | 2006-07-31 | 2009-06-02 | Sandisk 3D Llc | Method for reading a multi-level passive element memory cell array |
US7633828B2 (en) * | 2006-07-31 | 2009-12-15 | Sandisk 3D Llc | Hierarchical bit line bias bus for block selectable memory array |
US7542337B2 (en) * | 2006-07-31 | 2009-06-02 | Sandisk 3D Llc | Apparatus for reading a multi-level passive element memory cell array |
US20080029844A1 (en) * | 2006-08-03 | 2008-02-07 | Adkisson James W | Anti-fuse structure optionally integrated with guard ring structure |
US7838864B2 (en) * | 2006-08-08 | 2010-11-23 | Ovonyx, Inc. | Chalcogenide switch with laser recrystallized diode isolation device and use thereof in three dimensional memory arrays |
US7391045B2 (en) * | 2006-09-18 | 2008-06-24 | Ovonyx, Inc. | Three-dimensional phase-change memory |
US7473986B2 (en) * | 2006-09-22 | 2009-01-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Positive-intrinsic-negative (PIN) diode semiconductor devices and fabrication methods thereof |
US7872251B2 (en) * | 2006-09-24 | 2011-01-18 | Shocking Technologies, Inc. | Formulations for voltage switchable dielectric material having a stepped voltage response and methods for making the same |
US7678620B2 (en) * | 2006-10-05 | 2010-03-16 | Freescale Semiconductor, Inc. | Antifuse one time programmable memory array and method of manufacture |
US10134985B2 (en) * | 2006-10-20 | 2018-11-20 | The Regents Of The University Of Michigan | Non-volatile solid state resistive switching devices |
KR20080042548A (en) * | 2006-11-10 | 2008-05-15 | 삼성전자주식회사 | Hinge module and electronic equipment havint the same |
US20120119168A9 (en) * | 2006-11-21 | 2012-05-17 | Robert Fleming | Voltage switchable dielectric materials with low band gap polymer binder or composite |
US20080140724A1 (en) | 2006-12-06 | 2008-06-12 | David Flynn | Apparatus, system, and method for servicing object requests within a storage controller |
US7542370B2 (en) * | 2006-12-31 | 2009-06-02 | Sandisk 3D Llc | Reversible polarity decoder circuit |
US7525869B2 (en) * | 2006-12-31 | 2009-04-28 | Sandisk 3D Llc | Method for using a reversible polarity decoder circuit |
US7495500B2 (en) * | 2006-12-31 | 2009-02-24 | Sandisk 3D Llc | Method for using a multiple polarity reversible charge pump circuit |
US7477093B2 (en) * | 2006-12-31 | 2009-01-13 | Sandisk 3D Llc | Multiple polarity reversible charge pump circuit |
KR100831980B1 (en) * | 2007-03-05 | 2008-05-26 | 주식회사 하이닉스반도체 | Method for fabricating semiconductor device |
US7586773B2 (en) * | 2007-03-27 | 2009-09-08 | Sandisk 3D Llc | Large array of upward pointing p-i-n diodes having large and uniform current |
US7435636B1 (en) | 2007-03-29 | 2008-10-14 | Micron Technology, Inc. | Fabrication of self-aligned gallium arsenide MOSFETs using damascene gate methods |
US7554406B2 (en) | 2007-03-31 | 2009-06-30 | Sandisk 3D Llc | Spatially distributed amplifier circuit |
US7558140B2 (en) * | 2007-03-31 | 2009-07-07 | Sandisk 3D Llc | Method for using a spatially distributed amplifier circuit |
US7629247B2 (en) * | 2007-04-12 | 2009-12-08 | Sandisk 3D Llc | Method of fabricating a self-aligning damascene memory structure |
US7688613B2 (en) * | 2007-04-14 | 2010-03-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for controlling multiple electrical fuses with one program device |
US7958390B2 (en) * | 2007-05-15 | 2011-06-07 | Sandisk Corporation | Memory device for repairing a neighborhood of rows in a memory array using a patch table |
US7966518B2 (en) * | 2007-05-15 | 2011-06-21 | Sandisk Corporation | Method for repairing a neighborhood of rows in a memory array using a patch table |
US7793236B2 (en) * | 2007-06-13 | 2010-09-07 | Shocking Technologies, Inc. | System and method for including protective voltage switchable dielectric material in the design or simulation of substrate devices |
US7830697B2 (en) * | 2007-06-25 | 2010-11-09 | Sandisk 3D Llc | High forward current diodes for reverse write 3D cell |
US8072791B2 (en) * | 2007-06-25 | 2011-12-06 | Sandisk 3D Llc | Method of making nonvolatile memory device containing carbon or nitrogen doped diode |
US7684226B2 (en) * | 2007-06-25 | 2010-03-23 | Sandisk 3D Llc | Method of making high forward current diodes for reverse write 3D cell |
US8102694B2 (en) * | 2007-06-25 | 2012-01-24 | Sandisk 3D Llc | Nonvolatile memory device containing carbon or nitrogen doped diode |
US7718546B2 (en) * | 2007-06-27 | 2010-05-18 | Sandisk 3D Llc | Method for fabricating a 3-D integrated circuit using a hard mask of silicon-oxynitride on amorphous carbon |
US7800939B2 (en) * | 2007-06-29 | 2010-09-21 | Sandisk 3D Llc | Method of making 3D R/W cell with reduced reverse leakage |
US7759666B2 (en) * | 2007-06-29 | 2010-07-20 | Sandisk 3D Llc | 3D R/W cell with reduced reverse leakage |
