WO2003071247A1 - Chemically inert flow control with non-contaminating body - Google Patents
Chemically inert flow control with non-contaminating body Download PDFInfo
- Publication number
- WO2003071247A1 WO2003071247A1 PCT/US2000/042242 US0042242W WO03071247A1 WO 2003071247 A1 WO2003071247 A1 WO 2003071247A1 US 0042242 W US0042242 W US 0042242W WO 03071247 A1 WO03071247 A1 WO 03071247A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fluid
- control module
- recited
- conduit
- flow
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/37—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of communicating tubes or reservoirs with movable fluid levels, e.g. by U-tubes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0324—With control of flow by a condition or characteristic of a fluid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
- Y10T137/776—Control by pressures across flow line valve
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00991037A EP1377807A4 (en) | 1999-11-23 | 2000-11-24 | Chemically inert flow control with non-contaminating body |
DE10085498T DE10085498T5 (en) | 1999-11-23 | 2000-11-24 | Chemically inert flow control with contamination-free housing |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/447,984 US6578435B2 (en) | 1999-11-23 | 1999-11-23 | Chemically inert flow control with non-contaminating body |
US09/447,984 | 1999-11-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003071247A1 true WO2003071247A1 (en) | 2003-08-28 |
Family
ID=23778546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2000/042242 WO2003071247A1 (en) | 1999-11-23 | 2000-11-24 | Chemically inert flow control with non-contaminating body |
Country Status (6)
Country | Link |
---|---|
US (1) | US6578435B2 (en) |
EP (1) | EP1377807A4 (en) |
JP (1) | JP2001242940A (en) |
KR (1) | KR100800088B1 (en) |
DE (1) | DE10085498T5 (en) |
WO (1) | WO2003071247A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11313756B2 (en) | 2015-12-25 | 2022-04-26 | Futikin Incorporated | Flow rate control device and abnormality detection method using flow rate control device |
DE102021133288A1 (en) | 2021-12-15 | 2023-06-15 | Faurecia Autositze Gmbh | Arrangement and manipulation system and method for manipulating the flow of a fluid |
Families Citing this family (80)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100676249B1 (en) * | 2001-05-23 | 2007-01-30 | 삼성전자주식회사 | Coolant for cutting substrate and method for cutting using the same and apparatus for performing the same |
JP2005534111A (en) * | 2002-07-19 | 2005-11-10 | マイクロリス・コーポレーション | Liquid flow controller and precision dispensing device and system |
KR20050030204A (en) * | 2002-07-19 | 2005-03-29 | 마이크롤리스 코포레이션 | Fluid flow measuring and proportional fluid flow control device |
DE10259395A1 (en) * | 2002-12-19 | 2004-07-22 | Festo Ag & Co. | Connector for fluid lines |
US7131451B2 (en) * | 2003-09-04 | 2006-11-07 | Rivatek Incorporated | Apparatus for controlling and metering fluid flow |
US7740024B2 (en) * | 2004-02-12 | 2010-06-22 | Entegris, Inc. | System and method for flow monitoring and control |
US6973375B2 (en) * | 2004-02-12 | 2005-12-06 | Mykrolis Corporation | System and method for flow monitoring and control |
US7117104B2 (en) * | 2004-06-28 | 2006-10-03 | Celerity, Inc. | Ultrasonic liquid flow controller |
US6993954B1 (en) * | 2004-07-27 | 2006-02-07 | Tekscan, Incorporated | Sensor equilibration and calibration system and method |
JP4461329B2 (en) | 2004-08-31 | 2010-05-12 | 旭有機材工業株式会社 | Fluid control device |
