WO2003029775B1 - Thermoplastic apparatus for conditioning the temperature of a fluid - Google Patents

Thermoplastic apparatus for conditioning the temperature of a fluid

Info

Publication number
WO2003029775B1
WO2003029775B1 PCT/US2002/030494 US0230494W WO03029775B1 WO 2003029775 B1 WO2003029775 B1 WO 2003029775B1 US 0230494 W US0230494 W US 0230494W WO 03029775 B1 WO03029775 B1 WO 03029775B1
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
temperature
flow
heat exchanger
liquid
Prior art date
Application number
PCT/US2002/030494
Other languages
French (fr)
Other versions
WO2003029775A2 (en
WO2003029775A3 (en
Inventor
John E Pillion
Jieh-Hwa Shyu
Alicia Briggs
Robert Mcloughlin
Original Assignee
Mykrolis Corp
John E Pillion
Jieh-Hwa Shyu
Alicia Briggs
Robert Mcloughlin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corp, John E Pillion, Jieh-Hwa Shyu, Alicia Briggs, Robert Mcloughlin filed Critical Mykrolis Corp
Priority to EP02791182A priority Critical patent/EP1433036A4/en
Priority to JP2003532939A priority patent/JP3939697B2/en
Priority to KR1020047004742A priority patent/KR100711687B1/en
Priority to US10/489,288 priority patent/US7249628B2/en
Publication of WO2003029775A2 publication Critical patent/WO2003029775A2/en
Publication of WO2003029775A3 publication Critical patent/WO2003029775A3/en
Publication of WO2003029775B1 publication Critical patent/WO2003029775B1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/06—Constructions of heat-exchange apparatus characterised by the selection of particular materials of plastics material
    • F28F21/067—Details
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/08—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being otherwise bent, e.g. in a serpentine or zig-zag
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/08—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being otherwise bent, e.g. in a serpentine or zig-zag
    • F28D7/082—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being otherwise bent, e.g. in a serpentine or zig-zag with serpentine or zig-zag configuration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/06—Constructions of heat-exchange apparatus characterised by the selection of particular materials of plastics material
    • F28F21/062—Constructions of heat-exchange apparatus characterised by the selection of particular materials of plastics material the heat-exchange apparatus employing tubular conduits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F27/00—Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/01—Control of temperature without auxiliary power
    • G05D23/13—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
    • G05D23/1393—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1906—Control of temperature characterised by the use of electric means using an analogue comparing device
    • G05D23/1912—Control of temperature characterised by the use of electric means using an analogue comparing device whose output amplitude can take more than two discrete values
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
    • F28D2021/0077—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for tempering, e.g. with cooling or heating circuits for temperature control of elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4935—Heat exchanger or boiler making

Abstract

This invention relates to an apparatus for conditioning the temperature of a fluid by utilizing a thermoplastic heat exchanger (50) comprised of a plurality of hollow tubes. The apparatus controls the temperature of a process fluid inside the heat exchanger (50) via a controller (46) by adjustment of a control valve (64) that regulates the flow of an exchange fluid. The apparatus can be used to maintain the temperature of a chemical bath (12) and also to prepare discreet dispensed volumes of temperature controlled liquid. The heat exchanger (50) is chemically inert and may be operated in extreme environments.