US20090086521A1 (en) * | 2007-09-28 | 2009-04-02 | Herner S Brad | Multiple antifuse memory cells and methods to form, program, and sense the same |
US8349663B2 (en) * | 2007-09-28 | 2013-01-08 | Sandisk 3D Llc | Vertical diode based memory cells having a lowered programming voltage and methods of forming the same |
US7846782B2 (en) | 2007-09-28 | 2010-12-07 | Sandisk 3D Llc | Diode array and method of making thereof |
US20090128189A1 (en) * | 2007-11-19 | 2009-05-21 | Raminda Udaya Madurawe | Three dimensional programmable devices |
US7635988B2 (en) * | 2007-11-19 | 2009-12-22 | Tier Logic, Inc. | Multi-port thin-film memory devices |
JP5389352B2 (en) | 2007-12-06 | 2014-01-15 | ローム株式会社 | Semiconductor device |
US8399973B2 (en) * | 2007-12-20 | 2013-03-19 | Mosaid Technologies Incorporated | Data storage and stackable configurations |
US7795913B2 (en) * | 2007-12-26 | 2010-09-14 | Tier Logic | Programmable latch based multiplier |
US7573294B2 (en) * | 2007-12-26 | 2009-08-11 | Tier Logic, Inc. | Programmable logic based latches and shift registers |
US7602213B2 (en) * | 2007-12-26 | 2009-10-13 | Tier Logic, Inc. | Using programmable latch to implement logic |
US7573293B2 (en) * | 2007-12-26 | 2009-08-11 | Tier Logic, Inc. | Programmable logic based latches and shift registers |
US7906392B2 (en) * | 2008-01-15 | 2011-03-15 | Sandisk 3D Llc | Pillar devices and methods of making thereof |
US8206614B2 (en) * | 2008-01-18 | 2012-06-26 | Shocking Technologies, Inc. | Voltage switchable dielectric material having bonded particle constituents |
US20090227096A1 (en) * | 2008-03-07 | 2009-09-10 | Varian Semiconductor Equipment Associates, Inc. | Method Of Forming A Retrograde Material Profile Using Ion Implantation |
US7812335B2 (en) * | 2008-04-11 | 2010-10-12 | Sandisk 3D Llc | Sidewall structured switchable resistor cell |
US7830698B2 (en) * | 2008-04-11 | 2010-11-09 | Sandisk 3D Llc | Multilevel nonvolatile memory device containing a carbon storage material and methods of making and using same |
US8203421B2 (en) * | 2008-04-14 | 2012-06-19 | Shocking Technologies, Inc. | Substrate device or package using embedded layer of voltage switchable dielectric material in a vertical switching configuration |
US8450835B2 (en) * | 2008-04-29 | 2013-05-28 | Sandisk 3D Llc | Reverse leakage reduction and vertical height shrinking of diode with halo doping |
US20090273015A1 (en) * | 2008-04-30 | 2009-11-05 | Atmel Corporation | Non-volatile memory cell |
US8154005B2 (en) | 2008-06-13 | 2012-04-10 | Sandisk 3D Llc | Non-volatile memory arrays comprising rail stacks with a shared diode component portion for diodes of electrically isolated pillars |
US7579232B1 (en) | 2008-07-11 | 2009-08-25 | Sandisk 3D Llc | Method of making a nonvolatile memory device including forming a pillar shaped semiconductor device and a shadow mask |
US20100047535A1 (en) * | 2008-08-22 | 2010-02-25 | Lex Kosowsky | Core layer structure having voltage switchable dielectric material |
US8130528B2 (en) | 2008-08-25 | 2012-03-06 | Sandisk 3D Llc | Memory system with sectional data lines |
US8151023B2 (en) * | 2008-08-26 | 2012-04-03 | Sandisk Il Ltd. | Hybrid storage of documents |
US8230375B2 (en) | 2008-09-14 | 2012-07-24 | Raminda Udaya Madurawe | Automated metal pattern generation for integrated circuits |
US20100065785A1 (en) * | 2008-09-17 | 2010-03-18 | Lex Kosowsky | Voltage switchable dielectric material containing boron compound |
WO2010039902A2 (en) * | 2008-09-30 | 2010-04-08 | Shocking Technologies, Inc. | Voltage switchable dielectric material containing conductive core shelled particles |
US9208931B2 (en) * | 2008-09-30 | 2015-12-08 | Littelfuse, Inc. | Voltage switchable dielectric material containing conductor-on-conductor core shelled particles |
US8027209B2 (en) | 2008-10-06 | 2011-09-27 | Sandisk 3D, Llc | Continuous programming of non-volatile memory |
US7920407B2 (en) | 2008-10-06 | 2011-04-05 | Sandisk 3D, Llc | Set and reset detection circuits for reversible resistance switching memory material |
US8362871B2 (en) * | 2008-11-05 | 2013-01-29 | Shocking Technologies, Inc. | Geometric and electric field considerations for including transient protective material in substrate devices |
US8105867B2 (en) * | 2008-11-18 | 2012-01-31 | Sandisk 3D Llc | Self-aligned three-dimensional non-volatile memory fabrication |
US8193074B2 (en) * | 2008-11-21 | 2012-06-05 | Sandisk 3D Llc | Integration of damascene type diodes and conductive wires for memory device |
US20100161888A1 (en) * | 2008-12-22 | 2010-06-24 | Unity Semiconductor Corporation | Data storage system with non-volatile memory using both page write and block program and block erase |
US8120068B2 (en) * | 2008-12-24 | 2012-02-21 | Sandisk 3D Llc | Three-dimensional memory structures having shared pillar memory cells |