JP2006153677A (en) * | 2004-11-30 | 2006-06-15 | Dainippon Screen Mfg Co Ltd | Differential pressure type flowmeter, flow rate control device, and substrate treatment apparatus |
JP4640947B2 (en) * | 2005-04-27 | 2011-03-02 | シーケーディ株式会社 | Tank structure |
EP1890114B1 (en) * | 2005-06-07 | 2021-07-07 | Surpass Industry Co., Ltd. | Liquid flow rate control system |
US7866337B2 (en) | 2005-07-08 | 2011-01-11 | Entegris, Inc. | Chemically inert flow controller with non-contaminating body |
CN101258351A (en) * | 2005-07-08 | 2008-09-03 | 安格斯公司 | Chemically inert flow controller with non-contaminating body |
US20070016333A1 (en) * | 2005-07-12 | 2007-01-18 | Edwards Grant B | Method and apparatus for controlling the valve position of a variable orifice flow meter |
US7360448B2 (en) * | 2005-08-12 | 2008-04-22 | Celerity, Inc. | Ultrasonic flow sensor having reflecting interface |
JP2007058337A (en) * | 2005-08-22 | 2007-03-08 | Asahi Organic Chem Ind Co Ltd | Fluid controller |
JP2007058352A (en) * | 2005-08-22 | 2007-03-08 | Asahi Organic Chem Ind Co Ltd | Fluid controller |
US7261003B2 (en) * | 2006-01-03 | 2007-08-28 | Freescale Semiconductor, Inc. | Flowmeter and method for the making thereof |
US20070204913A1 (en) * | 2006-03-01 | 2007-09-06 | Asahi Organic Chemicals Industry Co., Ltd. | Fluid mixing system |
US20070204912A1 (en) * | 2006-03-01 | 2007-09-06 | Asahi Organic Chemicals Industry Co., Ltd. | Fluid mixing system |
US20070204914A1 (en) * | 2006-03-01 | 2007-09-06 | Asahi Organic Chemicals Industry Co., Ltd. | Fluid mixing system |
US7530278B2 (en) * | 2006-11-02 | 2009-05-12 | Rivatek, Inc. | Fluid flow blender and methods |
DE202007001507U1 (en) * | 2007-01-29 | 2007-04-19 | Gruner Ag | Volumetric flow regulator unit for ventilator or air conditioning system has multi-position selector switch and a variable resistor parameter setting switch |
JP5041847B2 (en) * | 2007-03-30 | 2012-10-03 | 旭有機材工業株式会社 | Fluid control device |
JP5079401B2 (en) * | 2007-06-25 | 2012-11-21 | サーパス工業株式会社 | Pressure sensor, differential pressure type flow meter and flow controller |
JP5054500B2 (en) | 2007-12-11 | 2012-10-24 | 株式会社フジキン | Pressure-controlled flow standard |
US8403908B2 (en) | 2007-12-17 | 2013-03-26 | Hospira, Inc. | Differential pressure based flow sensor assembly for medication delivery monitoring and method of using the same |
US9026370B2 (en) | 2007-12-18 | 2015-05-05 | Hospira, Inc. | User interface improvements for medical devices |
JP4585035B2 (en) * | 2007-12-27 | 2010-11-24 | 株式会社堀場エステック | Flow rate ratio controller |
US8065924B2 (en) * | 2008-05-23 | 2011-11-29 | Hospira, Inc. | Cassette for differential pressure based medication delivery flow sensor assembly for medication delivery monitoring and method of making the same |
US7819838B2 (en) * | 2008-09-02 | 2010-10-26 | Hospira, Inc. | Cassette for use in a medication delivery flow sensor assembly and method of making the same |
US20100114027A1 (en) * | 2008-11-05 | 2010-05-06 | Hospira, Inc. | Fluid medication delivery systems for delivery monitoring of secondary medications |
US8048022B2 (en) * | 2009-01-30 | 2011-11-01 | Hospira, Inc. | Cassette for differential pressure based medication delivery flow sensor assembly for medication delivery monitoring and method of making the same |
JP5220642B2 (en) * | 2009-02-05 | 2013-06-26 | サーパス工業株式会社 | Differential pressure flow meter and flow controller |
US20100280486A1 (en) * | 2009-04-29 | 2010-11-04 | Hospira, Inc. | System and method for delivering and monitoring medication |
US8042528B2 (en) * | 2009-07-31 | 2011-10-25 | Ford Global Technologies, Llc | Adaptive EGR control for internal combustion engines |
