WO2004019077A3 - Structures and methods for reducing retardance - Google Patents

Structures and methods for reducing retardance Download PDF

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Publication number
WO2004019077A3
WO2004019077A3 PCT/US2003/026164 US0326164W WO2004019077A3 WO 2004019077 A3 WO2004019077 A3 WO 2004019077A3 US 0326164 W US0326164 W US 0326164W WO 2004019077 A3 WO2004019077 A3 WO 2004019077A3
Authority
WO
WIPO (PCT)
Prior art keywords
retardance
cubic crystalline
structures
optical elements
methods
Prior art date
Application number
PCT/US2003/026164
Other languages
French (fr)
Other versions
WO2004019077A2 (en
WO2004019077A9 (en
Inventor
James P Mcguire Jr
Original Assignee
Optical Res Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optical Res Associates filed Critical Optical Res Associates
Priority to JP2004529761A priority Critical patent/JP4831967B2/en
Priority to AU2003258318A priority patent/AU2003258318A1/en
Publication of WO2004019077A2 publication Critical patent/WO2004019077A2/en
Publication of WO2004019077A9 publication Critical patent/WO2004019077A9/en
Publication of WO2004019077A3 publication Critical patent/WO2004019077A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0892—Catadioptric systems specially adapted for the UV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Abstract

An optical system (100 in Fig. 2) includes multiple cubic crystalline optical elements (e.g., A1, A3-5, A8-A20) and one or more uniaxial birefringent elements (id.) in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
PCT/US2003/026164 2002-08-22 2003-08-21 Structures and methods for reducing retardance WO2004019077A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004529761A JP4831967B2 (en) 2002-08-22 2003-08-21 Optical system, optical apparatus, optical imaging method, method for reducing retardance caused by intrinsic birefringence, photolithography system, and method of forming semiconductor device
AU2003258318A AU2003258318A1 (en) 2002-08-22 2003-08-21 Structures and methods for reducing retardance

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US40585302P 2002-08-22 2002-08-22
US60/405,853 2002-08-22
US43268802P 2002-12-11 2002-12-11
US60/432,688 2002-12-11
US10/331,103 US6958864B2 (en) 2002-08-22 2002-12-26 Structures and methods for reducing polarization aberration in integrated circuit fabrication systems
US10/331,101 US7072102B2 (en) 2002-08-22 2002-12-26 Methods for reducing polarization aberration in optical systems
US10/331,159 US7075720B2 (en) 2002-08-22 2002-12-26 Structures and methods for reducing polarization aberration in optical systems
US10/331,101 2002-12-26
US10/331,103 2002-12-26
US10/331,159 2002-12-26

Publications (3)

Publication Number Publication Date
WO2004019077A2 WO2004019077A2 (en) 2004-03-04
WO2004019077A9 WO2004019077A9 (en) 2004-04-08
WO2004019077A3 true WO2004019077A3 (en) 2005-05-06

Family

ID=31892049

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/026164 WO2004019077A2 (en) 2002-08-22 2003-08-21 Structures and methods for reducing retardance

Country Status (4)

Country Link
US (5) US7075720B2 (en)
JP (1) JP4831967B2 (en)
AU (1) AU2003258318A1 (en)
WO (1) WO2004019077A2 (en)

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Publication number Publication date
US20040036971A1 (en) 2004-02-26
WO2004019077A2 (en) 2004-03-04
US6958864B2 (en) 2005-10-25
US7075720B2 (en) 2006-07-11
US7656582B2 (en) 2010-02-02
JP4831967B2 (en) 2011-12-07
US20040036985A1 (en) 2004-02-26
US20060187549A1 (en) 2006-08-24
AU2003258318A1 (en) 2004-03-11
AU2003258318A8 (en) 2004-03-11
US7511885B2 (en) 2009-03-31
US20090153964A1 (en) 2009-06-18
US20040036961A1 (en) 2004-02-26
WO2004019077A9 (en) 2004-04-08
US7072102B2 (en) 2006-07-04
JP2005535939A (en) 2005-11-24

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