US8787064B2 (en) * | 2009-01-13 | 2014-07-22 | Hewlett-Packard Development Company, L.P. | Programmable bipolar electronic device |
US8455852B2 (en) | 2009-01-26 | 2013-06-04 | Hewlett-Packard Development Company, L.P. | Controlled placement of dopants in memristor active regions |
US8450711B2 (en) | 2009-01-26 | 2013-05-28 | Hewlett-Packard Development Company, L.P. | Semiconductor memristor devices |
US9226391B2 (en) | 2009-01-27 | 2015-12-29 | Littelfuse, Inc. | Substrates having voltage switchable dielectric materials |
US8272123B2 (en) | 2009-01-27 | 2012-09-25 | Shocking Technologies, Inc. | Substrates having voltage switchable dielectric materials |
US8399773B2 (en) | 2009-01-27 | 2013-03-19 | Shocking Technologies, Inc. | Substrates having voltage switchable dielectric materials |
CN102550132A (en) | 2009-03-26 | 2012-07-04 | 肖克科技有限公司 | Components having voltage switchable dielectric materials |
US8270199B2 (en) | 2009-04-03 | 2012-09-18 | Sandisk 3D Llc | Cross point non-volatile memory cell |
US7978498B2 (en) | 2009-04-03 | 2011-07-12 | Sandisk 3D, Llc | Programming non-volatile storage element using current from other element |
US8279650B2 (en) | 2009-04-20 | 2012-10-02 | Sandisk 3D Llc | Memory system with data line switching scheme |
US20100283053A1 (en) * | 2009-05-11 | 2010-11-11 | Sandisk 3D Llc | Nonvolatile memory array comprising silicon-based diodes fabricated at low temperature |
US8168538B2 (en) * | 2009-05-26 | 2012-05-01 | Macronix International Co., Ltd. | Buried silicide structure and method for making |
US8154904B2 (en) | 2009-06-19 | 2012-04-10 | Sandisk 3D Llc | Programming reversible resistance switching elements |
CN102484129B (en) | 2009-07-10 | 2015-07-15 | 惠普发展公司,有限责任合伙企业 | Memristive junction with intrinsic rectifier |
US8514637B2 (en) * | 2009-07-13 | 2013-08-20 | Seagate Technology Llc | Systems and methods of cell selection in three-dimensional cross-point array memory devices |
US8050109B2 (en) | 2009-08-10 | 2011-11-01 | Sandisk 3D Llc | Semiconductor memory with improved memory block switching |
US9053844B2 (en) * | 2009-09-09 | 2015-06-09 | Littelfuse, Inc. | Geometric configuration or alignment of protective material in a gap structure for electrical devices |
US8207064B2 (en) | 2009-09-17 | 2012-06-26 | Sandisk 3D Llc | 3D polysilicon diode with low contact resistance and method for forming same |
EP2488119B1 (en) | 2009-10-14 | 2014-09-17 | Skeletal Dynamics, LLC | Internal joint stabilizer for a multi-axis joint, such as a carpo-metacarpal joint or the like |
US8274130B2 (en) | 2009-10-20 | 2012-09-25 | Sandisk 3D Llc | Punch-through diode steering element |
US8461566B2 (en) | 2009-11-02 | 2013-06-11 | Micron Technology, Inc. | Methods, structures and devices for increasing memory density |
US20110137740A1 (en) | 2009-12-04 | 2011-06-09 | Ashmit Bhattacharya | Processing value-ascertainable items |
US8223525B2 (en) | 2009-12-15 | 2012-07-17 | Sandisk 3D Llc | Page register outside array and sense amplifier interface |
US8213243B2 (en) | 2009-12-15 | 2012-07-03 | Sandisk 3D Llc | Program cycle skip |
US8624293B2 (en) | 2009-12-16 | 2014-01-07 | Sandisk 3D Llc | Carbon/tunneling-barrier/carbon diode |
US20110153441A1 (en) * | 2009-12-23 | 2011-06-23 | Merrill Brooks Smith | Systems and Methods for Authorizing Use of Validly Sold Merchandise |
US8638584B2 (en) * | 2010-02-02 | 2014-01-28 | Unity Semiconductor Corporation | Memory architectures and techniques to enhance throughput for cross-point arrays |
US20110198544A1 (en) * | 2010-02-18 | 2011-08-18 | Lex Kosowsky | EMI Voltage Switchable Dielectric Materials Having Nanophase Materials |
KR20130001725A (en) | 2010-02-18 | 2013-01-04 | 쌘디스크 3디 엘엘씨 | Step soft program for reversible resistivity-switching elements |
US8686419B2 (en) * | 2010-02-23 | 2014-04-01 | Sandisk 3D Llc | Structure and fabrication method for resistance-change memory cell in 3-D memory |
US9320135B2 (en) * | 2010-02-26 | 2016-04-19 | Littelfuse, Inc. | Electric discharge protection for surface mounted and embedded components |
US9224728B2 (en) * | 2010-02-26 | 2015-12-29 | Littelfuse, Inc. | Embedded protection against spurious electrical events |
US9082622B2 (en) | 2010-02-26 | 2015-07-14 | Littelfuse, Inc. | Circuit elements comprising ferroic materials |
US9646869B2 (en) * | 2010-03-02 | 2017-05-09 | Micron Technology, Inc. | Semiconductor devices including a diode structure over a conductive strap and methods of forming such semiconductor devices |
US9608119B2 (en) | 2010-03-02 | 2017-03-28 | Micron Technology, Inc. | Semiconductor-metal-on-insulator structures, methods of forming such structures, and semiconductor devices including such structures |