JP5501806B2 (en) * | 2010-03-05 | 2014-05-28 | サーパス工業株式会社 | Pressure sensor, differential pressure type flow meter and flow controller |
JP5562712B2 (en) * | 2010-04-30 | 2014-07-30 | 東京エレクトロン株式会社 | Gas supply equipment for semiconductor manufacturing equipment |
JP5739261B2 (en) * | 2011-07-28 | 2015-06-24 | 株式会社堀場エステック | Gas supply system |
AU2012299169B2 (en) | 2011-08-19 | 2017-08-24 | Icu Medical, Inc. | Systems and methods for a graphical interface including a graphical representation of medical data |
WO2013090709A1 (en) | 2011-12-16 | 2013-06-20 | Hospira, Inc. | System for monitoring and delivering medication to a patient and method of using the same to minimize the risks associated with automated therapy |
WO2013148798A1 (en) | 2012-03-30 | 2013-10-03 | Hospira, Inc. | Air detection system and method for detecting air in a pump of an infusion system |
JP5887188B2 (en) * | 2012-04-12 | 2016-03-16 | 株式会社堀場エステック | Fluid control equipment |
CA3089257C (en) | 2012-07-31 | 2023-07-25 | Icu Medical, Inc. | Patient care system for critical medications |
AU2014268355B2 (en) | 2013-05-24 | 2018-06-14 | Icu Medical, Inc. | Multi-sensor infusion system for detecting air or an occlusion in the infusion system |
ES2838450T3 (en) | 2013-05-29 | 2021-07-02 | Icu Medical Inc | Infusion set that uses one or more sensors and additional information to make an air determination relative to the infusion set |
AU2014274122A1 (en) | 2013-05-29 | 2016-01-21 | Icu Medical, Inc. | Infusion system and method of use which prevents over-saturation of an analog-to-digital converter |
US20150133861A1 (en) | 2013-11-11 | 2015-05-14 | Kevin P. McLennan | Thermal management system and method for medical devices |
JP2015155845A (en) * | 2014-02-20 | 2015-08-27 | サーパス工業株式会社 | Differential pressure type flowmeter and flow rate controller including the same |
US10342917B2 (en) | 2014-02-28 | 2019-07-09 | Icu Medical, Inc. | Infusion system and method which utilizes dual wavelength optical air-in-line detection |
JP2017517302A (en) | 2014-05-29 | 2017-06-29 | ホスピーラ インコーポレイテッド | Infusion system and pump with configurable closed loop delivery rate catchup |
US10143795B2 (en) | 2014-08-18 | 2018-12-04 | Icu Medical, Inc. | Intravenous pole integrated power, control, and communication system and method for an infusion pump |
US11344668B2 (en) | 2014-12-19 | 2022-05-31 | Icu Medical, Inc. | Infusion system with concurrent TPN/insulin infusion |
US10850024B2 (en) | 2015-03-02 | 2020-12-01 | Icu Medical, Inc. | Infusion system, device, and method having advanced infusion features |
JP6539482B2 (en) | 2015-04-15 | 2019-07-03 | 株式会社フジキン | Circuit breaker |
NZ737340A (en) | 2015-05-26 | 2019-06-28 | Icu Medical Inc | Disposable infusion fluid delivery device for programmable large volume drug delivery |
JP6651323B2 (en) * | 2015-10-02 | 2020-02-19 | サーパス工業株式会社 | Flow control device |
JP6055941B2 (en) * | 2016-02-15 | 2016-12-27 | 株式会社堀場エステック | Fluid control equipment |
CN108780332B (en) * | 2016-02-29 | 2021-10-01 | 株式会社富士金 | Flow rate control device |
US9909909B2 (en) * | 2016-03-16 | 2018-03-06 | Rosemount Inc. | Flow measurement system for single-use containers |
CA3023658C (en) | 2016-05-13 | 2023-03-07 | Icu Medical, Inc. | Infusion pump system and method with common line auto flush |
AU2017277804B2 (en) | 2016-06-10 | 2022-05-26 | Icu Medical, Inc. | Acoustic flow sensor for continuous medication flow measurements and feedback control of infusion |
EP3285018B1 (en) * | 2016-08-19 | 2019-07-10 | Gruner AG | Volume flow regulator |
JP6831200B2 (en) * | 2016-09-21 | 2021-02-17 | リンナイ株式会社 | Combustion device |
