WO2003050466A1 - Cooling device, electronic equipment device, and method of manufacturing cooling device - Google Patents
Cooling device, electronic equipment device, and method of manufacturing cooling device Download PDFInfo
- Publication number
- WO2003050466A1 WO2003050466A1 PCT/JP2002/012643 JP0212643W WO03050466A1 WO 2003050466 A1 WO2003050466 A1 WO 2003050466A1 JP 0212643 W JP0212643 W JP 0212643W WO 03050466 A1 WO03050466 A1 WO 03050466A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- cooling device
- wick
- capacitor
- groove
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0266—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with separate evaporating and condensing chambers connected by at least one conduit; Loop-type heat pipes; with multiple or common evaporating or condensing chambers
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/16—Constructional details or arrangements
- G06F1/20—Cooling means
- G06F1/203—Cooling means for portable computers, e.g. for laptops
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4935—Heat exchanger or boiler making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4935—Heat exchanger or boiler making
- Y10T29/49353—Heat pipe device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4935—Heat exchanger or boiler making
- Y10T29/49359—Cooling apparatus making, e.g., air conditioner, refrigerator
Definitions
- Cooling device Description Cooling device, electronic device device, and manufacturing method of cooling device
- the present invention relates to a cooling device used for cooling heat generated from a driver of a card-type storage medium used for, for example, a personal computer or a digital camera, and a method of manufacturing the same.
- the present invention also relates to an electronic device such as a personal computer or a digital camera equipped with such a cooling device.
- Storage media such as Memory Stick (registered trademark), Smart Media (registered trademark), and Compact Flash (registered trademark) are smaller and thinner than conventional ones such as floppy (registered trademark) disks, and have a storage capacity. Since it can be made very large, it is becoming widely used in electronic equipment such as personal computers and digital cameras.
- These storage media include those having a flash memory and a driver integrally, and those having the driver mounted on the main body of the apparatus or another card. In any case, the storage capacity has been considerably increased recently.
- a heat pipe is a metal pipe with a capillary structure on the inner wall of the pipe.
- the inside is vacuum and a small amount of water or CFC substitute is enclosed.
- the liquid inside evaporates and evaporates.
- heat is taken in as latent heat (heat of vaporization).
- it moves quickly (almost at the speed of sound) to the low-temperature part, where it cools and returns to liquid again, releasing heat (by latent heat of condensation). Heat release).
- the liquid returns to its original location through the capillary structure (or by gravity), so that heat can be transferred continuously and efficiently.
- the conventional heat pipe is a tubular and large-sized device, it is not suitable for a cooling device of an electronic device such as a personal computer or a digital camera, which needs to be small and thin.
- the present inventors have proposed a technology to prevent heat diffusion on the substrate surface and improve the performance as a heat pipe by using a plastic substrate having low thermal conductivity instead of a silicon substrate. .
- the present invention has been made in view of the above circumstances, and an object of the present invention is to provide a cooling device, an electronic device, and a method of manufacturing a cooling device that can be reduced in size and thickness and have high cooling performance.
- a cooling device includes: a first substrate having a surface formed with a groove (group) at a portion excluding at least a jet portion (a structural portion causing a capillary phenomenon) constituting a heat pipe; It is made of a material having a higher thermal conductivity than the first substrate, At least a groove of the wick portion is formed on a surface, a second substrate having the surface joined to the first substrate, and the second substrate is incorporated into the surface, and the surface is formed on the first substrate And a third substrate bonded thereto.
- the first substrate and the third substrate are joined, and the groove on the opposing surface constitutes the flow path of the heat pipe, so that the size and thickness can be reduced.
- the wick portion is formed of a material such as a metal having high thermal conductivity, for example, by punishment or kicking, heat can be transferred effectively in this portion.
- the capacitor portion is also removable like the wick portion, and is formed of a material such as a metal having high thermal conductivity, for example, copper or nickel. Thereby, the cooling performance of the heat pipe can be improved.