US8507966B2 (en) | 2010-03-02 | 2013-08-13 | Micron Technology, Inc. | Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same |
US8385102B2 (en) | 2010-05-11 | 2013-02-26 | Sandisk 3D Llc | Alternating bipolar forming voltage for resistivity-switching elements |
US8520425B2 (en) | 2010-06-18 | 2013-08-27 | Sandisk 3D Llc | Resistive random access memory with low current operation |
US8737111B2 (en) | 2010-06-18 | 2014-05-27 | Sandisk 3D Llc | Memory cell with resistance-switching layers |
US8724369B2 (en) | 2010-06-18 | 2014-05-13 | Sandisk 3D Llc | Composition of memory cell with resistance-switching layers |
US8462575B2 (en) * | 2010-07-14 | 2013-06-11 | Broadcom Corporation | Multi-time programmable memory |
US8159266B1 (en) | 2010-11-16 | 2012-04-17 | Raminda Udaya Madurawe | Metal configurable integrated circuits |
US8159268B1 (en) | 2010-11-16 | 2012-04-17 | Raminda Udaya Madurawe | Interconnect structures for metal configurable integrated circuits |
US8159265B1 (en) | 2010-11-16 | 2012-04-17 | Raminda Udaya Madurawe | Memory for metal configurable integrated circuits |
US8462580B2 (en) | 2010-11-17 | 2013-06-11 | Sandisk 3D Llc | Memory system with reversible resistivity-switching using pulses of alternatrie polarity |
US8355271B2 (en) | 2010-11-17 | 2013-01-15 | Sandisk 3D Llc | Memory system with reversible resistivity-switching using pulses of alternate polarity |
US11615977B2 (en) * | 2010-11-18 | 2023-03-28 | Monolithic 3D Inc. | 3D semiconductor memory device and structure |
US8952418B2 (en) | 2011-03-01 | 2015-02-10 | Micron Technology, Inc. | Gated bipolar junction transistors |
US9053766B2 (en) | 2011-03-03 | 2015-06-09 | Sandisk 3D, Llc | Three dimensional memory system with intelligent select circuit |
US8374051B2 (en) | 2011-03-03 | 2013-02-12 | Sandisk 3D Llc | Three dimensional memory system with column pipeline |
US8553476B2 (en) | 2011-03-03 | 2013-10-08 | Sandisk 3D Llc | Three dimensional memory system with page of data across word lines |
US8519431B2 (en) | 2011-03-08 | 2013-08-27 | Micron Technology, Inc. | Thyristors |
JP5426596B2 (en) * | 2011-03-24 | 2014-02-26 | 株式会社東芝 | Nonvolatile semiconductor memory device |
US8699293B2 (en) | 2011-04-27 | 2014-04-15 | Sandisk 3D Llc | Non-volatile storage system with dual block programming |
KR101802905B1 (en) * | 2011-05-31 | 2017-12-01 | 에스케이하이닉스 주식회사 | Resistive Memory Device Having Schottky Diode and Method of Manufacturing The Same |
US9117495B2 (en) | 2011-06-10 | 2015-08-25 | Unity Semiconductor Corporation | Global bit line pre-charge circuit that compensates for process, operating voltage, and temperature variations |
US8891276B2 (en) | 2011-06-10 | 2014-11-18 | Unity Semiconductor Corporation | Memory array with local bitlines and local-to-global bitline pass gates and gain stages |
US10566056B2 (en) | 2011-06-10 | 2020-02-18 | Unity Semiconductor Corporation | Global bit line pre-charge circuit that compensates for process, operating voltage, and temperature variations |
US8866121B2 (en) | 2011-07-29 | 2014-10-21 | Sandisk 3D Llc | Current-limiting layer and a current-reducing layer in a memory device |
US8659001B2 (en) | 2011-09-01 | 2014-02-25 | Sandisk 3D Llc | Defect gradient to boost nonvolatile memory performance |
US8699257B2 (en) * | 2011-09-01 | 2014-04-15 | HangZhou HaiCun Information Technology Co., Ltd. | Three-dimensional writable printed memory |
US8637413B2 (en) | 2011-12-02 | 2014-01-28 | Sandisk 3D Llc | Nonvolatile resistive memory element with a passivated switching layer |
US8698119B2 (en) | 2012-01-19 | 2014-04-15 | Sandisk 3D Llc | Nonvolatile memory device using a tunnel oxide as a current limiter element |
US8767431B2 (en) | 2012-01-26 | 2014-07-01 | HGST Netherlands B.V. | High current capable access device for three-dimensional solid-state memory |
US8711597B2 (en) | 2012-01-26 | 2014-04-29 | HGST Netherlands B.V. | 3D solid-state arrangement for solid state memory |
US8686386B2 (en) | 2012-02-17 | 2014-04-01 | Sandisk 3D Llc | Nonvolatile memory device using a varistor as a current limiter element |
US9007810B2 (en) | 2013-02-28 | 2015-04-14 | Sandisk 3D Llc | ReRAM forming with reset and iload compensation |
US20140241031A1 (en) | 2013-02-28 | 2014-08-28 | Sandisk 3D Llc | Dielectric-based memory cells having multi-level one-time programmable and bi-level rewriteable operating modes and methods of forming the same |
US8947944B2 (en) | 2013-03-15 | 2015-02-03 | Sandisk 3D Llc | Program cycle skip evaluation before write operations in non-volatile memory |
US8947972B2 (en) | 2013-03-15 | 2015-02-03 | Sandisk 3D Llc | Dynamic address grouping for parallel programming in non-volatile memory |
US9628086B2 (en) * | 2013-11-14 | 2017-04-18 | Case Western Reserve University | Nanoelectromechanical antifuse and related systems |