JP2018080929A (en) * | 2016-11-14 | 2018-05-24 | 株式会社堀場エステック | Fluid device |
JP6871721B2 (en) * | 2016-11-17 | 2021-05-12 | 株式会社堀場エステック | Pressure flow meter |
US9785154B2 (en) * | 2017-02-13 | 2017-10-10 | Robert M. McMillan | Reconfigurable modular fluid flow control system for liquids or gases |
US10089055B1 (en) | 2017-12-27 | 2018-10-02 | Icu Medical, Inc. | Synchronized display of screen content on networked devices |
TW202012888A (en) * | 2018-09-18 | 2020-04-01 | 美商世偉洛克公司 | Fluid monitoring module arrangements |
US10883865B2 (en) | 2018-09-19 | 2021-01-05 | Swagelok Company | Flow restricting fluid component |
EP3734234B1 (en) * | 2019-04-30 | 2022-05-04 | Fas Medic S.A. | Fluid sensing apparatus |
USD939079S1 (en) | 2019-08-22 | 2021-12-21 | Icu Medical, Inc. | Infusion pump |
US11278671B2 (en) | 2019-12-04 | 2022-03-22 | Icu Medical, Inc. | Infusion pump with safety sequence keypad |
WO2021184131A1 (en) * | 2020-03-17 | 2021-09-23 | New Tech Copper Spa | Peripheral flow meter device with temperature sensor in electrolyte |
WO2022020184A1 (en) | 2020-07-21 | 2022-01-27 | Icu Medical, Inc. | Fluid transfer devices and methods of use |
US11135360B1 (en) | 2020-12-07 | 2021-10-05 | Icu Medical, Inc. | Concurrent infusion with common line auto flush |
WO2023047870A1 (en) * | 2021-09-22 | 2023-03-30 | 株式会社堀場エステック | Fluid control device and gas supply system |
DE102021130134A1 (en) | 2021-11-18 | 2023-05-25 | Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft | Fluid restriction device and device for measuring a property of a process fluid |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4977916A (en) * | 1988-06-20 | 1990-12-18 | Stec Inc. | Mass flow controller |
US5672832A (en) * | 1996-02-15 | 1997-09-30 | Nt International, Inc. | Chemically inert flow meter within caustic fluids having non-contaminating body |
US5865205A (en) * | 1997-04-17 | 1999-02-02 | Applied Materials, Inc. | Dynamic gas flow controller |
US6152162A (en) * | 1998-10-08 | 2000-11-28 | Mott Metallurgical Corporation | Fluid flow controlling |
Family Cites Families (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2734526A (en) | 1956-02-14 | aagaard | ||
US2190713A (en) | 1937-02-17 | 1940-02-20 | Zeiss Ikon Ag | Piezoelectric pressure indicator |
US3196900A (en) * | 1961-04-26 | 1965-07-27 | Foxboro Co | Electronic control apparatus |
US3645139A (en) | 1970-06-04 | 1972-02-29 | John R Z | Self-retaining diaphragm seal for recording instrument |
US3930823A (en) | 1972-03-14 | 1976-01-06 | Kulite Semiconductor Products, Inc. | High temperature transducers and housing including fabrication methods |
US4010769A (en) | 1972-11-27 | 1977-03-08 | Plast-O-Matic Valves, Inc. | Leak detection arrangement for valve having sealing means |
US4192192A (en) | 1978-11-02 | 1980-03-11 | General Signal Corporation | Diaphragm seal assembly |
US4322980A (en) | 1979-11-08 | 1982-04-06 | Hitachi, Ltd. | Semiconductor pressure sensor having plural pressure sensitive diaphragms and method |
US4343456A (en) | 1980-05-16 | 1982-08-10 | Galtek Corporation | Plastic control valve |
US4461181A (en) | 1983-01-06 | 1984-07-24 | Becton Dickinson And Company | Control for sample volume metering apparatus |
US4507973A (en) | 1983-08-31 | 1985-04-02 | Borg-Warner Corporation | Housing for capacitive pressure sensor |
US4600912A (en) | 1985-01-25 | 1986-07-15 | Bourns Instruments, Inc. | Diaphragm pressure sensor with improved tensile loading characteristics |
US4653330A (en) | 1985-07-15 | 1987-03-31 | Rosemount Inc. | Pressure transmitter housing |
US4683755A (en) | 1985-11-15 | 1987-08-04 | Imo Delaval Inc. | Biaxial strain gage systems |
