WO2003029874A3 - Switching device, in particular for optical applications - Google Patents

Switching device, in particular for optical applications Download PDF

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Publication number
WO2003029874A3
WO2003029874A3 PCT/DK2002/000666 DK0200666W WO03029874A3 WO 2003029874 A3 WO2003029874 A3 WO 2003029874A3 DK 0200666 W DK0200666 W DK 0200666W WO 03029874 A3 WO03029874 A3 WO 03029874A3
Authority
WO
WIPO (PCT)
Prior art keywords
mobile element
actuating electrode
switching position
elastic member
switching device
Prior art date
Application number
PCT/DK2002/000666
Other languages
French (fr)
Other versions
WO2003029874A2 (en
Inventor
Carsten Underbjerg
Claude Bourgeois
Original Assignee
Dicon As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dicon As filed Critical Dicon As
Priority to AU2002362541A priority Critical patent/AU2002362541B2/en
Priority to JP2003533030A priority patent/JP4238132B2/en
Priority to CA2462812A priority patent/CA2462812C/en
Priority to KR1020047005064A priority patent/KR100944203B1/en
Publication of WO2003029874A2 publication Critical patent/WO2003029874A2/en
Publication of WO2003029874A3 publication Critical patent/WO2003029874A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Abstract

There is described a switching device comprising a mobile element (2) that is able to at least move back and forth along a defined trajectory between a zero position (O) and at least one predetermined switching position (A, B), an elastic member (3) connecting the mobile element to a base (4) and at least one stationary actuating electrode (5, 6) located in the vicinity of the predetermined switching position for producing electrostatic forces to cause the mobile element to move to and/or away from the predetermined switching position. The stationary actuating electrode is disposed to act on at least one edge (20a) of the mobile element which is substantially parallel to the mobile element's trajectory. The geometry of the mobile element, elastic member and actuating electrode is such that the mobile element cannot come into contact with the actuating electrode and that the switching position is defined by an equilibrium point (E) between lateral electrostatic forces produced on the mobile element by the stationary actuating electrode and mechanical springs forces produced by the elastic member.
PCT/DK2002/000666 2001-10-04 2002-10-04 Switching device, in particular for optical applications WO2003029874A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AU2002362541A AU2002362541B2 (en) 2001-10-04 2002-10-04 Switching device, in particular for optical applications
JP2003533030A JP4238132B2 (en) 2001-10-04 2002-10-04 Switching device especially for optical applications
CA2462812A CA2462812C (en) 2001-10-04 2002-10-04 Switching device, in particular for optical applications
KR1020047005064A KR100944203B1 (en) 2001-10-04 2002-10-04 Switching device, in particular for optical applications

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP01203752.9 2001-10-04
EP01203749 2001-10-04
EP01203749.5 2001-10-04
EP01203752 2001-10-04

Publications (2)

Publication Number Publication Date
WO2003029874A2 WO2003029874A2 (en) 2003-04-10
WO2003029874A3 true WO2003029874A3 (en) 2004-03-25

Family

ID=26077009

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DK2002/000666 WO2003029874A2 (en) 2001-10-04 2002-10-04 Switching device, in particular for optical applications

Country Status (10)

Country Link
US (1) US6701039B2 (en)
EP (1) EP1300714B1 (en)
JP (1) JP4238132B2 (en)
KR (1) KR100944203B1 (en)
AT (1) ATE333105T1 (en)
AU (1) AU2002362541B2 (en)
CA (1) CA2462812C (en)
DE (1) DE60213051T2 (en)
DK (1) DK1300714T3 (en)
WO (1) WO2003029874A2 (en)

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US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof

