WO2004038070A3 - Pulse reverse electrolysis of acidic copper electroplating solutions - Google Patents
Pulse reverse electrolysis of acidic copper electroplating solutions Download PDFInfo
- Publication number
- WO2004038070A3 WO2004038070A3 PCT/US2003/024498 US0324498W WO2004038070A3 WO 2004038070 A3 WO2004038070 A3 WO 2004038070A3 US 0324498 W US0324498 W US 0324498W WO 2004038070 A3 WO2004038070 A3 WO 2004038070A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reverse electrolysis
- pulse reverse
- copper electroplating
- acidic copper
- electroplating solutions
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/605—Surface topography of the layers, e.g. rough, dendritic or nodular layers
- C25D5/611—Smooth layers
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/627—Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2003265370A AU2003265370A1 (en) | 2002-10-21 | 2003-08-06 | Pulse reverse electrolysis of acidic copper electroplating solutions |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/274,634 US20040074775A1 (en) | 2002-10-21 | 2002-10-21 | Pulse reverse electrolysis of acidic copper electroplating solutions |
US10/274,634 | 2002-10-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004038070A2 WO2004038070A2 (en) | 2004-05-06 |
WO2004038070A3 true WO2004038070A3 (en) | 2004-07-01 |
Family
ID=32093089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/024498 WO2004038070A2 (en) | 2002-10-21 | 2003-08-06 | Pulse reverse electrolysis of acidic copper electroplating solutions |
Country Status (4)
Country | Link |
---|---|
US (1) | US20040074775A1 (en) |
AU (1) | AU2003265370A1 (en) |
TW (1) | TWI261075B (en) |
WO (1) | WO2004038070A2 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7105082B2 (en) * | 2003-02-27 | 2006-09-12 | Novellus Systems, Inc. | Composition and method for electrodeposition of metal on a work piece |
US20050284766A1 (en) * | 2004-06-25 | 2005-12-29 | Herdman Roderick D | Pulse reverse electrolysis of acidic copper electroplating solutions |
EP1712660A1 (en) | 2005-04-12 | 2006-10-18 | Enthone Inc. | Insoluble anode |
US20080283404A1 (en) * | 2007-05-14 | 2008-11-20 | Nec Electronics Corporation | Method of manufacturing semiconductor device to decrease defect number of plating film |
US7905994B2 (en) * | 2007-10-03 | 2011-03-15 | Moses Lake Industries, Inc. | Substrate holder and electroplating system |
US20090188553A1 (en) * | 2008-01-25 | 2009-07-30 | Emat Technology, Llc | Methods of fabricating solar-cell structures and resulting solar-cell structures |
US8262894B2 (en) | 2009-04-30 | 2012-09-11 | Moses Lake Industries, Inc. | High speed copper plating bath |
EP2568063A1 (en) * | 2011-09-09 | 2013-03-13 | Rohm and Haas Electronic Materials LLC | Low internal stress copper electroplating method |
DE102012206800B3 (en) | 2012-04-25 | 2013-09-05 | Atotech Deutschland Gmbh | Method and apparatus for the electrolytic deposition of a deposition metal on a workpiece |
CN103334135A (en) * | 2013-06-19 | 2013-10-02 | 西北工业大学 | Preparation method of ultra-fine grain copper wire |
CN103668370A (en) * | 2013-12-19 | 2014-03-26 | 潮州市连思科技发展有限公司 | Method for pulse plating of disk |
CN103911635B (en) * | 2014-03-21 | 2016-02-24 | 复旦大学 | A kind of copper electroplating solution |
CN106757193B (en) * | 2016-11-24 | 2018-07-13 | 中国地质大学(武汉) | A kind of method without cyanogen acid bright copper plating of leaf |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5972192A (en) * | 1997-07-23 | 1999-10-26 | Advanced Micro Devices, Inc. | Pulse electroplating copper or copper alloys |
US20020036144A1 (en) * | 2000-09-27 | 2002-03-28 | Lee Sun-Jung | Copper-plating elecrolyte containing polyvinylpyrrolidone and method for forming copper interconnect of semiconductor device using the same |
US20030085133A1 (en) * | 2001-07-26 | 2003-05-08 | Electroplating Engineers Of Japan Limited (Japanese Corporation) | Copper plating solution for embedding fine wiring, and copper plating method using the same |
US6610192B1 (en) * | 2000-11-02 | 2003-08-26 | Shipley Company, L.L.C. | Copper electroplating |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2558090A (en) * | 1947-12-11 | 1951-06-26 | Westinghouse Electric Corp | Periodic reverse current electroplating apparatus |
US2700019A (en) * | 1951-07-05 | 1955-01-18 | Westinghouse Electric Corp | Acid copper plating |
US3328273A (en) * | 1966-08-15 | 1967-06-27 | Udylite Corp | Electro-deposition of copper from acidic baths |
US3682788A (en) * | 1970-07-28 | 1972-08-08 | M & T Chemicals Inc | Copper electroplating |
US3956078A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US4673469A (en) * | 1984-06-08 | 1987-06-16 | Mcgean-Rohco, Inc. | Method of plating plastics |
US20040011654A1 (en) * | 2001-10-16 | 2004-01-22 | Kenji Nakamura | Method of copper plating small diameter hole |
-
2002
- 2002-10-21 US US10/274,634 patent/US20040074775A1/en not_active Abandoned
-
2003
- 2003-08-06 AU AU2003265370A patent/AU2003265370A1/en not_active Abandoned
- 2003-08-06 WO PCT/US2003/024498 patent/WO2004038070A2/en not_active Application Discontinuation
- 2003-08-20 TW TW092122858A patent/TWI261075B/en not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5972192A (en) * | 1997-07-23 | 1999-10-26 | Advanced Micro Devices, Inc. | Pulse electroplating copper or copper alloys |
US20020036144A1 (en) * | 2000-09-27 | 2002-03-28 | Lee Sun-Jung | Copper-plating elecrolyte containing polyvinylpyrrolidone and method for forming copper interconnect of semiconductor device using the same |
US6610192B1 (en) * | 2000-11-02 | 2003-08-26 | Shipley Company, L.L.C. | Copper electroplating |
US20030085133A1 (en) * | 2001-07-26 | 2003-05-08 | Electroplating Engineers Of Japan Limited (Japanese Corporation) | Copper plating solution for embedding fine wiring, and copper plating method using the same |
Also Published As
Publication number | Publication date |
---|---|
AU2003265370A1 (en) | 2004-05-13 |
AU2003265370A8 (en) | 2004-05-13 |
TWI261075B (en) | 2006-09-01 |
WO2004038070A2 (en) | 2004-05-06 |
US20040074775A1 (en) | 2004-04-22 |
TW200407467A (en) | 2004-05-16 |
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