WO2003021298A3 - Mems comb-finger actuator - Google Patents

Mems comb-finger actuator Download PDF

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Publication number
WO2003021298A3
WO2003021298A3 PCT/US2002/026500 US0226500W WO03021298A3 WO 2003021298 A3 WO2003021298 A3 WO 2003021298A3 US 0226500 W US0226500 W US 0226500W WO 03021298 A3 WO03021298 A3 WO 03021298A3
Authority
WO
WIPO (PCT)
Prior art keywords
microstructure
finger actuator
comb
mems comb
finger
Prior art date
Application number
PCT/US2002/026500
Other languages
French (fr)
Other versions
WO2003021298A2 (en
Inventor
Mark Alan Lemkin
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Priority to AU2002323280A priority Critical patent/AU2002323280A1/en
Publication of WO2003021298A2 publication Critical patent/WO2003021298A2/en
Publication of WO2003021298A3 publication Critical patent/WO2003021298A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate

Abstract

A comb-finger microstructure (106, 108) is disclosed for use in optical switching arrays, beam steering, optical displays, disk drive head actuators and the like. The microstructure (106, 108) is capable of producing linear or nonlinear actuation forces, perpendicular to the surface of a chip in which the microactuator is formed, as a function of applied voltages 'V1, V2, V3'. The microstructure (106, 108) further provides the ability to detect the position of a movable structure with respect to a stationary or anchored structure.
PCT/US2002/026500 2001-08-31 2002-08-22 Mems comb-finger actuator WO2003021298A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002323280A AU2002323280A1 (en) 2001-08-31 2002-08-22 Mems comb-finger actuator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/944,395 US20030048036A1 (en) 2001-08-31 2001-08-31 MEMS comb-finger actuator
US09/944,395 2001-08-31

Publications (2)

Publication Number Publication Date
WO2003021298A2 WO2003021298A2 (en) 2003-03-13
WO2003021298A3 true WO2003021298A3 (en) 2003-09-04

Family

ID=25481318

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/026500 WO2003021298A2 (en) 2001-08-31 2002-08-22 Mems comb-finger actuator

Country Status (3)

Country Link
US (1) US20030048036A1 (en)
AU (1) AU2002323280A1 (en)
WO (1) WO2003021298A2 (en)

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Also Published As

Publication number Publication date
AU2002323280A1 (en) 2003-03-18
US20030048036A1 (en) 2003-03-13
WO2003021298A2 (en) 2003-03-13

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