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US7119942B2 (en) * 2004-06-30 2006-10-10 Northrop Gruman Corporation Side spring micro-mirror
US7271945B2 (en) * 2005-02-23 2007-09-18 Pixtronix, Inc. Methods and apparatus for actuating displays
EP1858796B1 (en) * 2005-02-23 2011-01-19 Pixtronix Inc. Methods and apparatus for actuating displays
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US20080158635A1 (en) * 2005-02-23 2008-07-03 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7304785B2 (en) * 2005-02-23 2007-12-04 Pixtronix, Inc. Display methods and apparatus
US7755582B2 (en) * 2005-02-23 2010-07-13 Pixtronix, Incorporated Display methods and apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US7304786B2 (en) * 2005-02-23 2007-12-04 Pixtronix, Inc. Methods and apparatus for bi-stable actuation of displays
KR100991044B1 (en) * 2005-02-23 2010-10-29 픽스트로닉스 인코포레이티드 Display apparatus and methods for manufacture thereof
US7742016B2 (en) * 2005-02-23 2010-06-22 Pixtronix, Incorporated Display methods and apparatus
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US7502159B2 (en) * 2005-02-23 2009-03-10 Pixtronix, Inc. Methods and apparatus for actuating displays
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US7675665B2 (en) 2005-02-23 2010-03-09 Pixtronix, Incorporated Methods and apparatus for actuating displays
US7999994B2 (en) * 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7405852B2 (en) * 2005-02-23 2008-07-29 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US7746529B2 (en) 2005-02-23 2010-06-29 Pixtronix, Inc. MEMS display apparatus
US7468572B2 (en) * 2005-03-28 2008-12-23 Maurice Thomas Versatile digitally controlled micro-mechanical actuator
US7656568B2 (en) * 2005-05-18 2010-02-02 The Regents Of The University Of California Optical switch using frequency-based addressing in a microelectromechanical systems array
JP2007074826A (en) * 2005-09-07 2007-03-22 Fujifilm Corp Minute electromechanical element and minute electromechanical element array
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US7876489B2 (en) * 2006-06-05 2011-01-25 Pixtronix, Inc. Display apparatus with optical cavities
EP2080045A1 (en) * 2006-10-20 2009-07-22 Pixtronix Inc. Light guides and backlight systems incorporating light redirectors at varying densities
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US7852546B2 (en) 2007-10-19 2010-12-14 Pixtronix, Inc. Spacers for maintaining display apparatus alignment
US20100188443A1 (en) * 2007-01-19 2010-07-29 Pixtronix, Inc Sensor-based feedback for display apparatus
US7832948B1 (en) * 2007-09-13 2010-11-16 Tessera MEMS Technologies, Inc. Impulse actuated MEMS devices
TWI418850B (en) * 2007-11-09 2013-12-11 尼康股份有限公司 Micro-actuator, optical device, display device, exposure device and device production method
WO2009102471A1 (en) * 2008-02-12 2009-08-20 Pixtronix, Inc. Mechanical light modulators with stressed beams
US8248560B2 (en) 2008-04-18 2012-08-21 Pixtronix, Inc. Light guides and backlight systems incorporating prismatic structures and light redirectors
US7920317B2 (en) 2008-08-04 2011-04-05 Pixtronix, Inc. Display with controlled formation of bubbles
US8169679B2 (en) * 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
WO2011097258A1 (en) 2010-02-02 2011-08-11 Pixtronix, Inc. Circuits for controlling display apparatus
KR20120132680A (en) 2010-02-02 2012-12-07 픽스트로닉스 인코포레이티드 Methods for manufacturing cold seal fluid-filled display apparatus
US9398666B2 (en) 2010-03-11 2016-07-19 Pixtronix, Inc. Reflective and transflective operation modes for a display device
EP2656134A1 (en) 2010-12-20 2013-10-30 Pixtronix, Inc. Systems and methods for mems light modulator arrays with reduced acoustic emission
US8749538B2 (en) 2011-10-21 2014-06-10 Qualcomm Mems Technologies, Inc. Device and method of controlling brightness of a display based on ambient lighting conditions
US9385634B2 (en) * 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
JP5714517B2 (en) * 2012-01-30 2015-05-07 シャープ株式会社 Backlight, liquid crystal display device including the backlight, and backlight lighting method
US9183812B2 (en) 2013-01-29 2015-11-10 Pixtronix, Inc. Ambient light aware display apparatus
US9170421B2 (en) 2013-02-05 2015-10-27 Pixtronix, Inc. Display apparatus incorporating multi-level shutters
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
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US10132699B1 (en) * 2014-10-06 2018-11-20 National Technology & Engineering Solutions Of Sandia, Llc Electrodeposition processes for magnetostrictive resonators
US9606349B2 (en) 2015-01-05 2017-03-28 Edward Pakhchyan MEMS display
US9703094B2 (en) 2015-01-05 2017-07-11 Edward Pakhchyan MEMS light modulator for display
US11009650B2 (en) 2015-01-05 2021-05-18 Edward Pakhchyan MEMS display
US9703095B2 (en) 2015-01-05 2017-07-11 Edward Pakhchyan Light modulator for MEMS display
JP6953118B2 (en) * 2016-07-04 2021-10-27 エドワード・パクチャン MEMS light modulators for displays
WO2018081736A1 (en) 2016-10-29 2018-05-03 Philippe Roe Fiber optic safety system
DE102018207783B4 (en) 2018-05-17 2022-11-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS array made of MEMS, each with a movable structural element
CN110725773B (en) * 2019-11-06 2020-09-04 北京纳米能源与系统研究所 Underwater energy collecting device and underwater operation equipment

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US5794761A (en) * 1994-10-25 1998-08-18 Csem Centre Suisse D'electronique Et De Microtechnique Sa Switching device
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9177523B2 (en) 2005-02-23 2015-11-03 Pixtronix, Inc. Circuits for controlling display apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof

Also Published As

Publication number Publication date
JP4238132B2 (en) 2009-03-11
DE60213051T2 (en) 2007-07-05
EP1300714A1 (en) 2003-04-09
KR20040051598A (en) 2004-06-18
CA2462812A1 (en) 2003-04-10
CA2462812C (en) 2010-12-14
DK1300714T3 (en) 2006-11-13
US6701039B2 (en) 2004-03-02
WO2003029874A2 (en) 2003-04-10
KR100944203B1 (en) 2010-02-26
AU2002362541B2 (en) 2007-07-05
ATE333105T1 (en) 2006-08-15
US20030068118A1 (en) 2003-04-10
DE60213051D1 (en) 2006-08-24
EP1300714B1 (en) 2006-07-12
JP2005504355A (en) 2005-02-10

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