WO2004063796A3 - Fiber optical illumination system - Google Patents

Fiber optical illumination system Download PDF

Info

Publication number
WO2004063796A3
WO2004063796A3 PCT/IL2004/000022 IL2004000022W WO2004063796A3 WO 2004063796 A3 WO2004063796 A3 WO 2004063796A3 IL 2004000022 W IL2004000022 W IL 2004000022W WO 2004063796 A3 WO2004063796 A3 WO 2004063796A3
Authority
WO
WIPO (PCT)
Prior art keywords
bundle
fibers
illumination
optical
coherence
Prior art date
Application number
PCT/IL2004/000022
Other languages
French (fr)
Other versions
WO2004063796A2 (en
Inventor
Dov Furman
Gad Neumann
Noam Dotan
Original Assignee
Negevtech Ltd
Dov Furman
Gad Neumann
Noam Dotan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Negevtech Ltd, Dov Furman, Gad Neumann, Noam Dotan filed Critical Negevtech Ltd
Priority to KR1020057013118A priority Critical patent/KR101145974B1/en
Priority to EP04701327A priority patent/EP1588210A4/en
Priority to KR1020117018041A priority patent/KR101205443B1/en
Priority to KR1020127002462A priority patent/KR101205439B1/en
Publication of WO2004063796A2 publication Critical patent/WO2004063796A2/en
Publication of WO2004063796A3 publication Critical patent/WO2004063796A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4298—Coupling light guides with opto-electronic elements coupling with non-coherent light sources and/or radiation detectors, e.g. lamps, incandescent bulbs, scintillation chambers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/48—Laser speckle optics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/04—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4788—Diffraction
    • G01N2021/479—Speckle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features

Abstract

A fiber optical illumination delivery system, which is effective in reducing the effects of source coherence. The system preferably utilizes either a single bundle of optical fibers, or serial bundles of optical fibers. In the single bundle embodiment, the differences in optical lengths between different fibers of the bundle is preferably made to be equal to even less than the coherence length of the source illumination. In the serial bundle embodiment, the fibers in the other bundle are arranged as groups of fibers of the same length, and it is the difference in lengths of these groups which is made equal to, or even more preferably, less than the overall difference in length between the shortest and the longest fibers in the other bundle. Both of these fiber systems enable construction of illumination systems delivering a higher level of illumination, but without greatly affecting the coherence breaking abilities of the system, thus enabling a generally more applicable system to be constructed.
PCT/IL2004/000022 2003-01-15 2004-01-11 Fiber optical illumination system WO2004063796A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020057013118A KR101145974B1 (en) 2003-01-15 2004-01-11 Fiber optical illumination system
EP04701327A EP1588210A4 (en) 2003-01-15 2004-01-11 Fiber optical illumination system
KR1020117018041A KR101205443B1 (en) 2003-01-15 2004-01-11 Fiber optical illumination system
KR1020127002462A KR101205439B1 (en) 2003-01-15 2004-01-11 A method of reducing the coherence of light transmitted through a fiber optical bundle

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/345,096 US6892013B2 (en) 2003-01-15 2003-01-15 Fiber optical illumination system
US10/345,096 2003-01-15

Publications (2)

Publication Number Publication Date
WO2004063796A2 WO2004063796A2 (en) 2004-07-29
WO2004063796A3 true WO2004063796A3 (en) 2004-12-16

Family

ID=32711878

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2004/000022 WO2004063796A2 (en) 2003-01-15 2004-01-11 Fiber optical illumination system

Country Status (5)

Country Link
US (2) US6892013B2 (en)
EP (1) EP1588210A4 (en)
KR (3) KR101205439B1 (en)
TW (1) TWI245135B (en)
WO (1) WO2004063796A2 (en)

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US7804993B2 (en) * 2005-02-28 2010-09-28 Applied Materials South East Asia Pte. Ltd. Method and apparatus for detecting defects in wafers including alignment of the wafer images so as to induce the same smear in all images
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KR101587344B1 (en) * 2014-04-08 2016-01-20 한양대학교 산학협력단 Multifocal and multiphoton microscope having optics based array and apparatus and method to manufacture the array
CN105759442B (en) * 2016-03-31 2019-08-06 许江珂 A kind of laser display picture speckle noise arrester and display
CN105739116B (en) * 2016-05-03 2019-08-06 许江珂 A kind of laser display light source of no laser speckle
CN109997285A (en) * 2016-12-02 2019-07-09 特拉迪欧德公司 Utilize the laser system of the fiber optic bundle for power conveying and light beam switching
JP7172415B2 (en) * 2018-10-12 2022-11-16 ウシオ電機株式会社 Broadband stretched pulse light source, spectroscopic measuring device and spectroscopic measuring method

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Also Published As

Publication number Publication date
US6892013B2 (en) 2005-05-10
WO2004063796A2 (en) 2004-07-29
US7260298B2 (en) 2007-08-21
EP1588210A2 (en) 2005-10-26
KR101205439B1 (en) 2012-11-27
KR20120057610A (en) 2012-06-05
KR20110094358A (en) 2011-08-23
TW200502604A (en) 2005-01-16
KR101145974B1 (en) 2012-05-15
TWI245135B (en) 2005-12-11
KR101205443B1 (en) 2012-11-27
EP1588210A4 (en) 2007-11-07
KR20050090006A (en) 2005-09-09
US20040136665A1 (en) 2004-07-15
US20050180707A1 (en) 2005-08-18

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