- the first substrate and the third substrate are formed of plastic, glass, or the like, they can be put to practical use in terms of workability, but the adhesion between the substrates deteriorates.
- an adhesive member is interposed between the substrates to complement these.
- the two substrates are glass substrates, plastic substrates, or if one is a glass base and the other is a plastic substrate. Good, but of course it may be a silicon substrate. It is more preferable to use silicon-copper or the like as the adhesive member from the viewpoints of workability, economy, and the like.
- An electronic device has a slot in which a card-type storage medium having a flash memory is detachable, and the storage medium side, the device side, or a portion separated from the device.
- An electronic device having a driver wherein the cooling device having the above-described configuration is provided for cooling heat generated from the driver.
- the cooling device having the above-described configuration that is, a cooling device that is small and thin and has good cooling performance is mounted, the electronic device device itself may not operate properly due to heat.
- a method of manufacturing a cooling device includes the steps of: forming a first substrate having a groove on a surface excluding at least a wick constituting a heat pipe on a surface; Forming a second substrate made of a material having a large size and thermal conductivity and having at least a groove of the wick on a surface thereof; A step of incorporating the second substrate; and a step of joining the surface of the first substrate to the surface of the third substrate.
- the cooling device having the above configuration can be efficiently and reliably manufactured.
- the fourth substrate is formed of a material having a higher thermal conductivity than the first substrate and has at least a capacitor groove on a surface. And a step of incorporating the fourth substrate on the surface of the third substrate. According to such a configuration, the capacitor portion is also formed of a material having high thermal conductivity. Thereby, heat transfer can be made more effective.
- the second substrate or the fourth substrate is formed by a UV-LIGA (Lith react Galvanoformung Abformung) process. Things. According to such a configuration, fine grooves can be efficiently formed.
- UV-LIGA Lith react Galvanoformung Abformung
- the first substrate and the third substrate are bonded to a surface of the first substrate or the third substrate.
- the method further comprises a step of forming an adhesive member. According to such a configuration, it is possible to reliably join.
- FIG. 1 is an exploded perspective view illustrating a configuration of a cooling device according to one embodiment of the present invention.
- FIG. 2 is a side view of the assembled cooling device according to one embodiment of the present invention.
- FIG. 3 is a plan view showing a lower substrate of the cooling device according to one embodiment of the present invention.
- FIG. 4 is a plan view showing an upper composite substrate of the cooling device according to one embodiment of the present invention.
- FIG. 5 is a plan view showing a state where the lower substrate and the upper composite substrate of the cooling device according to one embodiment of the present invention are assembled.
- FIG. 6A is a diagram showing a heat diffusion region when a plastic substrate is used.
- FIG. 6B is a diagram showing a heat diffusion region when the plastic / metal composite substrate of the present invention is used.
- FIG. 7 is a diagram showing a manufacturing process of the cooling device of the present invention.
- FIG. 8A is a schematic view showing a step of forming a groove on a capacitor substrate and a wick substrate used in the cooling device of the present invention.
- FIG. 8B is a schematic view showing a step of forming a groove on the capacitor substrate and the wick substrate used in the cooling device of the present invention.
- FIG. 8C is a schematic view showing a step of forming a groove on the capacitor substrate and the wick substrate used in the cooling device of the present invention.
- FIG. 8D is a schematic view showing a step of forming a groove on the capacitor substrate and the wick substrate used in the cooling device of the present invention.
- FIG. 9 is a schematic diagram showing a process of incorporating a capacitor substrate and a wick substrate into an upper substrate used in the cooling device of the present invention.
- FIG. 1OA is a schematic view showing a step of joining a lower substrate and an upper composite substrate used in the cooling device of the present invention.
- FIG. 1 OB is a schematic view showing a step of joining a lower substrate and an upper composite substrate used in the cooling device of the present invention.
- FIG. 11 is a schematic diagram showing a cooling device according to another embodiment of the present invention.
