WO2004049034A1 - Mems scanning mirror with tunable natural frequency - Google Patents
Mems scanning mirror with tunable natural frequency Download PDFInfo
- Publication number
- WO2004049034A1 WO2004049034A1 PCT/US2003/035776 US0335776W WO2004049034A1 WO 2004049034 A1 WO2004049034 A1 WO 2004049034A1 US 0335776 W US0335776 W US 0335776W WO 2004049034 A1 WO2004049034 A1 WO 2004049034A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrode
- teeth
- voltage
- voltage difference
- scanning
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03786631A EP1563333A1 (en) | 2002-11-22 | 2003-11-10 | Mems scanning mirror with tunable natural frequency |
AU2003295445A AU2003295445A1 (en) | 2002-11-22 | 2003-11-10 | Mems scanning mirror with tunable natural frequency |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/302,413 | 2002-11-22 | ||
US10/302,387 US6769616B2 (en) | 2002-11-22 | 2002-11-22 | Bidirectional MEMS scanning mirror with tunable natural frequency |
US10/302,413 US7034370B2 (en) | 2002-11-22 | 2002-11-22 | MEMS scanning mirror with tunable natural frequency |
US10/302,387 | 2002-11-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004049034A1 true WO2004049034A1 (en) | 2004-06-10 |
Family
ID=32396707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/035776 WO2004049034A1 (en) | 2002-11-22 | 2003-11-10 | Mems scanning mirror with tunable natural frequency |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1563333A1 (en) |
JP (1) | JP2004177957A (en) |
KR (1) | KR20060026001A (en) |
AU (1) | AU2003295445A1 (en) |
TW (1) | TWI238143B (en) |
WO (1) | WO2004049034A1 (en) |
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1757973A1 (en) * | 2005-08-22 | 2007-02-28 | Canon Kabushiki Kaisha | Optical scanning system and image forming apparatus using the same |
CN100462774C (en) * | 2005-08-22 | 2009-02-18 | 佳能株式会社 | Optical scanning system and image forming apparatus using the same |
US7667884B2 (en) | 2004-09-27 | 2010-02-23 | Qualcomm Mems Technologies, Inc. | Interferometric modulators having charge persistence |
US7675669B2 (en) | 2004-09-27 | 2010-03-09 | Qualcomm Mems Technologies, Inc. | Method and system for driving interferometric modulators |
EP1986411A3 (en) * | 2007-04-26 | 2010-03-10 | Brother Kogyo Kabushiki Kaisha | Optical scanning device, printing apparatus, and method for adjusting oscillation amplitude of an oscillating mirror |
US7679627B2 (en) | 2004-09-27 | 2010-03-16 | Qualcomm Mems Technologies, Inc. | Controller and driver features for bi-stable display |
US7702192B2 (en) | 2006-06-21 | 2010-04-20 | Qualcomm Mems Technologies, Inc. | Systems and methods for driving MEMS display |
US7724993B2 (en) | 2004-09-27 | 2010-05-25 | Qualcomm Mems Technologies, Inc. | MEMS switches with deforming membranes |
US7777715B2 (en) | 2006-06-29 | 2010-08-17 | Qualcomm Mems Technologies, Inc. | Passive circuits for de-multiplexing display inputs |
US7843410B2 (en) | 2004-09-27 | 2010-11-30 | Qualcomm Mems Technologies, Inc. | Method and device for electrically programmable display |
US7889163B2 (en) | 2004-08-27 | 2011-02-15 | Qualcomm Mems Technologies, Inc. | Drive method for MEMS devices |
US7920136B2 (en) | 2005-05-05 | 2011-04-05 | Qualcomm Mems Technologies, Inc. | System and method of driving a MEMS display device |
US7948457B2 (en) | 2005-05-05 | 2011-05-24 | Qualcomm Mems Technologies, Inc. | Systems and methods of actuating MEMS display elements |
US8049713B2 (en) | 2006-04-24 | 2011-11-01 | Qualcomm Mems Technologies, Inc. | Power consumption optimized display update |
US8174469B2 (en) | 2005-05-05 | 2012-05-08 | Qualcomm Mems Technologies, Inc. | Dynamic driver IC and display panel configuration |
US8194056B2 (en) | 2006-02-09 | 2012-06-05 | Qualcomm Mems Technologies Inc. | Method and system for writing data to MEMS display elements |
US8310441B2 (en) | 2004-09-27 | 2012-11-13 | Qualcomm Mems Technologies, Inc. | Method and system for writing data to MEMS display elements |
US8391630B2 (en) | 2005-12-22 | 2013-03-05 | Qualcomm Mems Technologies, Inc. | System and method for power reduction when decompressing video streams for interferometric modulator displays |
US8878825B2 (en) | 2004-09-27 | 2014-11-04 | Qualcomm Mems Technologies, Inc. | System and method for providing a variable refresh rate of an interferometric modulator display |
