WO2003067190A8 - Micromachined gyroscope - Google Patents

Micromachined gyroscope

Info

Publication number
WO2003067190A8
WO2003067190A8 PCT/US2003/003615 US0303615W WO03067190A8 WO 2003067190 A8 WO2003067190 A8 WO 2003067190A8 US 0303615 W US0303615 W US 0303615W WO 03067190 A8 WO03067190 A8 WO 03067190A8
Authority
WO
WIPO (PCT)
Prior art keywords
frame
micromachined gyroscope
suspended
detect
rotational
Prior art date
Application number
PCT/US2003/003615
Other languages
French (fr)
Other versions
WO2003067190A1 (en
Inventor
John A Geen
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Priority to AT03707756T priority Critical patent/ATE509254T1/en
Priority to CN03803436.0A priority patent/CN1628238B/en
Priority to EP03707756A priority patent/EP1472507B1/en
Priority to DE03707756T priority patent/DE03707756T1/en
Priority to JP2003566496A priority patent/JP4392246B2/en
Priority to AU2003209031A priority patent/AU2003209031A1/en
Publication of WO2003067190A1 publication Critical patent/WO2003067190A1/en
Publication of WO2003067190A8 publication Critical patent/WO2003067190A8/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes

Abstract

A micromachined gyroscope makes use of Coriolis acceleration to detect and measure rotation rate about an axis normal to the surface of a substrate. Specifically, various resonating structures are suspended within a frame. The resonating structures include phase and anti-phase masses that are mechanically coupled in order to produce a single resonance frequency for the entire resonating system. Rotation of the micromachined gyroscope about the axis produces a rotational force on the frame. The frame is suspended in such a way that its motion is severely restricted in all but the rotational direction. Sensors on all sides of the frame detect the rotational deflection of the frame for measuring the change in direction.
PCT/US2003/003615 2002-02-06 2003-02-06 Micromachined gyroscope WO2003067190A1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AT03707756T ATE509254T1 (en) 2002-02-06 2003-02-06 MICRO-MADE GYRO
CN03803436.0A CN1628238B (en) 2002-02-06 2003-02-06 Micromachined gyroscope
EP03707756A EP1472507B1 (en) 2002-02-06 2003-02-06 Micromachined gyroscope
DE03707756T DE03707756T1 (en) 2002-02-06 2003-02-06 MICRO-MADE CIRCLES
JP2003566496A JP4392246B2 (en) 2002-02-06 2003-02-06 Micromachined gyroscope
AU2003209031A AU2003209031A1 (en) 2002-02-06 2003-02-06 Micromachined gyroscope

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US35461002P 2002-02-06 2002-02-06
US60/354,610 2002-02-06
US36432202P 2002-03-14 2002-03-14
US60/364,322 2002-03-14

Publications (2)

Publication Number Publication Date
WO2003067190A1 WO2003067190A1 (en) 2003-08-14
WO2003067190A8 true WO2003067190A8 (en) 2005-08-18

Family

ID=27737467

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/003615 WO2003067190A1 (en) 2002-02-06 2003-02-06 Micromachined gyroscope

Country Status (8)

Country Link
US (5) US6877374B2 (en)
EP (3) EP2327959B1 (en)
JP (1) JP4392246B2 (en)
CN (1) CN1628238B (en)
AT (1) ATE509254T1 (en)
AU (1) AU2003209031A1 (en)
DE (1) DE03707756T1 (en)
WO (1) WO2003067190A1 (en)

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EP2327959B1 (en) 2012-09-12
US20030172753A1 (en) 2003-09-18
EP1472507B1 (en) 2011-05-11
WO2003067190A1 (en) 2003-08-14
US20050139005A1 (en) 2005-06-30
US7204144B2 (en) 2007-04-17
EP2325604B1 (en) 2013-04-24
US7032451B2 (en) 2006-04-25
DE03707756T1 (en) 2005-05-04
US20060191339A1 (en) 2006-08-31
US6877374B2 (en) 2005-04-12
CN1628238A (en) 2005-06-15
JP4392246B2 (en) 2009-12-24
AU2003209031A1 (en) 2003-09-02
EP2325604A1 (en) 2011-05-25
AU2003209031A8 (en) 2003-09-02
JP2005526959A (en) 2005-09-08
US20060179945A1 (en) 2006-08-17
EP1472507A1 (en) 2004-11-03
US7216539B2 (en) 2007-05-15
US20060191340A1 (en) 2006-08-31
CN1628238B (en) 2012-05-23
ATE509254T1 (en) 2011-05-15
US7357025B2 (en) 2008-04-15

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