- FIG. 12 is a schematic perspective view of a personal computer equipped with the cooling device of the present invention.
- FIG. 1 is an exploded perspective view of a cooling device according to an embodiment of the present invention
- FIG. 2 is a side view of the assembled cooling device.
- the cooling device 1 includes four substrates 10, 20, 30, and 40.
- the lower substrate 10 is a rectangular substrate made of plastic and is arranged on the lower side.
- the capacitor substrate 20 and the wick substrate 40 are rectangular substrates made of a metal such as nickel, for example.
- the upper substrate 30 is a rectangular substrate made of plastic and is arranged on the upper side.
- the capacitor substrate 20 and the wick substrate 40 are incorporated into the holes 32 and 34 of the upper substrate 30 without gaps, respectively.
- These four substrates 10, 20, 30, and 40 are bonded and fixed with, for example, a silicon member 50 interposed therebetween.
- the lower substrate 10 has a surface 10a
- the capacitor substrate 20 has a surface 20b
- the upper substrate 30 has a surface 30b
- the wick substrate has a surface 40b. 4 1 is formed. These grooves are formed to function as loop heat pipes when the four substrates are bonded.
- a groove 11 is formed on the surface 10 a of the lower substrate 10.
- the main part of the groove 11 is composed of a flow path through which a liquid and a gas flow, and a storage tank that supplies the liquid.
- a flow path 12 through which a liquid such as water flows, and the liquid is introduced from the flow path 12 into a wick substrate 40 described later.
- the introduced liquid becomes gas by the wick substrate 40 and is introduced into the gas receiving portion 14.
- the gas is introduced into the condenser 22 from the flow path 15, condensed and converted into a liquid, and moves to the low-temperature section 16. Further, the flow returns to the flow path 12 again. In this way, the circulation of liquids and gases takes place.
- the reservoir 13 and the reservoir 17 store liquid.
- the liquid in the reservoir 13 flows in when the amount of liquid in the gas receiving part 14 becomes lower than a certain level. Further, the liquid in the storage section 17 flows in when the amount of liquid in the low temperature section 16 becomes lower than a certain level.
- the reservoir 13 and the storage unit 17 store liquid so that the inside of the heat pipe does not dry out, and the liquid flows into the reservoir 13 and the storage unit 17 as necessary. It has become.
- a heat insulating hole 18 is provided at a position in the center of the lower substrate 10 and close to the flow paths 12 and 15. This prevents thermal diffusion.
- the capacitor substrate 20 and the wick substrate 40 are incorporated into the upper substrate 30 to form the upper composite substrate 100.
- a groove 21 is formed on the surface 20 b of the capacitor substrate 20.
- the groove 21 functions as a condenser 22 for condensing the gas introduced from the flow path 15 into a liquid, and circulates to the low-temperature section 16.
- a groove 41 is formed on the surface 40b of the wick substrate 40.
- This groove 4 1 is cold It functions as a cooling unit, and vaporizes the liquid introduced from the flow path 12 or the reservoir 13 and allows the vaporized gas to flow into the gas receiving unit 14.
- a heat insulating hole 34 is provided at a position facing the heat insulating hole 18 described above.
- These heat insulating holes 18 and 34 are provided as grooves on the lower substrate 10 and the upper substrate 30 in order to prevent thermal diffusion.
- FIG. 5 shows a state in which the lower substrate 100 and the upper composite substrate 100 are joined via the silicon member 50 as shown in FIG.
- Liquid is sealed inside the heat pipe formed by joining the lower substrate 100 and the upper composite substrate 100.
- the enclosed liquid circulates inside the heat pipe while changing its state from liquid to gas or gas to liquid. Thereby, heat is transferred, and functions as the cooling device 1.
- the state of circulation of the liquid / gas will be described with the flow path 12 as a starting point for convenience.
- the liquid flows into the wick 42 from the channel 12.