EP3221897A1 (en) * | 2014-09-08 | 2017-09-27 | The Research Foundation Of State University Of New York | Metallic gratings and measurement methods thereof |
US9806256B1 (en) | 2016-10-21 | 2017-10-31 | Sandisk Technologies Llc | Resistive memory device having sidewall spacer electrode and method of making thereof |
US11211487B2 (en) * | 2019-08-15 | 2021-12-28 | Micron Technology, Inc. | Transistors, memory structures and memory arrays containing two-dimensional materials between a source/drain region and a channel region |
KR102284263B1 (en) | 2019-10-29 | 2021-07-30 | 주식회사 키 파운드리 | Electrical-Fuse Cell and Non Volatile memory device having the same |
US11145379B2 (en) * | 2019-10-29 | 2021-10-12 | Key Foundry Co., Ltd. | Electronic fuse cell array structure |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6351406B1 (en) * | 1998-11-16 | 2002-02-26 | Matrix Semiconductor, Inc. | Vertically stacked field programmable nonvolatile memory and method of fabrication |
US6420215B1 (en) * | 2000-04-28 | 2002-07-16 | Matrix Semiconductor, Inc. | Three-dimensional memory array and method of fabrication |
Family Cites Families (125)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3432827A (en) | 1964-09-04 | 1969-03-11 | An Controls Inc Di | Stacked magnetic memory system |
US3414892A (en) | 1967-12-26 | 1968-12-03 | Lab For Electronics Inc | Means interconnecting printed circuit memory planes |
US3634929A (en) | 1968-11-02 | 1972-01-18 | Tokyo Shibaura Electric Co | Method of manufacturing semiconductor integrated circuits |
US3582908A (en) | 1969-03-10 | 1971-06-01 | Bell Telephone Labor Inc | Writing a read-only memory while protecting nonselected elements |
US3576549A (en) | 1969-04-14 | 1971-04-27 | Cogar Corp | Semiconductor device, method, and memory array |
US3671948A (en) | 1970-09-25 | 1972-06-20 | North American Rockwell | Read-only memory |
FR2134172B1 (en) | 1971-04-23 | 1977-03-18 | Radiotechnique Compelec | |
US3717852A (en) | 1971-09-17 | 1973-02-20 | Ibm | Electronically rewritable read-only memory using via connections |
US3728695A (en) | 1971-10-06 | 1973-04-17 | Intel Corp | Random-access floating gate mos memory array |
US3990098A (en) | 1972-12-22 | 1976-11-02 | E. I. Du Pont De Nemours And Co. | Structure capable of forming a diode and associated conductive path |
JPS5267532A (en) | 1975-12-03 | 1977-06-04 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor memory unit |
CA1135854A (en) | 1977-09-30 | 1982-11-16 | Michel Moussie | Programmable read only memory cell |
US4203123A (en) | 1977-12-12 | 1980-05-13 | Burroughs Corporation | Thin film memory device employing amorphous semiconductor materials |
US4203158A (en) | 1978-02-24 | 1980-05-13 | Intel Corporation | Electrically programmable and erasable MOS floating gate memory device employing tunneling and method of fabricating same |
US4272880A (en) | 1979-04-20 | 1981-06-16 | Intel Corporation | MOS/SOS Process |
US4281397A (en) | 1979-10-29 | 1981-07-28 | Texas Instruments Incorporated | Virtual ground MOS EPROM or ROM matrix |
US4419741A (en) | 1980-01-28 | 1983-12-06 | Rca Corporation | Read only memory (ROM) having high density memory array with on pitch decoder circuitry |
US4499557A (en) | 1980-10-28 | 1985-02-12 | Energy Conversion Devices, Inc. | Programmable cell for use in programmable electronic arrays |
US4420766A (en) | 1981-02-09 | 1983-12-13 | Harris Corporation | Reversibly programmable polycrystalline silicon memory element |
US5407851A (en) | 1981-02-23 | 1995-04-18 | Unisys Corporation | Method of fabricating an electrically alterable resistive component on an insulating layer above a semiconductor substrate |
US4442507A (en) | 1981-02-23 | 1984-04-10 | Burroughs Corporation | Electrically programmable read-only memory stacked above a semiconductor substrate |
JPS5837948A (en) | 1981-08-31 | 1983-03-05 | Toshiba Corp | Laminated semiconductor memory device |
EP0073487B1 (en) | 1981-08-31 | 1988-07-20 | Kabushiki Kaisha Toshiba | Method for manufacturing three-dimensional semiconductor device |
US4489478A (en) | 1981-09-29 | 1984-12-25 | Fujitsu Limited | Process for producing a three-dimensional semiconductor device |
US4500905A (en) | 1981-09-30 | 1985-02-19 | Tokyo Shibaura Denki Kabushiki Kaisha | Stacked semiconductor device with sloping sides |
US4507757A (en) | 1982-03-23 | 1985-03-26 | Texas Instruments Incorporated | Avalanche fuse element in programmable memory |
US4535424A (en) | 1982-06-03 | 1985-08-13 | Texas Instruments Incorporated | Solid state three dimensional semiconductor memory array |
US4543594A (en) | 1982-09-07 | 1985-09-24 | Intel Corporation | Fusible link employing capacitor structure |
