WO2004018909A3 - Electronically actuated valve - Google Patents

Electronically actuated valve Download PDF

Info

Publication number
WO2004018909A3
WO2004018909A3 PCT/US2003/026139 US0326139W WO2004018909A3 WO 2004018909 A3 WO2004018909 A3 WO 2004018909A3 US 0326139 W US0326139 W US 0326139W WO 2004018909 A3 WO2004018909 A3 WO 2004018909A3
Authority
WO
WIPO (PCT)
Prior art keywords
valve
piston
magnetic member
solenoid coil
valve body
Prior art date
Application number
PCT/US2003/026139
Other languages
French (fr)
Other versions
WO2004018909A2 (en
Inventor
Anh H Nguyen
Joseph Yudovsky
Mark A Alexander
Hungsuk A Yoon
Chiliang Chen
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of WO2004018909A2 publication Critical patent/WO2004018909A2/en
Publication of WO2004018909A3 publication Critical patent/WO2004018909A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F16K31/0655—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0675—Electromagnet aspects, e.g. electric supply therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0419—Fluid cleaning or flushing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
    • Y10T137/4245—Cleaning or steam sterilizing
    • Y10T137/4259—With separate material addition

Abstract

The present invention relates to a method and apparatus for delivery of reactants to a substrate processing chamber. An electronically controlled valve assembly is provided for rapid delivery of pulses of reactants to the chamber. The valve assembly comprises a valve body having a valve seat, and at least one gas inlet and one gas outlet below the seat. The piston is selectively movable within the valve body to open and close the valve. In order to actuate the valve assembly, current is sent to a solenoid coil within the valve body. The solenoid coil generates a magnetic field that acts on an adjacent magnetic member. The solenoid coil, magnetic member and piston are arranged such that relative movement of the coil and magnetic member cause the piston to be moved relative to the valve seat.
PCT/US2003/026139 2002-08-20 2003-08-20 Electronically actuated valve WO2004018909A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40507002P 2002-08-20 2002-08-20
US60/405,070 2002-08-20

Publications (2)

Publication Number Publication Date
WO2004018909A2 WO2004018909A2 (en) 2004-03-04
WO2004018909A3 true WO2004018909A3 (en) 2007-04-26

Family

ID=31946809

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/026139 WO2004018909A2 (en) 2002-08-20 2003-08-20 Electronically actuated valve

Country Status (2)

Country Link
US (1) US7222636B2 (en)
WO (1) WO2004018909A2 (en)

Families Citing this family (27)

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US6916398B2 (en) 2001-10-26 2005-07-12 Applied Materials, Inc. Gas delivery apparatus and method for atomic layer deposition
US6972267B2 (en) 2002-03-04 2005-12-06 Applied Materials, Inc. Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor
US20040178175A1 (en) * 2003-03-12 2004-09-16 Pellin Michael J. Atomic layer deposition for high temperature superconductor material synthesis
US20050095859A1 (en) * 2003-11-03 2005-05-05 Applied Materials, Inc. Precursor delivery system with rate control
JP4383933B2 (en) * 2004-03-15 2009-12-16 三菱電機株式会社 Method for manufacturing output shaft connection structure of electric control valve
US20050252449A1 (en) 2004-05-12 2005-11-17 Nguyen Son T Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
DE102004025062B4 (en) * 2004-05-18 2006-09-14 Hydraulik-Ring Gmbh Freezer-compatible metering valve
EP1771598B1 (en) 2004-06-28 2009-09-30 Cambridge Nanotech Inc. Atomic layer deposition (ald) system and method
TWI332532B (en) 2005-11-04 2010-11-01 Applied Materials Inc Apparatus and process for plasma-enhanced atomic layer deposition
US7798096B2 (en) 2006-05-05 2010-09-21 Applied Materials, Inc. Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool
DE102007004687B4 (en) * 2007-01-25 2012-03-01 Hydraulik-Ring Gmbh Volume quantity dispensing unit and method for calibrating the pressure output signal volume quantity characteristic
US20080206987A1 (en) 2007-01-29 2008-08-28 Gelatos Avgerinos V Process for tungsten nitride deposition by a temperature controlled lid assembly
US8122903B2 (en) 2007-07-26 2012-02-28 Parker-Hannifin Corporation Close-coupled purgeable vaporizer valve
DE102007050086A1 (en) * 2007-10-19 2009-04-23 Alfa Laval Kolding A/S Method of operating a valve
CA2714385C (en) * 2008-02-01 2013-12-31 Baso Gas Products, Llc Remotely actuated pilot valve, system and method
DE102008012780B4 (en) * 2008-03-05 2012-10-04 Hydraulik-Ring Gmbh exhaust treatment device
US8015989B2 (en) * 2008-06-09 2011-09-13 Applied Materials, Inc. Method and apparatus for dampening pressure fluctuations in a fluid delivery system
DE102009035940C5 (en) 2009-08-03 2017-04-20 Cummins Ltd. SCR exhaust treatment device
DE102010061222B4 (en) 2010-12-14 2015-05-07 Cummins Ltd. SCR exhaust treatment device
US10006556B2 (en) * 2014-09-04 2018-06-26 Vistadeltek, Llc Valve stroke amplification mechanism assembly
US9903503B2 (en) * 2014-11-26 2018-02-27 B/E Aerospace, Inc. Aircraft water heating tank air vent valve
US10619243B2 (en) 2016-07-22 2020-04-14 Triratna P. Muneshwar Method to improve precursor utilization in pulsed atomic layer processes
US10364897B2 (en) 2017-06-05 2019-07-30 Vistadeltek, Llc Control plate for a high conductance valve
US11248708B2 (en) 2017-06-05 2022-02-15 Illinois Tool Works Inc. Control plate for a high conductance valve
US10323754B2 (en) 2017-06-05 2019-06-18 Vistadeltek, Llc Control plate for a high conductive valve
US10458553B1 (en) 2017-06-05 2019-10-29 Vistadeltek, Llc Control plate for a high conductive valve
CN109506030A (en) * 2019-02-14 2019-03-22 山东创科自动化科技有限公司 A kind of fluid control solenoid valve