- the amount of liquid flowing into the wick 42 is equal to or less than a predetermined value, a shortage of liquid is supplied from the reservoir 13 to avoid dry-out.
- the liquid flowing into the wick 42 is heated and boiled.
- the gas that has been vaporized by boiling is introduced into the gas receiving portion 14.
- This gas flows into the capacitor 22 via the flow path 15 and is condensed into a liquid.
- the liquid condensed at this time flows into the low temperature section 16 arranged below the condenser 22.
- This liquid is circulated again from the low temperature section 16 to the flow path 12.
- the amount of liquid flowing from the low temperature section 16 to the flow path 12 is equal to or less than a predetermined value, the liquid stored in the liquid storage section 17 flows into the low temperature section 16.
- plastic is used as the material of the substrate.
- other materials for example, glass may be used, or a combination of a glass substrate and a plastic substrate may be used.
- capacitor substrate 20 and the wick substrate 40 are made of nickel, other materials such as copper may be used.
- FIGS. 6A and 6B are diagrams comparing a plastic substrate with the plastic / metal composite substrate of the present invention from the viewpoint of thermal diffusivity.
- Fig. 6A shows a case where a plastic substrate is used
- Fig. 6B shows a case where a plastic / metal composite substrate in which a metal such as nickel is incorporated in a plastic substrate is used. Is shown.
- the (wick) heat has a high diffusivity in the metal part and hardly diffuses into the surrounding plastic area. (B-2).
- the wick In order to function as a heat pipe, the wick must have a certain level of thermal conductivity, but as shown in Figure 6A, the plastic substrate has little thermal conductivity and can perform its function sufficiently. Absent.
- FIG. 6B in the case of the plastic / metal composite substrate, heat is sufficiently transmitted in the wick, and it is difficult for the heat to diffuse to the surrounding plastic portion. The heat concentrates on the wick, which will fulfill its function as a heat pipe.
- FIG. 7 shows a manufacturing process of the cooling device.
- grooves of the lower substrate 10 and the upper substrate 30 for functioning as a heat pipe are formed (Step 701).
- a flow channel, a storage tank for storing liquid, and a groove 11 functioning as a heat insulating hole are formed on the surface 10a of the lower substrate 10 made of plastic.
- a groove 31 functioning as a heat insulating hole is formed on the surface 30 b of the upper substrate 30 made of plastic.
- a method of forming a groove in each substrate a method in which a mold is completed for each substrate in advance and molding is performed using this mold can be considered.
- the lower substrate or the upper substrate may be made of glass. In this case, a groove may be formed by etching after patterning the substrate.
- a capacitor board 20 and an it board 40 functioning as a capacitor or a wick are formed (step 720).
- the capacitor substrate 20 having a groove and the wick substrate 40 are formed, for example, by a method called UV-LIGA.
- the UV-LIGA process will be specifically described based on FIGS. 8A to 8D.
- a resist layer 81 made of, for example, an organic material, SU-8 is formed on a plate 82, and a patterned resist film 83 is formed thereon. This is called a pattern substrate 80.
- UV is irradiated from above the pattern substrate 80 to etch the resist layer 81.
- the resist film 83 is peeled from the pattern substrate 80, and a nickel layer 84 is formed on the surface of the resist film 83 with nickel Ni.
- the nickel layer 84 is peeled off from the pattern substrate 80.
- the peeled nickel layer 84 becomes the capacitor substrate 20 and the wick substrate 40 having the groove.
- the capacitor substrate 20 and the wick substrate 40 formed as described above are incorporated into holes 32 and 34 formed through the upper substrate 30 as shown in FIG. 9 (step 703). This is because, for example, heat is applied to the plastic upper substrate 30 so as to be in a semi-solid state so that there is no gap between the upper substrate 30 and the capacitor substrate 20 and the wick substrate 40, respectively.
- the capacitor substrate 20 and the wick substrate 40 are inserted into the holes 32 and 34 of the upper substrate 30 in the state.
