WO2004079405A3 - Method and apparatus for imaging using contunuous non-raster patterns - Google Patents

Method and apparatus for imaging using contunuous non-raster patterns Download PDF

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Publication number
WO2004079405A3
WO2004079405A3 PCT/US2004/006973 US2004006973W WO2004079405A3 WO 2004079405 A3 WO2004079405 A3 WO 2004079405A3 US 2004006973 W US2004006973 W US 2004006973W WO 2004079405 A3 WO2004079405 A3 WO 2004079405A3
Authority
WO
WIPO (PCT)
Prior art keywords
contunuous
imaging
raster patterns
specimen
probe
Prior art date
Application number
PCT/US2004/006973
Other languages
French (fr)
Other versions
WO2004079405A2 (en
Inventor
Nelson George Publicover
John Leonard Sutko
Original Assignee
Univ Community College Sys Nev
Nelson George Publicover
John Leonard Sutko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Community College Sys Nev, Nelson George Publicover, John Leonard Sutko filed Critical Univ Community College Sys Nev
Priority to JP2006509233A priority Critical patent/JP2006520022A/en
Priority to EP04718123A priority patent/EP1604190A4/en
Publication of WO2004079405A2 publication Critical patent/WO2004079405A2/en
Publication of WO2004079405A3 publication Critical patent/WO2004079405A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages

Abstract

An apparatus for performing data collection within a device is disclosed. A device steers a scanning probe in a continuous, non-raster pattern across a specimen. Data is collected in response to interaction between the probe and the specimen to form a data set. Spiral scanning patterns without turnaround (10) regions are utilized in embodiments of the present invention, both with and without rounded corners in the scanning patterns.
PCT/US2004/006973 2003-03-06 2004-03-05 Method and apparatus for imaging using contunuous non-raster patterns WO2004079405A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006509233A JP2006520022A (en) 2003-03-06 2004-03-05 Method and apparatus for imaging using a continuous non-raster pattern
EP04718123A EP1604190A4 (en) 2003-03-06 2004-03-05 Method and apparatus for imaging using contunuous non-raster patterns

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US45269403P 2003-03-06 2003-03-06
US60/452,694 2003-03-06
US10/795,205 2004-03-04
US10/795,205 US7009172B2 (en) 2003-03-06 2004-03-04 Method and apparatus for imaging using continuous non-raster patterns

Publications (2)

Publication Number Publication Date
WO2004079405A2 WO2004079405A2 (en) 2004-09-16
WO2004079405A3 true WO2004079405A3 (en) 2005-09-15

Family

ID=33313322

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/006973 WO2004079405A2 (en) 2003-03-06 2004-03-05 Method and apparatus for imaging using contunuous non-raster patterns

Country Status (4)

Country Link
US (1) US7009172B2 (en)
EP (1) EP1604190A4 (en)
JP (1) JP2006520022A (en)
WO (1) WO2004079405A2 (en)