US4677742A (en) | 1983-01-18 | 1987-07-07 | Energy Conversion Devices, Inc. | Electronic matrix arrays and method for making the same |
US4569121A (en) | 1983-03-07 | 1986-02-11 | Signetics Corporation | Method of fabricating a programmable read-only memory cell incorporating an antifuse utilizing deposition of amorphous semiconductor layer |
US4630096A (en) | 1984-05-30 | 1986-12-16 | Motorola, Inc. | High density IC module assembly |
JPS613450A (en) | 1984-06-18 | 1986-01-09 | Hiroshima Daigaku | Shared memory integrated device of three-dimensional photo coupling |
US4646266A (en) | 1984-09-28 | 1987-02-24 | Energy Conversion Devices, Inc. | Programmable semiconductor structures and methods for using the same |
JPS6258673A (en) | 1985-09-09 | 1987-03-14 | Fujitsu Ltd | Semiconductor storage device |
CA1226966A (en) | 1985-09-10 | 1987-09-15 | Gabriel Marcantonio | Integrated circuit chip package |
US5089862A (en) | 1986-05-12 | 1992-02-18 | Warner Jr Raymond M | Monocrystalline three-dimensional integrated circuit |
US4943538A (en) | 1986-05-09 | 1990-07-24 | Actel Corporation | Programmable low impedance anti-fuse element |
US4899205A (en) | 1986-05-09 | 1990-02-06 | Actel Corporation | Electrically-programmable low-impedance anti-fuse element |
US4823181A (en) | 1986-05-09 | 1989-04-18 | Actel Corporation | Programmable low impedance anti-fuse element |
US4881114A (en) | 1986-05-16 | 1989-11-14 | Actel Corporation | Selectively formable vertical diode circuit element |
US4876220A (en) | 1986-05-16 | 1989-10-24 | Actel Corporation | Method of making programmable low impedance interconnect diode element |
US4811082A (en) | 1986-11-12 | 1989-03-07 | International Business Machines Corporation | High performance integrated circuit packaging structure |
US4820657A (en) | 1987-02-06 | 1989-04-11 | Georgia Tech Research Corporation | Method for altering characteristics of junction semiconductor devices |
US5354695A (en) | 1992-04-08 | 1994-10-11 | Leedy Glenn J | Membrane dielectric isolation IC fabrication |
US5283468A (en) | 1988-05-30 | 1994-02-01 | Canon Kabushiki Kaisha | Electric circuit apparatus |
JPH0770623B2 (en) | 1988-07-08 | 1995-07-31 | 三菱電機株式会社 | Static random access memory device |
US5306935A (en) | 1988-12-21 | 1994-04-26 | Texas Instruments Incorporated | Method of forming a nonvolatile stacked memory |
US5191405A (en) | 1988-12-23 | 1993-03-02 | Matsushita Electric Industrial Co., Ltd. | Three-dimensional stacked lsi |
JP2778977B2 (en) | 1989-03-14 | 1998-07-23 | 株式会社東芝 | Semiconductor device and manufacturing method thereof |
EP0395886A2 (en) | 1989-04-03 | 1990-11-07 | Olympus Optical Co., Ltd. | Memory cell and multidimensinal memory device constituted by arranging the memory cells |
US5160987A (en) | 1989-10-26 | 1992-11-03 | International Business Machines Corporation | Three-dimensional semiconductor structures formed from planar layers |
US5070384A (en) | 1990-04-12 | 1991-12-03 | Actel Corporation | Electrically programmable antifuse element incorporating a dielectric and amorphous silicon interlayer |
US5311039A (en) | 1990-04-24 | 1994-05-10 | Seiko Epson Corporation | PROM and ROM memory cells |
US5296716A (en) * | 1991-01-18 | 1994-03-22 | Energy Conversion Devices, Inc. | Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom |
JPH05102430A (en) | 1991-04-23 | 1993-04-23 | Mitsubishi Electric Corp | Semiconductor device and manufacture thereof |
US5334880A (en) | 1991-04-30 | 1994-08-02 | International Business Machines Corporation | Low voltage programmable storage element |
EP0516866A1 (en) | 1991-05-03 | 1992-12-09 | International Business Machines Corporation | Modular multilayer interwiring structure |
JP3547146B2 (en) | 1991-06-10 | 2004-07-28 | 日本特殊陶業株式会社 | Package for integrated circuit |
US5202754A (en) | 1991-09-13 | 1993-04-13 | International Business Machines Corporation | Three-dimensional multichip packages and methods of fabrication |
JPH0715969B2 (en) | 1991-09-30 | 1995-02-22 | インターナショナル・ビジネス・マシーンズ・コーポレイション | Multi-chip integrated circuit package and system thereof |
US5712180A (en) | 1992-01-14 | 1998-01-27 | Sundisk Corporation | EEPROM with split gate source side injection |
US5313421A (en) | 1992-01-14 | 1994-05-17 | Sundisk Corporation | EEPROM with split gate source side injection |
US5398200A (en) | 1992-03-02 | 1995-03-14 | Motorola, Inc. | Vertically formed semiconductor random access memory device |
US5985693A (en) | 1994-09-30 | 1999-11-16 | Elm Technology Corporation | High density three-dimensional IC interconnection |
US5422435A (en) | 1992-05-22 | 1995-06-06 | National Semiconductor Corporation | Stacked multi-chip modules and method of manufacturing |
US5266912A (en) | 1992-08-19 | 1993-11-30 | Micron Technology, Inc. | Inherently impedance matched multiple integrated circuit module |