- a copper thin film 10b as an adhesive member is formed on the surface 10a of the lower substrate 10 by, for example, sputtering.
- the lower substrate 10 and the upper composite substrate 100 are bonded by, for example, ultrasonic bonding or heat fusion bonding (step 704).
- FIG. 11 shows a flexible cooling device 120 in which a capacitor substrate 122 and a wick substrate 124 are connected by a flexible substrate 121.
- the capacitor substrate 122 and the wick substrate 124 are made of plastic, respectively, and the capacitor substrate 20 and the wick substrate 40 are assembled by the above-described method.
- the flexible substrate 122 is made of plastic and includes a heat pipe flow path 123 inside. These base materials or substrates are integrated into a heat pipe I do.
- the flexible substrate 1 2 1 can be freely deformed.
- the wick substrate 124 can be attached to the heat generating portion of the electronic device, and the flexible substrate can be adhered so as to conform to the shape of the external surface of the electronic device.
- the heat pipe can be efficiently mounted even in a narrow space, and the size and thickness of electronic devices and the like can be reduced.
- FIG. 12 is a schematic perspective view of a personal computer equipped with the cooling device according to the present invention.
- the computer 13 has a slot 13 1 for attaching and detaching a recording medium 13 4 having a flash memory 13 3 and a driver 13 2.
- the cooling device 135 according to the present invention is arranged in the personal computer 130 such that the wick is located immediately below the driver 133, for example, the storage medium 134 mounted via the slot 131. Have been.
- the personal computer has been described as an example of the electronic device, but the cooling device according to the present invention can be mounted on another electronic device such as a digital camera or a video camera.
- the embodiment of the present invention has been mainly described with respect to an example in which the upper substrate 30 and the lower substrate 10 are made of glass or plastic, and the wick substrate 40 and the capacitor substrate 20 are made of metal.
- the present invention is not limited to this, and is configured so that the thermal conductivity of the dielectric substrate 40 and the capacitor substrate 20 is larger (higher) than the thermal conductivity of the upper substrate 30 and the lower substrate 10. The feature is that it does.
- Table 1 Examples of materials suitable for the wick substrate 40 and the capacitor substrate 20 and their thermal conductivity are shown in Table 1 below. Materials suitable for the upper substrate 30 and the lower substrate 10 and their thermal conductivity are shown below. Table 2 below shows an example. Table>
- the upper substrate and the lower substrate when plastic glass (pyrex glass or the like) having general thermal conductivity is used for the upper substrate and the lower substrate, if the wick substrate and the capacitor substrate are made of titanium, the upper substrate and the lower substrate can be combined with each other. A thermal conductivity of 10 times or more can be obtained in comparison.
- the wick substrate and the capacitor substrate are made of iron or nickel, a thermal conductivity that is 50 times or more higher than that of the upper substrate or the lower substrate can be obtained.
- use the special plastic or aluminum-silicon By using a capacitor, it is possible to obtain a thermal conductivity that is 50 times or more that of the upper and lower substrates.
- the wick substrate and the capacitor substrate are made of copper, it is possible to obtain a heat conductivity of 300 times or more as compared with the upper substrate and the lower substrate.
- the cooling device according to the present invention is suitable for a small-sized cooling device for cooling a card-type storage medium.
- the electronic device according to the present invention is suitable for small electronic devices such as notebook personal computers and digital cameras using a card-type storage medium.
- the method for manufacturing a cooling device according to the present invention is suitable for manufacturing a small-sized cooling device for cooling a card-type storage medium.
