WO2003036229A1 - Surface shape measuring method and device therefor - Google Patents

Surface shape measuring method and device therefor Download PDF

Info

Publication number
WO2003036229A1
WO2003036229A1 PCT/JP2001/009416 JP0109416W WO03036229A1 WO 2003036229 A1 WO2003036229 A1 WO 2003036229A1 JP 0109416 W JP0109416 W JP 0109416W WO 03036229 A1 WO03036229 A1 WO 03036229A1
Authority
WO
WIPO (PCT)
Prior art keywords
face
peak position
band
optical path
measured
Prior art date
Application number
PCT/JP2001/009416
Other languages
French (fr)
Japanese (ja)
Inventor
Akira Hirabayashi
Katsuichi Kitagawa
Original Assignee
Toray Engineering Co., Ltd.
Yugen Kaisha Yamaguchi Tlo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Engineering Co., Ltd., Yugen Kaisha Yamaguchi Tlo filed Critical Toray Engineering Co., Ltd.
Priority to JP2003538684A priority Critical patent/JPWO2003036229A1/en
Priority to PCT/JP2001/009416 priority patent/WO2003036229A1/en
Publication of WO2003036229A1 publication Critical patent/WO2003036229A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

Abstract

A reference face (15) and a face (31) to be measured are irradiated with a white light from a white light source (10) to make an optical path difference. A CPU (20) samples the intensity value of an interference light varying at a specific portion of the face (31) because of the optical path difference, at sampling intervals of a product M•Δ of Δ = (λC2 - λB2)/4λC and a natural number M where λC is the center wavelength of a specific frequency band restricted by a band-pass filter (11) and 2 λB is the band width of the wavelength. In the case of a spectral distribution symmetric with respect to a center wave number kC of the specific frequency band, a characteristic function having a peak position which is identical to the peak position of the interference light is inferred. The irregular shape of the face (31) is measured by determining the height of the peak position of the characteristic function.
PCT/JP2001/009416 2001-10-25 2001-10-25 Surface shape measuring method and device therefor WO2003036229A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003538684A JPWO2003036229A1 (en) 2001-10-25 2001-10-25 Surface shape measuring method and apparatus
PCT/JP2001/009416 WO2003036229A1 (en) 2001-10-25 2001-10-25 Surface shape measuring method and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2001/009416 WO2003036229A1 (en) 2001-10-25 2001-10-25 Surface shape measuring method and device therefor

Publications (1)

Publication Number Publication Date
WO2003036229A1 true WO2003036229A1 (en) 2003-05-01

Family

ID=11737875

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/009416 WO2003036229A1 (en) 2001-10-25 2001-10-25 Surface shape measuring method and device therefor

Country Status (2)

Country Link
JP (1) JPWO2003036229A1 (en)
WO (1) WO2003036229A1 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1300550C (en) * 2004-03-22 2007-02-14 财团法人工业技术研究院 Apparatus and method for measuring surface outline of measured object
WO2007044786A2 (en) * 2005-10-11 2007-04-19 Zygo Corporation Interferometry method and system including spectral decomposition
CN100414251C (en) * 2005-10-31 2008-08-27 致茂电子股份有限公司 Method for repairing dim spot area in surface topography map
US20100128283A1 (en) * 2008-11-26 2010-05-27 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US9025162B2 (en) 2007-01-31 2015-05-05 Zygo Corporation Interferometry for lateral metrology
US9044164B2 (en) 2008-12-23 2015-06-02 Carl Zeiss Meditec Ag Device for swept source optical coherence domain reflectometry
JP2016090520A (en) * 2014-11-10 2016-05-23 株式会社ミツトヨ Non-contact surface shape measurement method and device using white light interferometer optical head
US9451213B2 (en) 2010-07-23 2016-09-20 Toyota Jidosha Kabushiki Kaisha Distance measuring apparatus and distance measuring method
CN108291802A (en) * 2015-11-12 2018-07-17 Ntn株式会社 Height detecting device and the applying device for carrying the height detecting device
CN108917641A (en) * 2018-05-15 2018-11-30 广东工业大学 Exemplar in-profile detection method and system based on the synthesis of laser wave number
US11326871B2 (en) 2015-11-12 2022-05-10 Ntn Corporation Height detection apparatus and coating apparatus equipped with the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5471303A (en) * 1994-04-29 1995-11-28 Wyko Corporation Combination of white-light scanning and phase-shifting interferometry for surface profile measurements
JPH09318329A (en) * 1996-05-31 1997-12-12 Tokyo Seimitsu Co Ltd Method and apparatus for measuring non-contact surface shape
US6028670A (en) * 1998-01-19 2000-02-22 Zygo Corporation Interferometric methods and systems using low coherence illumination
JP2001066122A (en) * 1999-08-27 2001-03-16 Rikogaku Shinkokai Surface shape measuring method and its device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5471303A (en) * 1994-04-29 1995-11-28 Wyko Corporation Combination of white-light scanning and phase-shifting interferometry for surface profile measurements
JPH09318329A (en) * 1996-05-31 1997-12-12 Tokyo Seimitsu Co Ltd Method and apparatus for measuring non-contact surface shape
US6028670A (en) * 1998-01-19 2000-02-22 Zygo Corporation Interferometric methods and systems using low coherence illumination
JP2001066122A (en) * 1999-08-27 2001-03-16 Rikogaku Shinkokai Surface shape measuring method and its device