KR100310220B1 (en) | 1992-09-14 | 2001-12-17 | 엘란 티본 | Apparatus for manufacturing integrated circuit device and its manufacturing method |
EP0595021A1 (en) | 1992-10-28 | 1994-05-04 | International Business Machines Corporation | Improved lead frame package for electronic devices |
JP3267409B2 (en) | 1992-11-24 | 2002-03-18 | 株式会社日立製作所 | Semiconductor integrated circuit device |
US5536968A (en) | 1992-12-18 | 1996-07-16 | At&T Global Information Solutions Company | Polysilicon fuse array structure for integrated circuits |
EP0606653A1 (en) | 1993-01-04 | 1994-07-20 | Texas Instruments Incorporated | Field programmable distributed processing memory |
US5471090A (en) | 1993-03-08 | 1995-11-28 | International Business Machines Corporation | Electronic structures having a joining geometry providing reduced capacitive loading |
US5801437A (en) | 1993-03-29 | 1998-09-01 | Staktek Corporation | Three-dimensional warp-resistant integrated circuit module method and apparatus |
US5455740A (en) | 1994-03-07 | 1995-10-03 | Staktek Corporation | Bus communication system for stacked high density integrated circuit packages |
WO1995005676A1 (en) | 1993-08-13 | 1995-02-23 | Irvine Sensors Corporation | Stack of ic chips as substitute for single ic chip |
US5561622A (en) | 1993-09-13 | 1996-10-01 | International Business Machines Corporation | Integrated memory cube structure |
US5391518A (en) | 1993-09-24 | 1995-02-21 | Vlsi Technology, Inc. | Method of making a field programmable read only memory (ROM) cell using an amorphous silicon fuse with buried contact polysilicon and metal electrodes |
EP1178530A2 (en) | 1993-09-30 | 2002-02-06 | Kopin Corporation | Three-dimensional processor using transferred thin film circuits |
US5427979A (en) | 1993-10-18 | 1995-06-27 | Vlsi Technology, Inc. | Method for making multi-level antifuse structure |
US5455445A (en) | 1994-01-21 | 1995-10-03 | Kulite Semiconductor Products, Inc. | Multi-level semiconductor structures having environmentally isolated elements |
US5380681A (en) | 1994-03-21 | 1995-01-10 | United Microelectronics Corporation | Three-dimensional multichip package and methods of fabricating |
US5535156A (en) | 1994-05-05 | 1996-07-09 | California Institute Of Technology | Transistorless, multistable current-mode memory cells and memory arrays and methods of reading and writing to the same |
US5585675A (en) | 1994-05-11 | 1996-12-17 | Harris Corporation | Semiconductor die packaging tub having angularly offset pad-to-pad via structure configured to allow three-dimensional stacking and electrical interconnections among multiple identical tubs |
US5463244A (en) | 1994-05-26 | 1995-10-31 | Symetrix Corporation | Antifuse programmable element using ferroelectric material |
US5441907A (en) | 1994-06-27 | 1995-08-15 | Taiwan Semiconductor Manufacturing Company | Process for manufacturing a plug-diode mask ROM |
US5434745A (en) | 1994-07-26 | 1995-07-18 | White Microelectronics Div. Of Bowmar Instrument Corp. | Stacked silicon die carrier assembly |
US5523628A (en) | 1994-08-05 | 1996-06-04 | Hughes Aircraft Company | Apparatus and method for protecting metal bumped integrated circuit chips during processing and for providing mechanical support to interconnected chips |
US5703747A (en) | 1995-02-22 | 1997-12-30 | Voldman; Steven Howard | Multichip semiconductor structures with interchip electrostatic discharge protection, and fabrication methods therefore |
US5612570A (en) | 1995-04-13 | 1997-03-18 | Dense-Pac Microsystems, Inc. | Chip stack and method of making same |
US5675547A (en) | 1995-06-01 | 1997-10-07 | Sony Corporation | One time programmable read only memory programmed by destruction of insulating layer |
US5751012A (en) | 1995-06-07 | 1998-05-12 | Micron Technology, Inc. | Polysilicon pillar diode for use in a non-volatile memory cell |
US5781031A (en) | 1995-11-21 | 1998-07-14 | International Business Machines Corporation | Programmable logic array |
US5696031A (en) | 1996-11-20 | 1997-12-09 | Micron Technology, Inc. | Device and method for stacking wire-bonded integrated circuit dice on flip-chip bonded integrated circuit dice |
US5726484A (en) * | 1996-03-06 | 1998-03-10 | Xilinx, Inc. | Multilayer amorphous silicon antifuse |
US5778422A (en) | 1996-04-04 | 1998-07-07 | International Business Machines Corporation | Data processing system memory controller that selectively caches data associated with write requests |
US5693552A (en) | 1996-04-29 | 1997-12-02 | United Microelectronics Corporation | Method for fabricating read-only memory device with a three-dimensional memory cell structure |
US5969380A (en) | 1996-06-07 | 1999-10-19 | Micron Technology, Inc. | Three dimensional ferroelectric memory |
US5835396A (en) | 1996-10-17 | 1998-11-10 | Zhang; Guobiao | Three-dimensional read-only memory |
