WO2003089872A3 - Improved simultaneous multi-spot inspection and imaging - Google Patents

Improved simultaneous multi-spot inspection and imaging Download PDF

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Publication number
WO2003089872A3
WO2003089872A3 PCT/US2003/012070 US0312070W WO03089872A3 WO 2003089872 A3 WO2003089872 A3 WO 2003089872A3 US 0312070 W US0312070 W US 0312070W WO 03089872 A3 WO03089872 A3 WO 03089872A3
Authority
WO
WIPO (PCT)
Prior art keywords
array
imaging
objective
spot
spot inspection
Prior art date
Application number
PCT/US2003/012070
Other languages
French (fr)
Other versions
WO2003089872A2 (en
WO2003089872A9 (en
Inventor
Mehdi Vaez-Iravani
Larry Miller
Original Assignee
Kla Tencor Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/125,906 external-priority patent/US20040042001A1/en
Application filed by Kla Tencor Tech Corp filed Critical Kla Tencor Tech Corp
Priority to AU2003234134A priority Critical patent/AU2003234134A1/en
Publication of WO2003089872A2 publication Critical patent/WO2003089872A2/en
Publication of WO2003089872A3 publication Critical patent/WO2003089872A3/en
Publication of WO2003089872A9 publication Critical patent/WO2003089872A9/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Abstract

A multi-spot inspection system employs an objective (30) for focusing an array of radiation beams (24) to a surface of an object (28) and a second objective (32) having a large numerical aperture for collecting scattered radiation (64) from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel (34) so that information about a scattering may be conveyed to a corresponding detector in a remote detector array (36) for processing. For patterned surface inspection, a cross-shaped filter (90) is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter (92) in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface.
PCT/US2003/012070 2002-04-18 2003-04-18 Improved simultaneous multi-spot inspection and imaging WO2003089872A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003234134A AU2003234134A1 (en) 2002-04-18 2003-04-18 Improved simultaneous multi-spot inspection and imaging

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/125,906 US20040042001A1 (en) 2002-04-18 2002-04-18 Simultaneous multi-spot inspection and imaging
US10/125,906 2002-04-18
US42657702P 2002-11-15 2002-11-15
US60/426,577 2002-11-15

Publications (3)

Publication Number Publication Date
WO2003089872A2 WO2003089872A2 (en) 2003-10-30
WO2003089872A3 true WO2003089872A3 (en) 2004-10-21
WO2003089872A9 WO2003089872A9 (en) 2004-12-23

Family

ID=29254001

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/012070 WO2003089872A2 (en) 2002-04-18 2003-04-18 Improved simultaneous multi-spot inspection and imaging

Country Status (3)

Country Link
US (3) US7130039B2 (en)
AU (1) AU2003234134A1 (en)
WO (1) WO2003089872A2 (en)

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Also Published As

Publication number Publication date
US20030210392A1 (en) 2003-11-13
WO2003089872A2 (en) 2003-10-30
US20070153265A1 (en) 2007-07-05
US7130039B2 (en) 2006-10-31
US20090161096A1 (en) 2009-06-25
US7492451B2 (en) 2009-02-17
AU2003234134A1 (en) 2003-11-03
US8817248B2 (en) 2014-08-26
AU2003234134A8 (en) 2003-11-03
WO2003089872A9 (en) 2004-12-23

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