DE3725312A1 (en) * | 1987-07-30 | 1989-02-09 | Jiri Hokynar | CONTROL UNIT FOR FLUID RIVER |
US4774843A (en) | 1987-08-14 | 1988-10-04 | Gulton Industries, Inc. | Strain gage |
US4790821A (en) | 1987-08-24 | 1988-12-13 | Vance Products Incorporated | Pressure gauge and system |
EP0380661A4 (en) | 1987-10-07 | 1991-08-14 | Kabushiki Kaisha Komatsu Seisakusho | Semiconducteur thin-film pressure sensor and method of producing the same |
US4994781A (en) | 1988-04-07 | 1991-02-19 | Sahagen Armen N | Pressure sensing transducer employing piezoresistive elements on sapphire |
US5174926A (en) | 1988-04-07 | 1992-12-29 | Sahagen Armen N | Compositions for piezoresistive and superconductive application |
US5063784A (en) | 1988-06-06 | 1991-11-12 | Ridenour Ralph Gaylord | Refrigerant transducer assembly and method |
JPH0397639A (en) | 1989-09-08 | 1991-04-23 | Hoya Corp | Combined material containing dispersed fine particles and production thereof |
JPH04258176A (en) | 1991-02-12 | 1992-09-14 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
US5183078A (en) | 1991-06-24 | 1993-02-02 | Sorrell Harold E | Combination shut-off and test-injection valve |
US5184514A (en) | 1991-07-12 | 1993-02-09 | Rosemount Inc. | Corrosion resistant isolator |
JP3077285B2 (en) | 1991-07-26 | 2000-08-14 | 大同特殊鋼株式会社 | Vacuum metal heat treatment furnace |
DE69212129T2 (en) * | 1991-12-18 | 1997-01-23 | Pierre Delajoud | Mass flow meter with constricting element |
JP2896725B2 (en) | 1991-12-26 | 1999-05-31 | 株式会社山武 | Capacitive pressure sensor |
US5357792A (en) | 1993-01-08 | 1994-10-25 | Getenby Alan D | Adaptor for testing fuel pressure in an operating engine |
JPH06201063A (en) | 1993-01-08 | 1994-07-19 | Saapasu Kogyo Kk | Flow regulating valve |
US5316035A (en) | 1993-02-19 | 1994-05-31 | Fluoroware, Inc. | Capacitive proximity monitoring device for corrosive atmosphere environment |
JP2552093B2 (en) | 1993-06-29 | 1996-11-06 | サーパス工業株式会社 | Pressure sensor |
SG41962A1 (en) | 1993-09-24 | 1997-08-15 | Rosemount Inc | Pressure transmitter isolation diaphragm |
AU1678595A (en) | 1994-01-14 | 1995-08-01 | Unit Instruments, Inc. | Flow meter |
US5488946A (en) | 1994-03-01 | 1996-02-06 | Calhoun; Clifford A. | Emergency breathing device for opening cartridges |
US5410916A (en) | 1994-06-24 | 1995-05-02 | Honeywell Inc. | Flowthrough pressure sensor |
US5563347A (en) | 1994-09-12 | 1996-10-08 | Ivac Corp | Pressure sensing vessel adapted to be preloaded against a sensor |
US5604315A (en) | 1995-01-12 | 1997-02-18 | Setra Systems, Inc. | Apparatus using a feedback network to measure fluid pressures |
US5731522A (en) | 1997-03-14 | 1998-03-24 | Rosemount Inc. | Transmitter with isolation assembly for pressure sensor |
US5654512A (en) | 1995-06-09 | 1997-08-05 | Pacer Industries, Inc. | Flexible membrane variable orifice fluid flow meter |
US5656780A (en) | 1996-03-28 | 1997-08-12 | Kavlico Corporation | Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm |
US5657001A (en) | 1996-04-16 | 1997-08-12 | Oklahoma Safety Equipment Company | Fluid flow detector |
US5822173A (en) | 1996-05-29 | 1998-10-13 | Texas Instruments Incorporated | Condition responsive electrical apparatus having improved low cost housing |
US5861546A (en) * | 1997-08-20 | 1999-01-19 | Sagi; Nehemiah Hemi | Intelligent gas flow measurement and leak detection apparatus |
US5878000A (en) | 1997-10-01 | 1999-03-02 | The United States Of America As Represented By The Secretary Of The Navy | Isolated sensing device having an isolation housing |
JP3339565B2 (en) | 1998-09-29 | 2002-10-28 | 株式会社山武 | Pressure sensor |