TW306005B (en) | 1996-11-22 | 1997-05-21 | United Microelectronics Corp | Decoding method of diode-type read only memory array |
US5953588A (en) | 1996-12-21 | 1999-09-14 | Irvine Sensors Corporation | Stackable layers containing encapsulated IC chips |
US6057598A (en) | 1997-01-31 | 2000-05-02 | Vlsi Technology, Inc. | Face on face flip chip integration |
US6551857B2 (en) | 1997-04-04 | 2003-04-22 | Elm Technology Corporation | Three dimensional structure integrated circuits |
US5915167A (en) | 1997-04-04 | 1999-06-22 | Elm Technology Corporation | Three dimensional structure memory |
KR100277438B1 (en) | 1998-05-28 | 2001-02-01 | 윤종용 | Multi Chip Package |
US6197641B1 (en) | 1998-08-28 | 2001-03-06 | Lucent Technologies Inc. | Process for fabricating vertical transistors |
US6281042B1 (en) | 1998-08-31 | 2001-08-28 | Micron Technology, Inc. | Structure and method for a high performance electronic packaging assembly |
US6034882A (en) | 1998-11-16 | 2000-03-07 | Matrix Semiconductor, Inc. | Vertically stacked field programmable nonvolatile memory and method of fabrication |
US6122187A (en) | 1998-11-23 | 2000-09-19 | Micron Technology, Inc. | Stacked integrated circuits |
US6351028B1 (en) | 1999-02-08 | 2002-02-26 | Micron Technology, Inc. | Multiple die stack apparatus employing T-shaped interposer elements |
US6518156B1 (en) * | 1999-03-29 | 2003-02-11 | Hewlett-Packard Company | Configurable nanoscale crossbar electronic circuits made by electrochemical reaction |
TW497376B (en) | 1999-05-14 | 2002-08-01 | Siliconware Precision Industries Co Ltd | Dual-die semiconductor package using lead as die pad |
JP3768744B2 (en) | 1999-09-22 | 2006-04-19 | 株式会社ルネサステクノロジ | Semiconductor device and manufacturing method thereof |
US6322903B1 (en) | 1999-12-06 | 2001-11-27 | Tru-Si Technologies, Inc. | Package of integrated circuits and vertical integration |
US6291858B1 (en) | 2000-01-03 | 2001-09-18 | International Business Machines Corporation | Multistack 3-dimensional high density semiconductor device and method for fabrication |
US6631085B2 (en) * | 2000-04-28 | 2003-10-07 | Matrix Semiconductor, Inc. | Three-dimensional memory array incorporating serial chain diode stack |
JP3370646B2 (en) | 2000-06-02 | 2003-01-27 | 株式会社新川 | Semiconductor device |
JP2002076250A (en) | 2000-08-29 | 2002-03-15 | Nec Corp | Semiconductor device |
JP3581086B2 (en) | 2000-09-07 | 2004-10-27 | 松下電器産業株式会社 | Semiconductor device |
US6355501B1 (en) | 2000-09-21 | 2002-03-12 | International Business Machines Corporation | Three-dimensional chip stacking assembly |
US6569705B2 (en) * | 2000-12-21 | 2003-05-27 | Intel Corporation | Metal structure for a phase-change memory device |
US6486065B2 (en) * | 2000-12-22 | 2002-11-26 | Matrix Semiconductor, Inc. | Method of forming nonvolatile memory device utilizing a hard mask |
JP2002231882A (en) | 2001-02-06 | 2002-08-16 | Mitsubishi Electric Corp | Semiconductor device |
US20030026157A1 (en) * | 2001-07-30 | 2003-02-06 | Knall N. Johan | Anti-fuse memory cell with asymmetric breakdown voltage |
US6704235B2 (en) * | 2001-07-30 | 2004-03-09 | Matrix Semiconductor, Inc. | Anti-fuse memory cell with asymmetric breakdown voltage |
US6768661B2 (en) * | 2002-06-27 | 2004-07-27 | Matrix Semiconductor, Inc. | Multiple-mode memory and method for forming same |
-
2001
- 2001-08-13 US US09/928,536 patent/US6525953B1/en not_active Expired - Lifetime
-
2002
- 2002-04-22 US US10/128,188 patent/US6689644B2/en not_active Expired - Lifetime
- 2002-07-26 WO PCT/US2002/023748 patent/WO2003017427A2/en not_active Application Discontinuation
- 2002-07-26 AU AU2002330921A patent/AU2002330921A1/en not_active Abandoned
- 2002-07-31 TW TW091117223A patent/TWI268604B/en not_active IP Right Cessation
- 2002-07-31 MY MYPI20022874A patent/MY122896A/en unknown
- 2002-12-06 US US10/313,763 patent/US6780683B2/en not_active Expired - Lifetime
-
2004
- 2004-05-17 US US10/848,601 patent/US7488625B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6351406B1 (en) * | 1998-11-16 | 2002-02-26 | Matrix Semiconductor, Inc. | Vertically stacked field programmable nonvolatile memory and method of fabrication |
US6420215B1 (en) * | 2000-04-28 | 2002-07-16 | Matrix Semiconductor, Inc. | Three-dimensional memory array and method of fabrication |
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US20030064572A1 (en) | 2003-04-03 |
US6780683B2 (en) | 2004-08-24 |
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MY122896A (en) | 2006-05-31 |
US20050026334A1 (en) | 2005-02-03 |
US6525953B1 (en) | 2003-02-25 |
US7488625B2 (en) | 2009-02-10 |
TWI268604B (en) | 2006-12-11 |
US20030124802A1 (en) | 2003-07-03 |
WO2003017427A2 (en) | 2003-02-27 |
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