US8878771B2 (en) | 2004-09-27 | 2014-11-04 | Qualcomm Mems Technologies, Inc. | Method and system for reducing power consumption in a display |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US8971675B2 (en) | 2006-01-13 | 2015-03-03 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US9110289B2 (en) | 1998-04-08 | 2015-08-18 | Qualcomm Mems Technologies, Inc. | Device for modulating light with multiple electrodes |
WO2020180544A1 (en) * | 2019-03-06 | 2020-09-10 | Microsoft Technology Licensing, Llc | Control loop for stabilizing a resonant frequency of a mirror of a laser beam scanning display |
US10914939B2 (en) | 2017-08-23 | 2021-02-09 | Murata Manufacturing Co., Ltd. | MEMS reflector system |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI287393B (en) * | 2004-08-18 | 2007-09-21 | Lg Electronics Inc | Scanning device and fabrication method thereof |
EP1835324A4 (en) * | 2005-01-05 | 2010-02-17 | Nippon Telegraph & Telephone | Mirror device, mirror array, optical switch, mirror device manufacturing method and mirror substrate manufacturing method |
JP2006201519A (en) * | 2005-01-20 | 2006-08-03 | Ricoh Co Ltd | Optical scanner and image forming apparatus |
JP5098254B2 (en) * | 2006-08-29 | 2012-12-12 | 富士通株式会社 | Micro oscillating device |
JP2008129424A (en) * | 2006-11-22 | 2008-06-05 | Topcon Corp | Method of adjusting torsional oscillation mirror, torsional oscillation mirror, optical deflector, ophthalmology apparatus and distance measuring apparatus |
US7911672B2 (en) * | 2006-12-26 | 2011-03-22 | Zhou Tiansheng | Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
JP2008185621A (en) | 2007-01-26 | 2008-08-14 | Brother Ind Ltd | Optical deflector |
JP4889026B2 (en) * | 2007-02-08 | 2012-02-29 | 株式会社リコー | Optical scanning device |
JP2009069457A (en) | 2007-09-13 | 2009-04-02 | Seiko Epson Corp | Optical scanning element, and image display device |
US8210038B2 (en) * | 2009-02-17 | 2012-07-03 | Robert Bosch Gmbh | Drive frequency tunable MEMS gyroscope |
KR20220084271A (en) * | 2019-10-25 | 2022-06-21 | 엘지전자 주식회사 | Scanner and electronic device having same |
CN114690400B (en) * | 2020-12-29 | 2023-05-02 | 极米科技股份有限公司 | Vibrating mirror driven by electrostatic force |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010022682A1 (en) * | 1997-08-27 | 2001-09-20 | The Microoptical Corporation | Magnetically actuated torsional micro-mechanical mirror system |
US20010034077A1 (en) * | 1999-08-05 | 2001-10-25 | Microvision, Inc. | Frequency tunable resonant scanner and method of making |
WO2001092939A1 (en) * | 2000-05-31 | 2001-12-06 | The Regents Of The University Of California | Staggered torsional electrostatic combdrive and method of forming same |
US20020026831A1 (en) * | 2000-03-24 | 2002-03-07 | Behrang Behin | Biased rotatable combdrive actuator methods |
US20020093722A1 (en) * | 2000-12-01 | 2002-07-18 | Edward Chan | Driver and method of operating a micro-electromechanical system device |
-
2003
- 2003-11-10 EP EP03786631A patent/EP1563333A1/en not_active Withdrawn
- 2003-11-10 AU AU2003295445A patent/AU2003295445A1/en not_active Abandoned
- 2003-11-10 KR KR1020057009119A patent/KR20060026001A/en not_active Application Discontinuation
- 2003-11-10 WO PCT/US2003/035776 patent/WO2004049034A1/en not_active Application Discontinuation
- 2003-11-12 TW TW092131669A patent/TWI238143B/en not_active IP Right Cessation
- 2003-11-25 JP JP2003394482A patent/JP2004177957A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010022682A1 (en) * | 1997-08-27 | 2001-09-20 | The Microoptical Corporation | Magnetically actuated torsional micro-mechanical mirror system |
US20010034077A1 (en) * | 1999-08-05 | 2001-10-25 | Microvision, Inc. | Frequency tunable resonant scanner and method of making |
US20020026831A1 (en) * | 2000-03-24 | 2002-03-07 | Behrang Behin | Biased rotatable combdrive actuator methods |
WO2001092939A1 (en) * | 2000-05-31 | 2001-12-06 | The Regents Of The University Of California | Staggered torsional electrostatic combdrive and method of forming same |
US20020093722A1 (en) * | 2000-12-01 | 2002-07-18 | Edward Chan | Driver and method of operating a micro-electromechanical system device |