JP4606290B2 (en) * | 2005-09-26 | 2011-01-05 | 本田技研工業株式会社 | Vehicle suspension structure |
-
1999
- 1999-11-23 US US09/447,984 patent/US6578435B2/en not_active Expired - Fee Related
-
2000
- 2000-11-24 JP JP2000358185A patent/JP2001242940A/en active Pending
- 2000-11-24 EP EP00991037A patent/EP1377807A4/en not_active Withdrawn
- 2000-11-24 KR KR1020027006601A patent/KR100800088B1/en not_active IP Right Cessation
- 2000-11-24 DE DE10085498T patent/DE10085498T5/en not_active Ceased
- 2000-11-24 WO PCT/US2000/042242 patent/WO2003071247A1/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4977916A (en) * | 1988-06-20 | 1990-12-18 | Stec Inc. | Mass flow controller |
US5672832A (en) * | 1996-02-15 | 1997-09-30 | Nt International, Inc. | Chemically inert flow meter within caustic fluids having non-contaminating body |
US5865205A (en) * | 1997-04-17 | 1999-02-02 | Applied Materials, Inc. | Dynamic gas flow controller |
US6152162A (en) * | 1998-10-08 | 2000-11-28 | Mott Metallurgical Corporation | Fluid flow controlling |
Non-Patent Citations (1)
Title |
---|
See also references of EP1377807A4 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11313756B2 (en) | 2015-12-25 | 2022-04-26 | Futikin Incorporated | Flow rate control device and abnormality detection method using flow rate control device |
DE102021133288A1 (en) | 2021-12-15 | 2023-06-15 | Faurecia Autositze Gmbh | Arrangement and manipulation system and method for manipulating the flow of a fluid |
Also Published As
Publication number | Publication date |
---|---|
EP1377807A4 (en) | 2007-03-14 |
KR100800088B1 (en) | 2008-01-31 |
JP2001242940A (en) | 2001-09-07 |
US20030061888A1 (en) | 2003-04-03 |
EP1377807A1 (en) | 2004-01-07 |
US6578435B2 (en) | 2003-06-17 |
DE10085498T5 (en) | 2004-04-29 |
KR20030090485A (en) | 2003-11-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6578435B2 (en) | Chemically inert flow control with non-contaminating body | |
US5693887A (en) | Pressure sensor module having non-contaminating body and isolation member | |
EP0880686B1 (en) | Flow meter within caustic fluids having non-contaminating body | |
US5869766A (en) | Non-contaminating pressure transducer module | |
WO1997030333A8 (en) | Flow meter within caustic fluids having non-contaminating body | |
US7866337B2 (en) | Chemically inert flow controller with non-contaminating body | |
US7918238B2 (en) | Flow controller and its regulation method | |
US6119710A (en) | Method for wide range gas flow system with real time flow measurement and correction | |
USRE38557E1 (en) | Non-contaminating pressure transducer module | |
US11914407B2 (en) | Flow rate control device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 1020027006601 Country of ref document: KR Ref document number: 2000991037 Country of ref document: EP |
|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): CA DE GB KR SG |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR |
|
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
WWP | Wipo information: published in national office |
Ref document number: 1020027006601 Country of ref document: KR |
|
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
WWP | Wipo information: published in national office |
Ref document number: 2000991037 Country of ref document: EP |
|
RET | De translation (de og part 6b) |
Ref document number: 10085498 Country of ref document: DE Date of ref document: 20040429 Kind code of ref document: P |
|
WWE | Wipo information: entry into national phase |
Ref document number: 10085498 Country of ref document: DE |
|
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8607 |