Claims

AMENDED CLAIMS
[received by the International Bureau on 19 March 2003 (19.03.03); Claims 9-21 amended; remaining claims unchanged (1 page)]
9. The apparatus of claim 1 wherein said hollow tubes are plaited into cords and thermally annealed.
10. The apparatus of claim 1 wherein said thermoplastic hollow tubes are impregnated with a thermally conductive material.
11. The apparatus of claim 1 wherein said first fluid is a photoresist, antireflective coating, or a photoresist developer.
12. The apparatus of claim 1 wherein said first fluid is a spin on dielectric.
13. The apparatus of claim 1 wherein said first fluid is a solution comprising copper ions.
14. The apparatus of claim 1 wherein said fluid is chosen from the group consisting of acid bases, oxidizers, or abrasive slurry.
15. The apparatus of claim 1 wherein said wherein said liquid is a photoresist stripper.
16. The apparatus of claim 1 wherein said liquid is an organic liquid.
17. The apparatus of claim 1 further comprising fluid flow controlling means in fluid communication with said first housing fluid connection.
18. The apparatus of claim 17 wherein the fluid flow controlling means is a dispense pump, valve, fluid flow controller, or pressure pot.
19. A method for maintaining the temperature of a liquid, a temperature sensor positioned to read the temperature of said first fluid and which generates a temperature signal indicative of the first fluid temperature, and a thermoplastic heat exchanger positioned to add or remove heat from the first fluid, said method comprising comparing the first fluid temperature as indicated by the temperature signal to a set-point and adjusting the instantaneous rate of addition or removal of heat through the heat exchanger to maintain the temperature of the first fluid in the fluid circuit, as read by the temperature sensor, essentially constant, controlling the flow of said second fluid through said heat exchanger by passing the second fluid through a flow proportioning the valve and regulating the flow of said second fluid using said flow proportioning valve.
20. The method of claim 19 wherein the temperature sensor is located in a wafer cleaning bath.
21. The method of claim 19 wherein the temperature sensor is in fluid communication with the dispense nozzle of a flow circuit.
PCT/US2002/030494 2001-10-01 2002-09-26 Thermoplastic apparatus for conditioning the temperature of a fluid WO2003029775A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP02791182A EP1433036A4 (en) 2001-10-01 2002-09-26 Apparatus for conditioning the temperature of a fluid
JP2003532939A JP3939697B2 (en) 2001-10-01 2002-09-26 Thermoplastic device for regulating fluid temperature
KR1020047004742A KR100711687B1 (en) 2001-10-01 2002-09-26 Apparatus for conditioning the temperature of a fluid
US10/489,288 US7249628B2 (en) 2001-10-01 2002-09-26 Apparatus for conditioning the temperature of a fluid

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32635701P 2001-10-01 2001-10-01
US60/326,357 2001-10-01

Publications (3)

Publication Number Publication Date
WO2003029775A2 WO2003029775A2 (en) 2003-04-10
WO2003029775A3 WO2003029775A3 (en) 2003-11-06
WO2003029775B1 true WO2003029775B1 (en) 2004-04-08

Family

ID=23271866

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/030494 WO2003029775A2 (en) 2001-10-01 2002-09-26 Thermoplastic apparatus for conditioning the temperature of a fluid

Country Status (7)

Country Link
US (1) US7249628B2 (en)
EP (1) EP1433036A4 (en)
JP (1) JP3939697B2 (en)
KR (1) KR100711687B1 (en)
CN (1) CN100407084C (en)
TW (1) TW546465B (en)
WO (1) WO2003029775A2 (en)