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5524865A (en) * 1993-11-15 1996-06-11 Kabushiki-Kaisha Motoyama Seisakusho Diaphragm valve structure
EP0942214A1 (en) * 1996-12-01 1999-09-15 FUJIKIN Inc. Fluid control valve and fluid supply/exhaust system
US6182941B1 (en) * 1998-10-28 2001-02-06 Festo Ag & Co. Micro-valve with capacitor plate position detector
US6341758B1 (en) * 2000-07-27 2002-01-29 Industrial Technology Research Institute Gas control module switch mechanism
EP1219875A1 (en) * 2000-12-28 2002-07-03 SMC Kabushiki Kaisha Solenoid valve
US20020088440A1 (en) * 2000-08-08 2002-07-11 Craig Weldon Method of operating a fuel tank isolation valve

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US3921111A (en) * 1974-09-25 1975-11-18 Marotta Scientific Controls Solenoid actuator for high pressure valve
US4558845A (en) * 1982-09-22 1985-12-17 Hunkapiller Michael W Zero dead volume valve
US5295662A (en) * 1991-08-26 1994-03-22 Masako Kiyohara Fluid flow-controller with improved diaphragm
TW342429B (en) * 1995-07-14 1998-10-11 Tadahiro Omi Fluid control system and valve used in it
JP3997338B2 (en) * 1997-02-14 2007-10-24 忠弘 大見 Fluid control device
JP3586075B2 (en) * 1997-08-15 2004-11-10 忠弘 大見 Pressure type flow controller
US5881997A (en) * 1997-11-24 1999-03-16 Fujikin Incorporated Metal diaphragm type valve
US5899437A (en) * 1997-12-12 1999-05-04 Applied Precision, Inc. Cam actuated valve
JP3522535B2 (en) * 1998-05-29 2004-04-26 忠弘 大見 Gas supply equipment equipped with pressure type flow controller
US6210482B1 (en) * 1999-04-22 2001-04-03 Fujikin Incorporated Apparatus for feeding gases for use in semiconductor manufacturing
US6218301B1 (en) * 2000-07-31 2001-04-17 Applied Materials, Inc. Deposition of tungsten films from W(CO)6
US7066194B2 (en) * 2002-07-19 2006-06-27 Applied Materials, Inc. Valve design and configuration for fast delivery system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5524865A (en) * 1993-11-15 1996-06-11 Kabushiki-Kaisha Motoyama Seisakusho Diaphragm valve structure
EP0942214A1 (en) * 1996-12-01 1999-09-15 FUJIKIN Inc. Fluid control valve and fluid supply/exhaust system
US6182941B1 (en) * 1998-10-28 2001-02-06 Festo Ag & Co. Micro-valve with capacitor plate position detector
US6341758B1 (en) * 2000-07-27 2002-01-29 Industrial Technology Research Institute Gas control module switch mechanism
US20020088440A1 (en) * 2000-08-08 2002-07-11 Craig Weldon Method of operating a fuel tank isolation valve
EP1219875A1 (en) * 2000-12-28 2002-07-03 SMC Kabushiki Kaisha Solenoid valve

Also Published As

Publication number Publication date
WO2004018909A2 (en) 2004-03-04
US20050229969A1 (en) 2005-10-20
US7222636B2 (en) 2007-05-29

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