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WO2005086858A2 (en) * 2004-03-08 2005-09-22 Board Of Regents Of The University And Community College System Of Nevada On Behalf Of The University Of Nevada, Reno Method and apparatus for two-axis, high-speed beam-steering
US8031926B2 (en) * 2004-05-20 2011-10-04 Board Of Regents Of The Nevada System Of Higher Education, On Behalf Of The University Of Nevada, Reno Discrete event distribution sampling apparatus and methods
US7960702B2 (en) * 2004-05-20 2011-06-14 Board of Regents of the Nevada System fo Higher Education, on behalf of the University of Nevada, Reno Photon event distribution sampling apparatus and method
JP4765667B2 (en) * 2006-02-27 2011-09-07 ブラザー工業株式会社 Image processing program and image processing apparatus
US7406860B2 (en) 2006-04-28 2008-08-05 Seagate Technology Llc Atomic force microscopy scanning and image processing
EP1895347A1 (en) * 2006-09-01 2008-03-05 Universität Zürich Scanning-microscope and method for operating a scanning-microscope
US20100195868A1 (en) * 2007-05-31 2010-08-05 Lu Peter J Target-locking acquisition with real-time confocal (tarc) microscopy
DE102008020889A1 (en) * 2008-04-22 2009-11-05 Nanolit Gmbh Method and apparatus for volumetric scanning
FR2941787B1 (en) * 2009-02-04 2011-04-15 Ecole Polytech METHOD AND DEVICE FOR ACQUIRING SIGNALS IN LASER SCANNING MICROSCOPY.
CN105974571B (en) 2009-10-28 2019-05-28 阿兰蒂克微科学股份有限公司 Micro-imaging
US9075225B2 (en) 2009-10-28 2015-07-07 Alentic Microscience Inc. Microscopy imaging
JP5737704B2 (en) * 2010-09-27 2015-06-17 株式会社ライフテック Fluorescent single particle detection method and detection system
EP2628061B1 (en) 2010-10-13 2020-03-04 MBDA UK Limited Workpiece positioning method and apparatus
US9586817B2 (en) 2011-07-28 2017-03-07 Seagate Technology Llc Semi-auto scanning probe microscopy scanning
US20130081159A1 (en) * 2011-07-29 2013-03-28 Seagate Technology Llc Advanced atomic force microscopy scanning for obtaining a true shape
JP2013058956A (en) * 2011-09-09 2013-03-28 Sony Corp Information processor, information processing method, program, and information processing system
JP6422864B2 (en) * 2012-07-18 2018-11-14 ザ、トラスティーズ オブ プリンストン ユニバーシティ Multiscale spectral nanoscopy
US10502666B2 (en) 2013-02-06 2019-12-10 Alentic Microscience Inc. Sample processing improvements for quantitative microscopy
CA2953620C (en) 2013-06-26 2020-08-25 Alentic Microscience Inc. Sample processing improvements for microscopy
US9784960B2 (en) * 2014-06-10 2017-10-10 Purdue Research Foundation High frame-rate multichannel beam-scanning microscopy
US10437038B2 (en) 2015-02-20 2019-10-08 Max-Planck-Geselleschaft Zur Foerderung Der Wissenschaften E.V. Device and method for creating an optical tomogram of a microscopic sample
US10564180B2 (en) * 2015-04-14 2020-02-18 Shimadzu Corporation Scanning probe microscope using gradual increases and decreases in relative speed when shifting and reciprocating the scanned probe across a sample
EP3125272A1 (en) * 2015-07-29 2017-02-01 FEI Company Scan pattern in a charged particle microscope comprising nested orbital windings
DE102016211126A1 (en) * 2016-06-22 2017-12-28 Osram Opto Semiconductors Gmbh Measuring device for flat samples and methods for measuring
JP6423841B2 (en) 2016-10-11 2018-11-14 浜松ホトニクス株式会社 Sample observation apparatus and sample observation method
WO2018211418A1 (en) * 2017-05-15 2018-11-22 Sigtuple Technologies Private Limited Method and system for determining area to be scanned in peripheral blood smear for analysis
US10979681B2 (en) * 2018-09-13 2021-04-13 Varjo Technologies Oy Display apparatus and method of displaying using light source and beam scanning arrangement
DE102018216038A1 (en) * 2018-09-20 2020-03-26 Carl Zeiss Microscopy Gmbh Method and device for acquiring an image of an object with a scanning microscope
CN110275294A (en) * 2019-06-27 2019-09-24 长春理工大学 The lobster eye lens of Archimedes's bipitch type arrangement mode
WO2021160843A2 (en) * 2020-02-12 2021-08-19 Samantree Medical Sa Systems and methods for imaging samples with reduced sample motion artifacts

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US5865978A (en) * 1997-05-09 1999-02-02 Cohen; Adam E. Near-field photolithographic masks and photolithography; nanoscale patterning techniques; apparatus and method therefor
US20010047682A1 (en) * 1994-12-22 2001-12-06 Amin Samsavar Dual stage instrument for scanning a specimen
US6606153B2 (en) * 1994-03-24 2003-08-12 Kla-Tencor Corporation Process and assembly for non-destructive surface inspections

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US6606153B2 (en) * 1994-03-24 2003-08-12 Kla-Tencor Corporation Process and assembly for non-destructive surface inspections
US20010047682A1 (en) * 1994-12-22 2001-12-06 Amin Samsavar Dual stage instrument for scanning a specimen
US5865978A (en) * 1997-05-09 1999-02-02 Cohen; Adam E. Near-field photolithographic masks and photolithography; nanoscale patterning techniques; apparatus and method therefor

Non-Patent Citations (1)

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Title
See also references of EP1604190A4 *

Also Published As

Publication number Publication date
EP1604190A2 (en) 2005-12-14
WO2004079405A2 (en) 2004-09-16
JP2006520022A (en) 2006-08-31
US7009172B2 (en) 2006-03-07
EP1604190A4 (en) 2010-11-03
US20040217270A1 (en) 2004-11-04

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