Families Citing this family (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
CN100380083C (en) * 2001-10-01 2008-04-09 安格斯公司 Exchange apparatus
US7245992B2 (en) * 2003-08-05 2007-07-17 Christian Holter Automatic selfoptimising and pressure regulated control unit for pumps
EP1706699B1 (en) * 2003-12-22 2011-02-09 Entegris, Inc. Exchange device with potted hollow conduits and methods of application
CN101076716B (en) 2004-10-08 2011-04-13 Sdc材料有限责任公司 An apparatus for and method of sampling and collecting powders flowing in a gas stream
CN101155992B (en) 2004-11-23 2013-02-20 恩特格里公司 System and method for a variable home position dispense system
US20060188412A1 (en) * 2005-02-24 2006-08-24 Dainippon Screen Mfg.Co., Ltd. Substrate treating apparatus and method
US9180423B2 (en) 2005-04-19 2015-11-10 SDCmaterials, Inc. Highly turbulent quench chamber
US8753097B2 (en) 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
CN101583796B (en) 2005-11-21 2012-07-04 恩特格里公司 Multistage pump and method for forming the same
CN101356715B (en) 2005-12-02 2012-07-18 恩特格里公司 System and method for valve sequencing in a pump
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
CN102705209B (en) * 2005-12-02 2015-09-30 恩特格里公司 For system and method pressure compensated in pump
DE602006021614D1 (en) 2005-12-02 2011-06-09 Entegris Inc I / O SYSTEMS, METHOD AND DEVICE FOR CONNECTING A PUMP CONTROL
WO2007067360A2 (en) * 2005-12-05 2007-06-14 Entegris, Inc. Error volume system and method for a pump
KR100747763B1 (en) * 2005-12-07 2007-08-08 김영훈 method for manufacturing oil filter element and the oil filter element thereby
US7849916B2 (en) * 2006-02-02 2010-12-14 Noah Precision, Llc Temperature control apparatus and method
TWI402423B (en) 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
US7684446B2 (en) * 2006-03-01 2010-03-23 Entegris, Inc. System and method for multiplexing setpoints
KR20090034344A (en) * 2006-07-21 2009-04-07 엔테그리스, 아이엔씨. Apparatus and method for conditioning an immersion fluid
JP2009081366A (en) * 2007-09-27 2009-04-16 Elpida Memory Inc Batch processing apparatus
US8507401B1 (en) 2007-10-15 2013-08-13 SDCmaterials, Inc. Method and system for forming plug and play metal catalysts
ITRM20070593A1 (en) * 2007-11-15 2009-05-16 Nanto S R L POLYMERIC MICRODISSIPATOR, IN PARTICULAR FOR THE THERMAL CONDITIONING OF MECHANICAL AND ELECTRONIC DEVICES.
USD627900S1 (en) 2008-05-07 2010-11-23 SDCmaterials, Inc. Glove box
US8545652B1 (en) 2009-12-15 2013-10-01 SDCmaterials, Inc. Impact resistant material
US9039916B1 (en) 2009-12-15 2015-05-26 SDCmaterials, Inc. In situ oxide removal, dispersal and drying for copper copper-oxide
US9126191B2 (en) 2009-12-15 2015-09-08 SDCmaterials, Inc. Advanced catalysts for automotive applications
US9149797B2 (en) 2009-12-15 2015-10-06 SDCmaterials, Inc. Catalyst production method and system
US8470112B1 (en) 2009-12-15 2013-06-25 SDCmaterials, Inc. Workflow for novel composite materials
US8557727B2 (en) 2009-12-15 2013-10-15 SDCmaterials, Inc. Method of forming a catalyst with inhibited mobility of nano-active material
US8652992B2 (en) 2009-12-15 2014-02-18 SDCmaterials, Inc. Pinning and affixing nano-active material
US8803025B2 (en) 2009-12-15 2014-08-12 SDCmaterials, Inc. Non-plugging D.C. plasma gun
IT1400573B1 (en) * 2010-05-06 2013-06-14 Carpigiani Group Ali Spa MACHINE FOR THE PRODUCTION AND DISTRIBUTION OF LIQUID OR SEMILIQUID FOOD CONSUMPTION PRODUCTS