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1300550C (en) * 2004-03-22 2007-02-14 财团法人工业技术研究院 Apparatus and method for measuring surface outline of measured object
WO2007044786A2 (en) * 2005-10-11 2007-04-19 Zygo Corporation Interferometry method and system including spectral decomposition
WO2007044786A3 (en) * 2005-10-11 2008-01-10 Zygo Corp Interferometry method and system including spectral decomposition
CN100414251C (en) * 2005-10-31 2008-08-27 致茂电子股份有限公司 Method for repairing dim spot area in surface topography map
US9025162B2 (en) 2007-01-31 2015-05-05 Zygo Corporation Interferometry for lateral metrology
US20100128283A1 (en) * 2008-11-26 2010-05-27 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8120781B2 (en) * 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8902431B2 (en) 2008-11-26 2014-12-02 Zygo Corporation Low coherence interferometry with scan error correction
US9044164B2 (en) 2008-12-23 2015-06-02 Carl Zeiss Meditec Ag Device for swept source optical coherence domain reflectometry
US9451213B2 (en) 2010-07-23 2016-09-20 Toyota Jidosha Kabushiki Kaisha Distance measuring apparatus and distance measuring method
JP2016090520A (en) * 2014-11-10 2016-05-23 株式会社ミツトヨ Non-contact surface shape measurement method and device using white light interferometer optical head
CN108291802A (en) * 2015-11-12 2018-07-17 Ntn株式会社 Height detecting device and the applying device for carrying the height detecting device
CN108291802B (en) * 2015-11-12 2020-09-08 Ntn株式会社 Height detection device and coating device equipped with same
US11326871B2 (en) 2015-11-12 2022-05-10 Ntn Corporation Height detection apparatus and coating apparatus equipped with the same
US11402195B2 (en) 2015-11-12 2022-08-02 Ntn Corporation Height detection apparatus and coating apparatus equipped with the same
CN108917641A (en) * 2018-05-15 2018-11-30 广东工业大学 Exemplar in-profile detection method and system based on the synthesis of laser wave number

Also Published As

Publication number Publication date
JPWO2003036229A1 (en) 2005-02-17

Similar Documents

Publication Publication Date Title
NO20010910D0 (en) Method and apparatus for measuring film thickness
WO2003036229A1 (en) Surface shape measuring method and device therefor
ATE235674T1 (en) METHOD AND DEVICE FOR RAMAN CORRELATION SPECTROSCOPY
DE69828385D1 (en) DEVICE FOR MEASURING OPTICAL WAVELENGTH LENGTHS
SE8502946L (en) SET AND DEVICE FOR DETERMINING PARAMETERS FOR GASFUL SUBSTANCES
AU2002349800A1 (en) Spectroscopic fluid analyzer
WO2001098740A3 (en) Spectrum measuring instrument
EP1396227A4 (en) Optical biological information measuring method and optical biological information measuring instrument
EP0379281A3 (en) Web inspecting method and apparatus
WO2002059550A3 (en) Interferometric filter wavelength meter and controller
ATE547699T1 (en) SPECTRAL EVALUATION OF FRUIT
DE60108064D1 (en) REFRACTOMETER WITH BRACELET BRAGGES
AU4044599A (en) Method and device for optoelectric acquisition of shapes by axial illumination
WO2000067547A3 (en) Method for detecting serum and for determining the quality thereof, and corresponding devices
SE9900022D0 (en) Coin discriminating device and method
DE60035148D1 (en) Device for measuring wavelength spectra
JPS6459018A (en) Method and measuring instrument for long time resolution total reflection spectrum analyzing
EP0961107A3 (en) Method of calculating optical frequency spectrum
JPS5414290A (en) Color measuring device
WO2004046701A3 (en) Apparatus and method for direct measurement of absorption and scattering coefficients in situ
JPS5622938A (en) Analyzing method for surface of transparent substance
DE59903039D1 (en) DEVICE FOR SPECTRAL MEASUREMENT OF OBJECTS
EP0977056A3 (en) Method and apparatus determining the intensity of a radar signal having passed a measuring range
SU1582004A1 (en) Reflectometric method of determination of parameters of roughness of surface of articles
JPS5642117A (en) Spectrophotometer for wide range of wavelength

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): CN JP KR US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2003538684

Country of ref document: JP

122 Ep: pct application non-entry in european phase