WO2004041454A3 - Substrate processing apparatus and method - Google Patents

Substrate processing apparatus and method Download PDF

Info

Publication number
WO2004041454A3
WO2004041454A3 PCT/US2003/034758 US0334758W WO2004041454A3 WO 2004041454 A3 WO2004041454 A3 WO 2004041454A3 US 0334758 W US0334758 W US 0334758W WO 2004041454 A3 WO2004041454 A3 WO 2004041454A3
Authority
WO
WIPO (PCT)
Prior art keywords
steam
processing apparatus
substrate processing
substrate
stream
Prior art date
Application number
PCT/US2003/034758
Other languages
French (fr)
Other versions
WO2004041454A2 (en
Inventor
Naoaki Kobayashi
Ryuta Yamaguchi
Kaori Tajima
Kohsuke Ori
Original Assignee
Lam Res Corp
Naoaki Kobayashi
Ryuta Yamaguchi
Kaori Tajima
Kohsuke Ori
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp, Naoaki Kobayashi, Ryuta Yamaguchi, Kaori Tajima, Kohsuke Ori filed Critical Lam Res Corp
Priority to AU2003286823A priority Critical patent/AU2003286823A1/en
Priority to KR1020117020428A priority patent/KR101252967B1/en
Priority to KR1020057007746A priority patent/KR101094679B1/en
Publication of WO2004041454A2 publication Critical patent/WO2004041454A2/en
Publication of WO2004041454A3 publication Critical patent/WO2004041454A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2230/00—Other cleaning aspects applicable to all B08B range
    • B08B2230/01—Cleaning with steam

Abstract

A method for applying steam onto a surface of a substrate (20) with a nozzle (16) by spinning the substrate with a rotary shaft (24).The stream of steam is supplied between point (23) and a peripheral edge of (20) and moving the stream of steam between the center (23) and the peripheral edge at correlated to an area of the substrate being subjected to the stream of steam.
PCT/US2003/034758 2002-10-31 2003-10-30 Substrate processing apparatus and method WO2004041454A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU2003286823A AU2003286823A1 (en) 2002-10-31 2003-10-30 Substrate processing apparatus and method
KR1020117020428A KR101252967B1 (en) 2002-10-31 2003-10-30 Substrate processing apparatus and method
KR1020057007746A KR101094679B1 (en) 2002-10-31 2003-10-30 Substrate processing apparatus and method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002-318875 2002-10-31
JP2002318875A JP4105931B2 (en) 2002-10-31 2002-10-31 Object processing apparatus and method

Publications (2)

Publication Number Publication Date
WO2004041454A2 WO2004041454A2 (en) 2004-05-21
WO2004041454A3 true WO2004041454A3 (en) 2004-07-22

Family

ID=32310348

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/034758 WO2004041454A2 (en) 2002-10-31 2003-10-30 Substrate processing apparatus and method

Country Status (5)

Country Link
JP (1) JP4105931B2 (en)
KR (2) KR101094679B1 (en)
AU (1) AU2003286823A1 (en)
TW (1) TWI248109B (en)
WO (1) WO2004041454A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004046802B3 (en) * 2004-09-27 2006-04-27 Mafac Ernst Schwarz Gmbh & Co. Kg Maschinenfabrik Treatment device and method for the cleaning and / or drying treatment of workpieces
JP2006128238A (en) * 2004-10-27 2006-05-18 Aqua Science Kk Object treatment device and object treatment method
JP2007173277A (en) 2005-12-19 2007-07-05 Fujitsu Ltd Spin cleaning device and wafer cleaning method
JP4813430B2 (en) * 2007-07-12 2011-11-09 東京エレクトロン株式会社 Substrate cleaning apparatus, substrate cleaning method, and recording medium
US8360817B2 (en) 2009-04-01 2013-01-29 Ebara Corporation Polishing apparatus and polishing method
JP5634381B2 (en) * 2011-11-01 2014-12-03 東京エレクトロン株式会社 Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium
CN103700610B (en) * 2013-12-31 2017-01-25 北京七星华创电子股份有限公司 Device and method for improving wafer etching uniformity
CN104793385B (en) * 2015-04-23 2018-01-19 京东方科技集团股份有限公司 Stripping means, display base plate and the display device of ultra-thin substrate
CN110000141A (en) * 2019-04-22 2019-07-12 中信戴卡股份有限公司 A kind of mold automatic flushing device that cleaning solution recycles

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5051136A (en) * 1989-02-02 1991-09-24 Nokia Mobile Phones Ltd. Procedure for washing circuit boards and means for use in said procedure
US5269878A (en) * 1992-12-10 1993-12-14 Vlsi Technology, Inc. Metal patterning with dechlorinization in integrated circuit manufacture
US5651832A (en) * 1992-11-03 1997-07-29 Valmet Corporation Method for cleaning rolls
US5964952A (en) * 1994-10-04 1999-10-12 Kunze-Concewitz; Horst Method of cleaning surfaces with water and steam

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3320640B2 (en) * 1997-07-23 2002-09-03 東京エレクトロン株式会社 Cleaning equipment
JPH11307492A (en) * 1998-04-20 1999-11-05 Tokyo Electron Ltd Substrate cleaning device
TW505822B (en) * 1999-06-09 2002-10-11 Tokyo Electron Ltd Developing method and developing apparatus
US6634806B2 (en) * 2000-03-13 2003-10-21 Tokyo Electron Limited Substrate processing method and substrate processing apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5051136A (en) * 1989-02-02 1991-09-24 Nokia Mobile Phones Ltd. Procedure for washing circuit boards and means for use in said procedure
US5651832A (en) * 1992-11-03 1997-07-29 Valmet Corporation Method for cleaning rolls
US5269878A (en) * 1992-12-10 1993-12-14 Vlsi Technology, Inc. Metal patterning with dechlorinization in integrated circuit manufacture
US5964952A (en) * 1994-10-04 1999-10-12 Kunze-Concewitz; Horst Method of cleaning surfaces with water and steam

Also Published As

Publication number Publication date
KR20050065668A (en) 2005-06-29
JP2004153172A (en) 2004-05-27
TWI248109B (en) 2006-01-21
KR101252967B1 (en) 2013-04-15
KR101094679B1 (en) 2011-12-20
WO2004041454A2 (en) 2004-05-21
AU2003286823A1 (en) 2004-06-07
TW200425223A (en) 2004-11-16
JP4105931B2 (en) 2008-06-25
KR20110105405A (en) 2011-09-26

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