WO2003083876A3 - Method and apparatus for aligning patterns on a substrate - Google Patents

Method and apparatus for aligning patterns on a substrate Download PDF

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Publication number
WO2003083876A3
WO2003083876A3 PCT/US2003/004363 US0304363W WO03083876A3 WO 2003083876 A3 WO2003083876 A3 WO 2003083876A3 US 0304363 W US0304363 W US 0304363W WO 03083876 A3 WO03083876 A3 WO 03083876A3
Authority
WO
WIPO (PCT)
Prior art keywords
spm
location
tip
spm tip
sample
Prior art date
Application number
PCT/US2003/004363
Other languages
French (fr)
Other versions
WO2003083876A2 (en
Inventor
Raymond K Eby
Michael Nelson
Igor Touzov
Original Assignee
Nanoink Inc
Raymond K Eby
Michael Nelson
Igor Touzov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanoink Inc, Raymond K Eby, Michael Nelson, Igor Touzov filed Critical Nanoink Inc
Priority to AU2003211027A priority Critical patent/AU2003211027A1/en
Publication of WO2003083876A2 publication Critical patent/WO2003083876A2/en
Publication of WO2003083876A3 publication Critical patent/WO2003083876A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
    • Y10S977/854—Semiconductor sample

Abstract

A system and method for aligning prior patterning positions formed by a first SPM tip with a second SPM tip in combination with an SPM system includes identifying first location information that includes a location of the first SPM tip and a sample reference location on an SPM sample and storing the first location information in a storage area. After replacing the first SPM tip with the second SPM tip, second location information, which includes a location of the second SPM tip and the sample reference location on the SPM sample, is identified. Displacement is calculated between the location of the second SPM tip and the first SPM tip based on the first and second location information, and either the second SPM tip or a stage supporting the SPM sample is translated to align the second SPM tip with the location of the first SPM tip in accordance with the calculated displacement.
PCT/US2003/004363 2002-03-27 2003-02-14 Method and apparatus for aligning patterns on a substrate WO2003083876A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003211027A AU2003211027A1 (en) 2002-03-27 2003-02-14 Method and apparatus for aligning patterns on a substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36751402P 2002-03-27 2002-03-27
US60/367,514 2002-03-27

Publications (2)

Publication Number Publication Date
WO2003083876A2 WO2003083876A2 (en) 2003-10-09
WO2003083876A3 true WO2003083876A3 (en) 2004-08-12

Family

ID=28675362

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/004363 WO2003083876A2 (en) 2002-03-27 2003-02-14 Method and apparatus for aligning patterns on a substrate

Country Status (4)

Country Link
US (2) US7279046B2 (en)
AU (1) AU2003211027A1 (en)
TW (1) TWI266339B (en)
WO (1) WO2003083876A2 (en)

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Also Published As

Publication number Publication date
US7279046B2 (en) 2007-10-09
WO2003083876A2 (en) 2003-10-09
US20030185967A1 (en) 2003-10-02
US8043652B2 (en) 2011-10-25
TW200304540A (en) 2003-10-01
AU2003211027A1 (en) 2003-10-13
TWI266339B (en) 2006-11-11
US20080147346A1 (en) 2008-06-19

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