AT509913B1 (en) * 2010-06-09 2012-06-15 Loeblich & Huebner En Effizienz Und Haustechnik Gmbh METHOD FOR ADJUSTING THE VOLUME FLOW OF HEATING AND / OR REFRIGERATING MEDIA THROUGH ROOM HEAT EXCHANGE OF A HEATING AND / OR COOLING MEDIUM. COOLING SYSTEM
US8669202B2 (en) 2011-02-23 2014-03-11 SDCmaterials, Inc. Wet chemical and plasma methods of forming stable PtPd catalysts
RU2014110365A (en) 2011-08-19 2015-09-27 ЭсДиСиМАТИРИАЛЗ, ИНК. COATED SUBSTRATES FOR USE IN CATALYSIS, CATALYTIC CONVERTERS AND METHODS OF COATING SUBSTRATES WITH OXIDE COATING COMPOSITIONS
JP6270310B2 (en) 2011-12-12 2018-01-31 ギガフォトン株式会社 Cooling water temperature control device
JP2013145066A (en) * 2012-01-13 2013-07-25 Panasonic Corp Heat exchanger
NO342628B1 (en) * 2012-05-24 2018-06-25 Fmc Kongsberg Subsea As Active control of underwater coolers
US10330625B2 (en) 2012-05-31 2019-06-25 Universiteit Gent Methods and systems for characterizing void fractions
US9156025B2 (en) 2012-11-21 2015-10-13 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9511352B2 (en) 2012-11-21 2016-12-06 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
CN103116373B (en) * 2013-01-23 2014-12-10 中国电子工程设计院 Method, device and system of controlling feeding sea water temperature
US9939822B2 (en) 2013-02-11 2018-04-10 Graco Minnesota Inc. Remote monitoring for fluid applicator system
US10969805B2 (en) 2013-02-11 2021-04-06 Graco Minnesota Inc. Paint sprayer distributed control and output volume monitoring architectures
CN103258760B (en) * 2013-04-23 2016-06-29 上海华虹宏力半导体制造有限公司 Semiconductor equipment
US10041911B2 (en) * 2013-05-28 2018-08-07 Dow Global Technologies Llc Methods and systems for measuring corrosion in-situ
US9586179B2 (en) 2013-07-25 2017-03-07 SDCmaterials, Inc. Washcoats and coated substrates for catalytic converters and methods of making and using same
US9517448B2 (en) 2013-10-22 2016-12-13 SDCmaterials, Inc. Compositions of lean NOx trap (LNT) systems and methods of making and using same
CN106061600A (en) 2013-10-22 2016-10-26 Sdc材料公司 Catalyst design for heavy-duty diesel combustion engines
WO2015143225A1 (en) 2014-03-21 2015-09-24 SDCmaterials, Inc. Compositions for passive nox adsorption (pna) systems
CN103969965B (en) * 2014-05-12 2015-11-18 华中科技大学 The device of accurate control submersible photoetching apparatus soaking liquid temperature and Temp. control method thereof
CN104634157B (en) * 2014-12-30 2017-01-04 中国天辰工程有限公司 A kind of built-in heat exchanger temperature control valve (TCV)
CN104865996B (en) * 2015-05-06 2018-01-23 新奥环保技术有限公司 A kind of supercritical water reaction temprature control method and device and supercritical water reaction device system
JP5938506B1 (en) * 2015-09-17 2016-06-22 株式会社日立国際電気 Substrate processing system, semiconductor device manufacturing method, program, and recording medium
CN108079645A (en) * 2018-01-31 2018-05-29 深圳市鑫承诺环保产业股份有限公司 Hydrocarbon solution circulation filter
CN108187979B (en) * 2018-01-31 2020-06-23 京东方科技集团股份有限公司 Photoresist glue supply system and coating machine
JP6942660B2 (en) * 2018-03-09 2021-09-29 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing equipment and substrate processing method
CN109374875A (en) * 2018-11-20 2019-02-22 中国科学院生物物理研究所 Low noise constant temperature gravity perfusion patch clamp
US11293430B2 (en) * 2020-01-22 2022-04-05 DropWater Solutions Smart pump controller
US11792885B2 (en) 2020-01-22 2023-10-17 DropWater Solutions Wireless mesh for fluid distribution network