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/250,528 US6999314B2 (en) | 2001-12-13 | 2002-12-03 | Cooling device, electronic equipment device, and method of manufacturing cooling device |
KR10-2003-7008874A KR20040058095A (ko) | 2001-12-13 | 2002-12-03 | 냉각 장치, 전자기기 장치 및 냉각 장치의 제조 방법 |
JP2003551472A JPWO2003050466A1 (ja) | 2001-12-13 | 2002-12-03 | 冷却装置、電子機器装置及び冷却装置の製造方法 |
US11/133,743 US7213338B2 (en) | 2001-12-13 | 2005-05-20 | Cooler, electronic apparatus, and method for fabricating cooler |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001/380561 | 2001-12-13 | ||
JP2001380561 | 2001-12-13 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10250528 A-371-Of-International | 2001-12-13 | ||
US11/133,743 Division US7213338B2 (en) | 2001-12-13 | 2005-05-20 | Cooler, electronic apparatus, and method for fabricating cooler |
Publications (1)
Publication Number | Publication Date |
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WO2003050466A1 true WO2003050466A1 (en) | 2003-06-19 |
Family
ID=19187196
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2002/012643 WO2003050466A1 (en) | 2001-12-13 | 2002-12-03 | Cooling device, electronic equipment device, and method of manufacturing cooling device |
Country Status (5)
Country | Link |
---|---|
US (2) | US6999314B2 (ja) |
JP (1) | JPWO2003050466A1 (ja) |
KR (1) | KR20040058095A (ja) |
CN (1) | CN1304807C (ja) |
WO (1) | WO2003050466A1 (ja) |
Cited By (2)
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JP2004088048A (ja) * | 2002-07-05 | 2004-03-18 | Sony Corp | 冷却装置、電子機器装置、音響装置及び冷却装置の製造方法 |
JP2009060148A (ja) * | 2008-12-15 | 2009-03-19 | Oki Data Corp | 表示装置 |
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JP2004190977A (ja) * | 2002-12-12 | 2004-07-08 | Sony Corp | 熱輸送装置、熱輸送装置の製造方法及び電子デバイス |
US20050151555A1 (en) * | 2004-01-13 | 2005-07-14 | Cookson Electronics, Inc. | Cooling devices and methods of using them |
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US7168152B1 (en) * | 2004-10-18 | 2007-01-30 | Lockheed Martin Corporation | Method for making an integrated active antenna element |
US7397665B2 (en) * | 2004-12-08 | 2008-07-08 | Optherm - Thermal Solutions Ltd. | Integral heat-dissipation system for electronic boards |
KR100659582B1 (ko) * | 2004-12-10 | 2006-12-20 | 한국전자통신연구원 | 루프형 마이크로 열이송 장치 |
JP5112101B2 (ja) | 2007-02-15 | 2013-01-09 | 株式会社東芝 | 半導体パッケージ |
US8100170B2 (en) * | 2007-08-01 | 2012-01-24 | Advanced Thermal Device Inc. | Evaporator, loop heat pipe module and heat generating apparatus |
JP4352091B2 (ja) * | 2008-03-27 | 2009-10-28 | 株式会社東芝 | 電子機器、冷却装置 |
JPWO2010084717A1 (ja) * | 2009-01-23 | 2012-07-12 | 日本電気株式会社 | 冷却装置 |
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- 2002-12-03 KR KR10-2003-7008874A patent/KR20040058095A/ko not_active Application Discontinuation
- 2002-12-03 US US10/250,528 patent/US6999314B2/en not_active Expired - Fee Related
- 2002-12-03 CN CNB028032683A patent/CN1304807C/zh not_active Expired - Fee Related
- 2002-12-03 JP JP2003551472A patent/JPWO2003050466A1/ja active Pending
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Also Published As
Publication number | Publication date |
---|---|
US20040052056A1 (en) | 2004-03-18 |
JPWO2003050466A1 (ja) | 2005-04-21 |
CN1479855A (zh) | 2004-03-03 |
US20050213303A1 (en) | 2005-09-29 |
CN1304807C (zh) | 2007-03-14 |
US7213338B2 (en) | 2007-05-08 |
KR20040058095A (ko) | 2004-07-03 |
US6999314B2 (en) | 2006-02-14 |
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