Cited By (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9110289B2 (en) | 1998-04-08 | 2015-08-18 | Qualcomm Mems Technologies, Inc. | Device for modulating light with multiple electrodes |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US7928940B2 (en) | 2004-08-27 | 2011-04-19 | Qualcomm Mems Technologies, Inc. | Drive method for MEMS devices |
US7889163B2 (en) | 2004-08-27 | 2011-02-15 | Qualcomm Mems Technologies, Inc. | Drive method for MEMS devices |
US7679627B2 (en) | 2004-09-27 | 2010-03-16 | Qualcomm Mems Technologies, Inc. | Controller and driver features for bi-stable display |
US8878771B2 (en) | 2004-09-27 | 2014-11-04 | Qualcomm Mems Technologies, Inc. | Method and system for reducing power consumption in a display |
US7675669B2 (en) | 2004-09-27 | 2010-03-09 | Qualcomm Mems Technologies, Inc. | Method and system for driving interferometric modulators |
US8878825B2 (en) | 2004-09-27 | 2014-11-04 | Qualcomm Mems Technologies, Inc. | System and method for providing a variable refresh rate of an interferometric modulator display |
US7724993B2 (en) | 2004-09-27 | 2010-05-25 | Qualcomm Mems Technologies, Inc. | MEMS switches with deforming membranes |
US8791897B2 (en) | 2004-09-27 | 2014-07-29 | Qualcomm Mems Technologies, Inc. | Method and system for writing data to MEMS display elements |
US7843410B2 (en) | 2004-09-27 | 2010-11-30 | Qualcomm Mems Technologies, Inc. | Method and device for electrically programmable display |
US7667884B2 (en) | 2004-09-27 | 2010-02-23 | Qualcomm Mems Technologies, Inc. | Interferometric modulators having charge persistence |
US8310441B2 (en) | 2004-09-27 | 2012-11-13 | Qualcomm Mems Technologies, Inc. | Method and system for writing data to MEMS display elements |
US7948457B2 (en) | 2005-05-05 | 2011-05-24 | Qualcomm Mems Technologies, Inc. | Systems and methods of actuating MEMS display elements |
US8174469B2 (en) | 2005-05-05 | 2012-05-08 | Qualcomm Mems Technologies, Inc. | Dynamic driver IC and display panel configuration |
US7920136B2 (en) | 2005-05-05 | 2011-04-05 | Qualcomm Mems Technologies, Inc. | System and method of driving a MEMS display device |
CN100462774C (en) * | 2005-08-22 | 2009-02-18 | 佳能株式会社 | Optical scanning system and image forming apparatus using the same |
US7385746B2 (en) | 2005-08-22 | 2008-06-10 | Canon Kabushiki Kaisha | Optical scanning system and image forming apparatus using the same |
EP1757973A1 (en) * | 2005-08-22 | 2007-02-28 | Canon Kabushiki Kaisha | Optical scanning system and image forming apparatus using the same |
US8391630B2 (en) | 2005-12-22 | 2013-03-05 | Qualcomm Mems Technologies, Inc. | System and method for power reduction when decompressing video streams for interferometric modulator displays |
US8971675B2 (en) | 2006-01-13 | 2015-03-03 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US8194056B2 (en) | 2006-02-09 | 2012-06-05 | Qualcomm Mems Technologies Inc. | Method and system for writing data to MEMS display elements |
US8049713B2 (en) | 2006-04-24 | 2011-11-01 | Qualcomm Mems Technologies, Inc. | Power consumption optimized display update |
US7702192B2 (en) | 2006-06-21 | 2010-04-20 | Qualcomm Mems Technologies, Inc. | Systems and methods for driving MEMS display |
US7777715B2 (en) | 2006-06-29 | 2010-08-17 | Qualcomm Mems Technologies, Inc. | Passive circuits for de-multiplexing display inputs |
EP1986411A3 (en) * | 2007-04-26 | 2010-03-10 | Brother Kogyo Kabushiki Kaisha | Optical scanning device, printing apparatus, and method for adjusting oscillation amplitude of an oscillating mirror |
US10914939B2 (en) | 2017-08-23 | 2021-02-09 | Murata Manufacturing Co., Ltd. | MEMS reflector system |
WO2020180544A1 (en) * | 2019-03-06 | 2020-09-10 | Microsoft Technology Licensing, Llc | Control loop for stabilizing a resonant frequency of a mirror of a laser beam scanning display |
US11137593B2 (en) | 2019-03-06 | 2021-10-05 | Microsoft Technology Licensing, Llc | Control loop for stabilizing a resonant frequency of a mirror of a laser beam scanning display |
Also Published As
Publication number | Publication date |
---|---|
JP2004177957A (en) | 2004-06-24 |
AU2003295445A1 (en) | 2004-06-18 |
KR20060026001A (en) | 2006-03-22 |
TWI238143B (en) | 2005-08-21 |
TW200416194A (en) | 2004-09-01 |
EP1563333A1 (en) | 2005-08-17 |
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