WO2003089138A3 - Microfluidic device - Google Patents

Microfluidic device Download PDF

Info

Publication number
WO2003089138A3
WO2003089138A3 PCT/GB2003/001648 GB0301648W WO03089138A3 WO 2003089138 A3 WO2003089138 A3 WO 2003089138A3 GB 0301648 W GB0301648 W GB 0301648W WO 03089138 A3 WO03089138 A3 WO 03089138A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
substrate
elastomeric
conduits
recesses
Prior art date
Application number
PCT/GB2003/001648
Other languages
French (fr)
Other versions
WO2003089138A2 (en
Inventor
John Brian Davis
Gordon Iain Herbert
Rene Richter
Mark Christopher Tracey
Ian Johnston
Original Assignee
Univ Hertfordshire Higher Educ
John Brian Davis
Gordon Iain Herbert
Rene Richter
Mark Christopher Tracey
Ian Johnston
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Hertfordshire Higher Educ, John Brian Davis, Gordon Iain Herbert, Rene Richter, Mark Christopher Tracey, Ian Johnston filed Critical Univ Hertfordshire Higher Educ
Priority to GB0421143A priority Critical patent/GB2402893B/en
Priority to AU2003226550A priority patent/AU2003226550A1/en
Publication of WO2003089138A2 publication Critical patent/WO2003089138A2/en
Publication of WO2003089138A3 publication Critical patent/WO2003089138A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0078—Fabrication methods specifically adapted for microvalves using moulding or stamping
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps

Abstract

A microfluidic device which is actuated by a piezo electric actuator. A microfluidic structure which comprises sequentially (i) a substrate through which there are a plurality of conduits (ii) a first layer of elastomeric material having a flat face and a patterned face having recesses formed therein, the flat face being bonded to the substrate and there being holes through the elastomeric layer connected to the recesses and aligned with the conduits in the substrate (iii) a second layer of a flexible material overlaying the patterned face of the elastomeric so that the holes and recesses in the elastomeric layer and the conduits in the substrate form channels through which fluid can flow (iv) an actuating means for driving a sealing means attached to or forming part of the second layer into at least one recess to modulate or seal the recess, which actuating means is operated by a piezo electric component.
PCT/GB2003/001648 2002-04-16 2003-04-16 Microfluidic device WO2003089138A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0421143A GB2402893B (en) 2002-04-16 2003-04-16 Microfluidic device
AU2003226550A AU2003226550A1 (en) 2002-04-16 2003-04-16 Microfluidic device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0208687.4 2002-04-16
GBGB0208687.4A GB0208687D0 (en) 2002-04-16 2002-04-16 Elastomer-glass fluid control elements

Publications (2)

Publication Number Publication Date
WO2003089138A2 WO2003089138A2 (en) 2003-10-30
WO2003089138A3 true WO2003089138A3 (en) 2003-12-04

Family

ID=9934920

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2003/001648 WO2003089138A2 (en) 2002-04-16 2003-04-16 Microfluidic device

Country Status (3)

Country Link
AU (1) AU2003226550A1 (en)
GB (2) GB0208687D0 (en)
WO (1) WO2003089138A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2537657A3 (en) 2005-08-09 2016-05-04 The University of North Carolina At Chapel Hill Methods and materials for fabricating microfluidic devices
WO2008124781A1 (en) * 2007-04-09 2008-10-16 Auburn University A microfluidic array system for biological, chemical, and biochemical assessments
CN101713471B (en) * 2007-06-15 2011-12-28 微邦科技股份有限公司 Valve structure and micro pump using same
WO2013133792A1 (en) * 2012-03-05 2013-09-12 Empire Technology Development Llc Flexible circuits
GB2516670A (en) * 2013-07-29 2015-02-04 Atlas Genetics Ltd Fluid control device and method of manufacture
CN208456827U (en) * 2016-01-29 2019-02-01 研能科技股份有限公司 Micro pressure power device
CN108072389B (en) * 2017-11-30 2019-09-03 西安交通大学 A kind of wearable health monitoring sensor manufacturing process of bionical attaching type
CN112892619B (en) * 2019-12-04 2022-07-15 香港城市大学深圳研究院 PDMS (polydimethylsiloxane) master mold with arc-shaped edge section, micro-fluidic valve and chip and preparation thereof
WO2023197061A1 (en) * 2022-04-12 2023-10-19 Interface Fluidics Ltd. Microfluidic assembly and method for operating a microfluidic assembly

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5313264A (en) * 1988-11-10 1994-05-17 Pharmacia Biosensor Ab Optical biosensor system
US6068751A (en) * 1995-12-18 2000-05-30 Neukermans; Armand P. Microfluidic valve and integrated microfluidic system
US20020025529A1 (en) * 1999-06-28 2002-02-28 Stephen Quake Methods and apparatus for analyzing polynucleotide sequences
WO2002022358A1 (en) * 2000-09-18 2002-03-21 Par Technologies, Llc. Piezoelectric actuator and pump using same
US20020197167A1 (en) * 2001-06-26 2002-12-26 Micralyne Inc. Microfluidic flow control device
US20030143122A1 (en) * 2002-01-26 2003-07-31 Dietmar Sander Piezoelectrically controllable microfluid actor system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5313264A (en) * 1988-11-10 1994-05-17 Pharmacia Biosensor Ab Optical biosensor system
US6068751A (en) * 1995-12-18 2000-05-30 Neukermans; Armand P. Microfluidic valve and integrated microfluidic system
US20020025529A1 (en) * 1999-06-28 2002-02-28 Stephen Quake Methods and apparatus for analyzing polynucleotide sequences
WO2002022358A1 (en) * 2000-09-18 2002-03-21 Par Technologies, Llc. Piezoelectric actuator and pump using same
US20020197167A1 (en) * 2001-06-26 2002-12-26 Micralyne Inc. Microfluidic flow control device
US20030143122A1 (en) * 2002-01-26 2003-07-31 Dietmar Sander Piezoelectrically controllable microfluid actor system

Also Published As

Publication number Publication date
GB2402893A (en) 2004-12-22
GB0421143D0 (en) 2004-10-27
WO2003089138A2 (en) 2003-10-30
GB0208687D0 (en) 2002-05-29
GB2402893B (en) 2006-01-11
AU2003226550A1 (en) 2003-11-03

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