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US433789A (en) * 1890-08-05 Type-writer scale
US2847166A (en) * 1955-09-06 1958-08-12 James L Smith Automatic control system
US3277959A (en) * 1964-08-12 1966-10-11 Du Pont Plastic tube heat exchanger and process of making
US3315750A (en) 1966-04-18 1967-04-25 Vincent N Delaney Fan balancing means
US3616022A (en) 1968-08-06 1971-10-26 Du Pont Method of making heat exchange components
US4129177A (en) * 1977-06-06 1978-12-12 Adcock Thomas P Solar heating and cooling system
NL7811007A (en) 1978-11-06 1980-05-08 Akzo Nv Apparatus for transferring heat by means of hollow wires.
CA1115608A (en) * 1979-06-04 1982-01-05 John M. Stewart Solar heating systems
US4320870A (en) * 1979-12-12 1982-03-23 Giora Manor Temperature control systems
US4333789A (en) * 1980-07-25 1982-06-08 Mcalister Roy E Apparatus for manifolding multiple passage solar panel
US4411307A (en) * 1981-01-29 1983-10-25 Atlantic Richfield Company Wound tube heat exchanger
US4749031A (en) 1982-07-29 1988-06-07 Nisshin Chemical Industry Co., Ltd. Heat exchanging device having baffles and fluorocarbon tubes
JPS602894A (en) 1983-06-10 1985-01-09 イ−・アイ・デユポン・ド・ネモア−ス・アンド・コンパニ− Heat exchanger
JPS60221533A (en) * 1984-04-17 1985-11-06 Mitsubishi Heavy Ind Ltd Device for cooling metallic strip
DE8506819U1 (en) 1985-03-08 1986-07-03 Akzo Gmbh, 5600 Wuppertal Device for heat and / or mass transfer with the aid of hollow fibers
US4637454A (en) 1985-04-01 1987-01-20 Mydax, Inc. Wide range temperature control system for fluids
DE3673780D1 (en) 1985-12-16 1990-10-04 Akzo Nv CONNECTING HOLLOW PROFILE BODIES TO A PLASTIC PLATE, ESPECIALLY FOR THE PRODUCTION OF HEAT EXCHANGERS.
JP2644896B2 (en) 1989-09-18 1997-08-25 株式会社日立製作所 Cooling device temperature control method
JPH03178668A (en) * 1989-12-06 1991-08-02 Senko Ika Kogyo Kk Heat exchanger
US5216743A (en) * 1990-05-10 1993-06-01 Seitz David E Thermo-plastic heat exchanger
US5228992A (en) 1992-03-03 1993-07-20 Pall Corporation Process for preparing hollow fiber separatory devices
US5572885A (en) * 1995-06-06 1996-11-12 Erickson; Donald C. Shrouded coiled crested tube diabatic mass exchanger
US5748656A (en) 1996-01-05 1998-05-05 Cymer, Inc. Laser having improved beam quality and reduced operating cost
EP0879135B1 (en) * 1996-02-07 2002-06-12 Anthony Joseph Cesaroni Bonding of tubes of thermoplastic polymers
US6001291A (en) * 1996-02-07 1999-12-14 Cesaroni; Anthony Joseph Method of bonding tubes into an article
US6024824A (en) * 1997-07-17 2000-02-15 3M Innovative Properties Company Method of making articles in sheet form, particularly abrasive articles
NL1008124C2 (en) * 1998-01-26 1999-07-27 Lentjes Standard Fasel Bv Apparatus and method for cooling gas.
US6024842A (en) * 1998-03-06 2000-02-15 Komax Systems, Inc. Distillation column device
DE19841256C2 (en) * 1998-09-09 2000-10-26 Viessmann Werke Kg Method and device for heating or cooling a fluid in a heat exchanger or cold exchanger and control therefor

Also Published As

Publication number Publication date
KR20040039467A (en) 2004-05-10
EP1433036A2 (en) 2004-06-30
TW546465B (en) 2003-08-11
KR100711687B1 (en) 2007-05-02
CN100407084C (en) 2008-07-30
WO2003029775A2 (en) 2003-04-10
US7249628B2 (en) 2007-07-31
EP1433036A4 (en) 2008-10-22
WO2003029775A3 (en) 2003-11-06
JP3939697B2 (en) 2007-07-04
JP2005536704A (en) 2005-12-02
US20040251017A1 (en) 2004-12-16
CN1561473A (en) 2005-01-05

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